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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
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dc.contributor.advisor | 田維誠(Wei-Cheng Tian) | |
dc.contributor.author | Cheng-Lun Hsu | en |
dc.contributor.author | 徐正綸 | zh_TW |
dc.date.accessioned | 2021-06-16T03:38:24Z | - |
dc.date.available | 2020-03-24 | |
dc.date.copyright | 2015-03-24 | |
dc.date.issued | 2015 | |
dc.date.submitted | 2015-03-23 | |
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[2] D. Poli et al., ‘‘Exhaled volatile organic compounds in patients with non-small cell lung cancer: cross sectional and nested short-term follow-up study”, Respiratory Research 6, 1-10. (2005) [3] H. P. Chan et al., ‘‘Exhaled breath analysis: Novel approach for early detection of lung cancer”, Lung Cancer 63, 164–168. (2009) [4] H. Kataoka. , ‘‘Derivatization reactions for the determination of amines by gas chromatography and their applications in environmental analysis”, Journal of Chromatography A, 733 19-34.(1996) [5] C. SJ Probert et al., ‘‘Volatile Organic Compounds as Diagnostic Biomarkers in Gastrointestinal and Liver Diseases”, J Gastrointestin Liver Dis, September Vol.18 No 3, 337-343.(2009) [6] M. Phillips et al., ‘‘Volatile organic compounds in breath as markers of lung cancer: a cross-sectional study”, The Lancet, Vol 353, June 5.(1999) [7] M. Phillips et al. , ‘‘Volatile Markers of Breast Cancer in the Breath”, The Breast Journal, Volume 9, Number 3, 184–191.(2003) [8] 102年死因統計摘要,衛生福利部. (2014) [9] Biomarkers Definitions Working Group, “Biomarkers and surrogate endpoints: preferred definitions and conceptual framework,” vol. 69, ed. Clinical Pharmacology & Therapeutics, pp. 89-95.(2001) [10] W. Cao and Y. Duan.,‘‘Breath Analysis Potential for Clinical Diagnosis and Exposure Assessment”, Clinical Chemistry; 52:800-11.(2006) [11] Ali, Syed Aftab.”Semi-packed micro gas chromatography columns.” Diss. Virginia Polytechnic Institute and State University,(2008). [12] “Introduction to GC”, Availabe http://www.chromedia.org/chromedia [13] Terry, S.C.; Jerman, J.H.; and Angell, J.B., 'A gas chromatographic air analyzer fabricated on a silicon wafer,' Electron Devices, IEEE Transactions on , vol.26, no.12, pp.1880,1886, (1979) [14] Shaelah Reidy, Don George, Masoud Agah, and Richard Sacks, “Temperature-Programmed GC Using Silicon Microfabricated Columns with Integrated Heaters and Temperature Sensors” Analytical Chemistry (2007) [15] Zareian-Jahromi, M.A.; Agah, M., 'μGC Multicapillary Columns with Mono-Layer Protected Gold as a Stationary Phase,' Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on , vol., no., pp.288,291, 25-29 Jan. (2009) [16] Narayanan, S.; Alfeeli, B.; Agah, M., 'Thermostatted micro gas chromatography column with on-chip thermal conductivity detector for elevated temperature separation,' Sensors, 2010 IEEE , vol., no., pp.2504,2507, 1-4 Nov. (2010) [17] H. M. McNair and J. M. Miller, Basic Gas Chromatography. New York: Wiley-Interscsience, (1998) [18] M. J. E. Golay, 'The height equivalent to a theoretical plate of retentionless rectangular tubes,' Journal of Chromatography, vol. 216, pp. 1-8, Oct. 1981. [19] M. Martin, J.-L. Jurado-Baizaval, and G. Guiochon, 'Gas Chromatography in Open Rectangular Channels with Large Aspect Ratios,' Chromatographia, vol. 16, pp. 98-102, Dec. (1982) [20] H. D. Papendick and J. Baudisch, 'Tapeworm Columns in Gas Chromatography,' Journal of Chromatography, vol. 122, pp. 443-450, July (1976) [21] R. Ghijsen, H. Poppe, J. Kraak, and P. Duysters, 'The Mass Loadability of Various Stationary Phases in Gas Chromatography,' Chromatographia, vol. 27, pp. 60-66, Jan. (1989) [22] 北區微機電中心,儀器教學手冊 [23] 黃盟欽,碳分子篩/氧化鋁複合膜之製備及特性之研究,國立成功大學化學工程研究所.(2004) [24] Yu-Shen Lin, “Development of MEMS-Based Micro Preconcentrator with Silver Self-Heater for Micro Gas Chromatography”, National Taiwan University (2011) [25] Zhijun Zhang, Ruisheng Hu, and Zhongfan Liu,'Formation of a Porphyrin Monolayer Film by Axial Ligation of Protoporphyrin IX Zinc to an Amino-Terminated Silanized Glass Surface' Langmuir 16 (3), 1158-1162 (2000) [26] Sarah L. Westcott, Steven J. Oldenburg, T. Randall Lee, and Naomi J. Halas, ” Formation and Adsorption of Clusters of Gold Nanoparticles onto Functionalized Silica Nanoparticle Surfaces”, Langmuir 14 (19), 5396-5401,(1998) [27] Agilent Technologies, ”Agilent A&J GC column selection guide”, Available http://www.interlab.ru/images/articles/files/5989-6159_Agilent_J&W_GC_Column_Selection_Guide2.pdf | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/54781 | - |
dc.description.abstract | 氣相層析系統(Micro gas chromatography, μGC)之應用廣泛,將其微型化後更可直接應用於醫療檢測、環境監控、居家照護等領域。而μGC中,一關鍵元件為微型層析晶片(Micro separation column, μSC),其功能為將蒐集到的混和氣體樣本分離。在本研究中,我們開發出具新穎性之微型層析晶片,透過化學鍍金製作層析晶片之內加熱器,並應用於氣相層析系統中。
本次研究所提出之層析晶片有著高加熱效能的特性,且在製程上僅需一道光罩便能透過簡單的微機電(MEMS)製程技術結合化學鍍金方式達成;相較於過去其他團隊之研究,本次研究提出之層析晶片在製程上能夠大幅節省成本與時間。 本次設計之層析晶片為1米長、流道寬度300微米、蝕刻深度為400微米之蛇狀流道,透過本次研究提出之製程步驟,我們成功地得到1.6Ω之金層自身加熱器;當提供外加電壓4V時,金層加熱器消耗10W便能夠以1℃/s之升溫速率穩定從室溫升到至少130℃,可以做為穩定的加熱器使用。 將本研究開發之層析晶片經過封裝流程以及DB-1静相塗佈的程序後,便可應用於氣相層析系統中;透過Labview程式控制與電路設計,本研究之層析晶片可順利產生穩定的溫度梯度,並成功將含有苯、甲苯、間二甲苯、以及辛烷的混合氣體分離層析。 | zh_TW |
dc.description.abstract | Micro gas chromatography (μGC) could be widely used in many areas, including homecare, environment or air-pollution monitoring, and medical diagnosis. According to recent researches, a μGC can provide a non-invasive and real-time diagnosis for early stage lung cancer detection by analyzing human exhaled air.
In this thesis, we proposed a novel microfabricated separation column (μSC) for μGC. With one photomask in microelectromechanical systems(MEMS)-based -fabrication processes and the developed chemical replacement reaction, we presented a μSC with a thin gold film within the microfluidic channel as a self-heated element. The novel μSC not only provided highly efficient on thermal performance, but it also decreased the development time and cost in the fabrication process comparing to previous research results. With the 1.6Ω inner gold film heater, the 1-m μSC can be heated to 130℃ rapidly by applying a constant electrical power of 10 W with a heating rate of 1℃/s. Four volatile organic compounds (VOCs), benzene, toluene, m-xylene, and octane are successfully separated and detected by a flame ionization detector (FID) with DB-1 stationary phase using the proposed μSC. | en |
dc.description.provenance | Made available in DSpace on 2021-06-16T03:38:24Z (GMT). No. of bitstreams: 1 ntu-104-R01943162-1.pdf: 5546387 bytes, checksum: fceb2aa10ac451f35f1cf3f31c1d3c24 (MD5) Previous issue date: 2015 | en |
dc.description.tableofcontents | 口試委員會審定書 ii
中文摘要 iiiii ABSTRACT iv CONTENTS v LIST OF TABLES viii LIST OF FIGURES ix Chapter 1 緒論 1 1.1前言 1 1.1.1研究背景 1 1.1.2研究動機 3 1.2微型氣相層析系統介紹 4 1.3微型層析晶片發展與文獻回顧 5 1.4論文架構 10 Chapter 2微型層析晶片原理、設計及製程介紹 11 2.1 層析管柱原理 11 2.2 色譜原理 12 2.2.1分析時間 12 2.2.2 塔板理論 12 2.2.3 有效樣品容積 13 2.3 微型層析晶片設計 15 2.3.1 設計概念 16 2.3.2 設計規格與模擬結果 16 2.4 微型層析晶片製程流程與介紹 19 2.4.1 黃光顯影 20 2.4.2 感應耦合電漿離子矽蝕刻系統(ICP) 20 2.4.3 陽極接合(Anodic bonding) 22 2.4.4 流道內表面處理與氧化 24 2.4.5 流道內矽烷化 25 2.4.6 金種子層塗佈 25 2.4.7 流道內鍍金製程 26 2.4.8 流道內鍍金步驟驗證 26 2.4.9層析晶片之封裝 34 2.4.10流道內靜相之塗佈 34 Chapter 3 實驗藥品耗材、儀器設備及實驗流程 37 3.1實驗藥品耗材 37 3.1.1 實驗藥品 37 3.1.2 實驗耗材 37 3.2 實驗儀器設備 39 3.3 量測實驗流程介紹 40 3.3.1 實驗前置作業 40 3.3.2 層析晶片溫度控制流程 40 3.3.3 氣相層析系統運作流程 41 Chapter 4 實驗結果及數據分析 43 4.1薄膜金層加熱器效能測試 43 4.1.1電壓與溫度關係測試 43 4.1.2溫度梯度測試 44 4.2微型層析管柱晶片氣體分離結果 46 4.2.1靜相效果測試 46 4.2.2 溫度梯度對層析管柱晶片分離效果之影響 48 4.2.3修正加熱器電阻後之層析晶片分離結果 54 4.2.4金層加熱器與制冷片之比較 55 Chapter 5 結論、改進工作與未來展望 58 5.1結論 58 5.2改進工作與未來展望 59 Reference 60 | |
dc.language.iso | zh-TW | |
dc.title | 以無電鍍金層作為加熱器之微型層析管柱晶片應用於微型氣相層析系統 | zh_TW |
dc.title | Novel Microfabricated Separation Column with Electroless Plated Gold Heater for Micro Gas Chromatography | en |
dc.type | Thesis | |
dc.date.schoolyear | 103-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 呂家榮(Chia-Jung Lu),沈弘俊(Horn-Jiunn Sheen) | |
dc.subject.keyword | 微型層析晶片,微型氣相層析系統,化學鍍金,金層加熱器, | zh_TW |
dc.subject.keyword | micro separation column,micro gas chromatography,gold replacement reaction,gold film heater, | en |
dc.relation.page | 62 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2015-03-23 | |
dc.contributor.author-college | 電機資訊學院 | zh_TW |
dc.contributor.author-dept | 電子工程學研究所 | zh_TW |
顯示於系所單位: | 電子工程學研究所 |
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