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標題: | 基於倒立式光學顯微鏡之原子力顯微鏡系統設計與開發 Design and Development of an Atomic Force Microscopy based on an Inverted Optical Microscope |
作者: | Yu-Ting Mai 麥毓庭 |
指導教授: | 廖先順(Hsien-Shun Liao) |
關鍵字: | 原子力顯微鏡,像散原理,光聲效應,光學顯微鏡,混合式成像系統, Atomic force microscope,Astigmatism,Photoacoustic effect,Optical microscope,Hybrid imaging system, |
出版年 : | 2020 |
學位: | 碩士 |
摘要: | 本論文致力於開發一套與倒立式光學顯微鏡進行結合之原子力顯微鏡系統,此系統可針對樣品的同一特定區域同時進行光學與表面高度量測。在實驗中,我們針對兩根直徑約為 7 μm 的碳纖維進行成像,使用掃描行程為 93 μm,量測碳纖維高度平均值為 6.39 μm,並可同時獲得原子力顯微鏡以及光學影像。此外,本論文進一步利用倒立式光學顯微鏡光路結合一藍光雷射進行光聲成像實驗,目標為得到樣品表面下之高解析度成像。實驗中,我們分別利用微懸臂感測系統以及超音波換能器偵測光聲訊號,其中,微懸臂感測系統可在一解析度測試片上之不同材料區域得到具對比度之影像。然而,超音波換能器的偵測結果顯示沒有明顯的對比,我們推測需要近一步使用高速之脈衝雷射提升光聲訊號雜訊比。 In this thesis, we devoted to develop a hybrid imaging system that combined an atomic force microscope (AFM) with an inverted optical microscope. The proposed system can obtain both optical image and surface height simultaneously in the specific sample area. In the experiment, two carbon fibers with a diameter of 7 μm were measured using a scan range of 93 μm. The result showed that the average height of the carbon fibers was 6.39 μm. Moreover, to obtain high-resolution sub-surface image, the hybrid system was used for the photoacoustic imaging experiment through combining a blue-ray laser into the inverted optical microscope. In the experiment, we utilized a cantilever sensor system and an ultrasonic transducer to detect the photoacoustic signal individually. The result displayed that the cantilever sensor system acquired an image of the resolution target with obvious contrast. However, the outcome from the ultrasonic transducer didn’t show obvious contrast. We concluded that a high-speed pulsed laser is required to improve the signal-to-noise ratio of the photoacoustic signal. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/58972 |
DOI: | 10.6342/NTU202001393 |
全文授權: | 有償授權 |
顯示於系所單位: | 機械工程學系 |
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U0001-0807202018174100.pdf 目前未授權公開取用 | 4.72 MB | Adobe PDF |
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