可撓式薄膜觸覺微感測元件於人體生理監控模組開發

Abstract

本論文利用溶膠-凝膠製程沉積壓電薄膜在可撓之不鏽鋼基板上並開發可撓式之觸覺感測器，不鏽鋼可撓基板優點有應用範圍大、具彎曲性、耐高溫、輕和薄。另外，可撓式觸覺感測器可應用在人體脈搏、脈搏波速、血流速度及中醫脈診上。在陶瓷薄膜之觸覺感測器可分別製作於矽基板與可撓式不鏽鋼基板上。根據本次研究結果，鋯鈦酸鉛薄膜沉積在可撓不鏽鋼基板之靈敏度為0.085~0.110mVg-1mm-2，且高於鋯鈦酸鉛薄膜沉積於矽基板之靈敏度0.017mVg-1mm-2。 在製作以三氟乙烯共聚物薄膜為感測材料之觸覺感測器，於過程中使用電解水解離法能夠改善不鏽鋼基板之表面能。電解水處理製程其優點有低成本、低汙染，製成簡單與非破壞製程等等。實驗結果顯示以三氟乙烯共聚物薄膜沉積在不鏽鋼基板上之觸覺感測器之靈敏度為0.067mVg-1mm-2。 可撓式之觸覺感測器使用來量測人體不同之動脈脈搏處，包括頸動脈、肱動脈、足背動脈、橈動脈和二尖脈之動脈脈搏，並且克服人體之各種動脈區域及檢測人體之動脈輸出之脈搏信號，測量到之動脈脈搏波形可用於診斷患者動脈之相關疾病。量測人體不同動脈處之脈搏波速度(Pulse Wave Velocity, PWV)分別有二尖脈到橈動脈、肱動脈到橈動脈及橈動脈到足背動脈之脈搏波速度。而量測人體之血流速度(Blood Flow Velocity, BFV)分別有頸動脈及橈動脈之區域。最後，可撓之觸覺感測器應用在中醫脈診上，中醫醫學之脈診最主要為橈動脈之脈位處分別有寸、關、尺之脈位，藉由寸、關、尺之脈位及不同之脈診深度來獲得不同之脈搏波形之輸出，量測到在不同之脈位上之脈搏波形並且由脈搏波形能夠提供其人體之器官之健康狀況之相關資訊。

This dissertation presents the development of tactile sensors using the sol-gel process to deposit a piezoelectric thin-film on a flexible stainless steel substrate. Ceramic-based tactile sensors using both silicon and stainless steel substrates were demonstrated and excellent ferroelectric properties were demonstrated. It is characterized that the sensitivity of our PZT-based tactile sensor was approximately 0.085~0.110mVg-1mm-2 on a stainless steel substrate while the sensitivity of the PZT-based tactile sensor was approximately 0.017 mVg-1mm-2 on a silicon substrate. A polymer-based tactile sensor using P(VDF-TrFE) material was also demonstrated with the developed deionized (DI) water dissociation technique. The deionized (DI) water dissociation technique has several advantages, such as low cost, minimal pollution, easy fabrication and non-destructive processing. It is characterized that the sensitivity of the P(VDF-TrFE) tactile sensor was approximately 0.067mVg-1mm-2. The developed flexible tactile sensors can be used to measure human pulses at several areas, including carotid, brachial, ankle, radial artery, and apical regions. Flexible tactile sensors can overcome the diverse topology of various human body regions and sense the corresponding signals. The measured arterial pulse waveforms can be used to diagnose hypertension and cardiac failure of patients. Pulse wave velocity (PWV) was demonstrated based on human pulse measurements from apical to radial, brachial to radial, and radial to ankle. In addition, the tactile sensor was utilized to measure blood flow velocity (BFV) of human body such as carotid and radial artery. Finally, our tactile sensor was used to monitor the pulse waveforms of Cun, Guan, and Chi acupoints located at the radial artery region of the human body in Traditional Chinese Medicine (TCM).