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標題: | 生長於不同極性基板上摻鎵氧化鋅奈米針極性的電子顯微研究 Transmission Electron Microscopy Studies on the Polarities of Ga-doped ZnO Nanoneedles Grown on Substrates of Different Polarities |
作者: | Huang-Hui Lin 林皇諱 |
指導教授: | 楊志忠 |
關鍵字: | 電子顯微鏡,摻鎵氧化鋅,極性,原子排列, TEM,GaZnO,polarity,atomic arrengement, |
出版年 : | 2017 |
學位: | 碩士 |
摘要: | 利用球面相差修正的掃描式穿透電子顯微鏡中環形明場拍攝技術,我們研究生長於不同極性基板上氧化鎵鋅奈米針與薄膜之極性,我們分別使用鎵極性的氮化鎵、氮極性的氮化鎵、矽極性的碳化矽與碳極性的碳化矽作為基板。我們利用銀的奈米顆粒作為催化劑並通過氣液固生長法來成長氧化鎵鋅奈米針,當氧化鎵鋅奈米針的生長溫度達到攝氏450度時,大部分的銀奈米顆粒會整顆熔融成為生長所需之催化劑,在這種溫度下,氧化鎵鋅奈米針會直接生長在基板上。當氧化鎵鋅奈米針生長溫度為攝氏350度時,大部份銀奈米顆粒只有上半部熔融,在這種情況下氧化鎵鋅奈米針會生長在下半部未熔融的銀奈米顆粒上。氧化鎵鋅薄膜是使用氣固生長法來生長,我們發現經由氣固生長法的薄膜其極性與基板的極性類似,而經由氣液固生長法的奈米針無論在那種極性的基板上全部都是鋅極性。換言之,氧化鎵鋅薄膜在鎵極性的氮化鎵或矽極性的碳化矽(氮極性的氮化鎵或碳極性的碳化矽) 是鋅極性(氧極性)。然而,在所有上述的基板上,無論奈米針是否直接接觸到基板,氧化鎵鋅奈米針都是鋅極性。這樣的結果,其主要原因是氧原子在氣液固生長法的參與反應途徑與其他原子不同,氧原子會由固液交界面進入參與反應。 By using the annular bright field imaging technique in aberration corrected scanning tunneling electron microscopy observations, we study the polarities of GaZnO nanoneedles (NNs) and thin films grown on templates of different polarities, including Ga-face GaN, N-face GaN, Si-face SiC, and C-face SiC. The GaZnO NNs are formed through the vapor-liquid-solid (VLS) process by using Ag nanoparticles (NPs) as growth catalyst. When GaZnO NNs are grown at 450 oC, most Ag NPs can be completely melted for serving as growth catalyst. In this situation, GaZnO NNs are precipitated directly onto the used template. When GaZnO NNs are grown at 350 oC, only the upper portion of an Ag NP is melted for serving as growth catalyst. In this situation, a GaZnO NN is precipitated onto the un-melted lower portion of the Ag NP. The GaZnO thin films are deposited through the vapor-solid process. It is found that although the polarity of a GaZnO thin film follows that of the template, the GaZnO NNs grown under all the conditions are Zn-polar. In other words, the polarity of a GaZnO thin film on Ga-face GaN or Si-face SiC (N-face GaN or C-face SiC) is Zn-polar (O-polar). Nevertheless, on all the aforementioned templates, GaZnO NNs are Zn-polar, no matter whether they directly contact the templates. This result is attributed to the different incorporation channel of the non-metal constituent atoms. Oxygen atoms incorporate the interaction from the liquid-solid interface in the VLS growth process. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/67644 |
DOI: | 10.6342/NTU201702074 |
全文授權: | 有償授權 |
顯示於系所單位: | 光電工程學研究所 |
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