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標題: | 多工超穎透鏡設計與應用 Multiplexing Metalens Design and Application |
作者: | BO HAN CHEN 陳柏翰 |
指導教授: | 蔡定平(Din Ping Tsai) |
關鍵字: | 超穎元件,超穎介面,超穎透鏡,氮化鎵,次波長結構,相位補償,影像感測器,寬頻帶消色差, Metadevices,metasurfaces,metalens,GaN,subwavelength structure,phase compensation,image sensor,broadband achromatic, |
出版年 : | 2018 |
學位: | 博士 |
摘要: | 超穎介面是一種以人造結構為主,具有局部次波長區域內以人為方式完成光調控的能力,比起傳統傳統光學元件操控以材料特性為主、需多波長物理尺度完成光調控,更具有較佳光操控性與輕巧性的優點,是目前奈米光子學領域中熱門的議題。根據超穎介面的提供的異常穿透、反射、控制光相位的特性,可設計出具有光聚焦效果的超穎透鏡。
本論文首先尋找於可見光具有高穿透效率之材料-氮化鎵,並建立以氮化鎵為透鏡材料,設計製作出不同功能性的超穎透鏡。第一部分將著重設計部分,包含相位公式推導、氮化鎵奈米柱尺寸最佳化、超穎透鏡介面奈米柱的人為安排方式、模擬驗證、實驗結果分析。第二部分將利用斜聚焦相位安排與多工氮化鎵奈米柱組的安排,設計同時具有分光(藍430 nm, 綠532 nm, 紅633 nm)與各顏色光聚焦於不同的人為設計位置,以單一結構完成傳統光感測晶片上的微透鏡與濾光片雙功能的效果,達到多工(多頻)的功能性超穎透鏡。最後利用複合式共振(Integrated-resonances)相位安排,完成具有寬波段消色差功能性的超穎透鏡,可同時將可見光範圍(400 nm - 660 nm)聚焦於相同位置,相對於傳統需以多種透鏡組較為簡化。 綜合本論文所提出的氮化鎵超穎透鏡所具有的特性:高效率、穿透式、次微米波長結構控制單元、半導體製程相容,相信可為微縮光學元件提供一種新式設計方式。 Nowadays, optics techniques play key roles in our daily life. Traditional optical components, which are used for light manipulation in demand, are usually bulky because of two main issues: (1) Limited intrinsic material properties, such as refractive index and dispersion; (2) The required phase retardation has to be accomplished through the optical path. Metasurface, a sort of artificial nanostructures, have been shown the great ability of tailoring light at a sub-wavelength resolution. They could therefore have promising potential in flat optical system and nanophotonics development. In this dissertation, we innovate high-efficient metasurface lenses (also called metalenses) with the working wavelength over the entire visible spectrum. For realizing a high-efficient metalens in transmission, the dielectric gallium nitride (GaN) is implemented as the material construction for metasurface units. As the proof-of-concept, not only the in-plane (with focusing efficiency 87% at 430 nm, 91.6% at 532 nm, 50.6% at 633 nm in measurement) but also the out-of-plane (with focusing efficiency 61.2% at 430 nm, 71.3% at 532 nm, 36% at 633 nm in measurement) converging metalenses are numerically designed, experimentally verified and analyzed. For practical applications, a multiplexing color routing and an achromatic metalens are also performed. The former possess the integrated functionality with the color filter and focusing microlens, which could significantly reduce the physical dimensions of traditional CMOS image sensor. The latter one is able to focus the full spectrum of visible light (λ = 400 nm to 660 nm) onto the same focal plane. It will be very useful for a variety of full-color applications, such as imaging system and detection. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/70179 |
DOI: | 10.6342/NTU201800145 |
全文授權: | 有償授權 |
顯示於系所單位: | 應用物理研究所 |
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