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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 鍾添東 | |
| dc.contributor.author | Yi-Feng Chen | en |
| dc.contributor.author | 陳藝丰 | zh_TW |
| dc.date.accessioned | 2021-06-16T10:18:40Z | - |
| dc.date.issued | 2013 | |
| dc.date.submitted | 2013-08-16 | |
| dc.identifier.citation | [1] 蘇建彰、陳建洋、林建宏、謝逸凡、蔡居恕、賴文郎、張復瑜, '轉印模仁之奈米結構製作,' 機械工業雜誌269期，2005年8月號, pp.44-55.
[2] M.J. Wieland, G. de Boer et al, 'MAPPER: High throughput maskless lithography,' in Proc. of SPIE, 2009, Vol. 727100, pp. 1-8. [3] Ho Seob Kim, Young Chul Kim , Dae-Wook Kim et al, 'Low energy electron beam microcolumn lithography, ' Microelectronic Engineering, vol.83, pp. 962-967, 2006. [4] H. He, J. C. She et al, 'Precisely-controlled fabrication of single ZnO nanoemitter arrays and their possible application in low energy parallel electron beam exposure, ' Nanoscale, vol.4, pp.2101-2108, 2012. [5] T. Yoshimoto, S.H. Hwang, K.H. Kim, D.J. Seong, D.W. Kim, Y.C. Kim, S.J. Ahn and H.S. Kim, 'Nano Patterning Fabrication by Low Energy Microcolumn Lithography,' in Proc. of SPIE, 2007, vol. 6476, pp. 121- 127. [6] Paul Petric, Chris Bevis et al, 'New advances with REBL for maskless high-throughput EBDW lithography, ' in Proceedings of the SPIE, 2011, vol. 7970, pp. 1801-1814. [7] In-Keun Yu, Sang-Ryul In, Jong-Yeun Lim and Seungyon Cho, 'Design and Test of the KSTAR Vacuum Pumping System,' Fusion Engineering and Design, vol. 83, pp.117-122, 2008. [8] Tien-Tung Chung, Tzu-Yang Chen and Chieh-Jen Yang, 'Performance of an Ultra-High Vacuum System for Massively Parallel Maskless Lithography System,' in CACS International Automatic Control Conference (CACS/iACC 2008), Tainan, Taiwan, November 2008, vol. I1701, pp. 21-23. [9] Tien-Tung Chung, Yi-Ting Tu, Yi-Feng Chen, Wei-Ming Wu, 'Design of a new ultra-high vacuum system for massively parallel maskless lithography,' in 2010 2nd International Conference on Mechanical and Electronics Engineering, 2010, vol. 1, pp. 154- 158. [10] John Wilson, AutoCAD2000 3D modeling, Beijing: China machine press, 2000. [11] Sun jiang-hong, Mi jie, programming and application of visualLisp, Beijing: science press, 1999. [12] Chen dao-jie, Fu shou-muo, The application of AutoLISP, Chengdu: Sichuan university press, 1995. [13] R.B. Stone and A. Chakrabarti, Editors, Engineering applications of representations of function, part 1, Artificial Intelligence for Engineering Design, Analysis and Manufacturing , vol.19, pp. 63-132, 2005. [14] R.B. Stone and A. Chakrabarti, Editors, 'Engineering applications of representations of function, part 2, Artificial Intelligence for Engineering Design, Analysis and Manufacturing, vol.19, pp. 137-219, 2005. [15] R. Sudarsan, S.J. Fenves, R.D. Sriram and F. Wang, 'A product information modeling framework for product lifecycle management,' Computer-Aided Design, vol. 37 , pp. 1399-1411, 2005. [16] Xiu Shixin et al, 'Development of the Vacuum Interrupter Computer Aided Design System VI-CAD,' in proc. of International Symposium on Discharges and Electrical Insulation in Vacuum, 2006, vol. 2, pp. 466-469. [17] John F. O'Hanlon, A User's Guide to Vacuum Technology, 3rd Edition. New Jersey: John Wiley & Sons, Inc., 1993. [18] 陳建人, 真空技術與應用, 國家實驗研究院儀器科技研究中心出版, 2006, pp.3-8, pp.101-104, pp.244-249. [19] Vacuum chamber, Vacuum chamber-Wikipedia, last modified on 8 July 2012, http://en.wikipedia.org/wiki/Vacuum_chamber, (Accessed: 18 July 2012). [20] Vacuum chambers, Vacuum Chambers Manu-Kurt J. Lesker Company, http://www.lesker.com/newweb/menu_Chambers.cfm (Accessed: 19 July 2012). [21] Catalog of VARAIAN Inc., http://www.varianinc.com/cgi-bin/nav?products/vacuum/pumps/ion/index&cid=LNQNNIOJFI(Accessed: June 2011) [22] Catalog of MDC (http://www.mdcvacuum.com/Index.aspx) [23] Catalog of HIGH VACUUM APPARATUS. http://www.highvac.com/pdf/11000_02_Standard_Cycle.pdf (Accessed: June 2 011). [24] Catalog of Trigger Technology Inc. (http://www.trigger-tech.com/trigger/products_detail.php?id=1137) (Accessed: May 2011) [25] Niels Marquardt, 'Introduction to the Principles of Vacuum Physics,' Institute for Accelerator Physics and Synchrotron Radiation, University of Dortmund, 44221 Dortmund, Germany. [26] Andrew Chew, 'Mechanical pumps,' CERN Accelerator School, Spain, 2006. [27] Http://upload.wikimedia.org/wikipedia/commons/4/4c/Cut_through_turbomolecular_pump.jpg [28] M. Audi, 'Ion Pumps,' CERN Accelerator School, 2006. [29] Tien Tung Chung, Chih Kang Lu, Yi Ting Tu, ”Design, Manufacturing and Pump-down Curve Simulation of High Vacuum Systems,” Applied Mechanics and Materials, vol. 220-223, pp. 575-579, 2012. | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/60456 | - |
| dc.description.abstract | 本論文發展了一套真空系統之電腦輔助設計軟體，並利用此軟體來設計一套用於用於電子束直寫微影的超高真空系統。此軟體的內容包含：真空零件資料庫、真空系統的參數化設計、對話框架構的使用者介面。真空零件資料庫將零件的外觀尺寸儲存在Excel，而使用者介面是利用Visual studio 2010 C++所建立的。真空系統的參數化設計則是使用了AutoLISP語言來撰寫。設計者在使用者介面中設計完真空系統，就可以呼叫AutoCAD來輸出所設計的真空系統實體模型，並利用先前已發展過的抽氣分析軟體來評估效率。最後，本論文利用此一軟體設計了一套超高真空系統，並提出其最佳抽氣流程。 | zh_TW |
| dc.description.abstract | This thesis develops a computer aided design (CAD) tool for vacuum system dessign, and uses it to design an ultra-high vacuum (UHV) system for electron beam diret-write lithography (EBDL). The CAD tool for vacuum system includes the vacuum components liabray, the parametric design of vacuum system, and the dialog-based user interface. The vacuum component library stores the feature dimensions and is saved in an Excel file. The user interface is developed by Visual C++, and the parametric design of vacuum system is developed by AutoLISP language. Designers design the vacuum system through the user interface, and the CAD tool will then link to AutoCAD to generate the solid model of the desired vacuum system automatically. The pump-down efficiency of the vacuum system could be estimated by the developed pump-down curve simulation program. Finally, an ultra-high vacuum system for EBDL is designed by the CAD tool, and the pumping procedure is developed. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-16T10:18:40Z (GMT). No. of bitstreams: 1 ntu-102-R98522608-1.pdf: 10335134 bytes, checksum: 2350ee88f8e0c3066346793d173cf24a (MD5) Previous issue date: 2013 | en |
| dc.description.tableofcontents | 口試委員審定書 i
Acknowledgement ii 摘要 iii ABSTRACT iv CONTENTS v LIST OF FIGURES vii LIST OF TABLES x Chapter 1 Introduction 1 1.1 Background 1 1.2 Paper review 1 1.3 Research objective and method 4 1.4 Thesis statements 5 Chapter 2 Introduction of vacuum system 7 2.1 Introduction of vacuum 7 2.2 Introduction of vacuum components 9 2.2.1 Vacuum chamber 9 2.2.2 Con-Flat flange 10 2.2.3 ISO flange 12 2.2.4 Vacuum pump 14 2.2.5 Other vacuum components 18 Chapter 3 The computer aided design tool for vacuum system 21 3.1 Parametric design of vacuum system 22 3.1.1 Establishment of the vacuum component library 22 3.1.2 Parameters of vacuum components 26 3.1.3 Coordinate system and design information storage 28 3.1.4 Subassemblies of vacuum chamber and designed-cover 32 3.1.5 Parametric drawing program of vacuum system 35 3.2 User interface for vacuum system 39 3.2.1 The appearance of user interface 39 3.2.2 The data structure in the user interface 40 3.2.3 The features of user interface and design procedures of vacuum system design 42 Chapter 4 The design of the vacuum system 46 4.1 Ultra-high vacuum system design 46 4.2 Design the UHV system by using the computer aided design tool for vacuum system 49 4.3 Prototype manufacturing 55 Chapter 5 The pump-down experiment of ultra-high vacuum system 57 5.1 The pump-down experiments of the main chamber 57 5.2 The pump-down curves of the ultra-high vacuum system for wafer production process 62 Chapter 6 Conclusions and suggestions 65 6.1 Conclusions 65 6.2 Suggestion 66 Reference 67 Appendix A Parametric drawing program 70 作者簡歷 93 | |
| dc.language.iso | en | |
| dc.subject | 超高真空 | zh_TW |
| dc.subject | AutoCAD | zh_TW |
| dc.subject | 電腦輔助設計 | zh_TW |
| dc.subject | 使用者介面 | zh_TW |
| dc.subject | 電子束微影 | zh_TW |
| dc.subject | 參數化設計 | zh_TW |
| dc.subject | design | en |
| dc.subject | ultra-high vacuum | en |
| dc.subject | EBDL | en |
| dc.subject | user interface | en |
| dc.subject | parametric | en |
| dc.subject | computer aided design | en |
| dc.subject | AutoCAD | en |
| dc.title | 真空系統之電腦輔助設計軟體開發及抽氣流程 | zh_TW |
| dc.title | Computer Aided Design Tool and Pumping Procedure for Vacuum System | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 101-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 劉正良,史建中 | |
| dc.subject.keyword | 電腦輔助設計,超高真空,電子束微影,使用者介面,參數化設計,AutoCAD, | zh_TW |
| dc.subject.keyword | computer aided design,ultra-high vacuum,EBDL,user interface,parametric,design,AutoCAD, | en |
| dc.relation.page | 94 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2013-08-17 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
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|---|---|---|---|
| ntu-102-1.pdf 未授權公開取用 | 10.09 MB | Adobe PDF |
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