類週期性遠離式光柵系統之表面電漿多重窄頻寬耦合

Abstract

近年來，光訊號傳遞元件的設計與開發成為關注的議題。我們利用時域有限差分法模擬並設計金奈米類週期性之遠離式光柵結構，並探討組成的表面電漿子在金屬介質交界面上產生的現象，以達到表面電漿多重窄頻寬耦合之效應，使其能擁有多重波長感測器的功效。經由模擬數據分析，我們發現類週期性遠離式光柵的排列以及貴金屬在可見光頻域的材料特性為影響共振耦合頻率的兩項重要因素。在實驗製程及量測方面，考慮半導體製程可行性之下，我們提出可以利用電子束微影製作金奈米表面電漿子之遠離式光柵結構，且規劃近場實驗架構量測其光訊號強度或穿透反射率等數值，做為進一步與理論模型分析。

Recently, the plasmonic devices and their integrated systems were proposed to transmit or to control the optical or electronic signals in the wafer-based platform. In this research, the quasi-periodic remote-grating structures are studied to obtain the functionality of coupling or waveguiding by using finite-difference time-domain method. To achieve the stronger multiple wavelength coupling effects, the quasi-periodic metal-insulator-metal surface plasmonic waveguide with the remote-grating system are considered. Several designs of two-dimensional plasmonic grating structures are proposed and they can give the light with multiple wavelengths coupling in the interfaces between metal and dielectric material remotely. From our simulation analysis, the grating arrangement of quasi-periodic structures and the optical properties of noble metal in the visible light frequencies are two important factors for multiple narrow-band coupling by surface plasmon resonances. Also, we propose the fabrication processes to fabricate the gold remote-grating nanostructures by using the electron beam lithography and semiconductor processes. By using the near-field experiment setup, the optical signals, transmissions, or reflections can be measured and compared with the theoretical models.