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| ???org.dspace.app.webui.jsptag.ItemTag.dcfield??? | Value | Language |
|---|---|---|
| dc.contributor.advisor | 顏家鈺(Jia-Yush Yen) | |
| dc.contributor.author | Cheng-Han Chung | en |
| dc.contributor.author | 鍾承翰 | zh_TW |
| dc.date.accessioned | 2021-06-16T13:18:38Z | - |
| dc.date.available | 2016-08-06 | |
| dc.date.copyright | 2013-08-06 | |
| dc.date.issued | 2013 | |
| dc.date.submitted | 2013-07-26 | |
| dc.identifier.citation | [1] K. David Young, Vadim I. Utkin, U‥mit O‥ zgu‥ner, “A Control Engineer’s Guide to Sliding Mode Control”, IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, VOL. 7, NO. 3, pp.328-342 ,1999.
[2] Yang Zhang, Nobuo Kurihara, “A Study of Integral Sliding Mode Control with Input Constraint for Engine Idling-Speed Control”, IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, VOL.7, NO. 3, pp.214-219, 2012. [3] İlyas Eker, “Sliding mode control with PID sliding surface and experimental application to an electromechanical plant”, ISA Transactions, Volume 45, No 1, pp.109-118, 2006. [4] Yangmin Li, Qingsong Xu, “Adaptive Sliding Mode Control With Perturbation Estimation and PID Sliding Surface for Motion Tracking of a Piezo-Driven Micromanipulator”, IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, VOL. 18, NO. 4, pp.798-810, 2010. [5] Slotine, J. J. E., M. W. Spong, ORobust “robot control with bounded input torques”, Journal of Robotics Systems, 2(4), pp.329-352, 1985. [6] Yury Stepanenko, Yong Cao, Chun-Yi Su, “Variable Structure Control of Robotic Manipulator With PID Sliding Surfaces”, INTERNATIONAL JOURNAL OF ROBUST AND NONLINEAR CONTROL, VOL. 8, pp.79-90, 1998. [7] R. D. Lorenz and P. B. Schmidt, “Synchronized motion control for process automation,” IEEE Conference on Industry Applications Society Annual Meeting, vol. 2, pp.1693-1698,1989. [8] Gourab Sen Gupta, Subhas Chandra Mukhopadhyay, Christopher H. Messom, Serge N. Demidenko, “Master–Slave Control of a Teleoperated Anthropomorphic Robotic Arm With Gripping Force Sensing”, IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, VOL. 55, NO. 6, pp2136, 2006. [9] Ikuo Yamano, Kenjiro Takemura, Ken Endo, Takashi Maeno, “Method for Controlling Master-Slave Robots using Switching and Elastic Elements”, Proc. IEEE Int. Conf. Robot. and Autom, pp.1707, 2002 [10] Min-Fu Hsieh, Wu-Sung Yao, Chia-Rong Chiang, “Modeling and synchronous control of a single-axis stage driven by dual mechanically-coupled parallel ball screws”, The International Journal of Advanced Manufacturing Technology, vol.34, no 9-10, pp.933-943, 2007. [11] Min-Fu Hsieh, Chin-Juei Tung, Wu-Sung Yao, Meng-Chieh Wu, Yunn-Shiuan Liao, “Servo design of a vertical axis drive using dual linear motors for high speed electric discharge machining”, International Journal of Machine Tools & Manufacture, vol.47, no. 3-4, pp.546-554, 2007. [12] Mi-Ching Tsai, Min-Fu Hsieh, Wu-Sung Yao, “Synchronous Control of Linear Servo Systems for CNC Machine Tools”, Proceedings of the 2003 European Control Conference, Cambridge, 2003. [13] Yoram Koren, “Cross-Coupled Biaxial Computer Control for Manufacturing Systems”, Journal of Dynamic Systems, Measurement, and Control, vol.102, pp.265-272, 1980. [14] Stephen J. Chanmpman 原著, 李建海 盧光常 編著,'電機機械基本原理精要'. [15] J. X. Shen, Z. Q. Zhu, David Howe, “Sensorless Flux-Weakening Control of Permanent-Magnet Brushless Machines Using Third Harmonic Back EMF”, IEEE TRANSACTIONS ON INDUSTRY APPLICATIONS, VOL. 40, NO. 6, 2004. [16] I. Boldea, Syed A. Nasar, 'Linear Electric Actuators and Generators',IEEE transactions on energy conversion, vol. 14, no.3, pp.712-717,1999. [17] 吳家慶,“交流永磁伺服馬達驅動控制”, 機械月刊 ,Oct,2005, pp.30-37. [18] J.G.Ziegler and N.B.Nichols, “Optimum Settings for Automatic Controllers”, Trans ASME, Vol.64, pp.759-768, 1942. [19] Ming-Han Chang, “Development of an Embedded Control System in a Sigle-Deck, Dual-Axis Precision Positioning Stage”, 2012. [20] 大銀微系統，website: http://www.hiwinmikro.com.tw [21] Keyence corporation, website: http://www.keyence.com.tw | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/61917 | - |
| dc.description.abstract | 精密定位平台在現今的半導體產業以及傳統產業的製程中漸漸獲得廣泛的應用，在硬體以及控制演算法的發展也已步上軌道。然而，傳統的定位平台受限於機構設計，降低了定位精度及暫態響應。因此，本論文採用相對於傳統設計，具有較高推力及反應速度的單層雙軸氣浮平台並設計相應的控制演算法，以期減少反應時間，增加定位精確度以及降低雜訊。以及利用嵌入式系統TMS320F28335單晶片來進行定位控制，控制方式著重於兩軸兩顆平行排列永磁線性馬達之間的耦合，藉以降低控制過程中平台的角度偏移，並改進位移暫態響應。
此外，本論文首先推導平台運動方程式，基於此模型利用滑模控制理論(sliding mode control, SMC)進行位移控制，並分析比較輸入及輸出的各項特性，利用同動控制器進行線性馬達之間的耦合及伺服控制，探討控制過程中同動和位置控制器的交互影響。 | zh_TW |
| dc.description.abstract | In nowadays manufacturing and semi-conductor field, application of high precise positioning stage gradually become mature, related hardware and algorism have progressed accordingly also. However, accuracy and transient response of conventional precise positioning stage are seriously constraint by mechanism designing limitation, so this research applies an innovative design with two parallel linear motors in dual axes to drive the stage for faster response time and higher thrust force, then obtaining higher accuracy and compressing noise by designing algorism respectively.
Software programming bases on embedded microprocessor Texas Instruments TMS320F28335 for positioning and servo-controlling. By applying synchronous controller to strengthen the relative robustness of dual linear motors in single axis, therefore rotation of stage can be further compressed during controlling process. Finally this research will put emphasis on discussing of sliding mode control properties and effects of input command current, both in single-axis and dual-axes controlling for better understanding the performance in practical system. Furthermore, derive a mathematical model of stage for adapting in sliding mode control with proportional, integral and derivative sliding surface to improve transient response of positioning. Angle displacement compressing will be achieved by servo control strategies; this property will heavily affect dual-axes control performance. Besides, in this research, interaction between positioning and synchronous control will be noted, which is very important in transient response. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-16T13:18:38Z (GMT). No. of bitstreams: 1 ntu-102-R00522836-1.pdf: 3520392 bytes, checksum: 96743baae39cd712339e9c712eee6ded (MD5) Previous issue date: 2013 | en |
| dc.description.tableofcontents | 致謝 I
中文摘要 II ABSTRACT III CONTENTS V LIST OF FIGURES VII LIST OF TABLES X SYMBOL TABLE XI Chapter 1 Introduction 1 1.1 Motivation 1 1.2 Literature Review 3 1.3 Research contribution 7 1.4 Frame of Research 7 Chapter 2 Permanent-Magnet Synchronous Motor 8 2.1 Principles of Synchronous Motor 10 2.2 Introduction of Linear Motor 14 2.3 Mathematic Model of Linear Permanent Magnet Synchronous Motor 18 2.4 The Force equation of Linear Motor 26 Chapter 3 Controller Theory 29 3.1 Sliding mode control 29 3.2 PID Controller 36 3.3 Synchronous Controller 38 3.3.1 Synchronized Master Motion Command Generator Control 38 3.3.2 Conventional Master-Slave Motion Control 39 3.3.3 Relative stiffness motion control 40 Chapter 4 Hardware and Software Arrangement 42 4.1 System Introduction 42 4.2 Hardware Construction 43 4.2.1 Moving Carriage 43 4.2.2 Digital Signal Processor 47 4.2.3 Current Amplifier 49 4.2.4 Digital-Analog Converter 50 4.2.5 Position Sensor 51 4.2.6 Analog-digital converter 52 4.3 Software Arrangement 54 4.3.1 Signal Feedback Programming 54 4.3.2 Programming Arrangement 55 Chapter 5 Experiment Result and Conclusion 57 5.1 Simulation result 57 5.2 Stage initializing Experiment 58 5.3 Single Axis Feedback Control with Sliding Mode Controller 61 5.3.1 Comparison of Synchronous Controller Property 62 5.3.2 Experiment of Switching Mode Control 68 5.3.3 Discussion of input properties 69 5.4 Experiment of Dual-Axis Performance 75 Chapter 6 Conclusion and Future Works 80 6.1 Conclusion 80 6.2 Future Works 81 REFERENCE 82 | |
| dc.language.iso | en | |
| dc.subject | 滑模控制 | zh_TW |
| dc.subject | 嵌入式系統 | zh_TW |
| dc.subject | 同動控制器 | zh_TW |
| dc.subject | 雷射干涉儀 | zh_TW |
| dc.subject | 單層雙軸精密定位氣浮平台 | zh_TW |
| dc.subject | sliding mode control (SMC) | en |
| dc.subject | Single-layer-two-axis precision positioning stage | en |
| dc.subject | PID sliding surface | en |
| dc.subject | laser interferometers | en |
| dc.subject | synchronous controlle | en |
| dc.subject | embedded microprocessor | en |
| dc.title | 基於嵌入式系統的高精度雙軸平台之驅動器與伺服控制器設計策略 | zh_TW |
| dc.title | Embedded Control System Design for a Dual Axes Single Stack Precision Stage | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 101-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.coadvisor | 陳明新(Min-Shin Chen) | |
| dc.contributor.oralexamcommittee | 陳政宏(Jeng-Hung Cheng),鍾添東(Tien-Tung Chung) | |
| dc.subject.keyword | 單層雙軸精密定位氣浮平台,滑模控制,雷射干涉儀,同動控制器,嵌入式系統, | zh_TW |
| dc.subject.keyword | Single-layer-two-axis precision positioning stage,sliding mode control (SMC),PID sliding surface,laser interferometers,synchronous controlle,embedded microprocessor, | en |
| dc.relation.page | 84 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2013-07-29 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| Appears in Collections: | 機械工程學系 | |
Files in This Item:
| File | Size | Format | |
|---|---|---|---|
| ntu-102-1.pdf Restricted Access | 3.44 MB | Adobe PDF |
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