Skip navigation

DSpace

機構典藏 DSpace 系統致力於保存各式數位資料(如:文字、圖片、PDF)並使其易於取用。

點此認識 DSpace
DSpace logo
English
中文
  • 瀏覽論文
    • 校院系所
    • 出版年
    • 作者
    • 標題
    • 關鍵字
  • 搜尋 TDR
  • 授權 Q&A
    • 我的頁面
    • 接受 E-mail 通知
    • 編輯個人資料
  1. NTU Theses and Dissertations Repository
  2. 工學院
  3. 工程科學及海洋工程學系
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/63782
完整後設資料紀錄
DC 欄位值語言
dc.contributor.advisor江茂雄
dc.contributor.authorChao-Hung Chengen
dc.contributor.author鄭兆宏zh_TW
dc.date.accessioned2021-06-16T17:19:01Z-
dc.date.available2015-08-20
dc.date.copyright2012-08-20
dc.date.issued2012
dc.date.submitted2012-08-17
dc.identifier.citationReferences
[1] L. L. Beranek and I. L. Ver, 'Noise and vibration control engineering:principles and applications,' New York: Wiley, 1992.
[2] McCloy and Martin, Control of Fluid Power, 2nd ed. Ellis Horwood Limited, 1980.
[3] J. W. Ban, D. W. Cho, and H. J. Pahk, 'A comprehensive investigation of active vibration isolation systems using an air spring,' presented at the Korea-U.S. Vibration Engineering Seminar, Taejon, Korea, 1993.
[4] K. G. Ahn, H. J. Pahk, M. Y. Jung, and D. W. Cho, 'A hybrid-type active vibration isolation system using neural networks,' Sound and Vibration, vol. 192(4), pp. 793-805, 1996.
[5] C. Erin, B. Wilson, and J. Zapfe, 'An improve model of a pneumatic vibration isolator: theory and experiment,' Sound and Vibration, vol. 218(1), pp. 81-101, 1998.
[6] G. Quaglia and M. Sorli, 'Air suspension dimensionless analysis and design procedure,' Vehicle System Dynamics, vol. 35, pp. 443-475, 2001.
[7] J. Xiao and B. T. Kulakowski, 'Sliding mode control of active suspension for transit buses based on a novel air-spring model,' IEEE, vol. 5, pp. 3768-3773 vol. 5, 2003.
[8] T. Kato, K. Kawashima, K. Sawamoto, and T. Kagawa, 'Active control of a pneumatic isolation table using model following control and a pressure differentiator,' Precision Engineering, vol. 31, pp. 269-275, 2007.
[9] C. Burrows and C. Webb, 'Simulation of an on-off Pneumatic Servomechanism,' Proceedings of the Institution of Mechanical Engineers, vol. 182, pp. 631-642, 1967.
[10] H. A. Baeck, 'Hydraulic on-off servo:simple, rugged positioner,' Control Engineering, pp. 79-82, 1967.
[11] T. Noritsugu, 'Development of PWM Mode Electro-Pneumatic Servomechanism Part II: Position Control of a Pneumatic Cylinder,' Fluid Control, vol. 66, pp. 65-80, 1987.
[12] N. Ye, S. Scavarda, M. Betemps, and A. Jutard, 'Models of a Pneumatic PWM Solenoid Valve for Enginerring Applications,' ASME, vol. 114, pp. 680-688, 1992.
[13] Y. Suematsu, H. Yamada, T. Tsukamoto, and T. Muto, 'Digital control of electrohydraulic servo system operated by differential pulse width modulation,' JSME international journal. Ser. C, Dynamics, control, robotics, design and manufacturing, vol. 36, pp. 61-68, 1993.
[14] M. C. Shih and C.-g. HWANG, 'Fuzzy PWM Control of the Positions of a Pneumatic Robot Cylinder Using High Speed Solenoid Valve,' JSME international journal. Ser. C, Dynamics, control, robotics, design and manufacturing, vol. 40, pp. 469-476, 1997.
[15] R. B. Van Varseveld and G. M. Bone, 'Accurate position control of a pneumatic actuator using on/off solenoid valves,' Mechatronics, IEEE/ASME Transactions on, vol. 2, pp. 195-204, 1997.
[16] Z. Situm, T. Zilic, and M. Essert, 'High speed solenoid valves in pneumatic servo applications,' 2007, pp. 1-6.
[17] J. F. Zhang, C. J. Yang, Y. Chen, Y. Zhang, and Y. M. Dong, 'Modeling and control of a curved pneumatic muscle actuator for wearable elbow exoskeleton,' Mechatronics, vol. 18, pp. 448-457, 2008.
[18] J. J. Slotine and S. S. Sastry, 'Tracking control of non-linear systems using sliding surfaces, with application to robot manipulators+,' International Journal of Control, vol. 38, pp. 465-492, 1983.
[19] J.J.Slotine, 'Sliding controller design for non-linear systems,' International Journal of Control, vol. 40, pp. 421-434, 1984.
[20] S. W. Kim and J. J. Lee, 'Design of a fuzzy controller with fuzzy sliding surface,' Fuzzy Sets and Systems, vol. 71, pp. 359-367, 1995.
[21] P. A. Ioannou and J. Sun, 'Robust adaptive control,' 1996.
[22] H. P. Whitaker, J. Yamron, and A. Kezer, 'Design of Model Reference Adaptive Control Systems for Aircraft,' Cambridge, Massachusetts1958.
[23] A. C. Huang and Y. S. Kuo, 'Sliding control of non-linear systems containing time-varying uncertainties with unknown bounds,' International Journal of Control, vol. 74, pp. 252-264, 2001.
[24] P. C. Chen and A. C. Huang, 'Adaptive sliding control of active suspension systems with uncertain hydraulic actuator dynamics,' Vehicle System Dynamics, vol. 44, pp. 357-368, 2006.
[25] B. S. Chen, C. H. Lee, and Y. C. Chang, 'H∞ tracking design of uncertain nonlinear SISO systems: adaptive fuzzy approach,' Fuzzy Systems, IEEE Transactions on, vol. 4, pp. 32-43, 1996.
[26] W. Y. Wang, M. L. Chan, C. C. J. Hsu, and T. T. Lee, 'H∞ tracking-based sliding mode control for uncertain nonlinear systems via an adaptive fuzzy-neural approach,' Systems, Man, and Cybernetics, Part B: Cybernetics, IEEE Transactions on, vol. 32, pp. 483-492, 2002.
[27] C. F. Hsu, T. T. Lee, and C. M. Lin, 'Robust adaptive fuzzy sliding-mode control with H infinity tracking performance for a class of nonlinear systems,' in Proceedings of the IEEE International Conference on Control Applications, 2004, pp. 604-609.
[28] Y. A. Zhang, Y. L. Mi, Z. M. Zhu, and F. L. Lu, 'Adaptive sliding mode control for two-link flexible manipulators with H∞ infinity tracking performance,' presented at the Machine Learning and Cybernetics, 2005.
[29] C. Kung and T. H. Chen, 'H∞ tracking-based adaptive fuzzy sliding mode controller design for nonlinear systems,' Control Theory & Applications, IET, vol. 1, pp. 82-89, 2007.
[30] P.-C. Chen, 'Analysis and control of Pneumatic Vibration Isolators,' Doctoral Disseration, National Cheng Kung University.
[31] L. W. Lee, 'Adaptive Sliding Mode Controller Design of Nonlinear System and Application to Fluid Power Servo System,' Doctoral Dissertation, National Taiwan University, 2009.
[32] B.-S. Shiu, 'Development of Position control for a Single-Axis Active Pneumatic Isolation System via High awdaSpeed on/off Valves,' Master Thesis, National Taiwan University, 2009.
[33] T.-W. Ma, 'Development of position control for the active pneumatic isolation table system via high speed on/off valve,' Master Thesis, National Taiwan University, 2010.
[34] K. R. Pai, 'Research on Design and Precision Positioning of a Servo Pneumatic Control System,' Doctoral Dissertation, National Cheng Kung University, 2006.
[35] B. S. Huang, 'An Active Pneumatic Vibration Isolator using Self-Tuning Fuzzy Control Method,' Master Thesis, National Cheng Kung University, 2010.
[36] C.-W. Hsu, 'Development of Active Cntrol for a Single-Axis Pneumatic Isolator via High Speed on/off Valves,' Master Thesis, National Taiwan University, 2011.
[37] F. C. Wang, M. F. Hong, and J. Y. Yen, 'Robust Control Design for Vibration Isolation of an Electron Beam Projection Lithography System,' Japanese Journal of Applied Physics, vol. 49, 2010.
dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/63782-
dc.description.abstract本文旨在發展四軸主動式氣壓減振系統控制之研究,以PWM控制訊號並配合並聯式雙快速電磁開關閥,實現主動式氣壓減振系統之控制。隔振桌腳座內的氣墊式氣壓隔振器,原為被動式的氣壓隔振元件,本文加裝雙快速開關閥,調控其充氣加壓過程中產生的膨脹與收縮的變化特性,作為主動減振控制下的單動式氣壓致動器。
本文藉由軟體實現脈波寬度調變,並產生PWM訊號來控制快速開關閥開啟與關閉時間,如此可不必透過額外的硬體電路實現脈波寬度調變,並且快速開關閥亦具有較比例伺服閥廉價之優勢,使得系統可以在較低成本的同時亦可達到控制精度的要求。本文首先建立氣壓減震系統之數學模式, 簡化系統為一非線性時變方程式,再結合具 追蹤性能之以函數近似法為基礎之適應性滑動控制( , Fourier series-based Adaptive Sliding Mode Control with tracking performance)進行控制器的設計,藉以克服氣壓系統之高度不確定性與時變問題。
本研究建立實驗系統進行即時控制實驗,實現四軸隔振桌的軌跡追蹤控制及主動式減振控制,最後為滿足氣壓隔振系統之實際需求,結合軌跡追蹤控制及主動式減振控制,發展為混合控制系統,進行不同外在干擾下之實驗,藉以檢驗此控制方法對於外在干擾之抑振效果。
zh_TW
dc.description.abstractThis study aims to develop the active control for the four-axial PWM (Pulse Width Modulation) pneumatic isolation system. A novel concept using parallel dual-on/off valves with PWM control signals is proposed to realize the active anti-vibration control and position control. In this thesis, on/off valves by PWM realized by software are used. Therefore, additional hardware circuit is not required to implement PWM.
In this study, we first derive the nonlinear mathematical model of the pneumatic isolation system. In the controller design, Fourier series-based adaptive sliding-mode controller with tracking performance is used for dealing with the uncertainty and time-varying problems of the pneumatic system.
The experiments of path-tracking control and the active anti-vibration control are implemented in the four-axial pneumatic isolation system under different loading conditions. Finally, in order to satisfy the demand of the practical application in pneumatic isolation system, the hybrid control that combines the path tracking control and active anti-vibration control is developed and verified through experiments under different conditions.
en
dc.description.provenanceMade available in DSpace on 2021-06-16T17:19:01Z (GMT). No. of bitstreams: 1
ntu-101-R99525075-1.pdf: 3323504 bytes, checksum: 9a8e0c2673f574fc2fa8186fb1a14d91 (MD5)
Previous issue date: 2012
en
dc.description.tableofcontentsContents
口試委員會審定書 I
致謝 II
Abstract IV
Contents V
List of Figures VIII
List of Tables XV
Chapter 1 Introduction 1
1.1 Preface 1
1.2 Literature Survey 2
1.2.1 Pneumatic isolation systems 2
1.2.2 PWM Pneumatic Control System 3
1.2.3 Control Theory 4
1.3 Motivation 7
1.4 Organization of the Thesis 8
Chapter 2 Layout of Test Rig of Pneumatic Isolation System 9
2.1 Layout of the Single-axial PWM Pneumatic Isolation System 9
2.2 Layout of the Four-axial PWM Pneumatic Isolation System 12
Chapter 3 Dynamic Model of the PWM Pneumatic Isolation System 17
3.1 Principle of Pulse Width Modulation (PWM) 17
3.2 Applications of PWM control in the Pneumatic Isolation System via on/off Valves 19
3.2.1 Dual parallel 3/2 on/off valves in the pneumatic isolation system 19
3.2.2 PWM control signal design 21
3.3 Dynamic Model of Pneumatic Isolation System 22
3.3.1 Dynamics of high speed on/off valve 22
3.3.2 The mass flow rate equation 24
3.3.3 Dynamic model of pneumatic isolator 26
3.3.4 Motion equation 30
Chapter 4 Controller Design and Stability Analysis 31
4.1 Functional Approximation with Fourier Series 31
4.2 Design of a Fourier Series-based Adaptive Sliding-mode Controller with Tracking Performance 33
4.3 Controller Parameters 39
Chapter 5 Experiments and Discussions 43
5.1 Experiment of Single-Axial PWM Pneumatic Isolation System 43
5.1.1 Comparison of passive control and active control for single-axial PWM pneumatic isolation system 43
5.2.1 Experiment results and comparisons of passive control and active controller under different disturbance frequency. 43
5.1 Experiment of Single-Axial PWM Pneumatic Isolation System 44
5.1.1 Comparison of passive control and active control for single-axial PWM pneumatic isolation system 44
5.2 Experiment of Four-axial PWM Pneumatic Isolation System under Different Disturbance Conditions 53
5.2.1 Experiment results and comparisons of passive control and active control under different disturbance frequency. 53
5.3 Experiment of Position Control for Four-axial PWM Pneumatic Isolation System under Disturbance 86
5.4 Experiment of Hybrid Control for Four-axial PWM Pneumatic Isolation System of Active Control and Path Control 92
Chapter 6 Conclusions 104
References 106
dc.language.isoen
dc.title以快速開關閥實現四軸主動式氣壓減振系統控制之研究zh_TW
dc.titleDevelopment of Active Control for a Four-Axial Pneumatic Isolation System via High Speed on/off Valvesen
dc.typeThesis
dc.date.schoolyear100-2
dc.description.degree碩士
dc.contributor.oralexamcommittee郭文化,黃金川,郭振華
dc.subject.keyword氣壓伺服系統,氣壓隔振器,並聯式雙開關閥,脈波寬度調變,主動式隔振控制,軌跡控制,適應性滑動控制,函數近似法,追蹤性能,zh_TW
dc.subject.keywordpneumatic servo system,pneumatic isolator,parallel dual-on/off valves,PWM,path control,active anti-vibration control,functional approximation,adaptive sliding mode control,tracking performance,en
dc.relation.page108
dc.rights.note有償授權
dc.date.accepted2012-08-17
dc.contributor.author-college工學院zh_TW
dc.contributor.author-dept工程科學及海洋工程學研究所zh_TW
顯示於系所單位:工程科學及海洋工程學系

文件中的檔案:
檔案 大小格式 
ntu-101-1.pdf
  目前未授權公開取用
3.25 MBAdobe PDF
顯示文件簡單紀錄


系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。

社群連結
聯絡資訊
10617臺北市大安區羅斯福路四段1號
No.1 Sec.4, Roosevelt Rd., Taipei, Taiwan, R.O.C. 106
Tel: (02)33662353
Email: ntuetds@ntu.edu.tw
意見箱
相關連結
館藏目錄
國內圖書館整合查詢 MetaCat
臺大學術典藏 NTU Scholars
臺大圖書館數位典藏館
本站聲明
© NTU Library All Rights Reserved