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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 溫政彥(Cheng-Yen Wen) | |
| dc.contributor.author | Lan-Hsuan Lee | en |
| dc.contributor.author | 李藍暄 | zh_TW |
| dc.date.accessioned | 2021-06-17T02:50:37Z | - |
| dc.date.available | 2018-09-04 | |
| dc.date.copyright | 2017-09-04 | |
| dc.date.issued | 2017 | |
| dc.date.submitted | 2017-08-15 | |
| dc.identifier.citation | 1. Available from: http://emc.missouri.edu/fib-sem.
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/69076 | - |
| dc.description.abstract | 聚焦離子束顯微鏡(Focused ion beam, FIB)是一個多功能且強大的材料分析及試片製備儀器，被廣泛用來製作高品質的穿透式電子顯微鏡(Transmission electron microscopy, TEM)之橫截面(Cross-sectional)試片，其試片具有定點操作、厚度均勻且薄、可觀察區域大等特性。然而，FIB製作之平面視角(Plan-view)試片卻鮮少有文獻研究，並且現有的方法都會對試片表面造成汙染及破壞，不適用於二維奈米薄膜材料上。為改善現有分析技術的不足之處，本論文提出了利用FIB製作新型態平面視角的TEM試片，成功地應用於單層石墨烯系統，並經過電子繞射、高解析TEM影像以及歐傑電子譜儀(Auger electron microscopy)的分析證實試片沒有明顯的汙染與破壞產生。本論文也利用平面視角的TEM繞射分析、拉曼光譜儀(Raman spectroscopy)、以及橫截面高解析TEM來分析石墨烯的層數及堆疊型態，發現實驗結果與過去文獻所觀察的不一致，結果顯示對於二維奈米薄膜材料的微結構或許還有許多探討的空間。 | zh_TW |
| dc.description.abstract | Focused ion beam(FIB)is a versatile and powerful instrument for materials analysis and sample preparation, and is widely used to fabricate cross-sectional TEM specimens with site-specific preparation, uniform-thinckness, and large observation area. However, on the other hand, FIB-based preparation methods for plan-view specimens are seldom reported yet, and the proposed methods would damage the sample surface during FIB process, harmful to two-dimensional atomic layer materials, such as graphene, MoS2, etc. In this study, we propose a new plan-view TEM specimen preparation method using FIB, which is suitable for single-layer graphene. The results of electron diffraction analysis, high-resolution TEM, and Auger electron microscopy show that the sample surface remains clean and structural-pristine after the fabrication process. We also judge the stacking type and layer number of graphene by plan-view TEM analysis, Raman spectroscopy and high-resolution cross-sectional TEM analysis. We find that determinatnion of the layer numbers of a graphene sheet by Raman analysis is not consistent with the way reported in literatures. Further analysis is still required for understanding the microstructure of two-dimensional atomic layer materials. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-17T02:50:37Z (GMT). No. of bitstreams: 1 ntu-106-R04527053-1.pdf: 11427882 bytes, checksum: 94be566dbdf5e301f905245875b03cda (MD5) Previous issue date: 2017 | en |
| dc.description.tableofcontents | 口試委員會審定書 #
誌謝 i 中文摘要 iii ABSTRACT iv CONTENTS v LIST OF FIGURES viii LIST OF TABLES xiv Chapter 1 緒論 1 Chapter 2 聚焦離子束顯微鏡簡介 2 2.1 FIB機台 2 2.1.1 雙束系統 2 2.1.2 氣體注射系統 3 2.1.3 微操縱器系統 4 2.1.4 其他系統 4 2.2 FIB應用 5 2.3 FIB試片缺點及限制 5 2.3.1 離子引起的損害 5 2.3.2 電子引起的損害 11 2.3.3 沉積引起的損害 12 2.4 平面視角 TEM試片製作方法 13 2.4.1 傳統研磨法 13 2.4.2 FIB製備法—提取法 14 2.4.3 FIB製備法—側面切削法 15 2.4.4 FIB製備法—保護帽法 16 2.4.5 特殊製備法—轉印法 17 2.5 現行平面視角試片製備法之缺點 17 Chapter 3 新型態平面視角 TEM試片製備 21 3.1 開發新型平面視角 TEM試片之需求 21 3.2 試片製作原理 22 3.3 試片分析方法介紹 24 3.3.1 穿透式電子顯微鏡 25 3.3.2 歐傑電子能譜儀 26 3.3.3 電子能量損失譜儀 27 3.4 製作步驟 28 3.4.1 微米膠囊前置作業 29 3.4.2 微米膠囊組合與建構 31 3.4.3 削薄及最後處理 32 3.5 結果與討論 33 3.5.1 石墨烯電子繞射分析 33 3.5.2 試片幾何形狀限制 34 3.5.3 試片汙染 36 3.5.4 厚度效應 39 3.5.5 氬離子濺射削薄 43 3.6 結論 45 Chapter 4 石墨烯堆疊型態分析 46 4.1 概述與動機 46 4.2 石墨烯的基礎性質 46 4.2.1 石墨烯的晶體結構 48 4.2.2 石墨烯的電子性質 49 4.2.3 石墨烯的製備方法 55 4.3 分析儀器與方法 69 4.3.1 聚焦離子束顯微鏡 70 4.3.2 掃描式電子顯微鏡 70 4.3.3 穿透式電子顯微鏡 70 4.3.4 石墨烯堆疊與電子繞射 71 4.3.5 拉曼光譜儀 74 4.3.6 石墨烯堆疊與拉曼光譜特徵峰強度比值 77 4.4 結果與討論 79 4.4.1 拉曼光譜分析 79 4.4.2 橫截面 TEM分析 80 4.4.3 平面視角 TEM分析 83 4.5 結論 85 Chapter 5 結論與未來展望 86 REFERENCES 87 | |
| dc.language.iso | zh-TW | |
| dc.subject | 石墨烯 | zh_TW |
| dc.subject | 薄膜分析 | zh_TW |
| dc.subject | 穿透式電子顯微鏡 | zh_TW |
| dc.subject | 堆疊型態 | zh_TW |
| dc.subject | 試片製作 | zh_TW |
| dc.subject | 平面視角 | zh_TW |
| dc.subject | 聚焦離子束顯微鏡 | zh_TW |
| dc.subject | Transmission electron microscopy(TEM) | en |
| dc.subject | atomic layer analysis | en |
| dc.subject | plan-view specimen preparation | en |
| dc.subject | Focused ion beam(FIB) | en |
| dc.subject | graphene | en |
| dc.subject | stacking type | en |
| dc.title | 利用聚焦離子束顯微鏡製作新型態之平面視角穿透式電子顯微鏡試片及其應用：石墨烯堆疊型態分析 | zh_TW |
| dc.title | A Plan-View TEM Specimen Preparation Method Using the Focused Ion Beam System and Its Application for Graphene Stacking Analysis | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 105-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 李紹先(Shao-Sian Li),吳建霆(Chien-Ting Wu),王迪彥(Di-Yan Wang) | |
| dc.subject.keyword | 聚焦離子束顯微鏡,平面視角,試片製作,穿透式電子顯微鏡,薄膜分析,石墨烯,堆疊型態, | zh_TW |
| dc.subject.keyword | Focused ion beam(FIB),plan-view specimen preparation,Transmission electron microscopy(TEM),atomic layer analysis,graphene,stacking type, | en |
| dc.relation.page | 91 | |
| dc.identifier.doi | 10.6342/NTU201703411 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2017-08-15 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 材料科學與工程學研究所 | zh_TW |
| 顯示於系所單位： | 材料科學與工程學系 | |
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