以CMOS 0.18μm製程之主動電感實現的微型化左右手傳輸線及在90度功率分配器之應用

Abstract

本論文以TSMC 0.18μm CMOS製程來實現左右手傳輸線(composite right/left-handed transmission line)，並應用bond wire技術結合主被動電路，藉此實現3-7.6GHz的 90o功率分配器(quadrature power splitter)。 本電路中採用人造左手傳輸線理論(LH)用以製造正相位，並以右手傳輸線 (RH)製造負相位，以此來實現90o功率分配器。又因傳統螺旋式電感占用面積與電感值成正比，寄生電阻與面積亦成正比，且品質因子(Q factor)偏小，因此本電路採用體積較小之主動電感來取代傳統的螺旋式電感，藉此微小化電路尺寸並產生較高的品質因子(Q factor)。又因主動電感可微調之特性，可用以修正電路中之非理想性偏移，使電路更符合實際的設計。本論文之目的在於研製一個較小體積之左右手傳輸線並應用於90o功率分配器。晶片電路大小約為250μm x480μm，功率損耗約為4.69mW，頻段內 皆小於-10dB，頻段內輸出振幅不平衡約為0.5dB。

This thesis presents the implementation of a 3-7.6 GHz broadband quadrature power splitter (QPS) by combining both active and passive processes. The active process used is TSMC 0.18μm CMOS and the passive process used is FR4 printed circuit board (PCB). We use bond wire interconnects to combine the T18 chip and the PCB. This QPS uses CRLH transmission line theory for creating the positive phase and RH transmission line to create negative phase. Since conventional on chip spiral inductors has inductance values proportional to the area occupied and its parasitic resistance is proportional to its area, the quality factor (Q factor) is too low. This thesis uses an active inductor to replace the traditional passive spiral inductors to miniaturize the circuit area and obtain higher Q factor. Chip size is 250μm x480μm, power consumption is about 4.69mW, is less than -10dB, and the output amplitude imbalance is about 0.5dB at 3~7.6GHz.