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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 徐振哲 | |
| dc.contributor.author | Chih-Ming Wang | en |
| dc.contributor.author | 汪志銘 | zh_TW |
| dc.date.accessioned | 2021-06-16T02:30:35Z | - |
| dc.date.available | 2020-08-03 | |
| dc.date.copyright | 2015-08-03 | |
| dc.date.issued | 2015 | |
| dc.date.submitted | 2015-07-30 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/53822 | - |
| dc.description.abstract | 本實驗利用電力驅動低成本可撓式常壓微電漿產生系統(Microplasma generationdevices, MGD) 以產生維度限制在小於 1mm 之電漿進行兩大部份之實驗研究，而該 MGD 為一介電質放電型電漿系統，主要是由雙層銅箔及玻璃纖維介電質所組成，且以碳粉轉印法及溼式蝕刻進行電漿圖案製作，相較於傳統半導體之圖樣製作方式，本作法之優點為低成本、製作時間短、圖樣可客製化，且其一重要特色為可大量製作，尤其有利於實驗開發階段之大量研究。
第一部為利用MGD進行氣體轉換研究，本實驗主要研究氣體為二氧化碳(CO2)，使之經由電漿處理後，產生主要產物如一氧化碳(CO) 和氧氣(O2) 等氣體。產物分析則以氣相層析儀及 Lissajous 圖形分別計算產物 CO 濃度和電漿消耗功率，並藉此獲得電漿裝置之能量效率及 CO2 之轉化率。實驗改變電源供應頻率、CO2 體積流率，及電極幾何參數如：單/雙側電漿產生及平坦式/可撓式電極等，以觀察並比較其結果。實驗結果可得出該系統之最適化操作參數，其中，較高之電源供應頻率、較快速之 CO2 體積流率，以及具撓曲電極之電漿裝置，都將具有較高之能量效率值(最高約為 8.95 %，X 值最高則約為 1.61 %)，且均較以傳統方式轉換CO2氣體製程之能量效率值(約 5 %) 更有效率。 第二部份則將上述MGD另外與微流道裝置(Microchanneldevice, MCD) 進行結合，並由 MCD 之翻模製作及兩裝置間之接合等開始著手，實驗中 MCD 之翻模主要以3D列印翻模主體，列印材料則為聚乳酸(Polylacticacid, PLA)，MCD 之基材則使用聚二甲基矽氧烷(Poly(dimethylsiloxane), PDMS)，黏合方式則為一般市售雙面膠。其後，進一步探討該結合裝置於氣液相分離程序和液相流道調換等之應用。於氣液相分離程序中，僅發現液相流體較喜好流經電漿改質後之微流道，而尚無法成功分離氣液相微流體；於液相流道調換中，則可成功使微流體於MCD中改變其流動方向，並可人為控制該流體使其流經特定微流道。 | zh_TW |
| dc.description.provenance | Made available in DSpace on 2021-06-16T02:30:35Z (GMT). No. of bitstreams: 1 ntu-104-R02524103-1.pdf: 7041362 bytes, checksum: cb62dacc7d98787dfb0865754156d9a9 (MD5) Previous issue date: 2015 | en |
| dc.description.tableofcontents | 誌謝 ................................................................................................................................... I
中文摘要 ......................................................................................................................... III ABSTRACT ..................................................................................................................... V 目錄 ............................................................................................................................... VII 圖目錄 ............................................................................................................................ XI 表目錄 ........................................................................................................................... XV 第 一 章 緒論............................................................................................................ 1 1.1 前言 ................................................................................................................ 1 1.2 研究動機與目標 ............................................................................................ 2 1.3 論文總覽 ........................................................................................................ 3 第 二 章 文獻回顧.................................................................................................... 5 2.1 電漿簡介 ........................................................................................................ 5 2.1.1 彈性與非彈性碰撞 ............................................................................... 5 2.1.2 電漿產生機制 ....................................................................................... 6 2.1.3 非熱平衡電漿 ..................................................................................... 10 2.1.4 氣體崩潰電壓 ..................................................................................... 11 2.1.5 低壓電漿及常壓電漿 ......................................................................... 15 2.2 常壓微電漿放電系統 .................................................................................. 16 2.2.1 微電漿系統之簡介 ............................................................................. 16 2.2.2 微電漿系統之種類及其應用 ............................................................. 18 2.3 介電質放電型電漿系統 .............................................................................. 29 2.3.1 介電質放電型電漿系統之簡介及原理 ............................................. 29 2.3.2 介電質放電型電漿系統之應用 ......................................................... 34 2.4 氣體轉換反應 .............................................................................................. 39 2.4.1 傳統製程之氣體轉換 ......................................................................... 39 2.4.2 常壓電漿製程之氣體轉換 ................................................................. 39 2.5 電漿輔助氣體轉換反應：二氧化碳 .......................................................... 45 2.5.1 二氧化碳之簡介 ................................................................................. 45 2.5.2 以微電漿產生裝置進行二氧化碳氣體轉換之原理 ......................... 46 2.5.3 以微電漿產生裝置進行二氧化碳氣體轉換之裝置 ......................... 49 2.6 微流道及微流體簡介 .................................................................................. 54 2.6.1 微型化 ................................................................................................. 54 2.6.2 微流體及微流道 ................................................................................. 54 2.6.3 微流體之流動 ..................................................................................... 57 2.6.4 微流道裝置之應用 ............................................................................. 62 2.7 結合微流道之元件及系統 .......................................................................... 65 2.7.1 微流道裝置：微流道之翻模程序 ..................................................... 65 2.7.2 微流道裝置：界面接合程序 ............................................................. 69 2.7.3 微流道內之氣液相流動型態 ............................................................. 72 2.7.4 微流道之氣液相分離程序 ................................................................. 75 2.7.5 微流道之液相流道調換 ..................................................................... 79 第 三 章 實驗設備與架構 ..................................................................................... 83 3.1 銅箔基板微電漿產生裝置 .......................................................................... 83 3.1.1 銅箔基板微電漿產生裝置之製備 ..................................................... 83 3.1.2 以銅箔基板微電漿產生裝置進行氣體轉換之實驗設備 ................. 84 3.2 銅箔基板微電漿產生裝置結合微流道系統 .............................................. 89 3.2.1 微流道系統之製備 ............................................................................. 89 3.2.2 銅箔基板微電漿產生裝置結合微流道系統之製備 ......................... 92 3.2.3 銅箔基板微電漿產生裝置結合微流道系統之實驗裝置 ................. 93 3.3 電漿檢測 ...................................................................................................... 95 3.3.1 電性檢測 ............................................................................................. 95 3.3.2 光學檢測 ............................................................................................. 97 3.4 檢測分析設備 .............................................................................................. 98 3.4.1 氣體轉換產物之定量分析檢測 ......................................................... 98 3.4.2 微電漿系統結合微流道裝置之檢測 ............................................... 101 第 四 章 實驗結果與討論 ................................................................................... 103 4.1 銅箔基板介電質放電型電漿產生裝置：二氧化碳轉換 ........................ 103 4.1.1 銅箔基板介電質放電型電漿產生裝置 ........................................... 103 4.1.2 電源供應頻率之影響 ....................................................................... 104 4.1.3 二氧化碳體積流率之影響 ............................................................... 109 4.1.4 電極單側產生電漿和雙側產生電漿之比較 ................................... 113 4.1.5 平坦式電極和可撓式電極之比較 ................................................... 119 4.1.6 銅箔基板介電質放電型電漿產生裝置與二氧化碳氣體轉換 ....... 121 4.2 銅箔基板介電質放電型電漿產生裝置：結合微流道系統 .................... 122 4.2.1 微電漿系統結合微流道裝置：親疏水性測試 ............................... 122 4.2.2 微電漿系統結合微流道裝置：微電漿與液體接觸測試 ............... 124 4.2.3 微電漿系統結合微流道裝置之應用：微流道內氣液相分離 ....... 129 4.2.4 微電漿系統結合微流道裝置之應用：微流道內液相流道調換 ... 141 第 五 章 結果與未來展望 ................................................................................... 147 第 六 章 參考文獻................................................................................................ 149 | |
| dc.language.iso | zh-TW | |
| dc.subject | 流道調換 | zh_TW |
| dc.subject | 常壓微電漿 | zh_TW |
| dc.subject | 二氧化碳 | zh_TW |
| dc.subject | 氣體轉換 | zh_TW |
| dc.subject | 微流體 | zh_TW |
| dc.subject | gas decomposition | en |
| dc.subject | carbon dioxide | en |
| dc.subject | atmospheric-pressure microplasma | en |
| dc.subject | michannel switching | en |
| dc.subject | microfluidics | en |
| dc.title | 低成本可撓式常壓微電漿產生裝置於微型反應器及微流道之應用 | zh_TW |
| dc.title | Low-cost and Flexible Atmospheric-pressure Microplasma Generation Devices as a Microreactor of CO2 Decomposition and Integrated with PDMS-based Microchannels | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 103-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 林致廷,許聿翔,康敦彥 | |
| dc.subject.keyword | 常壓微電漿,二氧化碳,氣體轉換,微流體,流道調換, | zh_TW |
| dc.subject.keyword | atmospheric-pressure microplasma,carbon dioxide,gas decomposition,microfluidics,michannel switching, | en |
| dc.relation.page | 175 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2015-07-30 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 化學工程學研究所 | zh_TW |
| 顯示於系所單位： | 化學工程學系 | |
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