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  1. NTU Theses and Dissertations Repository
  2. 工學院
  3. 機械工程學系
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/72113
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dc.contributor.advisor鍾添東
dc.contributor.authorYu-Kuan Leeen
dc.contributor.author李郁寬zh_TW
dc.date.accessioned2021-06-17T06:24:01Z-
dc.date.available2023-08-20
dc.date.copyright2018-08-20
dc.date.issued2018
dc.date.submitted2018-08-17
dc.identifier.citation[1] D. Tan, Y. Li, F. Qi, H. Yang, and Q. G. Dong and X. Duan, 'Reduction in feature size of two-photon polymerization using SCR500,' Applied Physics Letters, vol. 90, no. 7, 2007.
[2] M. Power, G. Z. Yang, 'Direct laser written passive micromanipulator end-effector for compliant object manipulation,' in IEEE/RSJ International Conference on Intelligent Robots and Systems, pp.790-797, 2015.
[3] P. S. Timashev, M. V. Vedunova, D. Guseva, E. Ponimaskin, A. Deiwick, T. A. Mishchenko, E. V. Mitroshina, A. V. Koroleva, A. S. Pimashkin, I. V. Mukhina, V. Ya. Panchenko, B. N. Chichkov and V. N. Bagratashvili, '3D in vitroplatform produced by two-photon polymerization for the analysis of neural network formation and function,' Biomedical Physics & Engineering Express, vol. 2, no. 3, p. 035001, 2016.
[4] T. StichelEmail, B. Hecht, R. Houbertz, G. Sextl, 'Compensation of spherical aberration influences for two-photon polymerization patterning of large 3D scaffolds,' Applied Physics A, vol. 121, no. 1, pp. 187-191, 2015.
[5] N. Bertin, T. Spelman, O. Stephan, L. Gredy, M. Bouriau, E. Lauga, P. Marmottant, 'Propulsion of Bubble-Based Acoustic Microswimmers,' Physical Review Applied, vol. 4, no. 6, p. 064012, 2015.
[6] I. Wang, M. Bouriau, P. L. Baldeck, C. Martineau, and C. Andraud, 'Three-dimensional microfabrication by two-photon-initiated polymerization with a low-cost microlaser,' Optics Letters, vol. 27, no. 15, pp. 1348-1350, 2002.
[7] M. Göppert-Mayer, 'Über Elementarakte mit zwei Quantensprüngen,' Annalen der Physik, vol. 401, no. 3, pp. 273-294, 1931.
[8] W. Kaiser, and C.G.B. Garrett, 'Two-Photon Excitation in CaF2:Eu2+,' Physical Review Letters,vol. 7, no. 6, pp. 229-231, 1961.
[9] K.-S. Lee, D.-Y. Yang, S. H. Park, R. H. Kim, 'Recent developments in the use of two-photon polymerization in precise 2D and 3D microfabrications,' Polymers for Advanced Technologies, vol. 17, no. 2, pp. 72-82, 2006.
[10] A. Spangenberg, N. Hobeika, F. Stehlin, J. Pierre Malval, F. Wieder, P. Prabhakaran, P. Baldeck, and O. Sopper, “Recent Advances in Two-Photon Stereolithography,” Updates in Advanced Lithography, Jul. 2013.
[11] S. Maruo, and S. Kawata, 'Two-Photon-Absorbed Near-Infrared Photopolymerization for the-dimensional microfabrication,' Jouranl of microelectromechanical system, vol. 7, no. 4, pp. 411-415, 1998.
[12] S. Maruo, O. Nakamura, and S. Kawata, 'Three-dimensional microfabrication with two-photon- absorbed photonpolymerization,' OPTICS LETTERS, vol. 22, no 2, pp. 132-134, 1997.
[13] H.-B. Sun, T. Tanaka, and S. Kawata, 'Three-dimensional focal spots related to two-photon excitation,' Applied Physics Letters, vol. 80, no. 20, pp. 3673-3675, 2002.
[14] Robert J. DeVoe, Harvey W. Kalweit, Catherine A. Leatherdale, Todd R. Williams, 'Voxel shapes in two-photon microfabrication,' in SPIE Proceedings, pp. 310-316, 2003.
[15] M. Malinauskas, V. Purlys, M. Rutkauskas, R. Gadonas, 'Two-photon polymerization for fabrication of three-dimensional micro- and nanostructures over a large area,' in SPIE Proceedings, pp. 72040C-72040C-11, 2009.
[16] Kotaro Obata, Ayman El-Tamer, Lothar Koch, Ulf Hinze and Boris N Chichkov, 'High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP),' Light: Science & Applications, vol. 2, no. 12, p. e116, 2013.
[17] K. Cheng, X. Zhou, X. Zheng, J. Lin, 'Study on the consistency of the voxel of two photon polymerization with inclined beam,' Optics Communications, vol. 381, no. 15, pp. 444-449, 2016.
[18] J.Serbin, A. Egbert, A. Ostendorf, and B. N. Chichkov, “Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,” OPTICS LETTERS, vol. 28, no. 5, 2003.
[19] Carsten Reinhardt, Sven Passinger, and Boris N. Chickov, “Laser-fabricated dielectric optical components for surface plasmom polaritons,” OPTICS LETTERS, vol. 31, no. 9, 2006.
[20] Tien-Tung Chung, Qi-Wen Tang, 'Design and Fabrication of Large Scale 3D objects by Two-Photon Polymerization Technology,' Department of Mechanical Engineering, College of Engineering, National Taiwan University, Taipei, Taiwan.
[21] S. H. Park, T. W. Lim, D.-Y. Yang, S. W. Yi, H. J. Kong, 'Direct Fabrication of Micropatterns and Three-Dimensional Structures Using Nanoreplication-Printing (nRP) Process. Sensors and Materials,' vol. 17, no. 2, pp. 65-75, 2005.
[22] M.J. Nasse, and J.C. Woehl, 'Realistic modeling of the illumination point spread function in confocal scanning optical microscopy,' Journal of the Optical Society of America A, vol. 27, no, 2, pp. 295-302, 2010.
[23] H.-B. Sun, and S. Kawata, 'Two-photon laser precision microfabrication and its applications to micro-nano devices and systems,' Journal of Lightwave Technology, vol. 21, no. 3, pp. 624-633, 2003.
[24] C.-Y. Liao, 'Product Model Acquisition, Preparation, and Simulation for Two-Photon Polymerization Micro-manufacturing,' Joint Ph.D. dissertation, University of Joseph Fourier and National Taiwan University, France and Taiwan, 2008.
[25] S.-Y. Chen, “Automatic Large Area Micro Manufacturing System for Two-Photon Polymerization,” M.S. thesis, National Taiwan University, Taiwan, 2014.
[26] T. Hasegawa, and S. Maruo, 'Two-photon microfabrication with a supercritical CO2 drying process toward replication of three-dimensional microstructures,' in International Symposium on Micro-NanoMechatronics and Human Science, pp. 12-15, 2007.
[27] S. Maruo, T. Hasegawa, and N. Yoshimura, 'Single-anchor support and supercritical CO2 drying enable high-precision microfabrication of three-dimensional structures,' Optics Express, vol. 17, no. 23, pp. 20945-20951, 2009.
[28] J. M. Garcia, “Augustin-Jean Fresnel,” Rev. Mex. Oftalmol, vol. 82, no.2, p. 130, 2008.
dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/72113-
dc.description.abstract本研究著眼於以雙光子聚合技術應用於大範圍三維尺寸產品的發展與製造。此雙光子微製造加工系統採用4W 的高功率飛秒雷射、用於xy方向定位的振鏡掃描器、z軸壓電控制平台及不同放大倍率的顯微物鏡。傳統的小範圍TPP製造系統僅能以30毫瓦的雷射功率製作小於300微米的成品。本系統以4W 的高功率雷射及10倍物鏡可製作的最佳光斑尺寸可縮減至2.5微米,且長寬比為30,所能製作的範圍約為2.3mm × 2.3mm × 1mm;搭配50倍物鏡時可製作的最佳光斑尺寸可縮減至0.6微米,且長寬比為13,所能製作的範圍約為0.45mm × 0.45mm × 0.5mm。在應用層面上可製作焦距為1mm 且具有聚焦能力的菲涅耳透鏡。亦可以高品質製作41 × 41 的光柵,其大小為1.45 mm × 1.45 mm 且線間距為36.25 微米。此外可成功製作用於眼神經細胞自我重建的管狀結構,其直徑為0.3 mm,
長度為 0.7 mm 且具有9個直徑為40微米的孔洞。
zh_TW
dc.description.abstractThis thesis studies development and fabrication of large-scale 3D structures by two-photon polymerization (TPP). The large-scale TPP fabrication system is equipped with a 4W high power femtosecond laser, a xy galvanometer scanner, a z-axis piezo-driven translation stage, and different objective lens. Traditional small-scale TPP system usually fabricates micro products within 300 μm size with 30 mW laser power. For using 4W laser power with using 10x objective, best typical lateral voxel size is reduced to 2.5 um with aspect ratio of 30 and the manufacturing range in xyz axes is about 2.3mm x 2.3mm x 1mm. For 50x objective, best typical lateral voxel size is reduced to 0.6 um with aspect ratio of 13, the manufacturing range in xyz axes is about 0.45mm x 0.45mm x 0.5mm. In application, a Fresnel Zone Plates(FZP) lens with focal length 1 mm is fabricated and can be used for focusing light. A 41 x 41 micro gratings with 1.45mm x 1.45mm size and 36.25μm line gap are also manufactured with good quality. A micro tube structure for eye nerve cell reconstruction with 0.3mm diameter, 0.7mm length, and nine 40-μm holes is successfully manufactured.en
dc.description.provenanceMade available in DSpace on 2021-06-17T06:24:01Z (GMT). No. of bitstreams: 1
ntu-107-R05522634-1.pdf: 5034872 bytes, checksum: ce41d2c6c5a8b820e8684bd889bec2c6 (MD5)
Previous issue date: 2018
en
dc.description.tableofcontents口試委員會審定書 i
致謝 ii
摘要 iii
Abstract iv
CONTENTS v
LIST OF FIGURES vii
LIST OF TABLE xi
NOMENCLATURES xii
Chapter 1 Introduction 1
1.1 Background 1
1.2 Literature Review 4
1.3 Research Motivation 10
1.4 Thesis outline 12
Chapter 2 Principle and fabrication process of TPP 13
2.1 Fundamental principle of TPP process 13
2.2 The fabrication process of TPP 17
2.3 NTUMFS CAM system for TPP micro fabrication 19
2.4 Experimental setup of TPP micro fabrication based on 3D piezostage 20
2.5 Supercritical point drying process 22
2.6 Scanning electronic microscope image 25
Chapter 3 Large scale TPP system based on galvanometer scanner 27
3.1 Hardware development of large scale TPP system 27
3.2 Software design for large scale TPP system 32
Chapter 4 Design and fabrication of 2D structures with large-scale TPP system 35
4.1 Pre-processing of cover slip before fabrication 35
4.2 Improvement of voxel size and 2D fabrication with 10x objective lens..38
4.3 Improvement of voxel size and 2D fabrication with 50x objective lens 51
Chapter 5 Design and fabrication of 3D structures with large-scale TPP system 60
5.1 Design and fabrication of Fresnel Zone Plate 60
5.2 Design and fabrication of tube structure 63
Chapter 6 Conclusions and Suggestions 70
6.1 Conclusions 70
6.2 Suggestions 71
References 72
作者簡歷 77
dc.language.isozh-TW
dc.subject雙光子聚合zh_TW
dc.subject振鏡掃描系統zh_TW
dc.subject10倍物鏡zh_TW
dc.subject50倍物鏡zh_TW
dc.subject飛秒雷射zh_TW
dc.subject雙光子吸收zh_TW
dc.subject50x objective lensen
dc.subjecttwo-photon absorptionen
dc.subjectfemtosecond laseren
dc.subjectgalvanometer scanneren
dc.subject10x objective lensen
dc.subjecttwo-photon polymerizationen
dc.title雙光子聚合技術應用於大範圍之產品發展與製造zh_TW
dc.titleDevelopment and Fabrication of Large Scale Structures by Two-Photon Polymerization Technologyen
dc.typeThesis
dc.date.schoolyear106-2
dc.description.degree碩士
dc.contributor.oralexamcommittee顏家鈺,王安邦,許聿翔
dc.subject.keyword雙光子聚合,雙光子吸收,飛秒雷射,振鏡掃描系統,10倍物鏡,50倍物鏡,zh_TW
dc.subject.keywordtwo-photon polymerization,two-photon absorption,femtosecond laser,galvanometer scanner,10x objective lens,50x objective lens,en
dc.relation.page77
dc.identifier.doi10.6342/NTU201803871
dc.rights.note有償授權
dc.date.accepted2018-08-17
dc.contributor.author-college工學院zh_TW
dc.contributor.author-dept機械工程學研究所zh_TW
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