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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 沈弘俊(Horn-Jiunn Sheen) | |
dc.contributor.author | Tsu-Hung Lin | en |
dc.contributor.author | 林祖弘 | zh_TW |
dc.date.accessioned | 2021-06-16T06:30:33Z | - |
dc.date.available | 2019-08-12 | |
dc.date.copyright | 2014-08-12 | |
dc.date.issued | 2014 | |
dc.date.submitted | 2014-08-07 | |
dc.identifier.citation | [1] Sberveglieri, G. (1992). Gas Sensors: Principles, Operation, and Development, pp. 89-186, 1992.
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Materials Science and Engineering B-Advanced Functional Solid-State Materials 174(1-3): 18-30. [17] Vayssieres, L., K. Keis, S. E. Lindquist and A. Hagfeldt (2001). 'Purpose-built anisotropic metal oxide material: 3D highly oriented microrod array of ZnO.' Journal of Physical Chemistry B 105(17): 3350-3352. [18] Greene, L. E., M. Law, J. Goldberger, F. Kim, J. C. Johnson, Y. F. Zhang, R. J. Saykally and P. D. Yang (2003). 'Low-temperature wafer-scale production of ZnO nanowire arrays.' Angewandte Chemie-International Edition 42(26): 3031-3034. [19 ] Greene, L. E., M. Law, D. H. Tan, M. Montano, J. Goldberger, G. Somorjai and P. D. Yang (2005). 'General route to vertical ZnO nanowire arrays using textured ZnO seeds.' Nano Letters 5(7): 1231-1236. [20] Hung, C. H. and W. T. Whang (2004). 'Low-temperature solution approach toward highly aligned ZnO nanotip arrays.' Journal of Crystal Growth 268(1-2): 242-248. [21] Sun, X. M., X. Chen, Z. X. Deng and Y. D. Li (2003). 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[33] Amin, G., 'White LEDs Printed on Paper—A Doctoral Thesis', 2012 [34] Mollow, E., 'In Proceedings of the Photoconductivity Conference', Wiley, New York, pp. 509, 1954. [35] Fan, S.-W., A. K. Srivastava and V. P. Dravid (2009). 'UV-activated room-temperature gas sensing mechanism of polycrystalline ZnO.' Applied Physics Letters 95(14): 142106. [36] Chang, S.-Y., N.-H. Yang and Y.-C. Huang (2009). 'Hydrothermal Growth and Interface Correlation of Highly Aligned ZnO Nanorod Arrays on UV-Activated Sol–Gel Transparent Conducting Films.' Journal of The Electrochemical Society 156(11): K200. [37] Liu, S. Y., T. Chen, J. Wan, G. P. Ru, B. Z. Li and X. P. Qu (2009). 'The effect of pre-annealing of sputtered ZnO seed layers on growth of ZnO nanorods through a hydrothermal method.' Applied Physics a-Materials Science & Processing 94(4): 775-780. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/56870 | - |
dc.description.abstract | 本研究成功地以水熱法結合指叉電極製備了偵測揮發性有機化合物氣體的感測晶片,主要的優勢在於製作成本低廉且製程簡便,以氧化鋅作為感測材料,並針對此種材料特性,以紫外光進行激發增加氣體感測訊號。
實驗方法以濺鍍方式濺鍍氧化鋅種子層,並以六甲基四胺與醋酸鋅調配水熱法使用之水溶液,以烘箱進行恆溫水熱法,透過使用UV光照射晶種層進行前處理可使晶種層輔助奈米柱軸向成長效果提升,與未進行UV光前處理比較使奈米柱形貌由花型成長為柱型結構,並搭配改變反應時間與高溫退火前處理,可改變氧化鋅奈米柱的成長結果。特性分析的量測使用掃描式電子顯微鏡(SEM)觀察奈米柱的尺寸。 透過奈米結構使材料的光吸收增加進而提升了UV光增益的效果,也能有效增加氣體接觸面積。此氧化鋅感測薄膜具有良好的氣體響應,且此結構所反映出的訊號亦與濃度之間有線性關係。有別以往製備奈米感測薄膜的製程,本研究製程相對簡單,並成功地將此技術與氣體感測結合,製備出高感測效果的氣體吸附感測薄膜。 | zh_TW |
dc.description.abstract | In this research, a novel volatile organic compound (VOC) sensing layer was fabricated. The advantage of the fabrication is the low cost and the simple equipment. We use the Zinc Oxide (ZnO) as the sensing material to detect the reduction gas. By the characteristic of oxidation of the surface of ZnO, the oxygen ion will become reduction when the surface is in the environment with volatile organic compound.
ZnO seed layers were deposited by RF Sputter. ZnO nanowires were grown in aqueous of zinc acetate and hexamethylenetetramine. With UV pretreatment, ZnO nanowires change from flower-like to well-aligned and vertical growth nanowires. The different nanowires morphologies can be fabricated by different growth time and high temperature annealing. The ZnO films were characterized by field-emission scanning electron microscopy (FE-SEM) to illustrate the morphologies. The signal of the nanowires structure was linear with the different concentration. The nanowires structure not only enhances light absorption but also the gas sensing results. On the other hand, we use the hydrothermal method to fabricate nanowires on the metallic interdigitated electrodes and apply this technology to gas sensing area successfully. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T06:30:33Z (GMT). No. of bitstreams: 1 ntu-103-R01543026-1.pdf: 10590076 bytes, checksum: 9947409328c368096abbcb9e79bdbb12 (MD5) Previous issue date: 2014 | en |
dc.description.tableofcontents | 摘要 II
Abstract III 致謝 IV 目錄 V 第1章 緒論 1 1.1 研究動機 1 1.2 一維氧化鋅奈米結構製備方式 2 1.2.1氣液固法(Vapor-Liquid-Solid;VLS) 2 1.2.2模板輔助成長(template-mediated growth) 4 1.2.3水熱法(hydrothermal growth) 5 1.3 論文架構 9 第2章 水熱法原理及感測機制 10 2.1 水熱法制備氧化鋅奈米柱 10 2.1.1成核理論 11 2.1.2水熱法製備奈米柱成長機制 13 2.2 金屬氧化物氣體感測機制 15 2.2.1 半導體金屬氧化物表面捕捉氣體機制 15 2.2.2氧化鋅材料特性 17 2.2.3 揮發性有機氣體特性 18 2.2.4 氧化鋅光催化反應機制 19 第3章 實驗步驟及設備原理 21 3.1 晶片平台 22 3.1.1電子束蒸鍍 22 3.1.2微影 22 3.1.3晶圓切割 24 3.2氧化鋅(ZnO)奈米柱製備 25 3.2.1晶種層製備 25 3.2.2晶片前處理 26 3.2.3水熱法 27 3.3晶片封裝 27 3.4氣體感測 28 3.3 實驗設備原理 28 3.3.1掃描式電子顯微鏡 29 3.3.2 氣相生成系統 30 3.3.3光吸收量測 33 第4章 實驗結果與討論 34 4.1 ZnO奈米柱結構製備結果討論 34 4.1.1 UV燈前處理時間對晶片影響 34 4.1.2 成長時間分析 39 4.1.3 高溫退火影響 44 4.2 氣體感測 48 4.2.1 光吸收量測 48 4.2.2 UV光增益對ZnO奈米柱結構之不同濃度氣體感測結果 49 第5章 結論與未來展望 54 5.1 結論 54 5.2 未來展望 55 第6章 參考文獻 56 | |
dc.language.iso | zh-TW | |
dc.title | 以水熱法成長氧化鋅奈米柱之紫外光激發室溫氣體感測器 | zh_TW |
dc.title | A UV-Activated Room-Temperature Gas Sensor Based on Hydrothermally Grown Zinc Oxide Nanowires | en |
dc.type | Thesis | |
dc.date.schoolyear | 102-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 吳光鐘(Kuang-Chong Wu),魏培坤(Pei-Kuen Wei),田維誠(Wei-Cheng Tian) | |
dc.subject.keyword | 水熱法,氧化鋅,金屬氧化物氣體感測器,氣體響應,UV光激發, | zh_TW |
dc.subject.keyword | Hydrothermally grown nanowires,ZnO,UV pretreatment,Gas sensors,Sensing response,UV irradiation, | en |
dc.relation.page | 60 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2014-08-08 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 應用力學研究所 | zh_TW |
顯示於系所單位: | 應用力學研究所 |
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