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  1. NTU Theses and Dissertations Repository
  2. 工學院
  3. 材料科學與工程學系
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/57437
完整後設資料紀錄
DC 欄位值語言
dc.contributor.advisor吳錫侃(Shyi-Kaan Wu)
dc.contributor.authorChun-Ming Lungen
dc.contributor.author龍俊名zh_TW
dc.date.accessioned2021-06-16T06:46:04Z-
dc.date.available2019-08-13
dc.date.copyright2014-08-13
dc.date.issued2014
dc.date.submitted2014-07-26
dc.identifier.citationCH1
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CH2
[1] M. Ishimori, Y. Kanamori, M. Sasaki, K. Hane, Subwavelength antireflection gratings for light emitting diodes and photodiodes fabricated by fast atom beam etching, Jpn. J. Appl. Phys. 41 (2002) 4346-4349.
[2] Y. Kanamori, M. Sasaki, K. Hane, Broadband antireflection gratings fabricated upon silicon substrates, Opt. Lett. 24 (1999) 1422-1424.
[3] M. A. Green, Crystalline Silicon Photovoltaic Cells, Adv. Mater. 13 (2001) 1019.
[4] S. L. Diedenhofen, G. Vecchi, R. E. Algra, A. Hartsuiker, O. L. Muskens, G. Immink, E. Bakkers, W. L. Vos, J. G. Rivas, Broad-band and Omnidirectional Antireflection Coatings Based on Semiconductor Nanorods, Adv. Mater. 21 (2009) 973.
[5] J. Hiller, J.D. Mendelsohn, M. F. Rubner, Reversibly erasable nanoporous anti-reflection coatings from polyelectrolyte multilayers, Nature Materials. 1 (2002) 59 -63.
[6] P. Lalanne, Design, fabrication and characterization of subwavelength periodic structures for semiconductor anti-reflection coating in the visible domain, Proc. of SPIE 2776 (1996) 300-309.
[7] S.M. Yang, Y.C. Hsieh, C.A. Jeng, Optimal design of antireflection coating and
experimental verification by plasma enhanced chemical vapor deposition in small displays, J. Vac. Sci. Technol. A 27 (2009) 336-341.
[8] Y.F. Huang, S. Chattopadhyay, Nanostructure surface design for broadband and angle-independent antireflection, J. Nanophotonics. 7 (2013) 073594 (8pp).
[9] S. Wang, X.Z. Yu, H.T. Fan, Simple lithographic approach for subwavelength structure antireflection, Appl. Phys. Lett. 91 (2007) 061105 (3 pp).
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synthesis of single-crystal silicon nanowires, Appl. Phys. Lett. 78 (2001) 2214–2216.
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[20] Y.K. Tseng, C.J. Huang, H.M. Cheng, I.N. Lin, K.S.Liu, I.C. Chen, Characterization and Field-Emission Properties of Needle-like Zinc Oxide Nanowires Grown Vertically on Conductive Zinc Oxide Films , Adv. Funct. Mater. 13 (2003) 81.
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CH3
[1]http://www.eia.gov/
[2]M. I. Hoffert, K. Caldeira, A. K. Jain, E. F. Haites, L. D. D. Harvey, S. D. Potter, M. E. Schlesinge, S. H. Schneider, R. G. Watts, T. M. L. Wigley , D. J. Wuebbles, Energy implications offuture stabilization of atmospheric CO2 contentNature 395 (1998) 881.
[3]http://www.erec.org/media/publications/2040-scenario.html, p.11 in Renewable Energy Scenario to 2040, 2004.
[4]K. Chopra, 3rd Work Shop on Thin Films Physics and Technology Proceeding. New Delhi, (1999) 8–24.
[5]H.J. Chen, 'Efficiency Enhancement of Nanotextured Silicon Solar Cells by Atomic Layer Deposition,' National Taiwan University Master Thesis.
[6]Z. Wang, C. Lin, X. Liu, G. Li, Y. Luo, Z. Quan, H.Xiang, J. Lin, Tunable Photoluminescent and Cathodoluminescent Properties of ZnO and ZnO:Zn Phosphors, J. Phys. Chem. B 110 (2006) 9469.
[7]Y.K. Tseng, C.J. Huang, H.M. Cheng, I.N. Lin, K.S.Liu, I.C. Chen, Characterization and Field-Emission Properties of Needle-like Zinc Oxide Nanowires Grown Vertically on Conductive Zinc Oxide Films , Adv. Funct. Mater. 13 (2003) 81.
[8]Y. J. Lee, T. L. Sounart, J. Liu, E. D. Spoerke, B. B. McKenzie, J. W. P. Hsu, J. A. Voigt, Tunable Arrays of ZnO Nanorods and Nanoneedles via Seed Layer and Solution Chemistry, Cryst. Growth Des. 8 (2008) 2036-2040.
dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/57437-
dc.description.abstract本研究利用水熱法合成超長氧化鋅奈米陣列作為抗反射層,應用在太陽能電
池上。在水熱法製備中,我們探討分析不同前驅物濃度對奈米陣列之形貌與性質
的影響,包括結構、發光頻譜與反射率。從光學性質分析可以得知氧化鋅奈米柱
內部存在有大量的缺陷。因此我們利用熱處理來降低缺陷密度,使入射太陽光在
穿越抗反射層時不會被氧化鋅奈米陣列吸收。此外,我們進一步將抗反射層應用
在矽晶太陽能電池上,發現在熱處理前因為氧化鋅內部缺陷較多,使入射太陽光
在穿透氧化鋅奈米陣列的過程中被吸收,因此太陽能電池的效率較低;在經過熱
處理後因為缺陷被消除,而使得效率上升。另一方面,我們也觀察到合成氧化鋅
奈米陣列的化學原料濃度對抗反射層的形貌與結構有顯著的影響;在適當的化學
原料濃度時,太陽能電池的效率可達 17.83%。我們並利用原子層沉積技術在氧
化鋅奈米陣列上均勻的鍍上一層具有高包覆度的氧化鋁薄膜可作為氧化鋅的抗
腐蝕保護層,並提供額外的折射率梯度,使入射太陽光在進入矽晶片時會有更少
的反射率。同時我們利用時域有限差分(FDTD)模擬與實驗同時探討具有不同厚
度的氧化鋁薄膜會對反射率之影響,結果不論是實驗或模擬都顯示在氧化鋁薄膜
的厚度為 12nm 時,會有最低的反射率。最後,在最佳化氧化鋅奈米陣列抗反射
結構之後,矽晶太陽能電池的效率可以從無反射層的 9.08%提升到 18.28%。
zh_TW
dc.description.abstractIn this thesis, we used a hydrothermal method to synthesize ultra-long ZnO nanorods array (NRA), which was utilized as the effective anti-reflective structure for
enhancing the performance of silicon solar cells.We investigated the effect of precursor concentration on the characteristics of broadband anti-reflection as well as
the efficiency of silicon solar cells. After the thermal treatment, a significant change in the photoluminescence spectra from ZnO NRA was observed. The deep-level
emission was suppressed due to the removal of the intrinsic defect by the thermal treatment. Therefore, the sunlight can pass through the anti-reflective structure rather than be absorbed by the ZnO NRA. Finally, atomic layer deposition was used to deposit highly conformal Al 2 O 3 layer on the surface of ZnO NRA to further reduce reflectance and provide effective protection of the chemically fragile ZnO NRA from harmful environments. The thickness of the Al 2 O 3 layer for minimum reflectance was examined experimentally, which is in good agreement with the result obtained from the finite-different time-domain (FTDT) simulation. . Under the optimal precursor
concentration and the thickness of conformal Al 2 O 3 layer, the efficiency of silicon solar cells could be greatly improved from 9.08% to 18.28% by using the ZnO NRA
as the anti-reflective structure. The result indicates that the ZnO/Al 2 O 3 core-shell NRA is a very promising anti-reflective structure for effective enhancement of the performance of solar cells and other photonic devices.
en
dc.description.provenanceMade available in DSpace on 2021-06-16T06:46:04Z (GMT). No. of bitstreams: 1
ntu-103-R01527050-1.pdf: 13234347 bytes, checksum: 06beeed660f9b6af87640f701eb56c03 (MD5)
Previous issue date: 2014
en
dc.description.tableofcontents致謝 .................................................................................................................II
摘要 .................................................................................................................III
ABSTRACT ............................................................................................................IV
目錄 .................................................................................................................V
圖目錄 ...............................................................................................................VII
表目錄 ...............................................................................................................X
第一章 簡介 ............................................................................................................ 1
1-1 研究動機 ........................................................................................................ 1
1-2 原子層沉積技術 ............................................................................................. 2
1-3 氧化鋅的晶體結構與特性 ............................................................................. 6
1-4 利用水熱法製作氧化鋅奈米陣列 .................................................................. 7
1-5 時域有限差分法(FINITE-DIFFERENCE TIME-DOMAIN) ................................. 9
1-6 參考文獻 ....................................................................................................... 11
第二章 利用氧化鋅奈米結構作為抗反射層及其性質分析 ..................................14
2-1 簡介 ...............................................................................................................14
2-2 實驗...............................................................................................................17
2-2-1 時域有限差分法之模擬 .........................................................................17
2-2-2 利用原子層沉積技術成長氧化鋅薄膜 ..................................................19
2-2-3 利用水熱法與不同濃度之 DAP 調控 ZnO 奈米柱陣列之形貌 ...........21
VI

2-2-4 爐管退火處理 ........................................................................................22
2-2-5 奈米材料之分析儀器與原理 ..................................................................23
2-3 結果與討論 ....................................................................................................25
2-3-1 氧化鋅種子層厚度對反射率之影響 .....................................................25
2-3-2 利用 FDTD 探討入射角與反射性質之關係 .........................................29
2-3-3 利用 FDTD 探討位置、結構與尺寸對反射率之影響 .........................34
2-3-4 氧化鋅奈米柱結構之分析 ....................................................................37
2-3-5 氧化鋅奈米柱光學性質之分析 ..............................................................41
2-4 結論...............................................................................................................46
2-5 參考文獻 .......................................................................................................48
第三章 氧化鋅與氧化鋅/氧化鋁核殼結構作為抗反射層應用在太陽能電池之探
討 .............................................................................................................................53
3-1 簡介...............................................................................................................53
3-2 實驗 ...............................................................................................................55
3-2-1 太陽能電池元件之製作 .........................................................................56
3-2-2 太陽能電池效率之量測 .........................................................................56
3-2-3 利用原子層沉積技術成長氧化鋁薄膜 ..................................................58
3-3 結果與討論 ...................................................................................................59
3-3-1 氧化鋅奈米抗反射層應用在矽晶太陽能電池上 ...................................59
3-3-2 低溫下合成氧化鋅/氧化鋁核殼結構之抗反射層應用在太陽能電池上
.........................................................................................................................64
3-4 結論...............................................................................................................68
3-5 參考文獻 .......................................................................................................69
第四章 總結 ...........................................................................................................70
dc.language.isozh-TW
dc.subject時域有限差分(FDTD)模擬zh_TW
dc.subject氧化鋅奈米柱zh_TW
dc.subject太陽能電池zh_TW
dc.subject抗反射層zh_TW
dc.subjectanti-reflective structureen
dc.subjectsolar cellen
dc.subjectZnO nanorod arrayen
dc.subjectfinite-different time-domain (FTDT) simulationen
dc.title原子層沉積技術與奈米結構應用在矽晶太陽能電池抗反射層之研究zh_TW
dc.titleApplications of nanostructures and atomic layer deposition as effective anti-reflection structures on silicon solar cellsen
dc.typeThesis
dc.date.schoolyear102-2
dc.description.degree碩士
dc.contributor.coadvisor陳敏璋(Miin-Jang Chen)
dc.contributor.oralexamcommittee陳良益(Liang-Yih Chen),陳景翔(Ching-Hsiang Chen)
dc.subject.keyword抗反射層,太陽能電池,氧化鋅奈米柱,時域有限差分(FDTD)模擬,zh_TW
dc.subject.keywordanti-reflective structure,solar cell,ZnO nanorod array,finite-different time-domain (FTDT) simulation,en
dc.relation.page72
dc.rights.note有償授權
dc.date.accepted2014-07-28
dc.contributor.author-college工學院zh_TW
dc.contributor.author-dept材料科學與工程學研究所zh_TW
顯示於系所單位:材料科學與工程學系

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