三次元量測儀之微奈米級接觸式掃描探頭之研製

Abstract

本研究發展出高精度接觸式三維量測探頭，以懸浮片機構結合探針為基礎，搭配光學式位移感測器，測量探針接觸到工件後探球的三維位置變化。經精密儀器校正後，在行程20微米範圍內，各項性能之標準差皆在20奈米內。 有別於現今市面上製造程序複雜的探頭，本研究所提出之探頭可用傳統機械加工的方式完成，搭配三套自製微型化雷射干涉儀，可滿足現今微奈米級三次元量測儀之規格。

In this research, a high precision tactile 3D probe is proposed. Based on suspension mechanism with a stylus, the probe is able to detect the 3D displacement on the ball tip using optical sensors. Calibrations with a nano measuring and positioning machine proved the excellent performances in the whole measuring range. Rather than complicated fabricating processes, this probe can be made by conventional machining processes. With three miniature interferometers, this probe could fill all requirements for the basic concepts of micro-/nano- CMM.