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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 張培仁(Pei-Zen Chang) | |
dc.contributor.author | Wei-Hsiang Tu | en |
dc.contributor.author | 凃偉祥 | zh_TW |
dc.date.accessioned | 2021-06-16T13:25:30Z | - |
dc.date.available | 2013-08-06 | |
dc.date.copyright | 2013-08-06 | |
dc.date.issued | 2013 | |
dc.date.submitted | 2013-07-23 | |
dc.identifier.citation | [1] Price, R.H.; Wood, J.E; Jacobsen, S.C. Modelling considerations for electrostatic forces in electrostatic microactuators. Sensors and Actuators 1989, 20, 107-114.
[2] Zhou, S.A. On forces in microelectromechanical systems. International Journal of Engineering Science 2003, 41, 313-335. [3] Hu, Y.C.; Chang, C.M.; Huang, S.C. Some design considerations on the electrostatically actuated microstructures. Sensors and Actuators A 2004, 112, 155-161. [4] Pamidighantam, S.; Puers, R.; Baert, K.; Tilmans, H.A.C. Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions. Journal of Micromechanics and Microengineering 2002, 12, 454-464. [5] Sasayama, T.; Suzuki, S.; Tsuchitani, S.; Koide, A.; Suzuki, M.; Ichikawa, N.; Nakazawa, T. Highly reliable silicon micromachined physical sensors in mass production. Sensors and Actuators A 1996, 54, 714-717. [6] Bao, M.H.; Yang, H.; Yin, H.; Shen, S.Q. Effects of electrostatic forces generated by the driving signal on capacitive sensing devices. Sensors and Actuators A 2000, 24, 213–219. [7] Lin, W.H.; Zhao, Y.P.; Pull-in instability of micro-switch actuators: model review. International Journal of Nonlinear Sciences and Numerical Simulation 2008, 9(2), 175-183. [8] Millet, O.; Bernardoni, P.; Regnier, S.; Bidaud, P.; Tsitsiris, E.; Collard, D.; Buchaillot, L. Electrostatic actuated micro gripper using an amplification mechanism. Sensors and Actuators A 2004, 114, 371-378. [9] Schiele, I.; Huber, J.; Hillerich, B.; Kozlowski, F. Surface-micromachined electrostatic microrelay. Sensors and Actuators A 1998, 66, 345-354. [10] Mehregany, M.; Nagarkar, P.; Senturia, S.D.; Lang, J.H. Operation of microfabricated harmonic and ordinary side-drive motors. Proc. 3rd. IEEE MEMS Workshop, Napa Valley, CA, Feb. 1990. 1–8. [11] Tavrow, L.S.; Bart, S.F.; Lang, J.H. Operational characteristics of microfabricated electric motors. Sensors and Actuators A 1992, 35, 33-44. [12] Ishihara, H.; Arai, F.; Fukuda. T. Micro mechatronics and micro actuators. IEEE/ASME Transactions on Mechatronics 1996, 1(1), 68-79. [13] Zhang, W.M.; Meng, G.; Li, H.G. Electrostatic micromotor and its reliability. Microelectronics Reliability 2005, 45, 1230-1242. [14] Peterson, K.E. Micromechanical membrane switches on silicon, IBM J. Res. Dev., 1979, 23(4), 376-385 [15] Osterberg, P.M.; Senturia, S.D. M-test: a test chip for MEMS material property measurement using electrostatically actuated test structures. Journal of Microelectromechanical Systems 1997, 6(2), 107–118. [16] Zhang, W.M.; Meng G. Nonlinear dynamic analysis of electrostatically actuated resonant MEMS sensors under parametric excitation. IEEE Sensors Journal 2007, 7(3), 370-380. [17] Castaner, L.M.; Senturia, S.D. Speed-energy optimization of electrostatic actuators based on pullin. Journal of Microelectromechanical Systems 1999, 8, 290-298. [18] Castaner, L.; Rodriguez, A.; Pons, J.; Senturia, S.D. Pull-in time energy product of electrostatic actuators: comparison of experiments with simulation. Sensors and Actuators A 2000, 83, 263-269. [19] Quevy, E.; Bigotte, P.; Collard, D.; Buchaillot, L. Large stroke actuation of continuous membrane for adaptive optics by 3D self-assembled microplates. Sensors and Actuators A 2002, 95, 183-195. [20] Chan, E.K.; Dutton, R.W. Electrostatic micromechanical actuator with extended range of travel. Journal of Microelectromechanical Systems 2000, 9, 321-328. [21] Nadal-Guardia, R.; Dehe, A.; Aigner, R.; Castaner, L.M. Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point. Journal of Microelectromechanical Systems 2002, 11, 255-263. [22] Legtenberg, R.; Gilbert, J.; Senturia, S.D.; Elwenspoek, M. Electrostatic curved electrode actuators. Journal of Microelectromechanical Systems 1997, 6, 257-265. [23] Tang, W.C.; Nguyen, T.C.H.; Judy, M.W.; Howe, R.T. Electrostatic comb drive of lateral polysilicon resonators. Sensors and Actuators A 1990, 21-23, 323-331. [24] Ye, W.; Mukherjee, S.; Macdonald, N.C. Optimal shape design of an electrostatic comb drive in microelectromechanical systems. Journal of Microelectromechanical Systems 1998, 7, 16-26. [25] Busta, H.; Amantea, R.; Furst, D.; Chen, J.M.; Turowski, M.; Mueller, C. A MEMS shield structure for controlling pull-in forces and obtaining increased pull-in voltages. Journal of Microelectromechanical Systems 2001, 11, 720-725. [26] Zhang, W.M.; Meng, G. Nonlinear dynamical system of micro-cantilever under combined parametric and forcing excitations in MEMS. Sensors and Actuators A 2005, 119, 291-299. [27] Liu, S.; Davidson, A.; Lin, Q. Simulating nonlinear dynamics and chaos in a MEMS cantilever using Poincare mapping. IEEE, Transducers’03, the 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003,1092-1095. [28] Adams, S.G.; Bertsch, F.M.; Shaw, K.A.; MacDonald, N.C. Independent tuning of linear and nonlinear stiffness coefficients. Journal of Microelectromechanical Systems 1998, 7(2), 172-180. [29] Zhang, W.; Baskaran, R.; Turner, K.L. Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor. Sensors and Actuators A 2002, 102, 139–150. [30] Li, G.; Aluru, N.C. Linear, nonlinear and mixed-regime analysis of electrostatic MEMS. Sensors and Actuators A 2001, 91, 278-291. [31] Aluru, N.R.; White, J. An efficient numerical technique for electromechanical simulation of complicated microelectromechanical structures. Sensors and Actuators A 1997, 58, 1-11. [32] Younis, M.I.; Abdel-Rahman, E.M.; Nayfeh, A. A reduced-order model for electrically actuated microbeam-based MEMS. Journal of Microelectromechanical Systems 2003, 12(5), 672-680. [33] Senturia, S.D.; Harris, R.M.; Johnson, B.P.; Kim, S.; Nabors, K.; Shulman, M.A.; White, J.K. A computer-aided design system for microelectromechanical systems (MEMCAD). Journal of Microelectromechanical Systems 1992, 1, 3–13. [34] Li, G.Y.; Wang, L. Influence of bonding parameters on electrostatic force in anodic wafer bonding. Thin Solid Films 2004, 462–463, 334–338. [35] Zhang, W.M.; Meng, G. Contact dynamics between the rotor and bearing hub in an electrostatic micromotor. Microsystem Technologies 2005, 11, 438–443. [36] Srikar, V.T.; Spearing, S.M. Materials selection for microfabricated electrostatic actuators. Sensors and Actuators A 2003, 102, 279-285. [37] Zhang, W.M.; Meng, G. Stability, bifurcation and chaos analyses of a high-speedmicro-rotor system with rub-impact. Sensors and Actuators A: Physical 2006,127(1), 163-178. [38] Srikar, V.T.; Spearing, S.M. Materials selection in micromechanical design: anapplication of the Ashby approach. Journal of Microelectromechanical Systems 2003, 12(1), 3-10. [39] Zhang, W.M.; Meng, G. Numerical simulation of sliding wear between the rotorbushing and ground plane in micromotors. Sensors and Actuators A: Physical 2006,126, 15-24 [40] Spearing, S.M. Materials issues in microelectromechanical systems (MEMS). Actamater 2000, 48, 179-196 [41] Richards, J.A. Analysis of Periodically Time-Varying Systems; Springer-Verlag: Berlin, Germany, 1983, 27-49 [42] Farhang, K.; Midha, A. Steady-state response of periodically time-varying linear systems with application to an elastic mechanism. Journal of Mechanical Design 1995, 117, 633-639. [43] Pesterv, A.V.; Yang B.; Bergman L.A.; Tan C.A. Revisiting the moving force problem. Journal of Sound and Vibration 2003, 261, 299-307 [44] Florence, A.L. Traveling force on a Timoshenko beam. Journal of applied Mechanic,1965,32,351-358 [45] Bishop, R. E. D.; Johnson, D.C. The Mechanical of Vibration; NY, 1960 [46] Milomir, M.; Jay C. On the response of beam to an arbitrary number of concentrated moving masses. Journal of the Franklin Institute, 1969, 287, 2 [47] Yau J.D.; Yang Y.B. Vertical accelerations of simple beams due to successive loads traveling at resonant speeds. Journal of Sound and Vibration 2006, 289, 210-228 [48] Hu, Y.C.; Huang. S.C. Forced response of sandwicth ring with viscoelastic core subjected to traveling loads. Journal of The Acoustical Society of America. 1999, 106, 202-210. [49] Ye, X.; Chen, Y.; Chen, D. C.; Huang, K. Y.; Hu, Y.C. The electromechanical behavior of a micro-ring driven by traveling electrostatic force. Sensors 2012, 12, 1170-1180. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/62058 | - |
dc.description.abstract | 本文旨在探討微結構在承受移動靜電力作用下的動態特性理論與穩定性分析,其採用的微結構以微型樑作為主要分析之微結構外形。研究主題包括微型樑承受來回移動力之動態分析、微型樑承受來回移動靜電力之動態分析與穩定性分析。
理論推導方面首先求得系統之能量式,再利用漢米頓原理(Hamilton principle)推導出具靜電項之非線性偏微分方程式,移動靜電負荷的位置以單位脈衝函數(Dirac delta function)定義之,基於微小變形之假設,將非線性之靜電項以泰勒級數展開(Taylor series expansion)並忽略二次以上之高次項,得到一結構與靜電耦合之線性化運動方程式,最後利用假設模態展開法求得微系統之離散化運動方程式,探討靜電外力為靜電常力或靜電簡諧力作用下之動態響應。 動態分析中以倫基•庫達二氏法(Runge-Kutta Method)求解,獲得外力為靜電常力與靜電簡諧力作用下之動態響應。文中討論移動外力頻率與簡諧力頻率對系統造成之頻率分歧現象,還有移動力與移動靜電力對系統影響的差異。本文中以弗洛蓋定理(Floquet’s theory)觀察微結構承受移動靜電力動態穩定性。發現靜電外力越大,其不穩定區域越大。 | zh_TW |
dc.description.abstract | The dynamics and stabilities of a micro-beam subjected to a to and fro traveling electrostatic force were investigated in this thesis. Research topics include the dynamics of a micro-beam subjected to a traveling load, the dynamics and stabilities of a micro-beam subjected to and fro traveling electrostatic loads.
In this study, Hamilton principle is first used to derive the nonlinear partial differential equation with the nonlinear electrostatic term. The position of the electrostatic load defined as Dirac delta function. Expand the electrostatic term by the Taylor series expansion. Based on the small deflection assumption, the second and higher order terms of the electrostatic expansion can be neglected, get a linearized equations of motion for the structure and electrostatic coupling effect, and finally the use of the mode expansion method yields the discrete equation of motion, then the dynamics of a micro-beam subjected to a to and fro traveling electrostatic force were investigated In the numerical analysis, Runge-Kutta Method is used to find dynamic responses. According to the analytical results, the resonant frequencies of a structure will be bifurcated by the traveling harmonic loads. Apart from Floquet’s theory, the beam may be unstable at some unstable traveling speeds. Furthermore the unstable regions expand with increasing driving voltage. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T13:25:30Z (GMT). No. of bitstreams: 1 ntu-102-D98525002-1.pdf: 1316768 bytes, checksum: b28b9da0e58be158898ea23bb6523f4d (MD5) Previous issue date: 2013 | en |
dc.description.tableofcontents | 口試委員會審定書 i
誌謝 ii 中文摘要 iii ABSTRACT iv 目錄 v 圖目錄 vii 第一章 序論 1 1.1 研究動機 1 1.2 文獻回顧 2 1.2.1 靜電驅動式微結構之電彈性分析 2 1.2.2 移動負荷對結構共振響應之影響 2 1.3 研究目的 4 第二章 承受移動力之微型樑的動態分析 5 2.1 系統運動方程式 5 2.2 系統運動方程式之離散化 8 2.3 結果與討論 10 第三章 承受移動靜電力之微型樑的動態分析 13 3.1 系統運動方程式 13 3.1.1 微結構系統之能量式 13 3.1.2 微結構系統之運動方程式 16 3.2 系統運動方程式之離散化 18 3.3 結果與討論 20 第四章 承受移動靜電力之微型樑的穩定性分析 24 4.1 倫基•庫達二氏法 24 4.2 弗洛蓋定理 26 4.3 穩定性分析 29 4.4 結果與討論 30 第五章 結論與未來方向 33 5.1 結論 33 5.2 未來展望 34 參考文獻 36 論文著作 40 附錄A 無因次化推導 41 | |
dc.language.iso | zh-TW | |
dc.title | 承受移動靜電力之微結構的電彈性分析 | zh_TW |
dc.title | On the Electromechanical Behavior of Microstructure Subjected to Traveling Electrostatic Loads | en |
dc.type | Thesis | |
dc.date.schoolyear | 101-2 | |
dc.description.degree | 博士 | |
dc.contributor.coadvisor | 李世光(Chih-Kung Lee) | |
dc.contributor.oralexamcommittee | 胡毓忠,楊龍杰,林大偉,黃榮堂,宋家驥 | |
dc.subject.keyword | 移動靜電力,動態響應,穩定性分析,倫基庫達二氏法,弗洛蓋定理, | zh_TW |
dc.subject.keyword | Traveling electrostatic loads,Dynamic response,Stabilities,Runge-Kutta Method, | en |
dc.relation.page | 42 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2013-07-23 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 工程科學及海洋工程學研究所 | zh_TW |
顯示於系所單位: | 工程科學及海洋工程學系 |
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