請用此 Handle URI 來引用此文件：
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/68986完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 楊申語 | |
| dc.contributor.author | Shian-Lung Chen | en |
| dc.contributor.author | 陳賢龍 | zh_TW |
| dc.date.accessioned | 2021-06-17T02:45:40Z | - |
| dc.date.available | 2019-09-04 | |
| dc.date.copyright | 2017-09-04 | |
| dc.date.issued | 2017 | |
| dc.date.submitted | 2017-08-15 | |
| dc.identifier.citation | [1] “Wearable Device Shipments to Reach 560 Million Units Annually by 2021 | Tractica.” .
[2] “Pelican Imaging’s prototype array camera could make your pictures better, phones thinner (video),” Engadget. [Online]. Available: https://www.engadget.com/2011/02/10/pelican-imagings-prototype-array-camera-could-make-your-picture/. [Accessed: 09-Jan-2017]. [3] “折射式微透鏡陣列介紹.” [Online]. Available: http://www.itrc.narl.org.tw/Publication/Newsletter/no81/p12.php. [Accessed: 14-Jan-2017]. [4] “LCoS技術,” MoneyDJ理財網. [Online]. Available: https://www.moneydj.com/KMDJ/Wiki/WikiViewer.aspx?KeyID=410b499c-f9e2-4d38-9991-63729c0f61e2. [Accessed: 09-Jan-2017]. [5] “Optical colored glass・molded lens | Isuzu Glass Ltd.” [Online]. Available: http://www.isuzuglass.com/. [Accessed: 09-Jan-2017]. [6] “背光模組簡介.” [Online]. Available: http://www.exp-coating.com/zh-TW/%E8%83%8C%E5%85%89%E6%A8%A1%E7%B5%84%E7%B0%A1%E4%BB%8B. [Accessed: 09-Jan-2017]. [7] C. L. Lee, H. W. Choi, E. Gu, M. D. Dawson, and H. Murphy, “Fabrication and characterization of diamond micro-optics,” Diam. Relat. Mater., vol. 15, no. 4, pp. 725–728, 2006. [8] D. Nieto, “Laser-based microstructuring of material surfaces | SPIE Homepage: SPIE.” [Online]. Available: http://spie.org/newsroom/4608-laser-based-microstructuring-of-material-surfaces. [Accessed: 09-Jan-2017]. [9] X. Zhu, H. Chen, L. Zhu, H. Wang, and W. Zhang, “Fabrication of curved microlens array using a drop-on-demand droplet generator and polydimethylsiloxane replica mold,” Opt. Eng., vol. 53, no. 11, pp. 117109–117109, 2014. [10] H. Sun, X. Wang, Y. Xiong, G. Liu, and K. Wang, “Fabrication of microlens based on overplating in electroforming,” J. Micromechanics Microengineering, vol. 26, no. 5, p. 55007, 2016. [11] X. Li, H. Tian, Y. Ding, J. Shao, and Y. Wei, “Electrically templated dewetting of a UV-curable prepolymer film for the fabrication of a concave microlens array with well-defined curvature,” ACS Appl. Mater. Interfaces, vol. 5, no. 20, pp. 9975–9982, 2013. [12] M. Bender, M. Otto, B. Hadam, B. Vratzov, B. Spangenberg, and H. Kurz, “Fabrication of nanostructures using a UV-based imprint technique,” Microelectron. Eng., vol. 53, no. 1, pp. 233–236, 2000. [13] P. Xie, L. Chang, L. Song, T. Cai, Y. Ding, and W. Yang, “The research of UV curing injection molding,” in PROCEEDINGS OF PPS-30: The 30th International Conference of the Polymer Processing Society–Conference Papers, 2015, vol. 1664, p. 110005. [14] M. Colburn, S. Johnson, M. Stewart, S. Damle, T. Bailey, B. Choi, H. Nounu, M. Wedlake, T. Michaelson, S. V. Sreenivasan, J. Ekerdt, and C. G. Willson, “Step and flash imprint lithography: a new approach to high-resolution patterning,” in Microlithography’99, 1999, pp. 379–389. [15] P. Dannberg, R. Bierbaum, L. Erdmann, and A. H. Braeuer, “Wafer scale integration of micro-optic and optoelectronic elements by polymer UV reaction molding,” in Optoelectronics’ 99-Integrated Optoelectronic Devices, 1999, pp. 244–251. [16] S. Kim and S. Kang, “Replication qualities and optical properties of UV-moulded microlens arrays,” J. Phys. Appl. Phys., vol. 36, no. 20, p. 2451, 2003. [17] H. Lee, S. Hong, K. Yang, and K. Choi, “Fabrication of 100nm metal lines on flexible plastic substrate using ultraviolet curing nanoimprint lithography,” Appl. Phys. Lett., vol. 88, no. 14, p. 143112, 2006. [18] S. Park, K. Choi, G. Kim, and J. Lee, “Nanoscale patterning with the double-layered soft cylindrical stamps by means of UV-nanoimprint lithography,” Microelectron. Eng., vol. 86, no. 4, pp. 604–607, 2009. [19] D. Xie, H. Zhang, X. Shu, and J. Xiao, “Fabrication of polymer micro-lens array with pneumatically diaphragm-driven drop-on-demand inkjet technology,” Opt. Express, vol. 20, no. 14, pp. 15186–15195, 2012. [20] Y.-J. Weng and J. Tsai, “Application of 9$ imes$ 9 grid gas bags pressure control technology to imprinting of various microstructures,” Opt.-Int. J. Light Electron Opt., vol. 127, no. 20, pp. 8638–8645, 2016. [21] H. Hiroshima, S. Inoue, N. Kasahara, J. Taniguchi, I. Miyamoto, and M. Komuro, “Uniformity in patterns imprinted using photo-curable liquid polymer,” Jpn. J. Appl. Phys., vol. 41, no. 6S, p. 4173, 2002. [22] A. Fuchs, M. Bender, U. Plachetka, U. Hermanns, and H. Kurz, “Ultraviolet-based nanoimprint at reduced environmental pressure,” J. Vac. Sci. Technol. B, vol. 23, no. 6, pp. 2925–2928, 2005. [23] P. Ruchhoeft et al., “Patterning curved surfaces: Template generation by ion beam proximity lithography and relief transfer by step and flash imprint lithography,” J. Vac. Sci. Technol. B, vol. 17, no. 6, pp. 2965–2969, 1999. [24] D. J. Resnick, S. V. Sreenivasan, and C. G. Willson, “Step & flash imprint lithography,” Mater. Today, vol. 8, no. 2, pp. 34–42, 2005. [25] X. Liang, H. Tan, Z. Fu, and S. Y. Chou, “Air bubble formation and dissolution in dispensing nanoimprint lithography,” Nanotechnology, vol. 18, no. 2, p. 25303, 2006. [26] H. Hiroshima, M. Komuro, N. Kasahara, Y. Kurashima, and J. Taniguchi, “Elimination of pattern defects of nanoimprint under atmospheric conditions,” Jpn. J. Appl. Phys., vol. 42, no. 6S, p. 3849, 2003. [27] H. Hiroshima and M. Komuro, “Control of bubble defects in UV nanoimprint,” Jpn. J. Appl. Phys., vol. 46, no. 9S, p. 6391, 2007. [28] H. Hiroshima and M. Komuro, “UV-nanoimprint with the assistance of gas condensation at atmospheric environmental pressure,” J. Vac. Sci. Technol. B, vol. 25, no. 6, pp. 2333–2336, 2007. [29] G. Y. Jung, S. Ganapathiappan, A. A. Ohlberg, L. O. Deirdre, Y. Chen, W. M. Tong and R. W. Stanley, “Fabrication of a 34 × 34 Crossbar Structure at 50 nm Half-pitch by UV-based Nanoimprint Lithography” Nano Letters, Vol 4(7), pp1225–1229, (2004) [30] A. Oerke, S. Büttgenbach, and A. Dietzel, “Micro molding for double-sided micro structuring of SU-8 resist,” Microsyst. Technol., vol. 20, no. 4–5, pp. 593–598, 2014. [31] K. Kalantar, S. Matsumoto, and T. Onishi, “Functional light-guide plate characterized by optical micro-deflector and micro-reflector for LCD backlight,” IEICE Trans. Electron., vol. 84, no. 11, pp. 1637–1646, 2001. [32] K. Kalantar, S. Matsumoto, T. Katoh, and T. Mizuno, “Backlight unit with double surface light emission using a single micro-structured light-guide plate,” IEICE Trans. Electron., vol. 87, no. 11, pp. 1954–1961, 2004. [33] 楊申語，“產學合作計畫：創新型微光學增光分色片應用於CMOS影像感測器之研究(2/2) ，” 臺北市：國立臺灣大學機械工程學系暨研究所，國科會報告， 2004。 [34] 蘇莉琪，“具雙面微結構設計之導光板 光學性質之研究，” 中原大學機械工程研究所學位論文， pp. 1–109, 2006。 [35] Y. K. Chen, “Study on Injection Molding of Thin Plate with Double-Side Micro Grooves,” Master Mech. Eng. NTUST Taipei, 2006. [36] C.-H. Chien and Z.-P. Chen, “Design and fabrication of the concentric circle light guiding plate for LED-backlight module by MEMS technique,” Microsyst. Technol., vol. 13, no. 11–12, pp. 1529–1535, 2007. [37] S.-J. Liu and Y.-C. Huang, “Manufacture of dual-side surface-relief diffusers with various cross angles using ultrasonic embossing technique,” Opt. Express, vol. 17, no. 20, pp. 18083–18092, 2009. [38] 陳柏霖，“滾輪壓印微奈米複合結構於光學玻璃製程開發研究，” 臺灣大學機械工程學研究所學位論文，pp. 1–133, 2013。 [39] C. F. Liu, C. T. Pan, Y. C. Chen, Z. H. Liu, and C. J. Wu, “Design and fabrication of double-sided optical film for OLED lighting,” Opt. Commun., vol. 291, pp. 349–358, 2013. [40] R. Sun, Y. Li, and L. Li, “Rapid method for fabricating polymeric biconvex parabolic lenslets,” Opt. Lett., vol. 39, no. 18, pp. 5391–5394, 2014. [41] W. Zhang and S. Y. Chou, “Multilevel nanoimprint lithography with submicron alignment over 4 in. Si wafers,” Appl. Phys. Lett., vol. 79, no. 6, pp. 845–847, 2001. [42] M. Rossi and I. Kallioniemi, “Micro-optical modules fabricated by high-precision replication processes,” in OSA Topical Meeting Diffractive Optics and Micro-Optics, 2002, pp. 3–6. [43] T. Glinsner, G. Kreindl, and M. Kast, “Nanoimprint Lithography,” Opt. Photonik, vol. 5, no. 2, pp. 42–45, 2010. [44] G. Kreindl, T. Glinsner, R. Miller, D. Treiblmayr, and R. Födisch, “High accuracy UV-nanoimprint lithography step-and-repeat master stamp fabrication for wafer level camera application,” J. Vac. Sci. Technol. B, vol. 28, no. 6, p. C6M57–C6M62, 2010. [45] C.-Y. Huang, W.-T. Hsiao, K.-C. Huang, K.-S. Chang, H.-Y. Chou, and C.-P. Chou, “Fabrication of a double-sided micro-lens array by a glass molding technique,” J. Micromechanics Microengineering, vol. 21, no. 8, p. 85020, 2011. [46] http://www.who.int/uv/resources/en/ [47] 國家實驗研究院儀器科技研究中心編著，'光學元件精密製造與量測，' 國家實驗研究院儀器科技研究中心出版， 2007。 [48] J. C. Tang, 'Research on Aspheric Lens Array by Injection Molding,' 2011. [49] http://www.jldoty.com/articles/laser_weapon_myth/laser_rant.html [50] http://www.iiviinfrared.com/be/tutorial | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/68986 | - |
| dc.description.abstract | 本研究開發紫外光固化膠注塑成型製程，並利用此製程製作3×3雙面微透鏡陣列。首先製作凹型微透鏡陣列鋁模具，微透鏡陣列與對位標記一併製作在鋁合金基材上。以鋁模具為母模，利用電鑄技術將鋁模具的結構翻製成另一鎳模具，其上為凸型微透鏡，藉由熱壓製程將鋁模具、鎳模具上微透鏡陣列複製到透明PC模仁，其上各有凹型及凸型微透鏡，再將透明PC模仁置於合模對位機台上。由於本研究微透鏡成品為雙面結構，為了對位需求，故建立即時光學對位系統觀測對位標記製作大面積雙面微透鏡陣列。進膠方式是利用氣動式點膠機將紫外光樹脂注入模穴內，充填完畢後，曝光即可得到成品，總製程時間為45秒。於四吋圓面積上製作雙面微透鏡陣列，成品無殘留氣泡；凸透鏡複製率達99.74%，凹透鏡複製率達99.00%。進一步量測成品的均勻性，直徑的標準差為1.3um，高度的標準差為1.5um，顯示出利用紫外光固化膠注塑成型製程製作雙面微透鏡陣列均勻性良好。
本研究進一步量測雙面微透鏡陣列之光學性質，分別量測雙面微透鏡陣列之有效焦距(EFL)、光斑直徑(Spot Size)與光學成像。平均有效焦長為1.686 mm，標準差為0.007 mm，表示利用紫外光注塑法來製作微透鏡陣列的成型性均勻。將原光源為1.2 mm直徑大小縮至僅剩50 um之光斑直徑大小，顯示此雙面微透鏡陣列擁有聚焦性質，而英文字母圖案A經由聚焦後其成像完整清晰。 | zh_TW |
| dc.description.abstract | In this study, we successfully developed the UV-curable injection molding process. By using this process the double-sided microlens array has been fabricated. The microlens array and the alignment marks were first machined on the aluminum block to ensure the machining accuracy and to enhance the alignment accuracy. Next, the aluminum mold with microlens array cavity was transferred to a nickel stamp by electroforming. Then, the patterns on the Ni stamp and the aluminum mold were then transferred to transparent PC molds by the hot embossing. Finally the PC molds were placed on the home-made machine with pneumatic clamp and alignment system. Real-time optical alignment system, composed of CCD and mobile platform, was implemented to observe the marks and to align them. After alignment, the UV-curable resin was injected into the clamped mold cavity by a pneumatic dispenser. After the resin being cured with UV light, double-sided microlens array was fabricated. The cycle time was 45 second. The degree of replication of convex and concave microlens array were 99.74 % and 99.00 % respectively. As far as uniformity was concerned, the standard deviation of diameter was 1.3 μm, while the standard deviation of height was 1.5 μm.
In addition, the optical properties of the double-sided microlens array were measured. The average effective focal length was 1.686 mm with a standard deviation of 0.007 mm, indicating the good formability and uniformity. The 1.2 mm diameter in the original light source is reduced to 50 um as the spot diameter. The image of “A’’ patterns are all complete and clear. This study demonstrated the potential of the UV-curable injection molding process with transparent PC molds for fabrication of microlens array and other double-sided microstructure. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-17T02:45:40Z (GMT). No. of bitstreams: 1 ntu-106-R04522712-1.pdf: 10178306 bytes, checksum: 79a5a17c1289298453f8da51a3e02342 (MD5) Previous issue date: 2017 | en |
| dc.description.tableofcontents | 致謝 I
中文摘要 II ABSTRACT III 目錄 V 圖目錄 VIII 表目錄 XII 第一章 導論 1 1.1 穿戴式裝置之介紹 1 1.2 微透鏡陣列介紹與製程技術 3 1.2.1 微透鏡陣列介紹 3 1.2.2 微透鏡陣列製程技術 4 1.3 紫外光固化成型技術 9 1.4 研究動機與目標 11 1.5 論文架構 12 第二章 文獻回顧節 13 2.1 紫外光固化成型技術 13 2.2 氣泡成型缺陷問題與改善 19 2.3 雙面微結構製造技術 27 2.4 雙面微結構對位技術 34 2.5 文獻整體回顧 37 第三章 實驗設置 38 3.1 實驗流程規劃 38 3.2 紫外光固化注塑成型實驗設備 39 3.2.1 模具加工機 39 3.2.2 模仁製作 40 3.2.3 進膠方式 41 3.2.4 真空脫泡設備 42 3.2.5 紫外光固化設備 42 3.2.6 紫外光能量計 44 3.2.7 紫外光固化樹脂 44 3.3 機台設計組裝 45 3.4 量測設備 49 3.4.1 微型光譜儀 49 3.4.2 光學顯微鏡 50 3.4.3 雷射共軛焦顯微鏡 50 3.4.4 偏芯量測系統 52 3.4.5 厚薄規 52 第四章 雙面微透鏡陣列製作 54 4.1 金屬微透鏡陣列模具 54 4.1.1 鋁模具製作 54 4.1.2 鎳模具製作 57 4.2 透明PC模仁製作 59 4.2.1 熱壓製程 59 4.2.2 熱壓參數探討 62 4.2.3 透明PC微透鏡陣列模仁製作 63 4.3 膠體曝光時間與光學性質之探討 67 4.4 雙面微透鏡陣列成型探討 70 4.4.1 雙面微透鏡陣列結構成型實驗設置及流程 70 4.4.2 充填壓力探討 74 4.4.3 微透鏡陣列成型結果 76 4.4.4 對位方法與結果 83 4.5 本章結論 85 第五章 雙面微透鏡陣列光學量測 86 5.1 有效焦距 86 5.2 光斑直徑 87 5.3 透鏡成像 90 第六章 結論與未來研究方向 92 6.1 結論 92 6.2 未來研究方向 93 參考文獻 94 | |
| dc.language.iso | zh-TW | |
| dc.subject | 雙面微結構 | zh_TW |
| dc.subject | 微透鏡陣列 | zh_TW |
| dc.subject | 紫外光固化 | zh_TW |
| dc.subject | 紫外光注塑製程 | zh_TW |
| dc.subject | 熱壓 | zh_TW |
| dc.subject | double-sided microstructure | en |
| dc.subject | UV curing | en |
| dc.subject | UV injection molding | en |
| dc.subject | hot embossing | en |
| dc.subject | microlens array | en |
| dc.title | 紫外光注塑成型應用於雙面微透鏡陣列製作 | zh_TW |
| dc.title | Fabrication of Double-sided Microlens Array Using UV Injection Molding | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 105-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 張致遠,粘世智,韓麗龍 | |
| dc.subject.keyword | 雙面微結構,微透鏡陣列,紫外光固化,紫外光注塑製程,熱壓, | zh_TW |
| dc.subject.keyword | double-sided microstructure,microlens array,UV curing,UV injection molding,hot embossing, | en |
| dc.relation.page | 99 | |
| dc.identifier.doi | 10.6342/NTU201703485 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2017-08-16 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
文件中的檔案：
| 檔案 | 大小 | 格式 | |
|---|---|---|---|
| ntu-106-1.pdf 未授權公開取用 | 9.94 MB | Adobe PDF |
系統中的文件，除了特別指名其著作權條款之外，均受到著作權保護，並且保留所有的權利。