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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 楊燿州 | |
dc.contributor.author | Ming-Xin Xu | en |
dc.contributor.author | 徐銘辛 | zh_TW |
dc.date.accessioned | 2021-06-17T04:48:23Z | - |
dc.date.available | 2020-08-01 | |
dc.date.copyright | 2018-08-06 | |
dc.date.issued | 2018 | |
dc.date.submitted | 2018-07-31 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/71011 | - |
dc.description.abstract | 本文提出了基於微機電技術製造的溫度振盪器之設計、製造和特性分析。提出的溫度振盪器由微型超靈敏溫度感測器和微型加熱器組成。其中,溫度感測器是透過在指叉電極上沉積具有正溫度係數(PTC)效應的丙烯酸酯共聚物複合材料實現的,並作為產生溫度振盪現象的關鍵部件。丙烯酸酯共聚物複合材料是將石墨顆粒分散在丙烯酸酯共聚物中製備的。丙烯酸酯共聚物複合材料在1.5 ℃的溫度變化下表現出超過四個數量級的電阻率變化。利用複合材料電阻率的變化,週期性地開關微型加熱器,實現溫度振盪現象。 本文在理論分析的基礎上,確定了基於丙烯酸酯共聚物複合材料的溫度振盪器之設計參數。完成了丙烯酸酯共聚物複合材料和溫度振盪器的製程設計。並以微機電技術完成了丙烯酸酯共聚物複合材料的製備以及溫度振盪器系統的製造。研究結果顯示,基於丙烯酸酯共聚物的傳感器在1.5 ℃的溫度變化內表現出超過四個數量級的電阻率變化。測量了元件的暫態行為和系統參數對性能的影響。測量結果表明,在長期試驗中溫度漂移不明顯,這表明丙烯酸酯複合材料在反覆相變過程中具有高可靠性。 | zh_TW |
dc.description.abstract | This thesis presents the design, fabrication, and characterization of a temperature oscillator fabricated by MEMS technology. The proposed device consists of a miniaturized ultra-sensitive temperature sensor and a microheater. The temperature sensor was fabricated by depositing acrylate-based temperature sensing material with a positive temperature coefficient (PTC) on an interdigital electrode pair. The PTC material was the key element which enables temperature oscillations by periodically switching the microheater on and off. The acrylate-based composite, which was prepared by dispersing acrylate copolymer with graphite particles, exhibits four order-of-magnitude variation in resistivity over a temperature change of 1.5 ℃. Based on the theoretical analysis, the design parameters of the proposed oscillator were determined. The preparation of the acrylate copolymer composite and the fabrication of the temperature oscillator were realized by micromachining techniques. The measured results showed that the acrylate-copolymer-based sensor exhibited a resistance variation about four orders of magnitude over a small temperature range of only 1.5 ℃. The transient behavior of devices was measured. In addition, long term measurement of the device over 1000 cycles shows that the temperature drift is not obvious, which indicates that the acrylate composite has high reliability in the repeated phase transformation process. | en |
dc.description.provenance | Made available in DSpace on 2021-06-17T04:48:23Z (GMT). No. of bitstreams: 1 ntu-107-R05522736-1.pdf: 3901233 bytes, checksum: fdf08f7c60979a424201cf68717c5793 (MD5) Previous issue date: 2018 | en |
dc.description.tableofcontents | 致謝 I 摘要 III ABSTRACT V 目錄 VII 圖目錄 IX 表目錄 XIII 符號表 XV 第一章 緒論 1 1.1 前言 1 1.2 文獻回顧 3 1.2.1 正溫度係數(PTC)材料 3 1.2.2 具振盪現象之微機電元件 15 1.3 研究動機與研究目的 17 1.4 研究方法 18 1.5 論文架構 20 第二章 研究理論與系統模型 21 2.1 聚合物複合材料導電機制 21 2.1.1滲透理論(Percolation theory) 21 2.1.1穿隧效應(Tunneling effect) 23 2.2 正溫度係數效應(Possitive temperure coefficient effect) 24 2.2.1 導電鏈(Conductive chain)與熱膨脹機制 24 2.2.2 穿隧(Tunneling)機制 25 2.2.3 協同效應機制 26 2.2.4 內部應力機制 27 2.3 聚合物複合材料溫度振盪器熱傳導模型 27 2.4 本章結論 32 第三章 基於正溫度係數材料的溫度振盪器研製 35 3.1 製造材料與儀器設備 36 3.1.1 材料與試劑 36 3.1.2 儀器與設備 36 3.2 溫度振盪器系統設計 37 3.2.1 微型加熱器 37 3.2.2 指叉式電極 39 3.2.3 C型散熱片 40 3.2.4 光罩設計 40 3.2.5 溫度振盪器系統原理 43 3.3 溫度振盪器系統製造 45 3.3.1 丙烯酸酯共聚物複合材料製備 46 3.3.2 溫度振盪元件製造 48 3.3.3 元件組裝與製造結果 64 3.4 本章結論 66 第四章 溫度振盪器系統性能測試與分析 67 4.1 基於正溫度係數材料的溫度振盪器量測方法與量測系統 67 4.1.1 DSC量測平台 68 4.1.2 溫度-電壓量測系統 69 4.2 基於正溫度係數材料的溫度振盪器性能測試 73 4.2.1 正溫度係數丙烯酸酯聚合物複合材料特性量測 74 4.2.2 基於正溫度係數材料的溫度振盪器特性量測 75 4.3 本章結論 85 第五章 結論與展望 87 5.1 結論 87 5.2 未來展望 89 參考文獻 91 附錄 A 101 | |
dc.language.iso | zh-TW | |
dc.title | 基於高靈敏度正溫度係數複合材料之溫度振盪器 | zh_TW |
dc.title | Development of Temperature Oscillator Based on High-sensitivity Positive Temperature Coefficient Composite | en |
dc.type | Thesis | |
dc.date.schoolyear | 106-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 陳國聲,蘇裕軒 | |
dc.subject.keyword | 致動器,振盪器,溫度感測器,微機電系統,微機械元件, | zh_TW |
dc.subject.keyword | Actuators,oscillators,temperature sensors,microelectromechanical systems,micromechanical devices, | en |
dc.relation.page | 102 | |
dc.identifier.doi | 10.6342/NTU201802310 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2018-08-01 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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