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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 范光照 | |
dc.contributor.author | Bo-Syun Liao | en |
dc.contributor.author | 廖柏勛 | zh_TW |
dc.date.accessioned | 2021-06-16T23:00:39Z | - |
dc.date.available | 2017-08-17 | |
dc.date.copyright | 2012-08-17 | |
dc.date.issued | 2012 | |
dc.date.submitted | 2012-08-07 | |
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Kurosawa, “Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems”, Applied Optics, Vol.43, No. 12, 2004. 【50】 S. Topcu, L. Chassagne, Y. Alayli, P. Juncar, “Improving the accuracy of homodyne Michelson interferometers using polarization state measurement techniques”, Optics Communications 247, pp.131-139, 2005. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/64829 | - |
dc.description.abstract | 為了將精密干涉儀微型化與簡易化成可在工程上實用的感測器,並加強安裝時的寬鬆性,不造成使用上的障礙,本研究使用鍾一正先生的多工式干涉模組(versatile interferometric module, VIM)做為感測器的核心元件,利用偏極化光學理論和四通道光感測器陣列來優化系統的性能。搭配上分光系統、偏極光學元件、四象限感測器以及穿透式光柵,實現具波長補償之麥克森位移量測方式,並且可以同時量測移動軸向的俯仰角和偏擺角。在訊號處理方面,提出了硬體電路和軟體演算法,進行前級訊號修正、後級訊號即時處理、訊號計數、細分割等動作,為一通用式的訊號解析模組。
完成之整套感測器系統包含了麥克森干涉儀、自動視準儀、波長補償模組。其位移精度經NMM實驗驗證後優於32 nm,量測範圍最高可以達到單方向50 mm;自動視準儀在定距離±30 arc sec量測時精度為±0.3 arc sec,當量測鏡進行長距離之線性運動時,量測精度也都優於±0.7 arc sec;波長模組部分在±2°C時可有效補償到波長誤差〔(△λ)/λ〕=10E-6 | zh_TW |
dc.description.abstract | In order to minimize and simplify the interferometer as a practically useful sensor in industrial use, we use a versatile interferometric module as the core of our sensor. By applying the polarizing theory and four-detector-array, the performance of the sensor can be optimized. Combined with polarizing beam splitter, quadrant detector and transmission grating, the system havs wavelength compensation and it can measure the pitch error and yaw error. This research also presents a general scheme of signal processing by mixing a hardware circuit and a software algorithm, proceeding pre-correction, real-time compensation, wave count and interpolation of the metrology signal.
This multi-degrees-of-freedom laser encoder included Michelson interferometer, autocollimator and wavelength compensator. Calibrated with NMM, the accuracy and the measurable range of the three displacement sensor are better than 32 nanometers. The measureable range can be reach to 50 millimeters in one direction. The angular accuracy of the autocollimator is ±0.3 arcsec in static measurement and ±0.7 arcsec in large linear motion measurement. In ±2°C , with the implantation of wavelength compensator, the error of the wavelength is reach to〔(△λ)/λ〕=10E-6 . | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T23:00:39Z (GMT). No. of bitstreams: 1 ntu-101-R99522712-1.pdf: 5117088 bytes, checksum: 30c657c18c56ccfeed46bb47c006a0cb (MD5) Previous issue date: 2012 | en |
dc.description.tableofcontents | 誌謝 i
摘要 ii ABSTRACT iii 目錄 iv 圖目錄 vi 表目錄 ix 第一章 緒論 1 1-1. 研究動機與目的 1 1-2. 參考文獻回顧 3 1-2-1. 干涉儀系統 3 1-2-2. 多自由度量測系統 10 1-2-3. 波長飄移研究 14 1-3. 研究方法與內容概要 17 第二章 多自由度量測系統之原理 18 2-1. 干涉儀量測原理 18 2-2. 自動視準儀原理 20 2-3. 波長補償原理 21 第三章 光路設計原理 22 3-1. 多自由度量測系統設計概念 22 3-1-1. 核心概念 22 3-1-2. 干涉之對比度 23 3-1-3. 幾何公差概念 25 3-2. 系統元件 26 3-3. 多自由度量測系統之研製 28 3-3-1. 麥克森干涉儀光路 29 3-3-2. 自動視準儀光路 31 3-3-3. 波長補償模組光路 33 3-4. 瓊斯運算 35 3-5. 訊號處理 39 3-6. 小結 45 第四章 多自由度量測系統之校正 46 4-1. 麥克森干涉儀校正 46 4-1-1. 麥克森干涉儀 46 4-1-2. 公差分析 47 4-1-3. 量程與精度實驗 50 4-2. 自動視準儀校正 55 4-2-1. 精度驗證 55 4-2-2. 雙角度比對實驗 58 4-3. 波長補償模組校正 60 4-3-1. 量測波長誤差來源 60 4-3-2. 量測波長架設 62 4-3-3. 波長模組校正實驗 64 4-3-4. 波長模組補償實驗 66 4-4. 小結 70 第五章 誤差分析 72 5-1. 誤差來源 72 5-2. 架設誤差 73 5-3. 儀器誤差 73 5-4. 環境誤差 78 第六章 結論 80 6-1. 研究成果 80 6-2. 未來展望 82 參考文獻 83 | |
dc.language.iso | zh-TW | |
dc.title | 具即時波長補償與雙角度量測麥克森干涉儀之研製 | zh_TW |
dc.title | Development of Michelson Interferometer with Wavelength Compensator and Dual Angle Measurements | en |
dc.type | Thesis | |
dc.date.schoolyear | 100-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 李朱育,覺文郁 | |
dc.subject.keyword | 麥克森干涉儀,自動視準儀,波長補償,超精密量測,多自由度感測器, | zh_TW |
dc.subject.keyword | Michelson interferometer,Autocollimator,Wavelength compensation,Ultra-precision metrology,Multi-degrees-of-freedom sensor, | en |
dc.relation.page | 86 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2012-08-07 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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