請用此 Handle URI 來引用此文件:
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/72864完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 白奇峰(Chi-Feng Pai) | |
| dc.contributor.author | Tsung-Yu Tsai | en |
| dc.contributor.author | 蔡宗佑 | zh_TW |
| dc.date.accessioned | 2021-06-17T07:08:31Z | - |
| dc.date.available | 2024-07-31 | |
| dc.date.copyright | 2019-07-31 | |
| dc.date.issued | 2019 | |
| dc.date.submitted | 2019-07-23 | |
| dc.identifier.citation | [1] N. Nagaosa, J. Sinova, S. Onoda, A. MacDonald, and N. Ong, “Anomalous hall effect,” Reviews of modern physics, vol. 82, no. 2, p. 1539, 2010.
[2] Y. Niimi and Y. Otani, “Reciprocal spin hall effects in conductors with strong spin– orbit coupling: a review,” Reports on Progress in Physics, vol. 78, p. 124501, oct 2015. [3] C. O’Handley, Modern Magnetic Materials:Principles and Applications. Wiley, 1999. [4] K.-J. L. Bernard Dieny, Ronald B. Goldfarb, Introduction to Magnetic Random- Access Memory. John Wiley and Sons, Inc, 2016. [5] C. O. Avci, A. Quindeau, M. Mann, C.-F. Pai, C. A. Ross, and G. S. Beach, “Spin transport in as-grown and annealed thulium iron garnet/platinum bilayers with per- pendicular magnetic anisotropy,” Physical Review B, vol. 95, no. 11, p. 115428, 2017. [6] C.-F. Pai, L. Liu, Y. Li, H.-W. Tseng, D. C. Ralph, and R. A. Buhrman, “Spin trans- fer torque devices utilizing the giant spin hall effect of tungsten,” Applied Physics Letters, vol. 101, no. 12, p. 122404, 2012. [7] Y.-M. Hung, Spin Currents and Spin Orbit Torques in Ferromagnets and Antiferro- magnets. PhD thesis, New York University, 2017. [8] C.-F. Pai, M. Mann, A. J. Tan, and G. S. D. Beach, “Determination of spin torque efficiencies in heterostructures with perpendicular magnetic anisotropy,” Phys. Rev. B, vol. 93, p. 144409, Apr 2016. [9] H. Nakayama, M. Althammer, Y.-T. Chen, K. Uchida, Y. Kajiwara, D. Kikuchi, T. Ohtani, S. Geprägs, M. Opel, S. Takahashi, R. Gross, G. E. W. Bauer, S. T. B. Goennenwein, and E. Saitoh, “Spin hall magnetoresistance induced by a nonequilibrium proximity effect,” Phys. Rev. Lett., vol. 110, p. 206601, May 2013. [10] E. Hall, “On a new action of the magnet on electric currents.,” American Journal of Mathematics, vol. 2, no. 3, pp. 287–292, 1879. [11] M. Dyakonov and V. Perel, “Current-induced spin orientation of electrons in semi- conductors,” Physics Letters A, vol. 35, no. 6, pp. 459–460, 1971. [12] Y. K. Kato, R. C. Myers, A. C. Gossard, and D. D. Awschalom, “Observation of the spin hall effect in semiconductors,” science, vol. 306, no. 5703, pp. 1910–1913, 2004. [13] J. Hirsch, “Spin hall effect,” Physical Review Letters, vol. 83, no. 9, p. 1834, 1999. [14] J.Schliemann,“Spinhalleffect,”InternationalJournalofModernPhysicsB,vol.20, no. 09, pp. 1015–1036, 2006. [15] E. Saitoh, M. Ueda, H. Miyajima, and G. Tatara, “Conversion of spin current into charge current at room temperature: Inverse spin-hall effect,” Applied physics letters, vol. 88, no. 18, p. 182509, 2006. [16] L. Liu, T. Moriyama, D. Ralph, and R. Buhrman, “Spin-torque ferromagnetic res- onance induced by the spin hall effect,” Physical review letters, vol. 106, no. 3, p. 036601, 2011. [17] J.-G. Choi, J. W. Lee, and B.-G. Park, “Spin hall magnetoresistance in heavy- metal/metallic-ferromagnet multilayer structures,” Physical Review B, vol. 96, no. 17, p. 174412, 2017. [18] J. Kim, P. Sheng, S. Takahashi, S. Mitani, and M. Hayashi, “Spin hall magnetore- sistance in metallic bilayers,” Phys. Rev. Lett., vol. 116, p. 097201, Feb 2016. [19] Z.Zhao,M.Jamali,A.K.Smith,andJ.-P.Wang,“Spinhallswitchingofthemagne- tization in ta/tbfeco structures with bulk perpendicular anisotropy,” Applied Physics Letters, vol. 106, no. 13, p. 132404, 2015. [20] R.Mishra,J.Yu,X.Qiu,M.Motapothula,T.Venkatesan,andH.Yang,“Anomalous current-induced spin torques in ferrimagnets near compensation,” Phys. Rev. Lett., vol. 118, p. 167201, Apr 2017. [21] K. Ueda, M. Mann, C.-F. Pai, A.-J. Tan, and G. S. Beach, “Spin-orbit torques in ta/tbxco100-x ferrimagnetic alloy films with bulk perpendicular magnetic anisotropy,” Applied Physics Letters, vol. 109, no. 23, p. 232403, 2016. [22] K. Ueda, M. Mann, P. W. P. de Brouwer, D. Bono, and G. S. D. Beach, “Temper- ature dependence of spin-orbit torques across the magnetic compensation point in a ferrimagnetic tbco alloy film,” Phys. Rev. B, vol. 96, p. 064410, Aug 2017. [23] J. Finley and L. Liu, “Spin-orbit-torque efficiency in compensated ferrimagnetic cobalt-terbium alloys,” Phys. Rev. Applied, vol. 6, p. 054001, Nov 2016. [24] T.-C.Wang,T.-Y.Chen,C.-T.Wu,H.-W.Yen,andC.-F.Pai,“Comparativestudyon spin-orbit torque efficiencies from w/ferromagnetic and w/ferrimagnetic heterostruc- tures,” Phys. Rev. Materials, vol. 2, p. 014403, Jan 2018. [25] H. X. Yang, M. Chshiev, B. Dieny, J. H. Lee, A. Manchon, and K. H. Shin, “First-principles investigation of the very large perpendicular magnetic anisotropy at fe|mgo and co|mgo interfaces,” Phys. Rev. B, vol. 84, p. 054401, Aug 2011. [26] T.-C.Wang,T.-Y.Chen,C.-T.Wu,H.-W.Yen,andC.-F.Pai,“Comparativestudyon spin-orbit torque efficiencies from w/ferromagnetic and w/ferrimagnetic heterostruc- tures,” Physical Review Materials, vol. 2, no. 1, p. 014403, 2018. [27] G.-G. An, J.-B. Lee, S.-M. Yang, J.-H. Kim, W.-S. Chung, and J.-P. Hong, “Highly stable perpendicular magnetic anisotropies of cofeb/mgo frames employing w buffer and capping layers,” Acta Materialia, vol. 87, no. C, pp. 259–265, 2015. [28] T. Liu, J. Cai, and L. Sun, “Large enhanced perpendicular magnetic anisotropy in cofeb/mgo system with the typical ta buffer replaced by an hf layer,” Aip Advances, vol. 2, no. 3, p. 032151, 2012. [29] X. Kozina, S. Ouardi, B. Balke, G. Stryganyuk, G. H. Fecher, C. Felser, S. Ikeda, H. Ohno, and E. Ikenaga, “A nondestructive analysis of the b diffusion in ta–cofeb– mgo–cofeb–ta magnetic tunnel junctions by hard x-ray photoemission,” Applied Physics Letters, vol. 96, no. 7, p. 072105, 2010. [30] A. T. Hindmarch, V. Harnchana, A. S. Walton, A. P. Brown, R. M. D. Brydson, and C. H. Marrows, “Zirconium as a boron sink in crystalline CoFeB/MgO/CoFeB magnetic tunnel junctions,” Applied Physics Express, vol. 4, p. 013002, dec 2010. [31] C.-J. Lin, G. Gorman, C. Lee, R. Farrow, E. Marinero, H. Do, H. Notarys, and C. Chien, “Magnetic and structural properties of co/pt multilayers,” Journal of Mag- netism and Magnetic Materials, vol. 93, pp. 194 – 206, 1991. [32] P.F.Carcia,“Perpendicular magnetic anisotropy in pd/co and pt/co thin film layered structures,” Journal of Applied Physics, vol. 63, no. 10, pp. 5066–5073, 1988. [33] S. Bandiera, R. C. Sousa, B. Rodmacq, and B. Dieny, “Asymmetric interfacial perpendicular magnetic anisotropy in pt/co/pt trilayers,” IEEE Magnetics Letters, vol. 2, pp. 3000504–3000504, 2011. [34] A. Aharoni, Introduction to the Theory of Ferromagnetism. Oxford, 2001. [35] W. F. Brown, Micromagnetics. Wiley, 1963. [36] T. L. Gilbert, “A phenomenological theory of damping in ferromagnetic materials,” IEEE transactions on magnetics, vol. 40, no. 6, pp. 3443–3449, 2004. [37] C. Kittel, “Theory of the dispersion of magnetic permeability in ferromagnetic materials at microwave frequencies,” Physical Review, vol. 70, no. 5-6, p. 281, 1946. [38] J. C. Slonczewski, “Current-driven excitation of magnetic multilayers,” Journal of Magnetism and Magnetic Materials, vol. 159, no. 1-2, pp. L1–L7, 1996. [39] L.Berger,“Emissionofspinwavesbyamagneticmultilayertraversedbyacurrent,” Physical Review B, vol. 54, no. 13, p. 9353, 1996. [40] D. C. Ralph and M. D. Stiles, “Spin transfer torques,” Journal of Magnetism and Magnetic Materials, vol. 320, no. 7, pp. 1190–1216, 2008. [41] A.Hoffmann,“Spinhalleffectsinmetals,”IEEEtransactionsonmagnetics,vol.49, no. 10, pp. 5172–5193, 2013. [42] M. Ito, A. Ooba, T. Komine, and R. Sugita, “Dependence of hard-axis anisotropy field on domain wall width for current-induced domain wall motion in nanowires,” Journal of Magnetism and Magnetic Materials, vol. 340, pp. 61–64, 2013. [43] J.-P. Tetienne, T. Hingant, L. Martínez, S. Rohart, A. Thiaville, L. H. Diez, K. Gar- cia, J.-P. Adam, J.-V. Kim, J.-F. Roch, et al., “The nature of domain walls in ultrathin ferromagnets revealed by scanning nanomagnetometry,” Nature communications, vol. 6, p. 6733, 2015. [44] Y. Wang, D. Zhu, Y. Wu, Y. Yang, J. Yu, R. Ramaswamy, R. Mishra, S. Shi, M. Elyasi, K.-L. Teo, et al., “Room temperature magnetization switching in topo- logical insulator-ferromagnet heterostructures by spin-orbit torques,” Nature com- munications, vol. 8, no. 1, p. 1364, 2017. [45] D. Mahendra, R. Grassi, J.-Y. Chen, M. Jamali, D. R. Hickey, D. Zhang, Z. Zhao, H. Li, P. Quarterman, Y. Lv, et al., “Room-temperature high spin–orbit torque due to quantum confinement in sputtered bi x se (1–x) films,” Nature materials, vol. 17, no. 9, p. 800, 2018. [46] A. Mellnik, J. Lee, A. Richardella, J. Grab, P. Mintun, M. H. Fischer, A. Vaezi, A. Manchon, E.-A. Kim, N. Samarth, et al., “Spin-transfer torque generated by a topological insulator,” Nature, vol. 511, no. 7510, p. 449, 2014. [47] N. H. D. Khang, Y. Ueda, and P. N. Hai, “A conductive topological insulator with large spin hall effect for ultralow power spin–orbit torque switching,” Nature mate- rials, p. 1, 2018. [48] Y. Wang, P. Deorani, K. Banerjee, N. Koirala, M. Brahlek, S. Oh, and H. Yang, “Topological surface states originated spin-orbit torques in bi 2 se 3,” Physical review letters, vol. 114, no. 25, p. 257202, 2015. [49] Y. Fan, P. Upadhyaya, X. Kou, M. Lang, S. Takei, Z. Wang, J. Tang, L. He, L.- T. Chang, M. Montazeri, et al., “Magnetization switching through giant spin–orbit torque in a magnetically doped topological insulator heterostructure,” Nature materials, vol. 13, no. 7, p. 699, 2014. [50] N. Roschewsky, E. S. Walker, P. Gowtham, S. Muschinske, F. Hellman, S. R. Bank, and S. Salahuddin, “Spin-orbit torque and nernst effect in bi-sb/co heterostructures,” arXiv preprint arXiv:1810.05674, 2018. [51] Y. Ou, D. Ralph, and R. Buhrman, “Strong perpendicular magnetic anisotropy en- ergy density at fe alloy/hfo2 interfaces,” Applied Physics Letters, vol. 110, no. 19, p. 192403, 2017. [52] D. Allwood, G. Xiong, M. Cooke, and R. Cowburn, “Magneto-optical kerr effect analysis of magnetic nanostructures,” Journal of Physics D: Applied Physics, vol. 36, no. 18, p. 2175, 2003. [53] T.-Y. Chen, C.-T. Wu, H.-W. Yen, and C.-F. Pai, “Tunable spin-orbit torque in cu-ta binary alloy heterostructures,” Physical Review B, vol. 96, no. 10, p. 104434, 2017. [54] Y. Lu, J. Cai, S. Huang, D. Qu, B. Miao, and C. Chien, “Hybrid magnetoresistance in the proximity of a ferromagnet,” Physical Review B, vol. 87, no. 22, p. 220409, 2013. [55] T.-Y.Chen,T.-C.Chuang,S.-Y.Huang,H.-W.Yen,andC.-F.Pai,“Spin-orbittorque from a magnetic heterostructure of high-entropy alloy,” Physical Review Applied, vol. 8, no. 4, p. 044005, 2017. [56] L.Liu,C.-F.Pai,Y.Li,H.Tseng,D.Ralph,andR.Buhrman,“Spin-torqueswitching with the giant spin hall effect of tantalum,” Science, vol. 336, no. 6081, pp. 555–558, 2012. [57] L. Neumann and M. Meinert, “Influence of the hall-bar geometry on harmonic hall voltage measurements of spin-orbit torques,” AIP Advances, vol. 8, no. 9, p. 095320, 2018. [58] S. Shen, D. Lee, C. Cheng, W. Chan, and G. Chern, “The correlation between mag- netic dead layer and perpendicular magnetic anisotropy in mgo/cofeb/ta top struc- ture,” IEEE Transactions on Magnetics, vol. 55, pp. 1–5, Feb 2019. [59] K.-F.Huang,D.-S.Wang,H.-H.Lin,andC.-H.Lai,“Engineeringspin-orbittorquein co/pt multilayers with perpendicular magnetic anisotropy,” Applied Physics Letters, vol. 107, no. 23, p. 232407, 2015. [60] A. Kobs, S. Heße, W. Kreuzpaintner, G. Winkler, D. Lott, P. Weinberger, A. Schreyer, and H. Oepen, “Anisotropic interface magnetoresistance in pt/co/pt sandwiches,” Physical review letters, vol. 106, no. 21, p. 217207, 2011. [61] Y. M. Lu, J. W. Cai, S. Y. Huang, D. Qu, B. F. Miao, and C. L. Chien, “Hybrid mag- netoresistance in the proximity of a ferromagnet,” Phys. Rev. B, vol. 87, p. 220409, Jun 2013. [62] M.Kawaguchi,D.Towa,Y.-C.Lau,S.Takahashi,andM.Hayashi,“Anomalousspin hall magnetoresistance in pt/co bilayers,” Applied Physics Letters, vol. 112, no. 20, p. 202405, 2018. [63] G.Zahnd,L.Vila,V.Pham,M.Cosset-Cheneau,W.Lim,A.Brenac,P.Laczkowski, A. Marty, and J. Attané, “Spin diffusion length and polarization of ferromagnetic metals measured by the spin-absorption technique in lateral spin valves,” Physical Review B, vol. 98, no. 17, p. 174414, 2018. [64] S. Emori, U. Bauer, S.-M. Ahn, E. Martinez, and G. S. Beach, “Current-driven dynamics of chiral ferromagnetic domain walls,” Nature materials, vol. 12, no. 7, p. 611, 2013. [65] A. Khvalkovskiy, D. Apalkov, S. Watts, R. Chepulskii, R. Beach, A. Ong, X. Tang, A. Driskill-Smith, W. Butler, P. Visscher, et al., “Basic principles of stt-mram cell operation in memory arrays,” Journal of Physics D: Applied Physics, vol. 46, no. 7, p. 074001, 2013. | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/72864 | - |
| dc.description.abstract | 拓樸絕緣體 (Topological insulators) 在近幾年吸引非常多的注意力,因為在拓樸絕緣體中,發現了非常高的自旋軌道矩轉換效率。而高的轉換效率意味著所消耗的能量較低,因此,拓樸絕緣體被視為下一個世代自旋電子元 件的熱門人選。在被證實具有拓樸絕緣體性質的材料系統中,鉍基硫族化合物是最被大家廣泛研究的材料,例如:鍗化鉍, 硒化鉍。然而,拓樸絕緣體擁有高的轉換效率是來自於其拓墣保護的表面態造成的自旋動量鎖定 (spin momentum locking)。而為了保護其表面態,必須使拓樸材料具有高度的結 晶性。這樣的需求限制了在工業上的應用。因此,我們選擇使用了傳統的濺鍍系統,成長非晶性的鉍基硫族化合物,碲化鉍。並藉由實驗室所開發的廣場磁光科爾效應磁滯曲線偏移量測方法,得到其自旋軌道矩轉換效率。在論文的第一部份, 我們將原本使用電學量測的磁滯曲線偏移量測方法優化成為 利用光學量測。在 Ta/CoFeB/Hf/MgO 異質結構中,我們發現以往用電學量 測的方式會低估材料本身自旋軌道矩轉換效率,其原因是 Hall bar 本身的幾何結構會造成電流在十字區域造成分流,導致電流密度降低,使預估的效率較低。在第二部份, 我們用磁控濺鍍系統去成長非晶質的碲化鉍, 並成長具有垂直異向性的鐵磁層(Pt/Co/Pt)。藉由磁滯曲線偏移量測, 我們得到高達 1.2 的自旋軌道矩轉換效率,這和其他透過分子束磊晶所成長的高結晶性鉍基硫族化合物是可比擬的。同時我們也量測到利用電流誘發碲化鉍中自旋軌道矩而產生的磁矩翻轉,更進一步證明非晶質的碲化鉍異質結構是可以應用在未來的記憶體元件中。 | zh_TW |
| dc.description.abstract | Topological insulators (TIs), for example, epitaxial Bi-based chalcogenides (BixSb1−x, BixSe1−x) have gained more attention in recent years since they possess large spin-orbit (SOT) efficiency due to spin-momentum locking originated from topologically-protected surface states. The large SOT efficiency makes them great candidates for next generation spintronics devices. However, epitaxy of these Bi-based chalcogenides is typically necessary to ensure the topologically-protected surface state, which limits the application of these materials in industry. In the first part of this thesis, we use Ta/CoFeB/Hf/MgO heterostructure to optimize our hysteresis loop-shift measurement by wide-field magneto-optical Kerr effect (MOKE), and find out that there is an under-estimation of spin-orbit torque efficiency when using electrical means due to current shunting of Hall bar geometry. In the second part, we use conventional dc magnetron sputtering to grow non-epitaxial BixTe1−x thin films and subsequently grow perpendicular magnetized layer (Pt/Co/Pt) on top of it. Through hysteresis loop shift measurement, the maximum damping-like SOT efficiency can reach 1.2, which is comparable to other TI works deposited by molecular beam epitaxy. Current-induced switching of thermally-stable BixTe1−x-based heterostructure is also demonstrated to show that non-epitaxial Bi-based chalcogenide can be applied in future memory devices. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-17T07:08:31Z (GMT). No. of bitstreams: 1 ntu-108-R06527023-1.pdf: 12775700 bytes, checksum: 594cedf7b4eb7bca3b3b087720a3c37a (MD5) Previous issue date: 2019 | en |
| dc.description.tableofcontents | 口試委員會審定書 iii
致謝辭 v 摘要 vii Abstract ix 1 Introduction 1 1.1 Hall effect.................................. 1 1.1.1 Ordinary Hall effect ........................ 1 1.1.2 Anomalous Hall effect ....................... 2 1.1.3 Spin Hall effect........................... 3 1.2 Perpendicular magnetic anisotropy..................... 5 1.2.1 Magnetic anisotropy ........................ 5 1.2.2 PMA in thin film.......................... 7 1.3 Magnetization dynamics .......................... 9 1.3.1 LLG equation............................ 9 1.3.2 Spin transfer torque......................... 10 1.3.3 Spin orbit torque .......................... 12 1.3.4 Domain wall motion ........................ 15 1.4 Motivation of this work........................... 17 2 Sample preparation 19 2.1 Thin film deposition ............................ 19 2.1.1 Introduction of magnetron sputtering . . . . . . . . . . . . . . . 19 2.1.2 Deposition of Ta (W)/CoFeB/Hf/MgO heterostructues . . . . . . 20 2.1.3 Deposition of Pt/Co/Pt-related heterostructures . . . . . . . . . . 21 2.2 Hall bar fabrication ............................. 24 3 Properties measurement 27 3.1 Magnetic property.............................. 27 3.1.1 Vibrating Sample Magnetometer.................. 27 3.1.2 Anomalous Hall effect measurement. . . . . . . . . . . . . . . . 28 3.1.3 Magneto-optical Kerr effect .................... 29 3.2 Spin-orbit torque measurement....................... 32 3.2.1 Current-induced hysteresis loop shift measurement . . . . . . . . 32 3.2.2 Spin Hall magnetoresistance.................... 34 3.3 Resistivity measurement .......................... 36 4 Current-induced hysteresis loop shift measurement by wide-field MOKE 39 4.1 Results of micron-sized devices ...................... 39 4.2 Results of unpatterned film......................... 46 4.3 Short conclusion .............................. 51 5 SOT characterization of BiTe/Pt/Co/Pt 53 5.1 Magnetic properties of Pt/Co/Pt ...................... 53 5.2 Current-induced loop shift results of BiTe/Pt/Co/Pt and control samples . 55 5.3 Spin diffusion length of Pt ......................... 60 5.3.1 SMR method ............................ 60 5.3.2 Loop shift measurement method.................. 63 5.4 Current-induced switching ......................... 66 5.5 Short conclusion .............................. 69 6 Summary 71 Bibliography 73 | |
| dc.language.iso | en | |
| dc.subject | 垂直異向性 | zh_TW |
| dc.subject | 磁光柯爾效應 | zh_TW |
| dc.subject | 磁性異質結構 | zh_TW |
| dc.subject | 硫族化合物 | zh_TW |
| dc.subject | 自旋霍爾效應 | zh_TW |
| dc.subject | 自旋軌道矩 | zh_TW |
| dc.subject | magneto-optical Kerr effect | en |
| dc.subject | perpendicular magnetic anisotropy | en |
| dc.subject | chalcogenide | en |
| dc.subject | magnetic heterostructure | en |
| dc.subject | spin Hall effect | en |
| dc.subject | spin-orbit torque | en |
| dc.title | 非晶質硫族化合物異質結構中自旋軌道矩之研究 | zh_TW |
| dc.title | Study of spin-orbit torque in non-epitaxial chalcogenide heterostructures | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 107-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 黃斯衍,林昭吟 | |
| dc.subject.keyword | 自旋軌道矩,垂直異向性,硫族化合物,磁性異質結構,自旋霍爾效應,磁光柯爾效應, | zh_TW |
| dc.subject.keyword | spin-orbit torque,perpendicular magnetic anisotropy,chalcogenide,magnetic heterostructure,spin Hall effect,magneto-optical Kerr effect, | en |
| dc.relation.page | 80 | |
| dc.identifier.doi | 10.6342/NTU201901452 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2019-07-23 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 材料科學與工程學研究所 | zh_TW |
| 顯示於系所單位: | 材料科學與工程學系 | |
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| ntu-108-1.pdf 未授權公開取用 | 12.48 MB | Adobe PDF |
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