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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 田維誠(Wei-Cheng Tian) | |
dc.contributor.author | Chang-Jung Hsieh | en |
dc.contributor.author | 謝昌融 | zh_TW |
dc.date.accessioned | 2021-06-16T17:14:07Z | - |
dc.date.available | 2017-08-22 | |
dc.date.copyright | 2012-08-22 | |
dc.date.issued | 2012 | |
dc.date.submitted | 2012-08-20 | |
dc.identifier.citation | [1]行政院衛生署統計室, '民國99年國人死因記者會新聞稿,' Jun. 2011.
[2]Silverlon Catheter. Available: http://www.silverlon.com/images/iv_catheter/iv_catheter_patient1.jpg [3]Thomas G.Pickering et. al., 'Recommendations for Blood Pressure Measurement in Humans and Experimental Animals,' Hypertension, vol. 45, pp. 142-161, 2005. [4]Blood pressure meter, Omron. Available: www.omron-healthcare.com/ [5]M. K. P. Reza Tabrizchi, 'Methods of blood flow measurement in the arterial circulatory system,' Journal of Pharmacological and Toxicological Methods, vol. 44, pp. 375- 384, 2000. [6]R. L. Peter Vennemann , Jerry Westerweel, 'In vivo whole-field blood velocity measurement techniques,' Exp Fluids, vol. 42, pp. 495-511, 2007. [7]G. P. Chatzimavroudis, 'Blood flow measurements with magnetic resonance phase velocity mapping,' Measurement, vol. 37, pp. 201-212, Apr 2005. [8]S. R. Alty, N. Angarita-Jaimes, S. C. Millasseau, and P. J. Chowienczyk, 'Predicting arterial stiffness from the digital volume pulse waveform,' IEEE Transactions on Biomedical Engineering, vol. 54, pp. 2268-2275, Dec 2007. [9]S. T. C. Jin Ji, Yafan Zhang, Khalil Najafi, and K.D Wise, 'An ultraminiature CMOS pressure sensor for a multiplexed cardiovascular catheter,' IEEE Trans. Electron Devices, vol. 39, pp. 2260-2267, 1992. [10]H. L. Chau and K. D. Wise, 'An Ultraminiature Solid-State Pressure Sensor for a Cardiovascular Catheter,' IEEE TRANSACTIONS ON ELECTRON DEVICES, vol. 35, pp. 2355-2362, Dec 1988. [11]葛振廷, '微型心血管壓力感測器之設計與製作,' 國立清華大學電子研究所碩士論文, 2005. [12]S.-H. T. C.-T. Ko, and M. S.-C. Lu, 'A CMOS micromachined capacitive tactile sensor with high frequency output,' IEEE Journal of Microelectromech. Syst., vol. 15, pp. 1708-1714, 2006. [13]T. Salo, T. Vancura, and H. Baltes, 'CMOS-sealed membrane capacitors for medical tactile sensors,' Journal of Micromechanics and Microengineering, vol. 16, pp. 769-778, Apr 2006. [14]J. S. K.-U. Kirstein, T. Salo, C. Hagleitner, T. Vancura and H.Balts, 'A CMOS-based Tactile Sensor for Continuous Blood Pressure Monitoring,' in IEEE Design, Automation and Test in Europe, Proceeding, 2005, pp. 210-214. [15]D. W. O.Pual, M.Hornung, V.Ziebart, and H.Baltes., 'Sacrificial Aluminum Etching for CMOS Microstructures,' in MEMS 97, Nagoya, Japan, 1997, pp. 523-528. [16]蔡瀚輝, 廖信豪, 0.35 CMOS BioMEMS Process Handbook 國家晶片中心(CIC), 2010. [17]S. Timoschenko, Theory of plates and shells. New York: McGraw-Hill, 1940. [18]Q. Wang and W. H. Ko, 'Modeling of touch mode capacitive sensors and diaphragms,' Sensors and Actuators a-Physical, vol. 75, pp. 230-241, Jun 8 1999. [19]Coventor Official Web-Site. Available: www.coventor.com/ [20]奈米三維量測儀及奈米薄膜材料試驗機(Nano indenterXP)儀器操作手冊. 國立成功大學微奈米科技中心, 2005. [21]國立中山大學奈米研究中心, 奈米壓痕系統(MTS Nano-Indenter) Available: http://khvic.nsysu.edu.tw/khvic/JL/86.htm [22]S.-P. C. a. M. G.Allen, 'Demonstration for integrating capacitive pressure sensors with read-out circuitry on stainless steel substrate,' Sensors and Actuators A: Physical, vol. 116, pp. 195-204, 2004. [23]Datasheet of LF351 Wide Bandwidth Single J-FET Operation Amplifier, STMicroelectronics, Available: http://www.st.com/internet/analog/product/63608.jsp | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/63568 | - |
dc.description.abstract | 本研究嘗試開發一種可應用於體外非侵入式血液流感測器,該感測器為電容式感測器主要利用結構間電極的形變,量測結構的電容變化,取得施加在感應器上的壓力變化。感測器以CMOS製程製作完成晶片的主體結構,再配合自行研發的後製程完成感測電容結構,以TSMC 0.35μm 2P4M製程為基礎加上MEMS後製程完成,其中使用兩層金屬M3以及M1作為犧牲層,另外兩層金屬M4還有M2
以及底部的導電多晶矽層組成三層共兩對感應電極,形成上、下兩組垂直的感應電容結構。本研究提出利用這兩組感應電容,再配合後端電容連結組態可以增加電容的變化,有助於提昇壓力感測的敏感度。研究中為了針對不同的量測壓力目標範圍,設計兩種不同的結構使其具有不同的彈性勁度,分別為L形以及方形設計,兩者的感測範圍為50mmHg 以及 200mmHg,配合後端的振盪器電路量測得兩者最大的頻率對壓力敏感度為0.1723 Hz/mmHg 以及 0.588 Hz/mmHg。 | zh_TW |
dc.description.abstract | In this research, we try to develop a capacitive tactile sensor for non-invasive blood flow monitoring. The capacitance variation of the capacitive tactile sensor was measured with the membrane deflection by an external pressure. This capacitive sensor is realized by using the CMOS-MEMS fabrication process which is based on TSMC 0.35μm 2P4M (2 polycrystalline silicon and 4 metal) process and self-developed post process. Two metal sacrificial layers of M1 and M3 are etched so the sensing electrodes of other two metal layers of M2, M4, and one polycrystalline silicon layer were formed. Two sensing capacitors consisting of three parallel sensing electrodes were connected vertically. The sensitivity of the sensor can be enhanced by a specific configuration of two sensing capacitors. Two different structure designs were proposed to cope with different sensing ranges. The detection range of L-type design is from 0 to 50 mmHg while the Square-type design is from 0 to 200 mmHg. The capacitance variation was recorded via an oscillator circuit converting a capacitance change into a frequency change. The maximum sensitivity of two designs are 0.1723 Hz/mmHg and 0.588 Hz/mmHg. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T17:14:07Z (GMT). No. of bitstreams: 1 ntu-101-R98943168-1.pdf: 7758886 bytes, checksum: 8f9625cb47343bca31ae7d764231800b (MD5) Previous issue date: 2012 | en |
dc.description.tableofcontents | 誌謝 I
中文摘要 III ABSTRACT IV 圖目錄 VII 表目錄 X 第一章 緒論 1 1.1 研究動機 1 1.2 血液流偵測方式介紹 2 1.3 壓力感應器研究回顧 6 1.4 互補式金氧半導體微機電製程介紹 12 1.5 論文架構 15 第二章 感應原理與感測器設計 16 2.1 電容式感測基本原理介紹 16 2.2 雙電容感應組態設計概念說明 18 2.2.1 差分型電容感應器組態介紹 18 2.2.2 相加增強型電容感應器組態介紹 22 2.3 雙層平行板電容式感測器結構設計 23 2.4 感測器結構佈局 25 2.5 模擬結果分析 29 2.5.1 差分組態結構模擬結果分析 31 2.5.2 相加增強組態結構模擬結果分析 39 第三章 感測器元件後製程與結果 43 3.1 後製程步驟 43 3.2 後製程結果 44 3.3 晶片封裝介紹 52 第四章 感測器特性量測結果與討論 53 4.1 機械特性量測結果 53 4.2電特性量測 56 4.2.1量測架設介紹 56 4.2.2施加形變位移測試結果 59 4.2.3往復施壓測試 64 4.2.4過度施壓測試 66 第五章 結論與未來展望 68 5.1 結論 68 5.2未來展望 69 參考資料 70 | |
dc.language.iso | zh-TW | |
dc.title | 以CMOS-MEMS研製之體外非侵入式血液流微觸覺電容式壓力感測器 | zh_TW |
dc.title | A CMOS-MEMS Capacitive Tactile Sensor For Non-Invasive Blood Flow Monitoring | en |
dc.type | Thesis | |
dc.date.schoolyear | 100-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 呂良鴻(Liang-Hung Lu),呂家榮(Chia-Jung Lu) | |
dc.subject.keyword | 微機電系統,互補式金氧半導體製程,壓力感測器,觸覺感測器,血液流感測, | zh_TW |
dc.subject.keyword | micro electro mechanical systems,complementary metal oxide semiconductor process,pressure sensor,tactile sensor,blood flow monitoring, | en |
dc.relation.page | 71 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2012-08-20 | |
dc.contributor.author-college | 電機資訊學院 | zh_TW |
dc.contributor.author-dept | 電子工程學研究所 | zh_TW |
顯示於系所單位: | 電子工程學研究所 |
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