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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 翁宗賢 | |
dc.contributor.author | Huang-Sheng Liu | en |
dc.contributor.author | 劉黃升 | zh_TW |
dc.date.accessioned | 2021-06-16T17:28:41Z | - |
dc.date.available | 2017-08-20 | |
dc.date.copyright | 2012-08-20 | |
dc.date.issued | 2012 | |
dc.date.submitted | 2012-08-15 | |
dc.identifier.citation | [1] P.L. Chen, R.S. Muller, and A.P. Andrews, Integrated silicon PI-FET accelerometer with proof mass, Sensors and Actuators, 5 119-126, 1984.
[2] P.W. Barth, F. Pourahmadi, R. Mayer, J. Poydock, K. Petersen, A monolithic silicon accelerometer with integral air damping and overrange protection, IEEE TH0215-4 35, 1988. [3] F. Rudolf, A micromechanical capacitive accelerometer with a two-point inertial-mass suspension, Sensors and Actuators, 4 191-198, 1983. [4] Y.P. Wang1, R.Q. Hsu, C.W. Wu, Design and simulation of a MEMS high G inertial impact sensor, SAS 2008 – IEEE Sensors Applications Symposium, Atlanta, GA, February 12-14, 2008. [5] Daniel Jean, Integrated MEMS mechanical shock sensor, NDIA Fuse, April 26-28, 2004, Charlotte, NC, USA. [6] X.Y. Zhang, Z.Y. Guo, H.T. Ding, Z.C. Yang, and G.Z. Yan, An acceleration latching switch with flexible contacts and barbs latching mechanism, IEEE Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference. [7] Z.Y. Guo, Z.C. Yang, L.T. Lin, Q.C. Zhao, H.T. Ding, X.S. Liu, X.Z. Chi, J. Cui, G.Z. Yan, A latching acceleration switch with cylindrical contacts independent to the proof-mass, IEEE SENSORS 2009 Conference, pp. 1282-5. Also, Sensors and Actuators A: Physics. 2010. [8] 趙海鷗,LS-DYNA動力分析指南,兵器工業出版社,北京市,2003 [9] 白金澤,LS-DYNA 3D理論基礎與實例分析,科學出版社,北京,2005 [10] 李裕春,時黨勇,趙遠,ANSYS/LS-DYNA理論基礎與工程實踐,中國水利水電出版社,北京,2006 [11] 劉孟杰,離心加速度開關之設計與模擬,國立台灣大學,碩士論文,民國100年7月 [12] Military Standard, MIL-STD-883E Method 2002.4 Test Method Standard for Environment Engineering Considerations, US Dept. of Defense,1998 [13] 陳宗湧,防爆門受衝擊載荷之數值分析,國立台灣大學,碩士論文,民國97年10月 [14] 陳煥章,衝擊產生器的設計參數與其響應頻譜探討,國立台灣大學,碩士論文,民國98年7月 [15] 鄭翔聯,黃金薄膜點火器之設計與高G值衝擊測試模擬,國立台灣大學,碩士論文,民國99年7月 [16] 曹大發,多層複合板之高速衝擊模擬,國立台灣大學,碩士論文,民國99年7月 | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/64068 | - |
dc.description.abstract | 本論文以數值計算軟體ANSYS/LS-DYNA配合微機電系統(MEMS)製程,設計並研製微型離心式加速度開關(或稱G-開關)。當加速度開關承受達到定限值加速度與旋轉角速度時,其內部的觸發開關將由斷路變成通路,輸出致動的訊號,開啟外接電路,使裝置得以進行後續程序。
加速度開關受環境外加之加速度達到定限值時,使得內部之質量塊因慣性力而產生相對位移,推動觸發機構,導通電路,達成開關之目的。為檢視加速度開關作動歷程,本研究首先設計合適的加速度感測元件及鎖定機構,模擬離心加速度開關受衝擊時之動態響應。在離心向時,當轉速在1000rpm以下安全不作動;轉速達到2000rpm以上時,則進入鎖定的致動狀態。有別於一般的加速度開關,離心加速度開關同時受主軸向及離心向兩加速度場影響,因此額外設定主軸向受1000G衝擊,並探討其影響,最後觀察加速度開關之動態響應及應力分布情況。根據衝擊模擬之結果,決定加速度開關的幾何構型,電訊號則以導體接觸的方式輸出。 本研究接著以微機電系統製程研製所設計之加速度開關,基材使用內夾氧化層的SOI (silicon on insulator)矽晶圓,經半導體製程研製出所設計的加速度開關,並利用離心機台裝置給予定限值的加速度,實驗結果顯示加速度開關的卡榫成功鎖定,且在作動過程中,材料均在彈性範圍內,無破壞現象。以1V的電源串聯電阻對釋放機構加熱,在極短時間內成功解除鎖定狀態,達到加速度開關可重複使用之目的。 | zh_TW |
dc.description.abstract | This thesis presents design and fabrication of a micro centrifugal G-switch by ANSYS/LS-DYNA and micro-electrical-mechanical system processing techniques. As the acceleration switch, also called the G-switch, subjected to sufficient levels of axial and centrifugal accelerations, the switch will turn from off to on, delivering signals to the connect circuits which can initiate subsequent processes.
As the G-switch receives acceleration exceeding threshold from surroundings, the proof-mass in the G-switch experiences an inertial force which moves the contact components in touch to trigger output signals. To appropriately investigate the micro centrifugal G-switch, this thesis first designed suitable accelerators and latching mechanism, then simulated numerically the dynamic response of the G-switch subjected to applied impact conditions. As the projectile rotated with a centrifugal acceleration below 1,000 rpm, the installed G-switch was not turned on, staying in a safety mode. The device would be latched up as the spin rate above 2,000 rpm. An additionally axial acceleration impact of 1000G was also applied to the centrifugal G-switch to emulate the launching situation. Numerical results of dynamic response and stress distribution were revealed to evaluate the performances of accelerometers. A novel design of latching mechanism with releasing components was figured out. Based on the simulated numerical results, this thesis fabricated the micro centrifugal G-switch chips on a silicon-on-insulator (SOI) wafer via MEMS processing. Upon finishing the manufacturing processes, G-switch chips were tested by a centrifugal machine to investigate the performances of the fabricated devices. Test results show that the designed G-switch functioned properly as the acceleration reached the threshold, and all components of the G-switch were in the elastic region of the silicon without destruction. Heating the release mechanisms by applying 1 voltage DC source regulated with series resistors, this latched state was successfully discharged in a short time, fulfilling the purpose of reusing the G-switch. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T17:28:41Z (GMT). No. of bitstreams: 1 ntu-101-R99543075-1.pdf: 4363077 bytes, checksum: 65dd403972777a9431fa23fd672d5ad5 (MD5) Previous issue date: 2012 | en |
dc.description.tableofcontents | 摘要 i
ABSTRACT ii 目錄 iii 表目錄 vi 圖目錄 vii 符號說明 x 第一章 序論 1 1-1前言 1 1-2文獻回顧 2 1-3研究動機與目的 4 1-4本文內容 5 第二章 理論及相關規範 11 2-1加速度開關原理 11 2-2動態模擬分析 13 2-2-1有限元素法 13 2-2-2空間網格描述法 14 2-2-3沙漏控制 15 2-2-4接觸碰撞之數值計算 16 2-2-5時間積分法 17 第三章 設計及模擬 23 3-1使用軟體介紹 23 3-1-1 Pro/Engineer 23 3-1-2 ANSYS 23 3-1-3 LS-DYNA 24 3-2設計與模擬流程 24 3-2-1模型建立 25 3-2-2定義元素類型 25 3-2-3設定材料特性 26 3-2-4網格劃分 28 3-2-5設定邊界及負載條件 29 3-2-6定義接觸類型及沙漏控制 29 3-2-7計算求解 30 3-2-8後處理器 30 3-3模擬結果 31 3-3-1模擬條件及研究目標 31 3-3-2加速度開關各元件說明 32 3-3-3結構之動態響應及應力分布情形 32 3-3-4設計之改良 34 3-3-5加速度開關各元件之共振模態 36 第四章 製程及測試 67 4-1製程規劃 67 4-1-1基材(substrate) 67 4-1-2定義圖形光罩 67 4-1-3光阻塗佈及顯影 68 4-1-4蝕刻(etching) 68 4-1-5鍍膜及封裝 69 4-2測試及結果 69 4-2-1離心機台 69 4-2-2測試條件 70 4-2-3測試結果 70 第五章 結論及未來展望 79 5-1結論 79 5-2未來展望 80 參考文獻 82 | |
dc.language.iso | zh-TW | |
dc.title | 微型離心式加速度開關之設計與研製 | zh_TW |
dc.title | Design and Fabrication of Micro Centrifugal G-switch | en |
dc.type | Thesis | |
dc.date.schoolyear | 100-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 沈弘俊,邱銘漢 | |
dc.subject.keyword | 加速度開關,離心加速度,衝擊模擬,微機電製程,釋放機構, | zh_TW |
dc.subject.keyword | acceleration switch,centrifugal acceleration,impact simulation,MEMS process,release mechanism, | en |
dc.relation.page | 83 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2012-08-16 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 應用力學研究所 | zh_TW |
顯示於系所單位: | 應用力學研究所 |
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