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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 楊申語(Sen-Yeu Yang) | |
dc.contributor.author | Kai-Yi Hsiao | en |
dc.contributor.author | 蕭凱憶 | zh_TW |
dc.date.accessioned | 2021-06-16T13:22:22Z | - |
dc.date.available | 2015-08-06 | |
dc.date.copyright | 2013-08-06 | |
dc.date.issued | 2013 | |
dc.date.submitted | 2013-07-25 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/61996 | - |
dc.description.abstract | 隨著微流體系統尺寸的縮小流阻劇升,當流道壁面具備疏水性時,可提升流體之滑移長度,增加流體之流速。假若能製作疏水結構於流道表面取代疏水塗層,將可避免對於生物晶片之影響,藉由降低滑動邊界層效應,降低流體之流阻。目前只能在平面或曲率較大之曲面製作微結構,無法成功製作微結構於流道側壁。本研究使用陽極氧化鋁微奈米複合結構作為疏水結構模具,並使用氣體輔助熱壓與氣體輔助熱成型之製程成功將表面結構與流道結構進行結合,經澆鑄PDMS,再經接合,就可得到三維微流道。
本研究首先將99.7%純度之鋁片以陽極氧化處理,得到微奈米複合結構,經電鑄為鎳模,以氣體輔助熱壓製程將此微奈米複合結構製作於聚碳酸酯薄膜(PC film)表面。接著使用此具微奈米複合結構之PC薄膜作為基材,進行氣體輔助熱成型製作流道形貌,流道寬500 μm,深200 μm,其母模以微影蝕刻及電鑄製作,再以PDMS澆灌此具有表面微奈米複合結構及流道結構之PC薄膜模具,得到三面皆具有疏水結構的PDMS微流道。同時以PDMS澆鑄在微奈米結構PC膜上,取得上蓋,將上蓋與流道以大氣電漿接合,得到密封之三維疏水微流道系統。 為探討本實驗所製作出之三維疏水流道性能,將進行疏水性及流速之量測比較,證實本實驗所製作疏水流道之性能,其接觸角成功由119 °提升至140 °,而於固定壓力源下,流體在具有疏水結構之微流道系統的流速較沒有疏水結構的提升24.8 %。 | zh_TW |
dc.description.abstract | Microfluidic channel with micro/nanostructures on four walls can change flowing behavior and enhance mixing performance due to apparent fluid slip at hydrophobic walls. Micro/nanostructures, however, cannot easily be patterned on sidewalls by lithography approaches. Hot embossing methods were reported to fabricate micro/nanostructures on channel with aid of PDMS stamp or spin-coated PDMS thin film to prevent nano-structures from damage during forming micro-structures. There are problems in patterning corners due to the elastic recovery of PDMS. In this study, gas-assisted hot embossing and thermoforming processes are employed; nanostructures can be replicated and preserved with gas-pressing technique. Besides, inexpensive anodic aluminum oxide (AAO) sheet is to be used as template for fabricating micro/nanostructures. Through gas-assisted hot embossing and thermoforming processes, PC (polycarbonate) films with micro/nanostructures can be fabricated. After cast into PDMS channel and cover plates, their hydrophobic characteristics are verified. The contact angle of water drop has increased from 119 ° to 140 °. They are to be bonded after plasma treatment. Flow tests are performed to compare the flow rates in microfluidic systems with hydrophobic and plain channels. The flow rate in hydrophobic microchannels has increased 24.8% under the same pressure. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T13:22:22Z (GMT). No. of bitstreams: 1 ntu-102-R00522742-1.pdf: 5607131 bytes, checksum: 5812735461750f1aef66a0fa4878cef7 (MD5) Previous issue date: 2013 | en |
dc.description.tableofcontents | 口試委員會審定書 II
誌謝 III 摘要 IV ABSTRACT V 目次 VI 表目錄 IX 圖目錄 X 第一章 導論 1 1.1 前言 1 1.2 微流體系統 1 1.3 疏水性 2 1.4 陽極氧化鋁結構 3 1.5 微熱壓成型技術 4 1.6 研究動機與目標 5 1.7 論文內容與架構 6 第二章 文獻回顧 11 2.1 氣體輔助熱壓技術相關文獻 11 2.2 疏水性結構相關文獻 12 2.3 三維微流道製作技術發展 13 2.4 流體狀況檢測 15 2.5 文獻整體回顧 16 第三章 實驗設置與實驗方法 25 3.1 實驗目的及整體流程規劃 25 3.2 表面疏水結構陽極氧化鋁模具製作 26 3.2.1 陽極氧化鋁製程之材料 26 3.2.2 陽極氧化電解槽與低溫循環系統 26 3.2.3 抽風櫥櫃 26 3.2.4 加溫磁石攪拌器 27 3.2.5 直流電壓供應器 27 3.2.6 陽極氧化鋁之製作流程 27 3.3 疏水結構複製 29 3.3.1 電鑄鎳模 29 3.3.2 氣體輔助熱壓製作具微結構之PC薄膜 30 3.4 流道模具製作設備與流程 32 3.4.1 光阻塗料 32 3.4.2 顯影劑 32 3.4.3 流道母模製作流程 33 3.5 三維流道製作設備與流程 34 3.5.1 三維流道PC膜模具製作 34 3.5.2 PDMS三維流道製作 35 3.5.3 氧電漿機 36 3.6 量測設備 37 3.6.1 表面接觸角量測儀 37 3.6.2 光學顯微鏡 37 3.6.3 場發射掃描式電子顯微鏡 37 3.6.4 3D雷射共軛焦顯微鏡 37 第四章 陽極氧化鋁結構與鎳模具製作 50 4.1 鋁片前處理 50 4.1.1 鋁片之熱處理 50 4.1.2 鋁片之拋光 51 4.2 陽極氧化鋁製作流程 51 4.2.1 第一次陽極處理 51 4.2.2 氧化鋁層移除 52 4.2.3 第二次陽極處理 52 4.2.4 擴孔處理 52 4.3 陽極氧化鋁結構疏水性測試 53 4.3.1 氣體輔助熱壓製程 53 4.3.2 疏水性測試 54 4.4 陽極氧化鋁鎳模製作 54 4.5 本章結論 56 第五章 三維流道製作 63 5.1 氣體輔助熱壓模具製作 63 5.1.1 流道模具製作 63 5.1.2 電鑄鎳模 64 5.2 三維流道模具製作 65 5.2.1 陽極氧化鋁結構複製於PC薄膜 65 5.2.2 流道結構複製於PC薄膜 66 5.3 熱壓參數結果與討論 67 5.3.1 真空腔體輔助熱壓與PDMS模具使用對成形性之影響 67 5.3.2 PC薄膜厚度與熱壓溫度對成形性之影響 67 5.3.3 熱壓時間與壓力對成形性之影響 68 5.4 PDMS三維流道製作 69 5.4.1 三維流道翻鑄 69 5.4.2 三維流道接合 70 5.5 本章結論 70 第六章 三維流道檢測 82 6.1 三維流道尺寸及表面結構檢測 82 6.2 三維流道接觸角量測 83 6.3 流道接合成果測試 83 6.4 流速測試 84 6.5 本章結論 85 第七章 研究成果總結與未來研究方向 91 7.1 研究成果總結 91 7.1.1 陽極氧化鋁微奈米複合疏水模具製作 91 7.1.2 以氣體輔助熱壓製程製作三維流道 91 7.1.3 三維流道性能檢測成果 92 7.2 未來研究方向與應用展望 92 參考文獻 94 | |
dc.language.iso | zh-TW | |
dc.title | 氣體輔助熱壓技術與陽極氧化鋁結構之應用製作三維流道 | zh_TW |
dc.title | Fabrication of 3D Microchannel by Gas-Assisted Thermoforming Process and Anodic Aluminum Oxidation | en |
dc.type | Thesis | |
dc.date.schoolyear | 101-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 沈永康,鄭芳松 | |
dc.subject.keyword | 疏水流道,氣體輔助熱壓,氣體輔助成型,陽極氧化鋁,疏水性, | zh_TW |
dc.subject.keyword | anodic aluminum oxide,gas-assisted hot embossing,gas-assisted thermoforming,3D channel,hydrophobic, | en |
dc.relation.page | 97 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2013-07-25 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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