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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 呂學士(Shey-Shi Lu) | |
| dc.contributor.author | Yu-Hao Chen | en |
| dc.contributor.author | 陳又豪 | zh_TW |
| dc.date.accessioned | 2021-06-16T05:12:57Z | - |
| dc.date.available | 2019-09-02 | |
| dc.date.copyright | 2014-09-02 | |
| dc.date.issued | 2014 | |
| dc.date.submitted | 2014-08-18 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/56011 | - |
| dc.description.abstract | CMOS 感測系統單晶片提供重點照護低成本、即時偵測並即刻對訊號做處理與可攜帶性之可能性。在本研究中利用台積電0.35μm 標準製程技術，整合化學、生物與電的原理共研製三種感測系統單晶片。
第一種為利用參考式電晶體(ReFET)實現一酸鹼感測電路，其感測靈敏度可達34.242 mV/pH，可用於感測人體內pH變化。 第二種是多晶矽奈米線生物分子感測系統單晶片，利用標準半導體製程後，透過後段製程蝕刻處理，可將多晶矽奈米線裸露作為感測之用。根據實驗結果，此感測系統晶片對急性腎損傷的生物標記分子NGAL 之靈敏度可達3pg/ml。 第三種則是對果蠅心電量測的感測晶片，此晶片於標準半導體製程後透過液態金屬銦鎵共金(Indium Gallium, InGa)塗布，可做為導電介質於單晶片及果蠅體表上，根據實驗結果，此種方式可以實現非侵入式果蠅心電量測。 此三種感測系統單晶片在未來有極高的潛力可做為重點照護之用。它們的效能可媲美甚至是超越現有商業產品或是技術。 本文中所提出之電路均使用台積電0.35μm 標準製程技術實現。 | zh_TW |
| dc.description.abstract | CMOS based sensor system-on-chip (SoC) have a great potential to realize the vision of future point-of-care testing (POCT) service with low-cost, real-time detection following with data processing and portability. We present here three types SoCs which combine chemical, biological, and electrical mechanisms using Taiwan Semiconductor Manufacturing Company’s (TSMC) 0.35 μm standard CMOS fabrication process.
First, a ReFET are realized by TSMC 0.35 μm standard CMOS fabrication process, which can reduce the drifting effect of pH sensor and the sensitivity of the ReFET is about 34.242 mV/pH. Second, a poly-Si nanowire based bio-SoC was realized in commercial process followed by post-process steps. Measured results show NGAL (a biomarker protein of Acute Kidney Injury) limit is about 3 pg/ml. Third, liquid metal (Indium Gallium, InGa) are used to noiselessly conduct noninvasive ECG recordings of Drosophila. These three kinds biosensors have the high potential to be used in POCT applications in the future. The sensing performances are better than or compatible to the current methods and commercial products. All the works are fabricated in TSMC 0.35 μm 2P4M process. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-16T05:12:57Z (GMT). No. of bitstreams: 1 ntu-103-R01943064-1.pdf: 3356454 bytes, checksum: 0d3896cef7f3407a92ae15e775d85d52 (MD5) Previous issue date: 2014 | en |
| dc.description.tableofcontents | Chapter1 Introduction 1
1.1 Introduction to Biomedical system 1 1.2 Thesis Organization 2 Chapter2 On-Chip Reference Ion-Sensitive Field-Effect Transistors for pH Sensing 4 2.1 Introduction 4 2.2 Experimental Section 10 2.2.1 The Fabrication of ReFET and its Sensing Mechanisms 10 2.2.2 Architecture and Circuit Design 14 2.3 Results and discussion 16 2.4 Conclusions 20 2.5 Future Work 22 Chapter3 Polysilicon Nanowire Based Biomolecules Sensor System-on-Chip 24 3.1 Introduction 24 3.2 Materials and Methods 28 3.2.1 Fabrication and Design of Poly-Si-NW Based Biosensor 28 3.2.2 Architecture and Circuit Design 30 3.2.3 Surface Modification and Immobilization Process of Poly Silicon Nanowire 32 3.2.4 Sensing Mechanism of Poly Silicon Nanowire Biosensor 34 3.3 Results and discussion 36 3.4 Conclusions 40 3.5 Future Work 42 Chapter4 Liquid Metal Based Drosophila ECG Recording Platform 47 4.1 Introduction 47 4.2 Materials and Methods 50 4.2.1 Electrodes 50 4.2.2 Modeling, simulation, and impedance analysis 50 4.2.3 Drosophila strains, rearing, and crosses 52 4.2.4 Electrophysiological experiment 54 4.2.5 Signal Processing 57 4.3 Results and Discussion 57 4.4 Conclusions 65 Chapter5 Conclusion 68 Reference 71 | |
| dc.language.iso | en | |
| dc.subject | 生醫 | zh_TW |
| dc.subject | 系統單晶片 | zh_TW |
| dc.subject | 心電 | zh_TW |
| dc.subject | 免標定 | zh_TW |
| dc.subject | 果蠅 | zh_TW |
| dc.subject | 液態金屬 | zh_TW |
| dc.subject | ReFET | zh_TW |
| dc.subject | 蛋白質檢測 | zh_TW |
| dc.subject | CMOS-MEMS | zh_TW |
| dc.subject | 酸鹼感測 | zh_TW |
| dc.subject | 後製程 | zh_TW |
| dc.subject | 讀出電路 | zh_TW |
| dc.subject | post-IC | en |
| dc.subject | SoC | en |
| dc.subject | biomedical | en |
| dc.subject | protein detection | en |
| dc.subject | nanowire | en |
| dc.subject | readout | en |
| dc.subject | label-free | en |
| dc.subject | CMOS-MEMS | en |
| dc.subject | Drosophila | en |
| dc.subject | ECG | en |
| dc.subject | liquid metal | en |
| dc.subject | ReFET | en |
| dc.subject | pH sensor | en |
| dc.title | 應用於生醫訊號偵測之CMOS感測單晶片研製 | zh_TW |
| dc.title | CMOS Based Sensor System-on-Chip for Biomedical Use | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 102-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 林致廷(Chih-Ting Lin),林佑昇(Yo-Sheng Lin),孫台平(Tai-Ping Sun) | |
| dc.subject.keyword | 系統單晶片,生醫,後製程,蛋白質檢測,讀出電路,免標定,CMOS-MEMS,果蠅,心電,液態金屬,ReFET,酸鹼感測, | zh_TW |
| dc.subject.keyword | SoC,biomedical,post-IC,protein detection,nanowire,readout,label-free,CMOS-MEMS,Drosophila,ECG,liquid metal,ReFET,pH sensor, | en |
| dc.relation.page | 81 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2014-08-18 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 電子工程學研究所 | zh_TW |
| 顯示於系所單位： | 電子工程學研究所 | |
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