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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 徐振哲(Cheng-Che Hsu) | |
dc.contributor.author | Tzu-Hsuan Lin | en |
dc.contributor.author | 林子軒 | zh_TW |
dc.date.accessioned | 2021-06-16T06:38:27Z | - |
dc.date.available | 2017-08-14 | |
dc.date.copyright | 2014-08-14 | |
dc.date.issued | 2014 | |
dc.date.submitted | 2014-07-30 | |
dc.identifier.citation | 1. 徐振哲, '常壓微電漿之發展近況及其應用,' 化工技術, (249), 66-83 (2013).
2. M. H. Kim, J. H. Cho, S. B. Ban, R. Y. Choi, E. J. Kwon, S. J. Park and J. G. Eden, 'Efficient generation of ozone in arrays of microchannel plasmas,' Journal of Physics D: Applied Physics, 46 (30), 305201 (2013). 3. C. Tendero, C. Tixier, P. Tristant, J. Desmaison and P. Leprince, 'Atmospheric pressure plasmas: A review,' Spectrochimica Acta Part B: Atomic Spectroscopy, 61 (1), 2-30 (2006). 4. C. Y. Su, W. Y. Chu, Z. Y. Juang, K. F. Chen, B. M. Cheng, F. R. Chen, K. C. Leou and C. H. Tsai, 'Large-scale synthesis of boron nitride nanotubes with iron-supported catalysts,' The Journal of Physical Chemistry C, 113 (33), 14732-14738 (2009). 5. Y. Chang, Y. J. Shih, C. Y. Ko, J. F. Jhong, Y. L. Liu and T. C. Wei, 'Hemocompatibility of poly(vinylidene fluoride) membrane grafted with network-like and brush-like antifouling layer controlled via plasma-Induced surface PEGylation,' Langmuir, 27 (9), 5445-5455 (2011). 6. H. K. Wei, C. S. Kou, K. Y. Wu and J. Hwang, 'Liquid crystal alignment on a-C:H films by an argon plasma jet at atmospheric pressure,' Diamond and Related Materials, 17 (7–10), 1639-1642 (2008). 7. C. Huang, C. Y. Tsai and R. S. Juang, 'Surface modification and characterization of an H2/O2 plasma-treated polypropylene membrane,' Journal of Applied Polymer Science, 124 (S1), E108-E115 (2012). 8. C. Huang, W. C. Ma, C. Y. Tsai, W. T. Hou and R. S. Juang, 'Surface modification of polytetrafluoroethylene membranes by radio frequency methane/nitrogen mixture plasma polymerization,' Surface and Coatings Technology, (0)(2013). 9. U. Kogelschatz, 'Dielectric-Barrier Discharges: Their History, Discharge Physics, and Industrial Applications,' Plasma Chemistry and Plasma Processing, 23 (1), 1-46 (2003). 10. K. H. Becker, K. H. Schoenbach and J. G. Eden, 'Microplasmas and applications,' Journal of Physics D: Applied Physics, 39 (3), R55-R70 (2006). 11. K. Schoenbach, H. , M. Moselhy and W. Shi, 'Self-organization in cathode boundary layer microdischarges,' Plasma Sources Science and Technology, 13 (1), 177 (2004). 12. J. D. Readle, K. E. Tobin, K. Kwang Soo, Y. Je Kwon, Z. Jie, L. Seung Keun, P. Sung Jin and J. G. Eden, 'Flexible, lightweight arrays of microcavity plasma devices: Control of cavity geometry in thin substrates,' IEEE Transactions on Plasma Science, 37 (6), 1045-1054 (2009). 13. S. J. Park, C. J. Wagner, C. M. Herring and J. G. Eden, 'Flexible microdischarge arrays: Metal/polymer devices,' Applied Physics Letters, 77 (2), 199-201 (2000). 14. S. J. Park, J. Chen, C. Liu and J. G. Eden, 'Silicon microdischarge devices having inverted pyramidal cathodes: Fabrication and performance of arrays,' Applied Physics Letters, 78 (4), 419-421 (2001). 15. S. J. Park, C. J. Wagner and J. G. Eden, 'Performance of microdischarge devices and arrays with screen electrodes,' Photonics Technology Letters, IEEE, 13 (1), 61-63 (2001). 16. S. J. Park, J. G. Eden, J. Chen and C. Liu, 'Independently addressable subarrays of silicon microdischarge devices: Electrical characteristics of large (30×30) arrays and excitation of a phosphor,' Applied Physics Letters, 79 (13), 2100-2102 (2001). 17. S. J. Park and J. G. Eden, '13–30 micron diameter microdischarge devices: Atomic ion and molecular emission at above atmospheric pressures,' Applied Physics Letters, 81 (22), 4127-4129 (2002). 18. S. J. Park, J. G. Eden and J. J. Ewing, 'Photodetection in the visible, ultraviolet, and near-infrared with silicon microdischarge devices,' Applied Physics Letters, 81 (24), 4529-4531 (2002). 19. S. J. Park, J. Chen, C. J. Wagner, N. P. Ostrom, L. Chang and J. G. Eden, 'Microdischarge arrays: a new family of photonic devices (revised*),' IEEE Journal of Selected Topics in Quantum Electronics, 8 (2), 387-394 (2002). 20. J. G. Eden, S. J. Park, N. P. Ostrom, S. T. McCain, C. J. Wagner, B. A. Vojak, J. Chen, C. Liu, P. von Allmen, F. Zenhausern, D. J. Sadler, C. Jensen, D. L. Wilcox and J. J. Ewing, 'Microplasma devices fabricated in silicon, ceramic, and metal/polymer structures: arrays, emitters and photodetectors,' Journal of Physics D: Applied Physics, 36 (23), 2869 (2003). 21. S. J. Park and J. G. Eden, 'Electrical characteristics and lifetimes of microdischarge devices having thin dielectric films of aluminum oxide,boron nitride, or barium titanate,' Electronics Letters, 39 (10), 773-775 (2003). 22. J. G. Eden and S. J. Park, 'Microcavity plasma devices and arrays: a new realm of plasma physics and photonic applications,' Plasma Physics and Controlled Fusion, 47 (12B), B83 (2005). 23. L. Meng, P. Sung-Jin, B. T. Cunningham and J. G. Eden, 'Microcavity plasma devices and arrays fabricated by plastic-based replica molding,' Journal of Microelectromechanical Systems, 16 (6), 1397-1402 (2007). 24. J. Waskoenig, D. O’Connell, V. Schulz- von der Gathen, J. Winter, S. J. Park and J. G. Eden, 'Spatial dynamics of the light emission from a microplasma array,' Applied Physics Letters, 92 (10), - (2008). 25. D. S. Lee, S. Hamaguchi, O. Sakai, S. J. Park and J. G. Eden, 'Microcavity array plasma system for remote chemical processing at atmospheric pressure,' Journal of Physics D: Applied Physics, 45 (22), 222001 (2012). 26. B. Mitra, B. Levey and Y. B. Gianchandani, 'Hybrid arc/flow microdischarges at atmospheric pressure and their use in portable systems for liquid and gas sensing,' IEEE Transactions on Plasma Science, 36 (4), 1913-1924 (2008). 27. K. T. A. L. Burm, 'Calculation of the townsend discharge coefficients and the paschen curve coefficients,' Contributions to Plasma Physics, 47 (3), 177-182 (2007). 28. D. D. Hsu and D. B. Graves, 'Microhollow cathode discharge stability with flow and reaction,' Journal of Physics D: Applied Physics, 36 (23), 2898 (2003). 29. A. Rousseau and X. Aubert, 'Self-pulsing microplasma at medium pressure range in argon,' Journal of Physics D: Applied Physics, 39 (8), 1619 (2006). 30. P. Chabert, C. Lazzaroni and A. Rousseau, 'A model for the self-pulsing regime of microhollow cathode discharges,' J. Appl. Phys., 108 (11)(2010). 31. C. Lazzaroni and P. Chabert, 'Discharge resistance and power dissipation in the self-pulsing regime of micro-hollow cathode discharges,' Plasma Sources Sci. Technol., 20 (5)(2011). 32. Y. Sakiyama, D. B. Graves, H. W. Chang, T. Shimizu and G. E. Morfill, 'Plasma chemistry model of surface microdischarge in humid air and dynamics of reactive neutral species,' Journal of Physics D: Applied Physics, 45 (42), 425201 (2012). 33. I. E. Kieft, E. P. v. d. Laan and E. Stoffels, 'Electrical and optical characterization of the plasma needle,' New Journal of Physics, 6 (1), 149 (2004). 34. E. Stoffels, I. E. Kieft, R. E. J. Sladek, L. J. M. v. d. Bedem, E. P. v. d. Laan and M. Steinbuch, 'Plasma needle for in vivo medical treatment: recent developments and perspectives,' Plasma Sources Science and Technology, 15 (4), S169 (2006). 35. H. W. Chang and C. C. Hsu, 'Plasmas in saline solution sustained using bipolar pulsed power source: Tailoring the discharge behavior using the negative pulses,' Plasma Chemistry and Plasma Processing, 33 (3), 581-591 (2013). 36. R. M. Sankaran and K. P. Giapis, 'High-pressure micro-discharges in etching and deposition applications,' Journal of Physics D: Applied Physics, 36 (23), 2914 (2003). 37. Z. Cao, J. L. Walsh and M. G. Kong, 'Atmospheric plasma jet array in parallel electric and gas flow fields for three-dimensional surface treatment,' Applied Physics Letters, 94 (2)(2009). 38. Y. Shimizu, T. Sasaki, A. Chandra Bose, K. Terashima and N. Koshizaki, 'Development of wire spraying for direct micro-patterning via an atmospheric-pressure UHF inductively coupled microplasma jet,' Surface and Coatings Technology, 200 (14–15), 4251-4256 (2006). 39. S. A. Wright, H. Z. Harvey and Y. B. Gianchandani, 'A microdischarge-based deflecting-cathode pressure sensor in a ceramic package,' Journal of Microelectromechanical Systems, 22 (1), 80-86 (2013). 40. J. Franzke, K. Kunze, M. Miclea and K. Niemax, 'Microplasmas for analytical spectrometry,' Journal of Analytical Atomic Spectrometry, 18 (7), 802-807 (2003). 41. Y. Zhang, G. Jacobs, D. E. Sparks, M. E. Dry and B. H. Davis, 'CO and CO2 hydrogenation study on supported cobalt Fischer–Tropsch synthesis catalysts,' Catalysis Today, 71 (3–4), 411-418 (2002). 42. M. C. J. Bradford and M. A. Vannice, 'Catalytic reforming of methane with carbon dioxide over nickel catalysts I. Catalyst characterization and activity,' Applied Catalysis A: General, 142 (1), 73-96 (1996). 43. M. B. Chang, J. H. Balbach, M. J. Rood and M. J. Kushner, 'Removal of SO2 from gas streams using a dielectric barrier discharge and combined plasma photolysis,' J. Appl. Phys., 69 (8), 4409-4417 (1991). 44. J. J. Lowke and R. Morrow, 'Theoretical analysis of removal of oxides of sulphur and nitrogen in pulsed operation of electrostatic precipitators,' IEEE Transactions on Plasma Science, 23 (4), 661-671 (1995). 45. A. Mizuno, K. Shimizu, A. Chakrabarti, L. Dascalescu and S. Furuta, 'NOx removal process using pulsed discharge plasma,' IEEE Transactions on Industry Applications, 31 (5), 957-962 (1995). 46. W. Sun, B. Pashaie, S. K. Dhali and F. I. Honea, 'Non‐thermal plasma remediation of SO2/NO using a dielectric‐barrier discharge,' J. Appl. Phys., 79 (7), 3438-3444 (1996). 47. R. Hackam and H. Aklyama, 'Air pollution control by electrical discharges,' IEEE Transactions on Dielectrics and Electrical Insulation, 7 (5), 654-683 (2000). 48. K. Urashima and J. S. Chang, 'Removal of volatile organic compounds from air streams and industrial flue gases by non-thermal plasma technology,' IEEE Transactions on Dielectrics and Electrical Insulation, 7 (5), 602-614 (2000). 49. T. Oda, 'Non-thermal plasma processing for environmental protection: decomposition of dilute VOCs in air,' Journal of Electrostatics, 57 (3-4), 293-311 (2003). 50. J. Chunqi, A. A. H. Mohamed, R. H. Stark, J. H. Yuan and K. H. Schoenbach, 'Removal of volatile organic compounds in atmospheric pressure air by means of direct current glow discharges,' IEEE Transactions on Plasma Science, 33 (4), 1416-1425 (2005). 51. H. H. Kim, S. M. Oh, A. Ogata and S. Futamura, 'Decomposition of gas-phase benzene using plasma-driven catalyst (PDC) reactor packed with Ag/TiO2 catalyst,' Applied Catalysis B: Environmental, 56 (3), 213-220 (2005). 52. M. Akira, 'Industrial applications of atmospheric non-thermal plasma in environmental remediation,' Plasma Physics and Controlled Fusion, 49 (5A), A1 (2007). 53. S. A. Nair, T. Nozaki and K. Okazaki, 'Methane oxidative conversion pathways in a dielectric barrier discharge reactor—Investigation of gas phase,' Chemical Engineering Journal, 132 (1-3), 85-95 (2007). 54. N. Blin-Simiand, F. Jorand, L. Magne, S. Pasquiers, C. Postel and J. R. Vacher, 'Plasma reactivity and plasma-surface interactions during treatment of toluene by a dielectric barrier discharge,' Plasma Chemistry and Plasma Processing, 28 (4), 429-466 (2008). 55. J. Van Durme, J. Dewulf, C. Leys and H. Van Langenhove, 'Combining non-thermal plasma with heterogeneous catalysis in waste gas treatment: A review,' Applied Catalysis B: Environmental, 78 (3–4), 324-333 (2008). 56. H. L. Chen, H. M. Lee, S. H. Chen, M. B. Chang, S. J. Yu and S. N. Li, 'Removal of volatile organic compounds by single-stage and two-stage plasma catalysis systems: A review of the performance enhancement mechanisms, current status, and suitable applications,' Environmental Science & Technology, 43 (7), 2216-2227 (2009). 57. L. Yu, X. Li, X. Tu, Y. Wang, S. Lu and J. Yan, 'Decomposition of naphthalene by dc gliding arc gas discharge,' The Journal of Physical Chemistry A, 114 (1), 360-368 (2009). 58. A. M. Vandenbroucke, R. Morent, N. De Geyter and C. Leys, 'Non-thermal plasmas for non-catalytic and catalytic VOC abatement,' Journal of Hazardous Materials, 195 (0), 30-54 (2011). 59. M. B. Chang, M. J. Kushner and M. J. Rood, 'Removal of SO2 and the simultaneous removal of SO2 and NO from simulated flue gas streams using dielectric barrier discharge plasmas,' Plasma Chemistry and Plasma Processing, 12 (4), 565-580 (1992). 60. L. M. Zhou, B. Xue, U. Kogelschatz and B. Eliasson, 'Nonequilibrium plasma reforming of greenhouse gases to synthesis gas,' Energy & Fuels, 12 (6), 1191-1199 (1998). 61. T. A. Caldwell, H. Le, L. L. Lobban and R. G. Mallinson, in Studies in Surface Science and Catalysis, edited by J. J. S. E. Iglesia and T. H. Fleisch, Elsevier, 2001, Vol. Volume 136, pp. 265-270. 62. H. K. Song, H. Lee, J. W. Choi and B. K. Na, 'Effect of electrical pulse forms on the CO2 reforming of methane using atmospheric dielectric barrier discharge,' Plasma Chemistry and Plasma Processing, 24 (1), 57-72 (2004). 63. T. Paulmier and L. Fulcheri, 'Use of non-thermal plasma for hydrocarbon reforming,' Chemical Engineering Journal, 106 (1), 59-71 (2005). 64. G. Petitpas, J.-D. Rollier, A. Darmon, J. Gonzalez-Aguilar, R. Metkemeijer and L. Fulcheri, 'A comparative study of non-thermal plasma assisted reforming technologies,' International Journal of Hydrogen Energy, 32 (14), 2848-2867 (2007). 65. H. L. Chen, H. M. Lee, S. H. Chen, Y. Chao and M. B. Chang, 'Review of plasma catalysis on hydrocarbon reforming for hydrogen production—Interaction, integration, and prospects,' Applied Catalysis B: Environmental, 85 (1-2), 1-9 (2008). 66. I. G. Koo, M. Y. Choi, J. H. Kim, J. H. Cho and W. M. Lee, 'Microdischarge in porous ceramics with atmospheric pressure high temperature H2O/SO2 gas mixture and its application for hydrogen production,' Japanese Journal of Applied Physics, 47 (6R), 4705 (2008). 67. M. Jasiński, M. Dors and J. Mizeraczyk, 'Production of hydrogen via methane reforming using atmospheric pressure microwave plasma,' Journal of Power Sources, 181 (1), 41-45 (2008). 68. H. J. Gallon, X. Tu and J. C. Whitehead, 'Effects of reactor packing materials on H2 production by CO2 reforming of CH4 in a dielectric barrier discharge,' Plasma Processes and Polymers, 9 (1), 90-97 (2012). 69. P. J. Lindner and R. S. Besser, 'Hydrogen production by methanol reforming in a non-thermal atmospheric pressure microplasma reactor,' International Journal of Hydrogen Energy, 37 (18), 13338-13349 (2012). 70. D. W. Larkin, T. A. Caldwell, L. L. Lobban and R. G. Mallinson, 'Oxygen pathways and carbon dioxide utilization in methane partial oxidation in ambient temperature electric discharges,' Energy & Fuels, 12 (4), 740-744 (1998). 71. C.-j. Liu, G.-h. Xu and T. Wang, 'Non-thermal plasma approaches in CO2 utilization,' Fuel Processing Technology, 58 (2–3), 119-134 (1999). 72. N. I. S. T., 'NIST data gateway,' (2014). 73. 長春石油化學, '回收利用化學製程排放之CO2 成果分享,' (2011). 74. L. C. Brown and A. T. Bell, 'Kinetics of the oxidation of carbon monoxide and the decomposition of carbon dioxide in a radiofrequency electric discharge. I. Experimental results,' Industrial & Engineering Chemistry Fundamentals, 13 (3), 203-210 (1974). 75. Y. Nishimura and T. Takenouchi, 'Decomposition of carbon dioxide in an induction-coupled argon plasma jet,' Industrial & Engineering Chemistry Fundamentals, 15 (4), 266-269 (1976). 76. A. Huczko and A. Szymański, 'Thermal decomposition of carbon dioxide in an argon plasma jet,' Plasma Chemistry and Plasma Processing, 4 (1), 59-72 (1984). 77. L. T. Hsieh, W. J. Lee, C. T. Li, C. Y. Chen, Y. F. Wang and M. B. Chang, 'Decomposition of carbon dioxide in the RF plasma environment,' Journal of Chemical Technology & Biotechnology, 73 (4), 432-442 (1998). 78. T. Sakurap and A. Yokoyama, 'Decompositions of carbon dioxide, carbon monoxide and gaseous water by microwave discharge,' Journal of Nuclear Science and Technology, 37 (9), 814-820 (2000). 79. G. Zheng, J. Jiang, Y. Wu, R. Zhang and H. Hou, 'The Mutual conversion of CO2 and CO in dielectric barrier discharge (DBD),' Plasma Chemistry and Plasma Processing, 23 (1), 59-68 (2003). 80. T. Mikoviny, 'Experimental study of negative corona discharge in pure carbon dioxide and its mixtures with oxygen,' Journal of Physics D: Applied Physics, 37 (2004). 81. A. Indarto, D. R. Yang, J. W. Choi, H. Lee and H. K. Song, 'Gliding arc plasma processing of CO2 conversion,' Journal of Hazardous Materials, 146 (1–2), 309-315 (2007). 82. J. D. S. G Horvath, N J Mason, 'FTIR study of decomposition of carbon dioxide in dc corona discharges,' Journal of Physics D: Applied Physics, 41 (2008). 83. S. Paulussen, 'Conversion of carbon dioxide to value-added chemicals in atmospheric pressure dielectric barrier discharges,' Plasma Sources Science and Technology, 19 (2010). 84. S. Savinov, H. Lee, H. Song and B.-K. Na, 'The effect of vibrational excitation of molecules on plasmachemical reactions involving methane and nitrogen,' Plasma Chemistry and Plasma Processing, 23 (1), 159-173 (2003). 85. S. Mori, A. Yamamoto and M. Suzuki, 'Characterization of a capillary plasma reactor for carbon dioxide decomposition,' Plasma Sources Science and Technology, 15 (2006). 86. S. L. Brock, T. Shimojo, M. Marquez, C. Marun, S. L. Suib, H. Matsumoto and Y. Hayashi, 'Factors influencing the decomposition of CO2 in AC fan-type plasma reactors: frequency, waveform, and concentration effects,' Journal of Catalysis, 184 (1), 123-133 (1999). 87. A. Huczko, 'Plasma decomposition of carbon dioxide,' AIChE Journal, 30 (5), 811-815 (1984). 88. R. Li, Q. Tang, S. Yin and T. Sato, 'Plasma catalysis for CO2 decomposition by using different dielectric materials,' Fuel Processing Technology, 87 (7), 617-622 (2006). 89. R. Li, Y. Yamaguchi, S. Yin, Q. Tang and T. Sato, 'Influence of dielectric barrier materials to the behavior of dielectric barrier discharge plasma for CO2 decomposition,' Solid State Ionics, 172 (1–4), 235-238 (2004). 90. P. J. Lindner, S. Y. Hwang and R. S. Besser, 'Analysis of a microplasma fuel reformer with a carbon dioxide decomposition reaction,' Energy & Fuels, 27 (8), 4432-4440 (2013). 91. H. Matsumoto, S. Tanabe, K. Okitsu, Y. Hayashi and S. L. Suib, 'Profiles of carbon dioxide decomposition in a dielectric-barrier discharge-plasma system,' Bulletin of the Chemical Society of Japan, 72, 2567-2571 (1999). 92. S. L. Suib, S. L. Brock, M. Marquez, J. Luo, H. Matsumoto and Y. Hayashi, 'Efficient catalytic plasma activation of CO2, NO, and H2O,' The Journal of Physical Chemistry B, 102 (48), 9661-9666 (1998). 93. J.-Y. Wang, G.-G. Xia, A. Huang, S. L. Suib, Y. Hayashi and H. Matsumoto, 'CO2 decomposition using glow discharge plasmas,' Journal of Catalysis, 185 (1), 152-159 (1999). 94. S. Wang, Y. Zhang, X. Liu and X. Wang, 'Enhancement of CO2 Conversion Rate and Conversion Efficiency by Homogeneous Discharges,' Plasma Chemistry and Plasma Processing, 32 (5), 979-989 (2012). 95. G. Nersisyan and W. G. Graham, 'Characterization of a dielectric barrier discharge operating in an open reactor with flowing helium,' Plasma Sources Science and Technology, 13 (4), 582 (2004). 96. J. Kriegseis, B. Moller, S. Grundmann and C. Tropea, 'Capacitance and power consumption quantification of dielectric barrier discharge (DBD) plasma actuators,' Journal of Electrostatics, 69 (4), 302-312 (2011). 97. J. Kriegseis, S. Grundmann and C. Tropea, 'Power consumption, discharge capacitance and light emission as measures for thrust production of dielectric barrier discharge plasma actuators,' J. Appl. Phys., 110 (1), - (2011). 98. D. B. Wurm, K. Sun and W. L. Winniford, 'Analysis of low levels of oxygen, carbon monoxide, and carbon dioxide in polyolefin feed streams using a pulsed discharge detector and two PLOT Columns,' Journal of Chromatographic Science, 41 (10), 545-549 (2003). 99. P. Chladek, L. J. I. Coleman, E. Croiset and R. R. Hudgins, 'Gas chromatography method for the characterization of ethanol steam reforming products,' Journal of Chromatographic Science, 45 (3), 153-157 (2007). 100. S. I. Sandler, 'Chemical, biochemical, and engineering thermodynamics,' (2006). | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/57225 | - |
dc.description.abstract | 本實驗以高壓交流電源驅動一以銅箔基板(Copper clad laminate, CCL)為基底之常壓微電漿系統,並以低成本之碳粉轉印技術(Toner transfer)於基板上製作微米尺度的圖案,可製作平面上之最小尺寸為200 μm,圖案間的距離為400 μm,並成功地讓低溫微電漿產生於微孔洞中(Micro-cavities)。而圖案的樣式大致分為正方形、圓形及三角形之陣列分佈式,或是長寬比大的線形分佈式電漿(Linear discharges)。
為了瞭解在此元件上產生的電漿性質,第一部分分別對元件進行電性及光學量測。由電性量測中可得知此放電系統為絲狀放電,於氬氣及二氧化碳氣氛下其氣體崩潰電壓分別約為850 Vpp(10 kHz)及2400 Vpp(1 kHz);以光學觀察其元件壽命,於氬氣電漿中以較溫和的電場條件下,壽命至少一個小時以上,旋轉溫度(Rotational temperature, Tr)約600 K;從外觀影像來看,電漿均勻且穩定地產生於圖案中。 第二個部分為將此系統應用於氣體轉化,以二氧化碳解離反應此一高吸熱可逆反應作為模型,並觀察其產物含量、電漿消耗功率及轉化效率。整體電漿消耗功率均小於2 W,產率約數十 mg/h,能源效率可達到11 %,其中能源效率不遜於文獻。於實驗結果中可發現,一氧化碳濃度皆比平衡轉化濃度高出許多,因此,吾人認為電漿於此反應類型中轉化率不受平衡常數的限制,並證明微電漿系統於氣體轉化方面具有一定的潛力。 | zh_TW |
dc.description.abstract | In this study, a copper clad laminate (CCL) -based dielectric barrier discharge system was driven by a high voltage alternative current power supply. The device fabrication was proceeded by a low-cost toner transfer technology, 200 μm in the smallest planar size and 400 μm in the closest distance between patterns was obtained successfully. Low-temperature micro-discharge was ignited and sustained in the cavities stably under atmospheric pressure. The arrangement of the patterns can be the array-distributed circle, triangle and square, or the large aspect ratio linear discharges.
In order to realize the characteristics of micro-discharges, electrical and optical diagnostics were used to characterize the properties of plasmas in the cavities preliminarily. We investigated that the current is discharged in the filamentary way and the gas breakdown voltage of argon on the devices under atmospheric pressure is about 850 Vpp(10 kHz). Moreover, the micro-discharges can be sustained beyond one hour via the micro-plasmas generation devices and in a uniform way from camera-captured image, the rotational temperature of this system was about 600 K. In second part, the CCL-based DBD system was applied in gas conversion. As the result, the dissociation of carbon dioxide (CO¬2) - the highly endothermic reversible gas reaction is chosen as our reaction model, the concentration of products, discharge power and the efficiency is analyzed primarily through variable experimental parameters. However the discharge was less than 2 watts throughout the experiment, the production of carbon monoxide (CO) was about tens of mg/h, and the efficiency can be reached as high as 11 %. Finally, it’s found that the concentration of CO obtained in the plasma process was larger than the equilibrium concentration of CO counts of order of magnitude, indicating that the plasma process benefit to get over the thermodynamic barrier, and plasmas is proved in an extremely potential way to gas conversion. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T06:38:27Z (GMT). No. of bitstreams: 1 ntu-103-R01524071-1.pdf: 5895267 bytes, checksum: dac083e93c8c1d84049981da1e61577a (MD5) Previous issue date: 2014 | en |
dc.description.tableofcontents | 誌謝 I
中文摘要 III Abstract IV 目錄 VI 圖目錄 VIII 表目錄 XIII 第1章 緒論 1 1.1 前言 1 1.2 研究動機 1 1.3 論文總覽 2 第2章 文獻回顧 3 2.1 介電質放電系統 3 2.2 微電漿系統 7 2.2.1 微電漿之種類 7 2.2.2 微電漿之應用 18 2.3 氣體轉化反應 27 2.3.1 傳統觸媒氣體轉化製程 27 2.3.2 常壓電漿製程 27 2.4 電漿輔助之二氧化碳轉化 33 2.4.1 二氧化碳之物性及化性 33 2.4.2 在大尺度電漿下進行二氧化碳轉化 35 2.4.3 以微電漿進行二氧化碳之轉化 40 第3章 實驗設備與架構 44 3.1 介電質放電系統 45 3.2 檢測設備 46 3.2.1 承載元件之腔體及實驗設備介紹 46 3.2.2 電漿性質檢測 47 3.2.3 氣體產物之定量分析 48 第4章 結果與討論 51 4.1 常壓介電質放電系統之性質檢測 51 4.2 以介電質放電系統進行二氧化碳轉化 56 4.2.1 以實驗參數控制之實驗 59 4.2.2 以幾何參數控制之實驗 63 4.2.3 氮氣添加之影響 71 第5章 結論與未來展望 73 第6章 參考文獻 77 | |
dc.language.iso | zh-TW | |
dc.title | 利用常壓微電漿系統進行二氧化碳之轉化 | zh_TW |
dc.title | Micro-discharge Driven Conversion of Carbon Dioxide under Atmospheric Pressure | en |
dc.type | Thesis | |
dc.date.schoolyear | 102-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 魏大欽(Ta-Chin Wei),黃駿(Chun Huang),王孟菊(Meng-Jiy Wang) | |
dc.subject.keyword | 常壓,介電質放電,微電漿,二氧化碳轉化,熱力學, | zh_TW |
dc.subject.keyword | Atmospheric pressure,Dielectric barrier discharges(DBDs),Micro-discharges,Conversion of carbon dioxide,Thermodynamics, | en |
dc.relation.page | 90 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2014-07-30 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 化學工程學研究所 | zh_TW |
顯示於系所單位: | 化學工程學系 |
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