請用此 Handle URI 來引用此文件:
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/64708
完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 吳文中(Wen-Jong Wu) | |
dc.contributor.author | Ya-Shan Shih | en |
dc.contributor.author | 施雅蘐 | zh_TW |
dc.date.accessioned | 2021-06-16T22:57:46Z | - |
dc.date.available | 2012-08-10 | |
dc.date.copyright | 2012-08-10 | |
dc.date.issued | 2012 | |
dc.date.submitted | 2012-08-09 | |
dc.identifier.citation | 1. S. Roundy, E.S.L., J. Baker, E. Carleton, E. Eeilly, E. Lai, B. Otis, J. M. Rabaey, P. K. Wright, and V. Sundararajan, Improving Power Output For Vibration-Based Wireless Sensor Networks. Wireless Sensorrnetworks, 2005. 2920: p. 1-17.
2. S. Roundy, P.K.Wright, A piezoelectric vibration based generator for wireless electronics. Smart Materials and Structures, 2004: p. 1131. 3. N. N. H. Ching, H.Y.W., W. J. Li, P. H. W. Leong, and Z. Y. Wen, A Laser-Machined Multi-Modal Resonating Power Transducer for Wireless Sensing Systems. Sensors and Actuators A: Physical, 2002. 97-8: p. 685-690. 4. S Roundy, O.B., YH Chee, J. M. Rabaey and P. K. Wright A 1.9 GHz RF Transceiver Beacon Using Environmentally Scavenged Energy. in ISPLED. 2003. 5. R. Amirtharajah, Design of Low Power VLSI Systems Powered by Ambient Mechanical Vibration, in EECS. 1999, MIT: Cambridge. 6. M. Marzencki, S.B., B. Belgacem, P. Muralt, and M. Colin. Comparison of Piezoelectric MEMS Mechanical Vibration Energy Scavengers. in Nanotech. 2007. California. 7. M. El-hami, R.G.-J., N. M. White, M. Hill, S. Beeby, E. James, A. D. Brown, and J. N. Ross, Design and Fabrication of a New Vibration-Based Electromechanical Power Generator. Sensors and Actuators A: Physical, 2001. 92: p. 335-342. 8. Wardle, N.E.duToit, and B.L., Performance of Microfabricated Piezoelectric Vibration Energy Harvesters. Integrated Ferroelectrics, 2006. 83: p. 13-32. 9. S. Roundy, P.K Wright and J.M. Rabaey, Energy Scavenging for Wireless Sensor Networks With Special Focus on Vibrations. 2004, Kluwer Academic Publishers: New York. 10. Y. Ammar, et al, Wireless sensor network node with asynchronous architecture and vibration harvesting micro power generator, in 2005 joint conference on Smart objects and ambient intelligence: innovative context-aware services: usages and technologies. 2005, Sensors and Actuators: Grenoble, France. p. 287-292. 11. S. Meninger, J.O.M.-M., R. Amirtharajah, A. Chandrakasan, and J. H. Lang, Vibration-to-Electric Energy Conversion. Very Large Scale Integration (VLSI) Systems, IEEE Transactions, 2001. 9: p. 64-76. 12. M. Miyazaki, Electric-Energy Generation Through Variable-Capacitive Resonator for Power-Free LSI. IEICE-Transactions on Communications, 2004. 87. 13. Y. C. Shu, I.C.L., and W. J. Wu, An Improved Analysis of the SSHI interface in Piezoelectric Energy Harvesting. Smart Materials and Structures, 2007. 16: p. 2253-2264. 14. H. A Sodano, D.J. Inman and Park G., A Review of Power Harvesting From Vibration Using Piezoelectric Materials. The Shock and Vibration Digest, 2004. 36(3): p. 197-205. 15. Y. Chiu, and V.F.G. Tseng., A Capapctive Vibration-to-Electricity Energy Converter With Integrated Mechanical Switches. Journal of Micromechanics and Microengineering, 2008. 18. 16. H. A. Sodano, A Review of Power Harvesting From Vibration Using Piezoelectric Materials. The Shock and Vibration Digest, 2004. 36. 17. S. Roundy, P.K.W., and J. Rabaey, A study of low level vibrations as a power source for wireless sensor nodes,. 2003. 18. Dubois, M.-A.and P. Muralt., Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films. Sensors and Actuators A: Physical, 1999. 77: p. 106-112. 19. Yi Qi, McAlpine, and C. Michael., Nanotechnology-enabled flexible and biocompatible energy harvesting. Energy & Environmental Science, 2010. 20. Cook-Chennault, K.A.et. al, Powering MEMS Portable Devices—A Review of Non-Regenerative And Regenerative Power Supply Systems With Special Emphasis on Piezoelectric Energy Harvesting Systems. Smart Materials and Structures, 2008. 17(4). 21. E. Lefeuvre, A.Badel , C. Richard, L. Petit, and D. Guyomar A Comparison Between Several Vibration-Powered Piezoelectric Generagtors For Standalone Systems. Sensors and Actuators A: Physical, 2006. 126: p. 405-416. 22. Dubois .M.A. and P. Muralt, Measurement of The Effective Transverse Piezoelectric Coefficient E(31,F) of AlN And Pb(Zr-X,Ti1-X)O3 Thin Films. Sensors and Actuators A: Physical, 1999. 2(77): p. 106-112. 23. W. Choi et. al, Energy Harvesting MEMS Device Based on Thin Film Piezoelectric Cantilevers. Journal of Electroceramics, 2006. 2(17): p. 543-548. 24. R. Elfrink, Vibration Energy Harvesting With Aluminum Nitride-Based Piezoelectric Devices. Journal of Micromechanics and Microengineering, 2009. 9(19). 25. W.Y. Chang , T.H.F., C.I. Weng , S.S. Yang, Flexible piezoelectric harvesting based on epitaxial growth of ZnO. Applied Physics A Materials Science and Processing, 2010. 26. X. Chen, 1.6 V Nanogenerator for Mechanical Energy Harvesting Using PZT Nanofibers. Nano Letters, 2010. 6(10): p. 2133-2137. 27. J.J. Allen and A. J. Smits., Energy Harvesting Eel. Journal of Fluids and Structures, 2001. 3-4(15): p. 629-640. 28. Yi Qi, J.K., D. Thanh. Nguyen,Bozhena Lisko, Prashant K. Purohit, and Michael C. McAlpine, Enhanced Piezoelectricity and Stretchability in Energy Harvesting Devices Fabricated from Buckled PZT Ribbons. Nano Letters, 2011(11): p. 1331-1336. 29. Yi Qi, N.T. J., K. Lyons, Jr., C.M. Lee, H. Ahmad, and M. C. McAlpine*, Piezoelectric Ribbons Printed onto Rubber for Flexible Energy Conversion. Nano Letters, 2010(10): p. 524-528. 30. R Elfrink, M.R., T M Kamel, C de Nooijer, M Jambunathan, M Goedbloed, D Hohlfeld, S Matova, V Pop, L Caballero and R van Schaijk Vacuum-packaged piezoelectric vibration energy harvesters: damping contributions and autonomy for a wireless sensor system. Journal of Micromechanics and Microengineering, 2010. 31. P.X. Gao, J.H. Song, J. Liu, and Z.L. Wang, Nanowire Piezoelectric Nanogenerators on Plastic Substrates as Flexible Power Sources for Nanodevices. Advanced Materials, 2007(17): p. 67-72. 32. H. Alexandra Techet, J.J.Allen and .A.J.Smits. Piezoelectric Eels for Energy Harvesting in the Ocean. in TheTwelfth(2002)InternationalOffshoreandPolarEngineeringConference. 2002. Kitakyushu,Japan. 33. G.W. Taylor, J.R.Burns, S.M. Kammann, W.B. Powers, and T.R. Welsh, The Energy Harvesting Eel: A Small Subsurface Ocean/River Power Generator. IEEE Journal of Oceanic Engineering, 2001. 26. 34. C. R. Bowen, R.Stevens, L J Nelson, A.C. Dent, G. Dolman, B. Su, T.W. Button, M.G. Cain and M. Stewart, Manufacture and characterization of high activity piezoelectric fibres. Smart Materials and Structures, 2006. 35. B.S. Lee, S.C.Lin, W.J. Wu, X.Y. Wang, P.Z. Chang, and C.K. Lee, Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film. Journal of Micromechanics and Microengineering, 2009. 18. 36. B.S. Lee, S.C.Lin and .W.J. Wu, Comparison of the piezoelectric MEMS generators with interdigital electrodes and laminated electrodes, in SPIE. 2008. 37. V.R. Challa, M.G.Prasad, Y. Shi and F.T. Fisher, A vibration energy harvesting device with bidirectional resonance frequency tunability. Smart Materials and Structures, 2007. 38. H. B. Fang, J.Q.Liu, Z. Y. Xu, L. Dong, L. Wang, D. Chen, B. C. Cai, and Y. Liu, A MEMS-Based Piezoelectric Power Generator for Low Frequency Vibration Energy Harvesting. Chinese Physics Letters, 2006. 23: p. 732-734. 39. B.S. Lee, Piezoelectric MEMS Cantilever Power Generator for Vibration Energy Harvesting, in Department of Engineering Science and Ocean Engineering. 2010, National Taiwan University: Taipei. p. -33, 72. 40. D. Shen, J.H. Park., J. Ajitsaria, S. Y. Choe, H. C. Wikle, and D. J. Kim, The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting. Journal of Micromechanics and Microengineering, 2008. vol. 18. 41. H. B. Fang, J.Q.Liu., Z. Y. Xu, L. Dong, L. Wang, D. Chen, B. C. Cai, and Y. Liu, Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting. Microelectronics Journal, 2006. 37: p. 1280-1284. 42. Y.B. Jeon, R.Sood, J.H. Jeong, and S.G. Kim, MEMS power generator with transverse mode thin film PZT. Sensors and Actuators A: Physical, 2005. 122: p. 16-22. 43. X.Y. Wang, C.Y.Lee, Y. C. Liu, W. P. Shih, C. C. Lee, J. T. Huang, and P. Z. Chang, The Fabrication of Silicon-Based PZT Microstructures Using an Aerosol Deposition Method. Journal of Micromechanics and Microengineering, 2008. 18. 44. X. Y. Wang, C.Y.Lee, C. J. Peng, P. Y. Chen, and P. Z. Chang, A Micrometer Scale and Low Temperature PZT Thick Film MEMS Process Utilizing an Aerosol Deposition Method. Sensors and Actuators A: Physical, 2008. 143: p. 469-474. 45. N.E Dutoit, B.L. Wardle, and S.G. Kim, Design Considerations For MEMS-Scale Piezoelectric Mechanical Vibration Energy Harvesters. Integrated Ferroelectrics, 2005. 71(1): p. 121-160. 46. Huicong Liu, C.J.T., Chenggen Quan, Takeshi Kobayashi, and Chengkuo Lee, Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power. Journal of Microelectromechanical Systems, 2011. 5. 47. H.L. Liu, T.Xu, Z.Y.Huang and D.Y. Chen, Piezoelectric cantilever with oscillators: a low-frequency multi-mode vibration energy harvester, in ICAST2011. 2011. 48 L.M. Miller, N.C.E., P. Shafer, P.K. Wright, Strain Enhancement within Cantilevered, Piezoelectric MEMS Vibrational Energy Scavenging Devices. Advances in Science and Technology, 2008. 54: p. 405-410. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/64708 | - |
dc.description.abstract | 隨著生醫監控與無線感測技術的蓬勃,植入體內之生醫晶片、動物追蹤裝置與座落於高塔的無線感測節點,其所需之功率消耗便成為聚人關注的焦點,進而帶動能量擷取領域的發展。此外,隨著科技進步,CMOS製程造就電子產品不斷微型化,其耗電量也降至微瓦特(micro-watts)的等級。在體積小、所需能耗低的條件下,具有自供電之優勢的微機電系統(Micro electro-Mechanical Systems, MEMS)能量擷取裝置便從眾多解決方式中脫穎而出。
本論文呈現一系列不鏽鋼基板之微機電壓電式能量擷取結構,其能量擷取裝置能將周遭環境之震動能量,透過壓電式懸臂樑轉換為電能,使用的壓電材料為實驗室自製的氣膠沉積系統沉積的鋯鈦酸鉛(PZT)。論文中將介紹四種不同的壓電結構:d31、d33、雙指叉d33與雙震盪子指叉結構的模擬以及其製程與實驗結果,並於末文針對前三種不同卻相似的結構做實驗結果比較與討論。 實驗結果顯示,以不鏽鋼作為基板的微機電壓電能量擷取裝置相較以往的裝置更加穩定與耐震。不鏽鋼基板的可撓性不但降低其共振頻率,同時,也增加了懸臂樑的形變量,因而增加發電輸出量。結果中,d31裝置的能量輸出為10.533 μW,共振頻213.9 Hz;d33裝置也達到了0.214 μW,共振頻136.2 Hz;新設計的雙指叉d33裝置則將原本d33裝置的輸出提升了四倍,達到0.927 μW,共振頻127.9 Hz;而新結構的雙震盪子裝置則是成功地將30 μm基板之共振頻率壓低至27 Hz,50 μm基板降至66.4 Hz,此結構不僅共振頻率低,並具有倍頻之功能,若操作於共振頻的整除數頻率下,可得到多輸出峰值;並預估在10 Hz以下,由於其峰值頻率靠近,可造成寬頻效果,且其峰值大小更接近共振頻輸出效果。此四種結構輸出之電壓皆足以通過一般的整流電路,以方便後端的儲能應用。 | zh_TW |
dc.description.abstract | Of late years, the growing interest in the field of power harvesting technologies has been brought to researchers’ attentions. With the increasing interests in biomedical monitoring and sensor network applications, supplying power to the implanted biochips and wireless sensor devices have become an important issue[1]. Also, due to the miniaturization of electronics devices, the power consuming scale has been lowered to the micro-watts level. Summing up the above reasons, MEMS power harvesting device seems to be an optimistic solution, avoiding power source replacement, which may be impractical in some cases.
In this thesis, miniaturized power harvesting devices based on stainless steels in the form of cantilever beam is presented. Utilizing the lead zirconate titanate (PZT) as the piezoelectric transforming material, the fabricated devices own the ability to scavenge energy from ambient mechanical vibrations. To increase the voltage output, a home-made PZT deposition chamber which could deposit thin films having the thickness as thick as 10μm was used to deposit the PZT layer of the structures. Different harvesting modes of d31, d33, dual layer d33, and a dual oscillator structure are simulated and afterwards discussed. Subsequently, experimental results of the three similar structures are compared. Experimental results confirm that the stainless steel substrates have superior robustness, allowing the MEMS device to withstand harsher environments comparing to previous researches. The experimental results show that the d31 device is able to provide the output power of 10.533 μW under the resonance frequency of 213.9 Hz; the d33 device is able to give the output power of 0.214 μW, under 136.2 Hz; the dual d33 device can output four folds the output of single d33, which is 0.927 μW, under 127.9 Hz. The fabricated devices are able to generate power output in scales of micro-watts and the voltage outputs have overcome the threshold voltage of a rectifying bridge, enabling the storage of harvested energy. A newly designed structure of dual oscillator is also presented. With the structure of dual oscillator, the device has lowered the resonance frequency to 27 Hz and 66.4 Hz for different thicknesses of substrate, 30 and 50 μm. This structure also enables the up-conversion of the device. The up-conversion effect not only causes multi-peak frequencies, it also broadens the bandwidth of low vibrating frequencies. It is predicted that the device can be able to operate in circumstances under frequencies lower than 10 Hz. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T22:57:46Z (GMT). No. of bitstreams: 1 ntu-101-R99525043-1.pdf: 5174838 bytes, checksum: a5d0d375a1974230ddc540682c8a5578 (MD5) Previous issue date: 2012 | en |
dc.description.tableofcontents | 中文摘要 i
ABSTRACT ii LIST OF FIGURES vii LIST OF TABLES xi Chapter 1 Introduction 1 1.1 Motivation 1 1.2 Thesis Outline 3 Chapter 2 Literature Review 6 2.1 Introduction to Piezoelectric Materials 6 2.2 Piezoelectric Equations 8 2.3 Piezoelectric Power Harvesting Devices 12 2.3.1 Devices Utilizing Aluminum Nitride 13 2.3.2 Devices Utilizing Zinc Oxide 14 2.3.3 Devices Utilizing PVDF 15 2.3.4 Devices Utilizing Composite Materials 16 Chapter 3 Piezoelectric Cantilever Beam Harvesters and Critical MEMS Fabrication Processes 19 3.1 Literature Review of Cantilever Beam Harvesters 19 3.2 The d31 and d33 Modes 22 3.3 Critical Fabrication Processes of MEMS Piezoelectric Cantilever Beams 27 3.3.1 Photolithography Processes 27 3.3.2 Aerosol Deposition of PZT Thin Film 30 3.3.3 The Annealing Process 32 3.3.4 The Poling Process 33 Chapter 4 MEMS Power Harvesters Based on Stainless Steel Substrates 35 4.1 MEMS Power Harvesters Based on Stainless Steel under Mode D31 36 4.1.1 Design Concepts 36 4.1.2 Fabrication Processes 38 4.1.3 Experimental Setup 42 4.2 MEMS Power Harvesters Based on Stainless Steel under Mode D33 43 4.2.1 Design Concepts 43 4.2.2 Fabrication Processes 45 4.3 Dual Electrode MEMS Power Harvesters Based on Stainless Steel under Mode D33 47 4.3.1 Design Concepts 47 4.3.2 Fabrication Process 49 4.4 MEMS Power Harvesters with Ultra Low Resonance Frequencies and Up Conversion Ability 51 4.4.1 Design Concepts 51 4.4.2 Fabrication Processes 55 4.4.3 Experimental Setup 57 Chapter 5 Experimental Results 60 5.1.1 Experimental Results of Mode d33 60 5.1.2 Experiment Results of Mode d31 62 5.1.3 Experiment Results of Mode Dual d33 63 5.1.4 Experiment Results of the Dual Oscillator Structure 65 5.2 Result Comparisons 75 5.3 Discussion 78 Chapter 6 Conclusions and Future Work 80 6.1 Conclusions 80 6.2 Future Work 81 REFERENCE 82 | |
dc.language.iso | zh-TW | |
dc.title | 不鏽鋼基板微型能量擷取器之設計與研製 | zh_TW |
dc.title | Design and Fabrication of Piezoelectric MEMS Generator Based on Stainless Steel Substrates | en |
dc.type | Thesis | |
dc.date.schoolyear | 100-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 李世光(Chih-Kung Lee),林致廷(Chih-Ting Lin),謝志文 | |
dc.subject.keyword | PZT氣膠沉積,MEMS能量擷取,懸臂樑,壓電能量擷取,不鏽鋼基板,能量擷取,雙震盪器, | zh_TW |
dc.subject.keyword | aerosol PZT deposition,MEMS generator,cantilever beam,power harvesting,piezoelectric generator,stainless steel substrate, | en |
dc.relation.page | 85 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2012-08-09 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 工程科學及海洋工程學研究所 | zh_TW |
顯示於系所單位: | 工程科學及海洋工程學系 |
文件中的檔案:
檔案 | 大小 | 格式 | |
---|---|---|---|
ntu-101-1.pdf 目前未授權公開取用 | 5.05 MB | Adobe PDF |
系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。