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  1. NTU Theses and Dissertations Repository
  2. 電機資訊學院
  3. 光電工程學研究所
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/65361
完整後設資料紀錄
DC 欄位值語言
dc.contributor.advisor黃升龍(Sheng-Lung Huang)
dc.contributor.authorAgnes Leeen
dc.contributor.author李妍儀zh_TW
dc.date.accessioned2021-06-16T23:38:36Z-
dc.date.available2012-08-09
dc.date.copyright2012-08-09
dc.date.issued2012
dc.date.submitted2012-07-25
dc.identifier.citationBibliography
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volume 4. Optical Society of America, 2009.
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and A. L. Gaeta. Tailored anomalous group-velocity dispersion in silicon channel
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systems. Analytical and Bioanalytical Chemistry, 390(1):89–111, 2008.
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Rogers. Processing dependent behavior of soft imprint lithography on the 1-10-nm
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of water and steam as function of wavelength, temperature and density. J. Phys.
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the navier-stokes equations and a multigrid method. Journal of Comput. Phys., 48:
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Horizontal single and multiple slot waveguides: optical transmission at wavelength = 1550
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[33] T.S. Ursell. The diffusion equation– a multi-dimensional tutorial. 2007.
dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/65361-
dc.description.abstract本論文提出了利用擴散原理於微流控光學矽晶片上量測血糖濃度差別的方法。本論文研究了兩種擴散情形:單純擴散情形以及系統周圍外加水流(流動率10 ul/min)的擴散情形。此兩種情形皆經過COMSOL模擬和實際實驗比較。本實驗利用一含有四組微環共振腔的光學矽晶片做為量測工具。根據這些微環共振腔的分佈情形,實驗設計了微流管道與此矽晶片結合,以至於管道內流動的溶液可以通過這些微環共振腔,達到量測液體折射率變化的目的。本實驗所設計的微流管道包含一流動管道及一擴散管道,流動管道內可以控制流動的溶液濃度,擴散管道一端開口連接流動管道,其餘三端封閉,此情形可以確保在擴散管道內粒子的移動以擴散為主。在擴散管道內的微環共振腔偵測折射率的變化,達到觀察擴散管道內擴散情形的變化。實驗結果發現,單純擴散情形所得到的擴散常數8.8*10^(-10) m^2/s與文獻上的值9.4*10^(-10) m^2/s非常接近;而外加水流的擴散情形則比理論模擬結果快很多,此現象可用頂蓋驅動方腔流解釋之。zh_TW
dc.description.abstractThis thesis presents a glucose sensing method on a miniature optofluidic silicon chip based on the idea of diffusion. Two cases of diffusion, one without external flow and one with an external flow rate of 10 ul/min are analyzed both theoretically by COMSOL simulation and experimentally. The experiment utilized an silicon on insulator (SOI) chip containing 4 sets of microring
resonators. The SOI chip was integrated with designed microfluidic channels, including a flow channel and a diffusion channel. A flow with glucose concentration was imported and exported through the flow channel. The
diffusion channel was designed with three impermeable boundaries and one open boundary connected to the flow channel. In this case the glucose particles could penetrate through the diffusion channel only through diffusion. The microring resonators lied within the diffusion channel and detected the diffusion effect of the system. In the case without flow, the diffusion coefficient extracted from the experimental result is 8.8*10^(-10) m^2/s, which is
close to the literature value 9.4*10^(-10) m^2/s. The diffusion speed obtained in the case with flow is higher than that in the theoretical simulation because of the driven convection in the lid-driven cavity.
en
dc.description.provenanceMade available in DSpace on 2021-06-16T23:38:36Z (GMT). No. of bitstreams: 1
ntu-101-R98941009-1.pdf: 3054420 bytes, checksum: c7e14bf6f5e67c5f40f58fe591da8640 (MD5)
Previous issue date: 2012
en
dc.description.tableofcontentsContents
口試委員審定書i
Acknowledgments ii
中文摘要v
Abstract vii
List of Acronyms ix
List of Symbols x
List of figures xvi
List of tables xix
1 Introduction 1
2 Theory of glucose sensing 8
2.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.2 Transmission spectrum . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.2.1 Transmission spectra of water and glucose . . . . . . . . . . . . . 9
2.3 Detection principles . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
2.3.1 Dual beam detection . . . . . . . . . . . . . . . . . . . . . . . . 13
2.3.2 Evanescent sensor . . . . . . . . . . . . . . . . . . . . . . . . . 14
2.3.3 Ring resonator . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.4 Diffusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
2.4.1 The diffusion equations . . . . . . . . . . . . . . . . . . . . . . . 17
2.4.2 Solution when the diffusion coefficient is constant by method of
Laplace transform . . . . . . . . . . . . . . . . . . . . . . . . . 21
2.4.3 Transfer function model . . . . . . . . . . . . . . . . . . . . . . 24
2.5 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
3 Literature review 27
3.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
3.2 Evanescent field sensing with SOI microring resonators . . . . . . . . . . 28
3.2.1 SOI microring resonators . . . . . . . . . . . . . . . . . . . . . . 29
3.2.2 Spectral characteristics . . . . . . . . . . . . . . . . . . . . . . . 31
3.2.3 Finesse and Q-factor . . . . . . . . . . . . . . . . . . . . . . . . 33
3.2.4 Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
3.3 Microfluidics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
3.3.1 Basic concepts . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
3.3.2 Fabrication of making PDMS microfluidic channels . . . . . . . . 37
3.3.3 Integration with SOI chips . . . . . . . . . . . . . . . . . . . . . 41
3.4 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
4 Simulation experiments with COMSOL Multiphysics 43
4.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
4.2 Simulation software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
4.2.1 COMSOL Multiphysics . . . . . . . . . . . . . . . . . . . . . . 44
4.3 Simulation design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
4.3.1 Physics models . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
4.3.2 Decisive parameters . . . . . . . . . . . . . . . . . . . . . . . . 47
4.3.3 Designed structures . . . . . . . . . . . . . . . . . . . . . . . . . 49
4.4 Simulation results . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
4.4.1 Constant input concentration . . . . . . . . . . . . . . . . . . . . 50
4.4.2 Varying input concentration . . . . . . . . . . . . . . . . . . . . 52
4.4.3 Diffusion with flow . . . . . . . . . . . . . . . . . . . . . . . . . 52
4.5 Discussion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
4.5.1 Diffusion speed . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
4.5.2 Transfer function model . . . . . . . . . . . . . . . . . . . . . . 55
4.6 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
5 Experimental design and set-up 59
5.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
5.2 PDMS microfluidic channels . . . . . . . . . . . . . . . . . . . . . . . . 60
5.2.1 Silicon on chip . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
5.2.2 Performance of SOI ring resonators . . . . . . . . . . . . . . . . 64
5.2.3 Contact mask . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
5.3 Experimental set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
5.3.1 Camera set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
5.3.2 Data processing . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
5.4 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
6 Experimental results 75
6.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
6.2 Spectrum detection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75
6.3 Bare chip measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
6.3.1 Microring resonators on SOI . . . . . . . . . . . . . . . . . . . . 77
6.3.2 Step response . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
6.4 Measurements with microfluidic channels . . . . . . . . . . . . . . . . . 80
6.4.1 Valve behavior . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
6.4.2 Diffusion without flow . . . . . . . . . . . . . . . . . . . . . . . 82
6.4.3 Diffusion with flow . . . . . . . . . . . . . . . . . . . . . . . . . 85
6.5 Discussion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
6.5.1 Glucose adsorption . . . . . . . . . . . . . . . . . . . . . . . . . 87
6.5.2 Diffusion coefficient . . . . . . . . . . . . . . . . . . . . . . . . 87
6.5.3 Branch flow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
6.5.4 Hypothesis for the faster diffusion speed . . . . . . . . . . . . . . 90
6.6 Conclusion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
7 Conclusions 95
7.1 Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
7.2 Future directions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 96
Appendix A 98
Bibliography 100
dc.language.isoen
dc.subject血糖偵測zh_TW
dc.subject擴散zh_TW
dc.subject微環共振腔zh_TW
dc.subject微流zh_TW
dc.subjectSOIzh_TW
dc.subjectMicrofluidicsen
dc.subjectGlucose sensingen
dc.subjectDiffusionen
dc.subjectMicroring resonatoren
dc.subjectSOIen
dc.title應用微流控光學矽晶片量測血糖濃度差別之研究zh_TW
dc.titleGlucose Sensing on an Optofluidic Silicon Chipen
dc.typeThesis
dc.date.schoolyear100-2
dc.description.degree碩士
dc.contributor.oralexamcommittee黃鼎偉,徐世祥
dc.subject.keyword血糖偵測, 擴散, 微環共振腔, 微流, SOI,zh_TW
dc.subject.keywordGlucose sensing, Diffusion, Microring resonator, Microfluidics, SOI,en
dc.relation.page104
dc.rights.note有償授權
dc.date.accepted2012-07-26
dc.contributor.author-college電機資訊學院zh_TW
dc.contributor.author-dept光電工程學研究所zh_TW
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