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???org.dspace.app.webui.jsptag.ItemTag.dcfield??? | Value | Language |
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dc.contributor.advisor | 吳文中(Wen-Jong Wu) | |
dc.contributor.author | Guan-Yu Ke | en |
dc.contributor.author | 柯冠宇 | zh_TW |
dc.date.accessioned | 2021-06-16T17:15:07Z | - |
dc.date.issued | 2021 | |
dc.date.submitted | 2021-02-04 | |
dc.identifier.citation | [1] S. Madakam, V. Lake, V. Lake, and V. Lake, 'Internet of Things (IoT): A literature review,' Journal of Computer and Communications, vol. 3, no. 05, p. 164, 2015. [2] R. Amirtharajah and A. P. Chandrakasan, 'Self-powered signal processing using vibration-based power generation,' IEEE journal of solid-state circuits, vol. 33, no. 5, pp. 687-695, 1998. [3] S. Roundy, P. K. Wright, and J. Rabaey, 'A study of low level vibrations as a power source for wireless sensor nodes,' Computer communications, vol. 26, no. 11, pp. 1131-1144, 2003. [4] Y. Chiu and V. F. Tseng, 'A capacitive vibration-to-electricity energy converter with integrated mechanical switches,' Journal of Micromechanics and Microengineering, vol. 18, no. 10, p. 104004, 2008. [5] S. Cheng, N. Wang, and D. P. Arnold, 'Modeling of magnetic vibrational energy harvesters using equivalent circuit representations,' Journal of Micromechanics and Microengineering, vol. 17, no. 11, p. 2328, 2007. [6] H. A. Sodano, D. J. Inman, and G. Park, 'A review of power harvesting from vibration using piezoelectric materials,' Shock and Vibration Digest, vol. 36, no. 3, pp. 197-206, 2004. [7] R. Amirtharajah, 'Design of a low power VLSI systems powered by ambient mechanical vibration,' Massachusetts Institute of Technology, 1999. [8] X. Wu, J. Lin, S. Kato, K. Zhang, T. Ren, and L. Liu, 'A frequency adjustable vibration energy harvester,' Proceedings of PowerMEMS, pp. 245-248, 2008. [9] S. Roundy et al., 'Improving power output for vibration-based energy scavengers,' IEEE Pervasive computing, vol. 4, no. 1, pp. 28-36, 2005. [10] R. Elfrink et al., 'Vacuum-packaged piezoelectric vibration energy harvesters: damping contributions and autonomy for a wireless sensor system,' Journal of Micromechanics and Microengineering, vol. 20, no. 10, p. 104001, 2010. [11] Z. Wang, R. Elfrink, M. Rovers, S. Matova, R. van Schaijk, and M. Renaud, 'Shock reliability of vacuum-packaged piezoelectric vibration harvester for automotive application,' Journal of microelectromechanical systems, vol. 23, no. 3, pp. 539-548, 2013. [12] C.-L. Kuo, 'Design and Fabrication of Piezoelectric Transducer − Ultrasonic Transducer with Anisotropic Beam Pattern, Integration of Shear Force Detection Sensors and Self-Powered Wireless Temperature Sensor,' Department of Engineering Science and Ocean Engineering College of Engineering, National Taiwan University, 2016. [13] M.-L. Pykälä et al., 'Susterel energy harvesting Roadmap for societal applications,' VTT Research Report VTT, 2012. [14] J. Curie and P. Curie, 'Development by pressure of polar electricity in hemihedral crystals with inclined faces,' Bull. soc. min. de France, vol. 3, p. 90, 1880. [15] R. Oppermann, 'Piezoelectricity: An Introduction to the Theory and Applications of Electromechanical Phenomena in Crystals: by Walter Guyton Cady. 806 pages, drawings, 15× 23 cms. 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Lake, 'Internet of Things (IoT): A literature review,' Journal of Computer and Communications, vol. 3, no. 05, p. 164, 2015. [2] R. Amirtharajah and A. P. Chandrakasan, 'Self-powered signal processing using vibration-based power generation,' IEEE journal of solid-state circuits, vol. 33, no. 5, pp. 687-695, 1998. [3] S. Roundy, P. K. Wright, and J. Rabaey, 'A study of low level vibrations as a power source for wireless sensor nodes,' Computer communications, vol. 26, no. 11, pp. 1131-1144, 2003. [4] Y. Chiu and V. F. Tseng, 'A capacitive vibration-to-electricity energy converter with integrated mechanical switches,' Journal of Micromechanics and Microengineering, vol. 18, no. 10, p. 104004, 2008. [5] S. Cheng, N. Wang, and D. P. Arnold, 'Modeling of magnetic vibrational energy harvesters using equivalent circuit representations,' Journal of Micromechanics and Microengineering, vol. 17, no. 11, p. 2328, 2007. [6] H. A. Sodano, D. J. Inman, and G. Park, 'A review of power harvesting from vibration using piezoelectric materials,' Shock and Vibration Digest, vol. 36, no. 3, pp. 197-206, 2004. [7] R. Amirtharajah, 'Design of a low power VLSI systems powered by ambient mechanical vibration,' Massachusetts Institute of Technology, 1999. [8] X. Wu, J. Lin, S. Kato, K. Zhang, T. Ren, and L. Liu, 'A frequency adjustable vibration energy harvester,' Proceedings of PowerMEMS, pp. 245-248, 2008. [9] S. Roundy et al., 'Improving power output for vibration-based energy scavengers,' IEEE Pervasive computing, vol. 4, no. 1, pp. 28-36, 2005. [10] R. Elfrink et al., 'Vacuum-packaged piezoelectric vibration energy harvesters: damping contributions and autonomy for a wireless sensor system,' Journal of Micromechanics and Microengineering, vol. 20, no. 10, p. 104001, 2010. [11] Z. Wang, R. Elfrink, M. Rovers, S. Matova, R. van Schaijk, and M. Renaud, 'Shock reliability of vacuum-packaged piezoelectric vibration harvester for automotive application,' Journal of microelectromechanical systems, vol. 23, no. 3, pp. 539-548, 2013. [12] C.-L. Kuo, 'Design and Fabrication of Piezoelectric Transducer − Ultrasonic Transducer with Anisotropic Beam Pattern, Integration of Shear Force Detection Sensors and Self-Powered Wireless Temperature Sensor,' Department of Engineering Science and Ocean Engineering College of Engineering, National Taiwan University, 2016. [13] M.-L. Pykälä et al., 'Susterel energy harvesting Roadmap for societal applications,' VTT Research Report VTT, 2012. [14] J. Curie and P. Curie, 'Development by pressure of polar electricity in hemihedral crystals with inclined faces,' Bull. soc. min. de France, vol. 3, p. 90, 1880. [15] R. Oppermann, 'Piezoelectricity: An Introduction to the Theory and Applications of Electromechanical Phenomena in Crystals: by Walter Guyton Cady. 806 pages, drawings, 15× 23 cms. New York, McGraw-Hill Book Company, Inc., 1946,' ed: Pergamon, 1947. [16] Y. Yamashita, Y. Hosono, K. Harada, and N. Ichinose, 'Effect of molecular mass of B-site ions on electromechanical coupling factors of lead-based perovskite piezoelectric materials,' Japanese Journal of Applied Physics, vol. 39, no. 9S, p. 5593, 2000. [17] B. Noheda and D. Cox, 'Bridging phases at the morphotropic boundaries of lead oxide solid solutions,' Phase Transitions, vol. 79, no. 1-2, pp. 5-20, 2006. [18] J. Jung, W. Lee, W. Kang, E. Shin, J. Ryu, and H. Choi, 'Review of piezoelectric micromachined ultrasonic transducers and their applications,' Journal of Micromechanics and Microengineering, vol. 27, no. 11, p. 113001, 2017. [19] C. J. Brinker and G. W. Scherer, Sol-gel science: the physics and chemistry of sol-gel processing. Academic press, 2013. [20] G. Yi, Z. Wu, and M. Sayer, 'Preparation of Pb (Zr, Ti) O3 thin films by sol gel processing: Electrical, optical, and electro‐optic properties,' Journal of Applied Physics, vol. 64, no. 5, pp. 2717-2724, 1988. [21] D. Barrow, T. Petroff, R. Tandon, and M. Sayer, 'Characterization of thick lead zirconate titanate films fabricated using a new sol gel based process,' Journal of Applied Physics, vol. 81, no. 2, pp. 876-881, 1997. [22] P. Muralt et al., 'Fabrication and characterization of PZT thin-film vibrators for micromotors,' Sensors and Actuators A: Physical, vol. 48, no. 2, pp. 157-165, 1995. [23] M. J. Jung, K. H. Nam, L. R. Shaginyan, and J. G. Han, 'Deposition of Ti thin film using the magnetron sputtering method,' Thin Solid Films, vol. 435, no. 1-2, pp. 145-149, 2003. [24] T. Morita, T. Kanda, Y. Yamagata, M. Kurosawa, and T. Higuchi, 'Single process to deposit lead zirconate titanate (PZT) thin film by a hydrothermal method,' Japanese journal of applied physics, vol. 36, no. 5S, p. 2998, 1997. [25] T. Morita, 'Piezoelectric materials synthesized by the hydrothermal method and their applications,' Materials, vol. 3, no. 12, pp. 5236-5245, 2010. [26] M. Dietze and M. Es-Souni, 'Structural and functional properties of screen-printed PZT–PVDF-TrFE composites,' Sensors and Actuators A: Physical, vol. 143, no. 2, pp. 329-334, 2008. [27] V. Walter, P. Delobelle, P. Le Moal, E. Joseph, and M. Collet, 'A piezo-mechanical characterization of PZT thick films screen-printed on alumina substrate,' Sensors and Actuators A: Physical, vol. 96, no. 2-3, pp. 157-166, 2002. [28] J. Akedo and M. Lebedev, 'Microstructure and electrical properties of lead zirconate titanate (Pb (Zr52/Ti48) O3) thick films deposited by aerosol deposition method,' Japanese Journal of Applied Physics, vol. 38, no. 9S, p. 5397, 1999. [29] S.-C. Lin and W.-J. Wu, 'Fabrication of PZT MEMS energy harvester based on silicon and stainless-steel substrates utilizing an aerosol deposition method,' Journal of Micromechanics and Microengineering, vol. 23, no. 12, p. 125028, 2013. [30] M. F. B. Ab Rahman and S. L. Kok, 'Investigation of useful ambient vibration sources for the application of energy harvesting,' in 2011 IEEE Student Conference on Research and Development, 2011: IEEE, pp. 391-396. [31] P. Muralt et al., 'Piezoelectric micromachined ultrasonic transducers based on PZT thin films,' IEEE transactions on ultrasonics, ferroelectrics, and frequency control, vol. 52, no. 12, pp. 2276-2288, 2005. [32] T. K. Lin, 'Performance improvement of PZT micro piezoelectric energy harvester fabricated by aerosol deposition method,' Department of Engineering Science and Ocean Engineering College of Engineering, National Taiwan University, 2017. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/63627 | - |
dc.description.abstract | 隨著物聯網(Internet of Things, IoT)的來臨,越來越多智慧裝置充斥在我們日常生活中。然而隨著IoT裝置數量呈現爆炸式的成長趨勢,能源的消耗是一個嚴重的議題。傳統上我們一般使用電池作為裝置之能量來源,但傳統電池得回收對環境造成不小的環境汙染影響。近年隨著微機電技術的發展,致力於尋找能夠有效代替傳統電池的使用。 在我們生活環境中,環境振動源充斥在我們日常使用的儀器,本研究中分析振動源的組成以設計元件及封裝。使用氣膠沉積設備及微機電製程,製作微型壓電能量擷取器。利用滑軌機構使元件能調整懸臂梁之有效長度,藉此調整共振頻率以擷取最大能量,並將其真空封裝,真空環境下更加提升元件之輸出表現,最後安裝在實際振動源中擷取能量。 實驗結果顯示,將元件懸臂梁之有效長度調整至9.79 mm,共振頻率為102.9 Hz,雖然振動頻率未達共振頻率,但仍擁有一定的輸出表現,輸出電壓為1.45 V,輸出功率為1.10 μW。將其完成真空封裝後安裝在風扇上,元件輸出功率為輸出電壓為1.70 V輸出功率為1.51 μW,真空封裝確實能有效提升元件之輸出表現。 | zh_TW |
dc.description.abstract | With the booming of Internet of Things (IoTs) devices, there are more and more smart devices implemented into our daily life. However, the more ended devices implemented also imply the need of the power solution became much severe. Traditionally, the button batteries are the easiest power solution for remote devices. However, this solution would directly cause the amount of battery replacement and charging inconvenience. Fortunately, the power consumption of electronic devices is decreasing continuously with the improvement of semi-conductor process technique. The ambient vibration sources are easily accessible. In this study, the vibration frequency and acceleration level from each machine should be measured and analyzed for later design. Micro piezoelectric energy harvester (MPEH) is fabricated by aerosol deposition equipment and microelectromechanical systems. With rail-like trough mechanism, effective beam length can be adjusted to change resonant frequency of MPEH. The output power of vacuum packaged device is further improved. In this study, package is set up on fan which provides acceleration level of 0.21g. When the length of cantilever beam is adjusted to 9.79 mm, the resonant frequency is 102.9 Hz. Although vibration frequency doesn’t reach resonant frequency of MPEH, the output voltage and output power still have considerable value. The MPEH generates the output voltage of 1.45 V and max output power of 1.10 µW. With vacuum package process, the output performance of MPEH is further improved. The MPEH generates the output voltage of 1.70 V and max output power of 1.51 µW. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T17:15:07Z (GMT). No. of bitstreams: 1 U0001-0202202123595600.pdf: 5000703 bytes, checksum: 8ad44e1ea70506d022bee2d21fd5544e (MD5) Previous issue date: 2021 | en |
dc.description.tableofcontents | 口試委員會審定書 i 誌謝 ii 中文摘要 iii ABSTRACT iv 目錄 v 圖目錄 viii 表目錄 xii 第一章 緒論 1 1.1 研究動機與目的 1 1.2 文獻回顧 6 1.2.1 能量擷取器之共振頻率調整 6 1.2.2 真空封裝 10 1.2.3 實際應用 15 1.3 研究目標 16 1.4 論文架構 18 第二章 壓電原理與薄膜製程技術 19 2.1 壓電材料 19 2.1.1 晶體對稱性 19 2.1.2 壓電效應 20 2.1.3 鋯鈦酸鉛(Lead Zirconate titanate,PZT) 22 2.2 壓電薄膜製程 24 2.2.1 溶膠凝膠法(Sol-gel method) 24 2.2.2 濺鍍法(Sputtering method) 25 2.2.3 水熱合成法(Hydrothermal method) 26 2.2.4 網版/鋼版印刷法(Screen printing method) 27 2.2.5 氣膠沉積法(Aerosol deposition method) 28 2.2.6 壓電沉積製程比較 29 第三章 壓電能量擷取器與封裝之設計概念 32 3.1 環境振動源 32 3.1.1 環境振動源之實驗架設 32 3.1.2 環境振動源之分析 33 3.2 壓電能量擷取器之元件模擬分析 36 3.2.1 COMSOL Multiphysics有限元素分析 36 3.2.2 微型壓電能量擷取器之設計與模型建立過程 37 3.3 封裝設計 41 3.3.1 調整共振頻率之滑軌機構 41 3.3.2 懸臂梁之固定端 42 3.3.3 封裝組合件 43 第四章 壓電能量擷取器之製作流程 45 4.1 製程設備 45 4.2 氣膠沉積製程 49 4.3 微機電製程 51 4.4 壓電薄膜退火 56 4.5 壓電薄膜極化 57 第五章 實驗結果與討論 59 5.1 振幅量測 59 5.2 元件封裝 63 5.3 元件量測 66 5.3.1 共振頻率之調整範圍 66 5.3.2 元件輸出表現 68 5.3.3 元件焊接後之輸出表現 71 5.4 封裝之元件表現 73 5.5 封裝之真空度測試 76 第六章 結論及未來展望 77 6.1 結論 77 6.2 未來展望 78 Reference 79 | |
dc.language.iso | zh-TW | |
dc.title | 具可調頻功能之微型壓電能量擷取器真空封裝設計開發 | zh_TW |
dc.title | A Vacuum Package Design with Frequency Tuning Mechanism for Micro Piezoelectric Energy Harvesters | en |
dc.type | Thesis | |
dc.date.schoolyear | 109-1 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 李世光(Chih-Kung Lee),舒貽忠(Yi-Chung Shu), 林順區(Shun-Chiu Lin) | |
dc.subject.keyword | 微型壓電能量擷取器,共振頻率調整,真空封裝,壓電材料,氣膠沉積法, | zh_TW |
dc.subject.keyword | micro piezoelectric energy harvester,frequency tuning,vacuum package,piezoelectric material,aerosol deposition method, | en |
dc.relation.page | 80 | |
dc.identifier.doi | 10.6342/NTU202100420 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2021-02-05 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 工程科學及海洋工程學研究所 | zh_TW |
Appears in Collections: | 工程科學及海洋工程學系 |
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U0001-0202202123595600.pdf Restricted Access | 4.88 MB | Adobe PDF |
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