請用此 Handle URI 來引用此文件：
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/61640完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 黃漢邦(Han-Pang Huang) | |
| dc.contributor.author | Shu-Wei Chang | en |
| dc.contributor.author | 張書瑋 | zh_TW |
| dc.date.accessioned | 2021-06-16T13:08:10Z | - |
| dc.date.available | 2013-08-06 | |
| dc.date.copyright | 2013-08-06 | |
| dc.date.issued | 2013 | |
| dc.date.submitted | 2013-08-01 | |
| dc.identifier.citation | [1] N. Brauner and G. Finke, “On a Conjecture About Robotic Cells: New Simplified Proof for the Three-Machine Case,” INFOR, Vol. 37, No. 1, pp. 20-36, 1999.
[2] W. K. Chan, J. Yi, and S. Ding, “On the Optimality of One-Unit Cycle Scheduling of Multi-Cluster Tools with Single-Blade Robots,” Proceedings of the 3rd Annual IEEE Conference on Automation Science and Engineering, Scottsdale, AZ, USA, pp. 392-397, 2007. [3] W. K. Chan, J. Yi, S. Ding, and D. Song, “Optimal Scheduling of K-Unit Production of Cluster Tools with Single-Blade Robots,” IEEE International Conference on Automation Science and Engineering, Key Bridge Marriott, DC, USA, pp. 335-340, 2008. [4] W. K. V. Chan, S. Ding, J. Yi, and D. Song, “Optimal Scheduling of Multicluster Tools with Constant Robot Moving Times, Part Ii: Tree-Like Topology Configurations,” IEEE Transactions onAutomation Science and Engineering, Vol. 8, No. 1, pp. 17-28, 2011. [5] W. K. V. Chan and T. M. Roeder, “On Gradient Estimation of Scheduling for Multi-Cluster Tools with General Robot Moving Times,” IEEE Conference onAutomation Science and Engineering, Marriott Eaton Centre Hotel Toronto, Ontario, Canada, pp. 112-117, 2010. [6] W. K. V. Chan, J. Yi, and S. Ding. (2008). Optimal Scheduling of Multi-Cluster Tools with Finite Inter-Cluster Buffers and Single-Blade Robots. Available: http://sigma.dses.rpi.edu/ROSL/Others/MC/Chan_Paper2_MultiCluster.pdf [7] W. K. V. Chan, J. Yi, and S. Ding, “Optimal Scheduling of Multicluster Tools with Constant Robot Moving Times, Part I: Two-Cluster Analysis,” IEEE Transactions on Automation Science and Engineering, Vol. 8, No. 1, pp. 5-16, 2011. [8] Q. H. Chen, “A Dynamic Power Scheduling and Real-Time Monitoring System and Its Application to Robotic System,” Master Thesis, Graduate Institute of Industrial Engineering, National Taiwan University, 2010. [9] S. Ding and J. Yi, “An Event Graph Based Simulation and Scheduling Analysis of Multi-Cluster Tools,” Proceedings of the 36th conference on Winter simulation, Washington, D.C., USA, pp. 1915-1924, 2004. [10] S. Ding, J. Yi, and M. T. Zhang, “Multicluster Tools Scheduling: An Integrated Event Graph and Network Model Approach,” IEEE Transactions on Semiconductor Manufacturing, Vol. 19, No. 3, pp. 339-351, 2006. [11] S. Ding, J. Yi, M. T. Zhang, and R. Akhavan-Tabatabaei, “Performance Evaluation and Schedule Optimization of Multi-Cluster Tools with Process Times Uncertainty,” IEEE International Conference onAutomation Science and Engineering, Shanghai, China, pp. 112-117, 2006. [12] C. C. Hsu, “Individually Addressable Bulk-Heterojuction Photodetector Arrays with Atomic Layer Deposition Prepared Tio2 as Hole-Blocking Layer,” Master, Institute of Photonics Technologies, Tsing Hua University, 2011. [13] D. Jevtic, “Method and Aparatus for Managing Scheduling a Multiple Cluster Tool,” European Patent, 2001. [14] C. Kim and T. E. Lee, “Modelling and Simulation of Automated Manufacturing Systems for Evaluation of Complex Schedules,” International Journal of Production Research, Vol. 51, No. 12, pp. 3734-3747, 2013. [15] H. J. Kim, J. H. Lee, C. Kim, S. H. Baik, and T. E. Lee, “Scheduling in-Line Mulitple Cluster Tools: A Decomposition Approach,” International Conference on Mechatronics and Automation, Chengdu, pp. 1544-1549, 2012. [16] S. Kumar, N. Ramanan, and C. Sriskandarajah, “Minimizing Cycle Time in Large Robotic Cells,” IIE Transactions, Vol. 37, No. 2, pp. 123-136, 2005. [17] H. Y. Lee and T. E. Lee, “Scheduling Single-Armed Cluster Tools with Reentrant Wafer Flows,” IEEE Transactions on Semiconductor Manufacturing, Vol. 19, No. 2, pp. 226-240, May 2006. [18] H. Neil Geismar, M. Dawande, and C. Sriskandarajah, “Approximation Algorithms for K-Unit Cyclic Solutions in Robotic Cells,” European Journal of Operational Research, Vol. 162, No. 2, pp. 291-309, 2005. [19] Y. Sun, N. Wu, and M. Zhou, “Closed-Form Solution for Cycle Time of Revisiting Processes in Single-Arm Cluster Tool Scheduling with Atomic Layer Deposition,” IEEE International Conference onNetworking, Sensing and Control (ICNSC), Netherlands, pp. 377-382, 2011. [20] D. Tonke and T. E. Lee, “Scheduling of a Dual-Armed Cluster Tool with Two Independent Robot Arms,” IEEE International Conference on Automation Science and Engineering (CASE), Seoul, pp. 200-205, 2012. [21] X. C. Tsai, “The Development of the Scheduling Mechanism of a Semiconductor Cluster Tool,” Master, Department of Mechanical Engineering, National Taiwan University, 2000. [22] Y. L. Tsai, “An Intelligent Power and Battery Management System for Robots,” Master Graduate Institute of Industrial Engineering, National Taiwan University, 2011. [23] S. Venkatesh, R. Davenport, P. Foxhoven, and J. Nulman, “A Steady-State Throughput Analysis of Cluster Tools: Dual-Blade Versus Single-Blade Robots,” IEEE Transactions on Semiconductor Manufacturing, Vol. 10, No. 4, pp. 418-424, 1997. [24] Z. L. Wang, “The Modeling and Control of the Cluster Tool in Semiconductor Fabrication,” Master Department of Mechanical Engineering, National Taiwan University, 2000. [25] N. Wu, F. Chu, C. Chu, and M. Zhou, “A Novel Approach to Scheduling of Single-Arm Cluster Tools with Wafer Revisiting,” IEEE International Conference on Automation Science and Engineering, Bangalore, India, pp. 567-572, 2009. [26] N. Wu, F. Chu, C. Chu, and M. Zhou, “Petri Net-Based Cycle Time Analysis of Dual-Arm Cluster Tools with Wafer Revisiting and Swapping Strategy,” IEEE International Conference on Robotics and Automation (ICRA), Shanghai, China, pp. 5499-5504, 2011. [27] N. Wu, F. Chu, C. Chu, and M. Zhou, “Petri Net-Based Scheduling of Single-Arm Cluster Tools with Reentrant Atomic Layer Deposition Processes,” IEEE Transactions on Automation Science and Engineering, Vol. 8, No. 1, pp. 42-55, 2011. [28] N. Wu, F. Chu, C. Chu, and M. Zhou, “Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools with Wafer Revisiting,” IEEE Transactions on Systems, Man, and Cybernetics: Systems, Vol. 43, No. 1, pp. 196-207, 2013. [29] N. Wu and M. Zhou, “A Novel Scheduling Approach to Dual-Arm Cluster Tools with Wafer Revisiting,” IEEE International Conference on Systems, Man, and Cybernetics (SMC), Seoul, pp. 1213-1218, 2012. [30] N. Wu, M. C. Zhou, F. Chu, and C. Chu, “A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools with Wafer Revisiting,” IEEE Transactions on Systems, Man, and Cybernetics: Systems, Vol. PP, No. 99, pp. 1-13, 2013. [31] S. H. Wu, “Diagnosing and Predictive Maintenance Systems for Abnormal Behavior of Power Scheduling Loading and Its Applications to Robotics System,” Master Graduate Institute of Industrial Engineering, National Taiwan University, 2010. [32] Z. Y. Xiao, “Development of Remote Control System of a Semiconductor Cluster Tool,” Master Department of Mechanical Engineering, National Taiwan University, 2001. [33] Q. Yan, W. NaiQi, and Z. MengChu, “A Petri Net-Based Novel Scheduling Approach and Its Cycle Time Analysis for Dual-Arm Cluster Tools with Wafer Revisiting,” IEEE Transactions on Semiconductor Manufacturing, Vol. 26, No. 1, pp. 100-110, 2013. [34] Q. Yan, N. Wu, and M. Zhou, “Modeling and Analysis of Dual-Arm Cluster Tools for Wafer Fabrication with Revisiting,” IEEE Conference on Automation Science and Engineering (CASE), Trieste, Italy, pp. 90-95, 2011. [35] Q. Yan, N. Wu, and M. Zhou, “Petri Net-Based Scheduling Analysis of Dual-Arm Cluster Tools with Wafer Revisiting,” IEEE International Conference on Automation Science and Engineering (CASE), Seoul, Korea, pp. 206-211, 2012. [36] J. Yi, S. Ding, and D. Song, “Steady-State Throughput and Scheduling Analysis of Multi-Cluster Tools for Semiconductor Manufacturing: A Decomposition Approach,” IEEE International Conference on Robotics and Automation, Barcelona, Spain, pp. 292-298, 2005. [37] C. Y. Yu and H. P. Huang, “Development of the Order Fulfillment Process in the Foundry Fab by Applying Distributed Multi-Agents on a Generic Message-Passing Platform,” IEEE/ASME Transactions on Mechatronics, Vol. 6, No. 4, pp. 387-398, 2001. [38] W. M. Zuberek, “Cluster Tools with Chamber Revisiting-Modeling and Analysis Using Timed Petri Nets,” IEEE Transactions on Semiconductor Manufacturing, Vol. 17, No. 3, pp. 333-344, 2004. | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/61640 | - |
| dc.description.abstract | 集結式機台廣泛地應用在半導體製造上，由於半導體的製程日益複雜，多集結式機台的應用逐漸顯現出來。尤其，某些晶圓的製程，像是原子層沉積這類的重入過程，晶圓必須由相同的某些機台加工很多次，就很適合利用多集結式機台。因此，如何用有效率的方法找到一個好的排程，對生產改善與成本降低是至為重要的。
本論文針對含有4個機器手臂且包含重入過程之一個雙集結式機台進行探討，在考慮所有晶圓都依循同一加工路徑的狀況下，求出系統在穩態時的輸出與排程。由於問題的複雜度，我們使用分解法將此一問題分成兩個問題，分別是含有4個機器手臂但不包含重入過程之一個雙集結式機台問題，以及有2個機器手臂並且包含重入過程之一個單集結式機台的問題。 在探討4個機器手臂並且包含重入過程之一個雙集結式機台問題底下，我們藉由分析法來決定2個機器手臂並且包含重入過程之單集結式機台的排程。並且根據此結果，藉由將連續的重入過程之機台視為單一無重入過程之機台，建立一個含有4個機器手臂並且包含重入過程之雙集結式機台的轉換模型。然後，使用含有4個機器手臂但不包含重入過程之一個雙集結式機台問題的混和整數規劃，來求出另一2個機器手臂不包含重入過程之單集結式機台的排程。 最後，我們再用模擬系統來確認系統的有效性。從結果顯示，在1或2單位的週期循環中，可以發現含有4個機器手臂並且包含重入過程之雙集結式機台的轉換模型的結果，與含有4個機器手臂並且包含重入過程之雙集結式機台的原模型結果相同。 | zh_TW |
| dc.description.abstract | Cluster tools are widely used as semiconductor manufacturing equipment. In particular, they are suitable for wafer fabrication processes with revisiting process, such as the atomic layer deposition (ALD) process in which the wafers need to visit some processing modules for many times. How to find an efficient way for scheduling a multi-cluster tool is critical for productivity improvement and cost reduction.
In this study, we analyze the steady-state throughput and the scheduling of the two-cluster tool with four blades including revisiting process. We consider the case where all wafers follow the same processing flow within two cluster tools. The two-cluster tool with four blades including revisiting process problem is decomposed into the two-cluster tool with four blades without revisiting process problem and the single cluster tool with two blades including revisiting process problem. First, we apply the analyzing method to the single cluster tool with two blades including revisiting process problem. We determine the robot actions in the cluster tool including revisiting process. Based on the result, we build a transformation model of the two-cluster tool with four blades including revisiting process by regarding the consecutive revisiting processing modules as one processing module. Then, we use mixed integer programming method to find the solutions of the robot actions for the transformation model. Finally, we use simulation system to validate its effectiveness. The result of transformation model of the two-cluster tool with four blades including revisiting process shows that it is the same as the result of the original model of two-cluster tool with four blades including revisiting process by the simulation system in the 1-unit or 2-unit cycle. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-16T13:08:10Z (GMT). No. of bitstreams: 1 ntu-102-R99546045-1.pdf: 2150354 bytes, checksum: 68e6055c09e2847b80e90c8effaf2b81 (MD5) Previous issue date: 2013 | en |
| dc.description.tableofcontents | 摘要 i
Abstract iii List of Tables vii List of Figures ix Chapter 1 Introduction 1 1.1 Motivation 1 1.2 Literature Survey 2 1.3 Scope of Research 3 1.4 Contributions 3 1.5 Thesis Organization 5 Chapter 2 Background Knowledge 7 2.1 Revisiting Process 7 2.2 Cluster Tool 8 2.3 Statistical Process Control (SPC) 11 2.4 Generic Message-Passing Platform (GMPP) 13 Chapter 3 Environment of the Two-Cluster Tool 15 3.1 Fabrication Process of Organic Batteries 15 3.2 Cluster Tool Modules and Controllers 19 3.3 Problem Description 23 Chap 4 Methodologies 25 4.1 Single-Cluster Tool with Two Robots including the Revisiting Process 25 4.1.1 Parameters m+1 and k are Relatively Prime 28 4.1.2 Parameters m+1 and k are not Relatively Prime 40 4.2 Transformation of the Cluster Tool with Two Robots including Revisiting Process 49 4.2.1 PB 1-Unit Cycle 51 4.2.2 NPB 1-Unit cycle 54 4.3 Mixed Integer Programming of the Two-Cluster Tool with Four Robots without Revisiting Process 56 4.3.1 Two-Cluster Tool with Four Blades without Revisiting Process 58 4.3.2 Initial Allocation of Jobs 72 Chap 5 Simulation Results 73 5.1 Analysis of Single-Cluster Tool with Revisiting Process 74 5.1.1 Parameters m+1=3 and k=4 are Relatively Prime 74 5.1.2 Parameters m+1=3 and k=3 are not Relatively Prime 75 5.2 Occupation Time in Transformation Model 82 5.2.1 PB 1-Unit Cycle 83 5.2.2 NPB 1-Unit Cycle 84 5.2.3 NPB 2-Unit Cycle 85 5.3 Analysis of the Two-Cluster Tool with Four Robots without Revisiting Process 88 5.3.1 PB 1-Unit Cycle when m=2 and k=4 88 5.3.2 PB 3-Unit Cycle when m=2 and k=3 90 5.3.3 NPB 1-Unit Cycle when m=2 and k=3 92 5.3.4 NPB 2-Unit Cycle when m=2 and k=3 94 5.4 Result of the Two-Cluster Tool with Four Robots Including Revisiting Process 97 5.4.1 PB 1-Unit Cycle when m=2 and k=4 97 5.4.2 NPB 1-Unit Cycle when m=2 and k=3 99 5.4.3 NPB 2-Unit Cycle when m=2 and k=3 101 Chap 6 Conclusions and Future Works 103 References ……………………………………………………………105 | |
| dc.language.iso | en | |
| dc.subject | 重入過程 | zh_TW |
| dc.subject | 多集結式機台 | zh_TW |
| dc.subject | 混和整數規劃 | zh_TW |
| dc.subject | 機械手臂 | zh_TW |
| dc.subject | multi-cluster tools | en |
| dc.subject | four blades | en |
| dc.subject | revisiting process | en |
| dc.subject | mixed integer programming | en |
| dc.title | 雙集結式機台包含重入流程之排程規劃 | zh_TW |
| dc.title | Scheduling of Two-Cluster Tools with Four Blades including Revisiting Process | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 101-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 陳建良(James C. Chen),吳建瑋(Chien-Wei Wu) | |
| dc.subject.keyword | 多集結式機台,混和整數規劃,重入過程,機械手臂, | zh_TW |
| dc.subject.keyword | multi-cluster tools,mixed integer programming,revisiting process,four blades, | en |
| dc.relation.page | 108 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2013-08-01 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 工業工程學研究所 | zh_TW |
| 顯示於系所單位： | 工業工程學研究所 | |
文件中的檔案：
| 檔案 | 大小 | 格式 | |
|---|---|---|---|
| ntu-102-1.pdf 未授權公開取用 | 2.1 MB | Adobe PDF |
系統中的文件，除了特別指名其著作權條款之外，均受到著作權保護，並且保留所有的權利。