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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/53542完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 張陸滿(Luh-Maan Chang) | |
| dc.contributor.author | Yen-Cheng Lai | en |
| dc.contributor.author | 賴彥程 | zh_TW |
| dc.date.accessioned | 2021-06-16T02:25:33Z | - |
| dc.date.available | 2018-12-31 | |
| dc.date.copyright | 2015-08-31 | |
| dc.date.issued | 2015 | |
| dc.date.submitted | 2015-08-06 | |
| dc.identifier.citation | 中文文獻:
王珉政、劉澄芳、徐力行(2014)，流體力學(第七版)，新北市:全華圖書。 王新榮、陳時錦、劉亞忠(2002)，有限元素法及其應用，台北市:中央圖書出版社。 王輔仁(2012)，無塵室技術-設計、測試及運轉，新北市:全華圖書。 朱清宇(2007)，CFD與建築環境設計，北京:中國建築工業出版社。 吳伯諺，曹志明，胡石政(2008)，「利用計算流體力學檢討潔淨室設計之適正性」，碩士論文，國立台北科技大學能源與冷凍空調學系。 張陸滿(2008)，「奈米時代之高科技廠房設施工程」，中國土木水利工程學會，第三十五卷 第一期，第15-26頁。 郭榮欽、謝尚賢(2010)，BIM概觀與國內推行策略，土木水利，第三十七卷，第五期，第8-20頁。 黃佳松(2006)，「半導體廠潔淨室氣流模擬分析與省能運轉策略.」，碩士論文，國立台北科技大學能源與冷凍空調學系。 溫正，石良辰，任譯如(2009)，FLUENT流體計算應用教程，北京:清華大學出版社，第15-60頁。 趙勝裕、黃榮鑑(1997)，「K-ε紊流模式之近壁行為探討」，全國計算流體力學研討會。 賴朝俊、蔡志敏(2013)，BIM建築資訊建模手冊(第二版)，台北市:松崗資產管理股份有限公司。 英文文獻: Alexy Kolesnikov (2006), “Use of computational fluid dynamics to predict airflow and contamination concentration profiles within laboratory floor plan environment.”, Applied Biosafety, Vol 11, No 4, P.197-214. Antti Karola, Hannu Lahtela, Reijo Hänninem, Rob Hitchcock, Qingyan Chen, Stephen Dajka, Kim Hagström (2002), “BSPro COM-Server¬ interoperability between software tools using industrial foundation classes”, Energy and Building, Vol 34, P.901-907. Arno Schlueter, Frank Thesseling (2009), “Building information model based energy/exergy performance assessment in early design stages”, Automation in Construction, Vol 18, P.153–163. Bryde, David, Martí Broquetas, and Jürgen Marc Volm (2013), “The project benefits of building information modelling (BIM).”, International Journal of Project Management, Vol 31, No 7, P.971-980. C.Y.Chuah, Salim.M.Salim, H.G Low (2013), “CFD Application on Cleanroom Design”, EURECA, P.15-16. Donald F. Young, Bruce R. Munson, Theodore H. Okiishi, Wade W. Huebsch (2007). A Brief Introduction to Fluid Mechanics (4thed.). USA: Wiley. Eddy Krygiel, Brad Nies (2008), Green BIM (1 sted). USA: Wiley Publishing, Inc. FED-STD-209E (1992), “Airborne particulates,cleanliness classes in cleanrooms and clean zones”, Federal Standard/Specification, Sep. 1992. Hu, S. C., Y. Y. Wu, and C. J. Liu (1996), “Measurements of air flow characteristics in a full-scale clean room.”, Building and Environment, Vol 31, No 2, P.119-128. International Organization for Standards (1999), ISO Standard 14644: 1999, “Cleanroom and associated controlled environments”, Geneva, Switzerland. John D. Anderson, Jr. (1995). Computational Fluid Dynamic (1sted). USA: McGraw-Hill Education. Karki, Kailash C., Amir Radmehr, and Suhas V. Patankar (2003), “Use of Computational Fluid Dynamics for Calculating Flow Rates Through Perforated Tiles in Raised-Floor Data Centers”, International Journal of Heating, Ventilation, Air-Conditioning, and Refrigeration Research, Vol.9, No.2, P.153-166. Kwang-Chul Noh, Hyuk-Soon Kim, Myung-Do Oh (2010), “Study on Contamination Control in a Minienvironment Inside Clean Room for Yield Enhancement Based on Particle Concentration Measurement and Airflow CFD Simulation”, Building and Environment, Vol 45, P.825-831. Kyosuke Hiyama, Yunting Diao, Shinsuke Kato, Makoto Koganei (2013), “Impact Analysis of BIM Spread on Mechanical Design Process”, International Journal of High-Rise Buildings, Vol 2, No 2, P.97-104. Nari Yoon, Nobuyuki Oshitani, Yuya Ando (2014), “Automated CFD Simulation System with BIM for BCA Green Mark Certification”, ASHRAE/IBPSA-USA Building Simulation Conference Atlanta, GA, P.121-128. Oliver Rouaud, Michel Havet (2002), “Computation of the airflow in a pilot scale clean room using K-ε turbulence models”, International Journal of Refrigeration Vol. 25, P351-361. Paola Sanguinetti, Sherif Abdelmohsen, JaeMin Lee, JinKook Lee, Hugo Sheward, Chuck Eastman (2012), “General system architecture for BIM: An integrated approach for design and analysis”, Advanced Engineering Informatics, Vol 26, P.317–333. Q.Chen (2007), “Comparison of Different K-ε Models for Indoor Air Flow Computations”, An International Journal of Computation and Methodology, P353-369. R. Vanlande, C. Nicolle, C. Cruz (2008), “IFC and building lifecycle management”, Automation in Construction, Vol 18, P.70–78. Raymond K. Schneider (2001), “Designing Clean Room HVAC Systems” ASHRAE journal, Vol 43, No 8, P.39-43. Robert Eadie, Mike Browne, Henry Odeyinka, Clare McKeown, Sean McNiff (2013), “BIM implementation throughout the UK construction project lifecycle: An analysis”, Automation in Construction Vol. 36, P145-151. S.C. Hu, Y. K. Chuah (2003), “Deterministic simulation and assessment of air-recirculation performance of unidirectional-flow cleanrooms that incorporate age of air concept”, Building and Environment, Vol 38, No 4, P.563-570. Sagar Malsane, Jane Matthews, Steve Lockley, Peter E.D. Love, David Greenwood (2015), “Development of an object model for automated compliance checking.”, Automation in Construction, Vol 49, P.51-58. Salman Azhar (2011), “Building Information Modeling (BIM): Trends, Benefits, Risks, and Challenges for the AEC Industry.”, Leadership and Management in Engineering., Vol 11, No 3, P.241–252. Suhas Patankar (1980). Numerical Heat Transfer and Fluid Flow (1sted). USA: CRC Press. Tsan-Hsing Shih, Louis A. Povinelli, Nan-Suey Liu, Mark G. Potapczuk, J.L. Lumley (1999), “A Generalized Wall Function”, National Aeronautics and Space Administration-Glenn Research Center. Tuomas Lanie, Reijo Hänninen, Antti Karola (2007), “Benefits of BIM in the Termal Performance Management”, Building Simulation, P.1455-1461. Umit Isikdag (2012), “Design patterns for BIM-based service-oriented architectures.”, Automation in Construction, Vol 25, P.59-71. Vaibhav K. Arghode and Yogendra Joshi (2013), “Modeling Strategies for Air Flow Through Perforated Tiles in a Data Center”, IEEE Transactions on Components, Packaging and Manufacturing Technology, Vol.3, No5, P.801-810. W. P. Jones and B.E. Launder (1972), “The prediction of laminarization with a two-equation model of turbulence”, International journal of heat and mass transfer, Vol 15, No 2, P.301-314. Walter O’Grady, Marcus Keane (2006), “Specification of an IFC Based Software Application to Support CFD Simulation.” ICCCBE, P.1-10. 其他文獻: 台灣半導體協會，2015台灣半導體產業協會年刊(第72期)：http://ebook.greenpublishers.com/ebook/tsia/72/ 台灣半導體協會，2014台灣半導體產業協會年刊(第68期)：http://ebook.greenpublishers.com/ebook/tsia/68/ 工業研究院產業經濟與趨勢研究中心，展望IC製造業-創新蛻變，迎向產業新契機: http://ieknet.iek.org.tw/BookView.do?domain=2&rptidno=393837509&opt=3 工業研究院產業經濟與趨勢研究中心，全球IC製造產業對半導體產業的影響: http://ieknet.iek.org.tw/BookView.do?domain=2&rptidno=346296961 | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/53542 | - |
| dc.description.abstract | 隨著半導體產業的演進，製程設備對環境的要求日益嚴苛，而環境控制則需透過潔淨室的運作，以排除包括溫度變化、微震動、噪音、微粒子污染等影響生產環境的因素，使晶圓良率保持在一定的水準，以便讓產品趕上快速變遷的市場，從中取得先機。
而環境控制的方法有很大一部份需依靠空調系統，好的空調設計能讓溫度保持在一定的區間，且能提供足夠的換氣率，快速排出微粒子等污染因素，確保機台運作正常。然而現在的廠房多為顧及製程的良率，遂以過度的空調設計確保生產環境穩定，如此雖能達到環境控制的成效，但過度的設計卻造成能源浪費，同時也增加建造以及營運的成本，於是如何拿捏空調設備的配置便成為一門十分重要的學問。 為具體評估空調設計的合理性，本研究提出BIM aided CFD (BaC)概念，應用建築資訊模型(Building Information Model, BIM)輔助近代計算流體力學(Computational Fluid Dynamics, CFD)分析，進行潔淨室3D流場模擬，直觀地呈現潔淨室內氣流運行的情況，作為空調設計的評估依據。 但由於近代廠房規模龐大且複雜，進行CFD分析需要大量的人工參數輸入作業，以致於分析往往無法跟上設計變更，評估最新的設計結果。因此本研究進一步應用BaC技術，透過物件資訊交換機制，自動化輸入CFD參數，大量減少參數輸入所需的人力以及過程中的疏失，縮短模擬週期，使CFD分析能作為評估大型廠房潔淨室設計的依據。 | zh_TW |
| dc.description.abstract | The variation of several environment factors directly affects the chemical reaction in the wafer and causes the reduction of manufacturing yields. Therefore, environment control becomes a critical issue in advanced nano-fab design.
To deal with this issue, 3D BIM (Building Information Modeling) is incorporated into CFD (Computational Fluid Dynamics) simulation. The air flow or particles distribution in cleanroom are supplemented with 3D visualization that provides an intuitive platform for all of the design teams. Because of the complication of modern Giga-Fab, the pre-process of CFD simulation becomes very difficult. Therefore, the research focuses on its process automation. With the application of BaC (BIM aided CFD), not only the 3D geometry model but also its corresponding parameters can be concurrently imported into CFD. Thus, the procedure of reassigning CFD properties to every object is reduced. The new process of utilizing BaC beneficially simplifies the conventional CFD simulation. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-16T02:25:33Z (GMT). No. of bitstreams: 1 ntu-104-R02521706-1.pdf: 5235955 bytes, checksum: e5d0171e27cbc2176908d6a09e6e0dd3 (MD5) Previous issue date: 2015 | en |
| dc.description.tableofcontents | 誌謝 II
中文摘要 III Abstract IV 目錄 V 圖目錄 VIII 表目錄 X 第一章 緒論 1 1.1 研究動機 1 1.2 研究目的 4 1.3 研究範圍與限制 4 1.4 研究方法與流程 5 第二章 文獻回顧 8 2.1 潔淨室氣流模式(Cleanroom Airflow Patterns) 8 2.2 計算流體力學(Computational Fluid Dynamics) 10 2.2.1 流體運動學(Fliud Kinematics) 11 2.2.2 網格劃分(Meshing) 12 2.2.3 紊流模型(Turbulence Model) 14 2.3 計算流體力學應用於潔淨室設計 15 2.4 建築資訊模型 16 2.5 建築資訊模型輔助計算流體動力學分析 18 2.6 使用工具 20 2.6.1 建模工具 21 2.6.2 計算流體動力學分析軟體 22 第三章 BIM Aided CFD自動化流程 24 3.1 潔淨室風場模擬測試 24 3.1.1 分析軟體架構 24 3.1.2 小型廠房情境演練 25 3.2 定義前置作業工作流程 27 3.3 傳遞廠房建築資訊模型屬性 28 3.4 程式架構及工作流程 30 3.4.1 程式架構 30 3.4.2 BIM與CFD參數資料對應 33 3.4.3 BIM aided CFD程式介面操作 35 第四章 導入BaC於潔淨室氣流模擬 38 4.1 小型潔淨室實際專案模擬 38 4.1.1 實驗室規格 38 4.1.2 手動設定流程 39 4.1.3 手動模擬結果 41 4.1.4 驗證模擬結果 42 4.1.5 套用BaC自動化設定 46 4.1.6 BaC自動化分析結果 50 4.2 大型廠房BaC自動化模擬 54 4.2.1 廠房潔淨室規格 54 4.2.2 空廠房氣流測試 55 4.2.3 空廠房氣流測試結果 59 4.2.4 創建不同空調設計方案 61 4.2.5 大型廠房BaC自動化模擬 63 4.2.6 大型廠房自動化模擬效益與限制 67 第五章 結論與後續研究 70 5.1 結論 70 5.2 後續研究 71 參考文獻 73 中文文獻: 73 英文文獻: 74 其他文獻: 78 附錄A 79 Revit API程式解說 79 Winform介面程式解說 84 | |
| dc.language.iso | zh-TW | |
| dc.subject | 空調設計 | zh_TW |
| dc.subject | BIM Aided CFD | zh_TW |
| dc.subject | 潔淨室 | zh_TW |
| dc.subject | 計算流體力學 | zh_TW |
| dc.subject | 建築資訊模型 | zh_TW |
| dc.subject | CFD | en |
| dc.subject | BIM Aided CFD | en |
| dc.subject | HVAC | en |
| dc.subject | BIM | en |
| dc.subject | Cleanroom | en |
| dc.title | 自動化3D氣流模擬應用於半導體廠潔淨室之研究 | zh_TW |
| dc.title | Automatic CFD Simulation In High-Tech Fab Cleanroom | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 103-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 曾惠斌,謝尚賢,莊子壽,胡石政 | |
| dc.subject.keyword | BIM Aided CFD,潔淨室,計算流體力學,建築資訊模型,空調設計, | zh_TW |
| dc.subject.keyword | BIM Aided CFD,Cleanroom,CFD,BIM,HVAC, | en |
| dc.relation.page | 89 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2015-08-06 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 土木工程學研究所 | zh_TW |
| 顯示於系所單位： | 土木工程學系 | |
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