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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 吳政忠 | |
dc.contributor.author | Chia-Hao Hung | en |
dc.contributor.author | 洪家浩 | zh_TW |
dc.date.accessioned | 2021-06-16T17:17:10Z | - |
dc.date.available | 2017-08-22 | |
dc.date.copyright | 2012-08-22 | |
dc.date.issued | 2012 | |
dc.date.submitted | 2012-08-17 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/63718 | - |
dc.description.abstract | 聲子晶體是由數種彈性材料在空間中週期性排列而成,當聲波在此結構中傳遞時,由於波傳模態在某頻率範圍出現不連續的現象,使聲波無法於該頻段內傳遞,此現象稱之為聲波頻溝(acoustic band gap)。本研究即利用此頻溝現象,配合數值分析及微機電製程,探討以石英聲子晶體為反射體之共振器的共振現象。
文中以布拉格(Bloch)理論為基礎,結合有限元素法(finite element method, FEM)建立週期性邊界條件,來分析石英聲子晶體平板之頻散關係。此外,藉由計算延遲距離(delay distance)探討等效反射面在共振腔內之位置,進而最佳化共振器之共振效果。本文也同時探討共振腔內相鄰反對稱共振模態之頻率間隙,並利用超晶格技術(supercell technique)分析其頻率間隙與共振腔長度之關係。 在實驗方面,本研究成功研製出具正方晶格聲子晶體反射體之石英單埠板波共振器,其實驗結果與導納數值模擬相當吻合。量測結果顯示,此共振器在共振頻率17.00 MHz和18.52 MHz處,具有相當高的品質因數(quality factor)。 | zh_TW |
dc.description.abstract | This thesis reports numerical analysis and experimental results of a one-port quartz plate wave resonator using two-dimensional phononic crystal (PC) gratings. Based on the band gap effect, i.e. acoustic waves in a specific frequency are blocked by the PC, PC was utilized as the reflectors of a resonator. The dispersion relations of phononic crystals were calculated by using the finite element method (FEM). To optimize the resonance inside the cavity, the effective reflective plane was obtained through a series of numerical simulations. Attention has been focused on the frequency differences between the lowest anti-symmetric (A0) modes within a resonant cavity. The relation between the cavity length and the frequency difference was analyzed by the supercell technique.
On the experimental side, one-port quartz plate wave resonators with square-lattice PC reflective gratings were fabricated. The measured resonant frequencies of the cavity are in a good agreement with the admittance simulation. In addition, the measurement result showed that a high Q factor of 3541 and 3407 can be achieved at 17.00 MHz and 18.52 MHz resonant frequency respectively. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T17:17:10Z (GMT). No. of bitstreams: 1 ntu-101-R99543017-1.pdf: 6779085 bytes, checksum: f46b8f084335c784c32a6fffa16ce013 (MD5) Previous issue date: 2012 | en |
dc.description.tableofcontents | 致謝 I
摘要 II ABSTRACT III CONTENTS IV LIST OF NOTATIONS VI LIST OF FIGURES VIII LIST OF TABLES XI Chapter 1 Introduction 1 1.1 Research Motivation 1 1.2 Literature Review 2 1.3 Contents of the Chapters 3 Chapter 2 Band structure of Lamb waves in Two-dimensional Air/Quartz Phononic crystals 5 2.1 Theory of Wave Propagation in the Phononic Crystal 5 2.2 Band Structure of a 2-D Air/Quartz Phononic Plate 8 2.3 Design of Inter-digital Transducer on Quartz Plate 10 Chapter 3 Design of Phononic Lamb wave Resonators 18 3.1 Calculation of Effective Reflective Plane 18 3.2 Resonance mode of Lamb Wave inside the Resonant Cavity 20 Chapter 4 Fabrications and Experimental Results 30 4.1 Fabrication Processes 30 4.1.1 Fabrication of Mask 30 4.1.2 Deposition of the Seed Layer 32 4.1.3 Fabrication of PC Gratings 33 4.1.4 Fabrication of Inter-digital Transducers 35 4.2 Measurement of Experimental Results 36 4.2.1 Experimental Setup 37 4.2.2 Calibration for Improving Measurement Accuracy 37 4.2.3 Quality Factor 38 4.2.4 Frequency Response Simulation 38 4.2.5 Piezoelectric property of AT-cut quartz plate 39 4.2.6 Experimental Result and Discussion 40 Chapter 5 Conclusions 56 5.1 Conclusions 56 REFERENCES 57 | |
dc.language.iso | zh-TW | |
dc.title | 石英聲子晶體之單埠板波共振器 | zh_TW |
dc.title | One-port AT-cut Quartz Phononic Laam Wave Resonator | en |
dc.type | Thesis | |
dc.date.schoolyear | 100-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 陳永裕,孫嘉宏 | |
dc.subject.keyword | 板波共振器,聲子晶體,頻溝,有限元素法,共振模態,品質因數, | zh_TW |
dc.subject.keyword | Lamb wave resonator,Phononic crystal,Band gap,Finite element method,Resonant mode,Q factor, | en |
dc.relation.page | 63 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2012-08-18 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 應用力學研究所 | zh_TW |
顯示於系所單位: | 應用力學研究所 |
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