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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/63434完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 蘇國棟 | |
| dc.contributor.author | Yu-Hung Huang | en |
| dc.contributor.author | 黃裕閎 | zh_TW |
| dc.date.accessioned | 2021-06-16T16:41:29Z | - |
| dc.date.available | 2017-09-03 | |
| dc.date.copyright | 2012-09-03 | |
| dc.date.issued | 2012 | |
| dc.date.submitted | 2012-08-29 | |
| dc.identifier.citation | [1] G. Vdovin, M. Loktev (2002). 'Deformable mirror with thermal actuators.' Optics Letters, v 27, n 9, p 677-679
[2] Loktev, M. Y., V. N. Belopukhov, et al. (2000). 'Wave front control systems based on modal liquid crystal lenses.' Review of Scientific Instruments 71(9): 3290-3297 [3] Paweł Wnuk, Czesław Radzewicz, Jerzy S. Krasi’nski (2005). 'Bimorph piezo deformable mirror for femtosecond pulse shaping.' Optics Express, Vol. 13, Issue 11, pp. 4154-4159 [4] M. Hacker, G. Stobrawa, R. Sauerbrey, T. Buckup, M. Motzkus, M. Wildenhain, A. Gehner (2003). 'Micromirror SLM for femtosecond pulse shaping in the ultraviolet.' Applied Physics B: Lasers and Optics, Volume 76, Number 6, pp. 711-714 [5] E. Hecht, Optics, 4th ed.: Addison Wesley, 2001. [6] F. Zamkotsian, V. Conedera, A. Liotard, A. Schroeder, N. Fabre, H. Camon, and P. Lanzoni, 'Polymer-based micro-deformable mirror for adaptive optics applications,' USA, 2004, pp. 144-54. [7] C.-H. Li, H.-T. Hsieh, and G.-D. J. Su, 'A fiber variable optical attenuator made by a large-stroke polymeric deformable mirror,' IEEE Photonics Technology Letters, vol. 21, pp. 1432-1434, 2009. [8] H.-T. Hsieh, H.-C. Wei, M.-H. Lin, W.-Y. Hsu, Y.-C. Cheng, and G.-D. J. Su, 'Thin autofocus camera module by a large-stroke micromachined deformable mirror,' Optics Express, vol. 18, pp. 11097-11104, 2010. [9] S. Sinzinger and J. Jahns, Microoptics, 2nd ed.: Wiley-VCH, 2003 [10] R. F. Fischer and B. Tadic, Optical System Design: McGraw-Hill, 2000. [11] Hu Yu-Ming, “The design and fabrication of deformable mirror”,2010 [12] F.C. Wippermann, P. Schreiber, A. Brauer, B. Berge, “Mechanically assisted liquid lens zoom system for mobile phone cameras”, Proc. of SPIE Vol. 6289, 62890T, 2007 [13] H. Gross, “Zoom lens”, Handbook of Optical systems, Vol.4, p.447-458, WILEY-VHC Verlag GmbH& Co.KGaA, Germany , 2008. [14] W. J. Smith, “Modern Optical Engineering”, the design of optical systems, 3nd , p. 295 , McGraw-Hill, Inc, 2000. [15] Bin WANG, Mao YE and Susumu SATO, “Liquid Crystal Negative Lens”, Japanese Journal of Applied Physics Vol. 44, No. 7A, 2005, pp. 4979–4983. [16] Bin WANG, Mao YE and Susumu Sato, “Liquid Crystal Lens Driven by Two voltages”, Proc. of SPIE Vol. 6018, 601812, 2005. [17] Bin Wang, Mao Ye, and Susumu Sato, “Liquid Crystal Lens With Focal Length Variable From Negative to Positive Values”, IEEE PHOTONICS TECHNOLOGY LETTERS, VOL. 18, NO. 1, JANUARY 1, 2006. [18] Yi-Hsin Lin, Ming-Syuan Chen, and Hung-Chun Lin, “An electrically tunable optical zoom system using two composite liquid crystal lenses with a large zoom ratio”, Vol. 19, N0.5 / OPTICS EXPRESS 4714, February, 2011. [19] Varioptic [cited; Available from: http://www.varioptic.com/en/index.php [20] S. Kuipera, B.H.W. Hendriks, L.J. Huijbregtsb, A. Hirschbergb, C.A. Renders, M.A.J. van As, “Variable-focus liquid lens for portable applications” Proc. of SPIE, Vol. 5523, 2004. P.100-109. [21] S. Kuipera and B. H. W. Hendriks, “Variable-focus liquid lens for miniature cameras”, APPLIED PHYSICS LETTERS VOLUME 85, NUMBER 7 16 AUGUST 2004. [22] F.C. Wippermann, P. Schreiber, A. Brauer, B. Berge, “Mechanically assisted liquid lens zoom system for mobile phone cameras”, Proc. of SPIE Vol. 6289, 62890T, 2007 [23] S. Kuiper, B.H.W. Hendriks, J.F. Suijver, S. Deladi. I. Helwegen, “Zoom camera based on liquid lenses”, Proc. of SPIE Vol. 6466, 64660F, 2007. [24] H.Gross, “Correction of aberration”, Handbook of Optical systems, Vol.3, p.217, WILEY-VHC Verlag GmbH& Co.KGaA, Germany , 2007. | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/63434 | - |
| dc.description.abstract | 一般傳統的變焦與自動對焦系統是由馬達驅動透鏡位置來造成效果，這種方式通常需要較大的空間並且有較大的功率損耗，在這篇論文裡，我們設計一款反射式的兩倍變焦系統，反射式光學除了具有低色散的特性之外，還可以透過折光的方式來使空間運用上更有效率。對於現在強調輕薄短小的光學系統來說，如何有效運用反射式光學在光學設計裡面，是很重要的課題。
我們利用有機可形變面鏡(organic deformable mirror)擔任系統裡的反射原件，它使用聚二甲基矽氧烷(PDMS)來製做一具高度可饒性薄膜，使薄膜具有低的楊氏係數(Young’s modulus)和低的殘餘應力(residual stress)，薄膜表面鍍鋁用以反射或聚焦入射光線，藉由施加薄膜(鋁)和下電極間的電壓，可使有機可行變面鏡因靜電力形變進而形成曲率的變化，並藉此電壓來控制其度數(diopter,m^(-1))，成功做出可當作凹面鏡與凸面鏡使用的可行變面鏡，製作的可形變面鏡有大位移量與低驅動電壓的特性。 最後我們將模擬的變焦系統實作出來，透鏡是請國研院儀科中心研磨而成，封裝外殼是請機構工程師幫我們設計，最後搭配我們實驗室製作的可形變面鏡組成一個變焦光學模組，成功做出1.3倍的變焦效果。 | zh_TW |
| dc.description.abstract | Conventional zoom autofocus system effect is caused by changing position of lens via a motor, this method usually requires a larger space and causes greater power loss. In this thesis, we designed a reflective 2X zoom system. Reflective optics is a technology not only can make the space application become more efficient and flexible, but also has the advantage that it induces low chromatic aberrations. For nowadays, optical systems are asked to light weight and small size, it is an important topic to use reflective optics effective to achieve the goal.
We use organic Micro Electro Mechanical Systems (MEMS) deformable mirror (DM) as a reflective element of zoom system, we fabricated a highly flexible Polydimethylsiloxane (PDMS) membrane which has low Young’s modulus (<10 GPa) and low residual stress. The incident beam is reflected or focused by the aluminum coating layer on the membrane. The optical power (diopter,m^(-1)) of DM is controlled by the electrostatic force results from the applied voltage between membrane (Aluminum coating) and bottom electrode pad. We successfully made available deformable mirror used as a concave mirror and a convex mirror. Advantages of the polymer DM have large stroke and low applied voltage. Finally we will build up a zoom optical system by three parts, lens is fabricated by Instrument Technology Research Center (ITRC), and package of module is designed by mechanical engineer, and the deformable mirror is produced by our lab. The zoom ratio is approximately 1.3 times. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-16T16:41:29Z (GMT). No. of bitstreams: 1 ntu-101-R99941120-1.pdf: 14645553 bytes, checksum: a1ee68233add73da558e38403986ff8d (MD5) Previous issue date: 2012 | en |
| dc.description.tableofcontents | 口試委員會審定書 #
誌謝 i ABSTRACT iii CONTENTS iv LIST OF FIGURES vi LIST OF TABLES xi Chapter 1 Introduction 1 Chapter 2 MEMS deformable mirror by PDMS membrane 3 2.1 Different type of deformable mirror 3 2.1.1 Deformable Mirrors with Thermal Actuators 3 2.1.2 Piezo-driven deformable mirror 5 2.1.3 Micromachined membrane deformable mirrors (MMDM) 7 2.2 Fabrication and design of MEMS deformable mirror 9 2.2.1 Introduction 9 2.2.2 Fabrication process of upper electrode 12 2.2.3 Transparent bottom electrode 15 2.3 Theory and design 20 2.3.1 Optical power 20 2.3.2 Calculation of ellipse deformable mirror 23 2.4 Simulation and result 26 2.4.1 Ansys simulation 26 2.4.2 Actuation range 32 2.4.3 Surface roughness 34 2.4.4 Response time 41 Chapter 3 Zoom system consist of MEMS deformable mirror 44 3.1 Methods to achieve zoom function 44 3.1.1 System with Moving Components 46 3.1.2 System without Moving Components 48 3.2 Zoom system designed by MEMS deformable mirror 51 3.2.1 Introduction 51 3.2.2 Optical zoom system with two MEMS deformable mirrors 52 3.2.3 Aberrations induced by deformable mirrors 54 3.2.4 Simulation result 62 3.2.5 Experiment result 65 Chapter 4 Conclusion 71 REFERENCE 72 | |
| dc.language.iso | en | |
| dc.subject | 鏡頭 | zh_TW |
| dc.subject | 反射式光學 | zh_TW |
| dc.subject | 可形變面鏡 | zh_TW |
| dc.subject | 變焦系統 | zh_TW |
| dc.subject | 光學系統設計 | zh_TW |
| dc.subject | MEMS Deformable Mirror | en |
| dc.subject | Reflective Optics | en |
| dc.subject | camera lens | en |
| dc.subject | Optical system design | en |
| dc.subject | Zoom System | en |
| dc.title | 聚二甲基矽氧烷製備之高形變可形變面鏡運用於光學變焦模組 | zh_TW |
| dc.title | Thin zoom camera module by a large-stroke
micromachined Polydimethylsiloxane deformable mirror | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 100-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 黃鼎偉,蔡永傑 | |
| dc.subject.keyword | 反射式光學,可形變面鏡,變焦系統,光學系統設計,鏡頭, | zh_TW |
| dc.subject.keyword | Reflective Optics,MEMS Deformable Mirror,Zoom System,Optical system design,camera lens, | en |
| dc.relation.page | 75 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2012-08-30 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
| 顯示於系所單位： | 光電工程學研究所 | |
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