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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 顏家鈺 | |
| dc.contributor.author | Shih-Tang Liu | en |
| dc.contributor.author | 劉世棠 | zh_TW |
| dc.date.accessioned | 2021-06-15T16:08:59Z | - |
| dc.date.available | 2018-08-28 | |
| dc.date.copyright | 2015-08-28 | |
| dc.date.issued | 2015 | |
| dc.date.submitted | 2015-08-19 | |
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Kobayashi, “Disturbance observer and feedforward design for a high-speed direct-drive positioning table,” IEEE Trans. Contr. Syst. Technol., vol. 7, pp.513-526 1999. [13] S. M. Shahruz, “Performance enhancement of a class of nonlinear systems by disturbance observers,” IEEE/ASME Trans. Mechatronics, vol.5, no.3, pp. 319–323, Sep. 2000. [14] H. Shim and N. Jo, “An almost necessary and sufficient condition for robust stability of closed-loop systems with disturbance observer,” Automatica, vol. 45, pp. 296–299, 2009. [15] H. J. M. Adriaens, W. L. de Koning and R. Banning “Modeling piezoelectric actuators”, IEEE/ASME Trans. Mechatronics, vol. 5, no. 4, pp.331 -341 2000. [16] L. S. Chen, J. Y. Yen, et al., “Precision Tracking of a Piezo-Driven Stage by Charge Feedback Control,” Precision Engineering, 2013. [17] Physik Instrumente Inc., The world of micro- and nanopositioning, 2005/2006. [18] Physik Instrumente GmbH, Tutorial: Piezoelectrics in Nanopositioning, Designing with Piezoelectric Actuators, 2009. [19] Piezomechanik, Low voltage co-fired multilayer stacks, rings and chips for actuation, pp. 21-23, 2004. [20] Q. Yao, Jingyan Dong and Placid M. Ferreira, 'A novel parallel-kinematics mechanisms for integrated, multi-axis nanopositioning: Part 2. Dynamics, control and performance analysis,' Precision Engineering, Vol. 32, Issue 1, pp.20-23, Jan. 2008. [21] Y. Tian, B. Shirinzadeh, and D. Zhang. 'Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation,' Microelectronic Engineering, Vol. 87, pp. 230-241, 2010. [22] Agilent Technologies Inc., “Chapter 7B Agilent 10705A Single Beam Interferometer,” in Laser and Optics User's Manual, 2002. [23] A. Visintin, “Mathematical models of hysteresis,” in The Science of Hysteresis, G. Bertotti and I. Mayergoyz, Eds. London, U.K.: Academic, 2006, pp. 1–123. [24] C. Y. Su, Y. Stepanenko, J. Svoboda, and T. Leung, “Robust adaptive control of a class of nonlinear systems with unknown backlash-like hysteresis,” IEEE Trans. Autom. Control,vol.45,no.12,pp.2427–2432, Dec. 2000. [25] L. Ljung, System Identification Toolbox—User's Guide, Mathworks, Sherborn, MA, 2003. [26] T. Katayama, Subspace Methods for System Identification, Springer, 2005. [27] M. Tomizuka, 'Zero phase error tracking algorithm for digital control,' Journal of dynamic systems, measurement, and control, Vol. 109, pp 65-68, 1987. [28] E. Gross, M. Tomizuka, and W. Messner. 'Cancellation of discrete time unstable zeros by feedforward control.' Journal of dynamic systems, measurement, and control, Vol. 116, pp. 33-38, 1994. [29] J. A. Butterworth, L. Y. Pao and D. Y. Abramovitch, “The effect of nonminimum-phase zero locations on the performance of feedforward model-inverse control techniques in discrete-time systems,” American Control Conference, 2008. [30] H. F Tsai, “Hysteresis compensation of piezoelectric-actuated stage by surface fitted inverse Preisach model and robust control,” Master thesis, Department of Mechanical Engineering, National Taiwan University, 2012. [31] C. Z. Jan, “Piezo-Stage Identification and Control Based on Non-Hysteretic Electromechanical with Charge input,” Master thesis, Department of Mechanical Engineering, National Taiwan University, 2013. [32] S. F. Wen, “Charge Feedback Hysteresis Disturbance Observer Design of a Multi-axis Piezo-actuated Stage,” Master thesis, Department of Mechanical Engineering, National Taiwan University, 2014. [33] L. S. Chen, “Sensorless Precision Motion Control of a Multi-axis Piezo-actuated Stage,” Ph.D. dissertation, Department of Mechanical Engineering, National Taiwan University, 2013. [34] F. C. Wang, L. S. Chen, Y. C. Tsai, C. H. Hsieh and J. Y. Yen, “Robust loop-shaping control for a nano-positioning stage,” Journal of Vibration and Control, 2013. | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/52171 | - |
| dc.description.abstract | 由於具備高驅動解析度與高操作頻寬，壓電材料被廣泛應用於微控制領域之中，然其受制於遲滯效應－一種非線性之能量耗損－不僅驅動效率因而降低，控制成果也深受阻踞。 依據文獻中提出的電荷控制架構，藉由串連一個額外電容，可以準確地識別壓電制動器之等效模型，進而以電容上的壓降來估測遲滯所消耗的電壓。此外，此作法將控制目標由輸出位移轉換為電容上之電荷存量，不僅避免位置量測時之雜訊干擾，還能大幅降低控制成本。 基於上述硬體架構，本論文提出兩種補償方式來減少遲滯之影響，這兩種做法都是以遲滯觀察器來做為補償基礎，然而其中一個與遲滯模型進行結合，而另一個則是搭配內迴路控制器。這兩個補償機制只作用於遲滯消除而不進行任何的位置控制，因此在設計上位置控制器與遲滯補償兩者各自獨立。 除了補償方法所具備之運算架構，其所對應的穩定準則與效能分析也將在本論文內進行討論，並且在最後佐以不同控制頻率下之驗證結果。 | zh_TW |
| dc.description.abstract | With large bandwidth and high resolution, piezo-actuated stage is widely used in nanoscale position systems. However, the piezo is suffered from the hysteresis: a nonlinear effect which causes additional energy consumption that further degrades the control performance. According to the charge control structure proposed by L.S. Chen et al., by connecting a capacitor to the system, the parameter of the piezo actuator can be identified and further used to estimate the voltage consumed by the hysteresis. Based on the hardware structure described in the previous paragraph, this thesis proposes two compensation methods to eliminate the hysteresis effect. Both methods use a hysteresis observer to calculate the compensation value, however, only one of them is integrated with a hysteresis model, while the other is combined with an inner-loop controller. The two methods are only used for hysteresis cancellation and not involved in position control. Therefore, in the design process, the position controller and the hysteresis compensator are independent of each other. In addition to the compensation structure of the proposed methods, the corresponding stability criteria and performance analysis are also discussed in this thesis. Moreover, for validity, a series of experiments are also implemented, whereby the control results are presented in the end of this thesis. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-15T16:08:59Z (GMT). No. of bitstreams: 1 ntu-104-R02522810-1.pdf: 2315948 bytes, checksum: 94419816280262a315a279d15fae7738 (MD5) Previous issue date: 2015 | en |
| dc.description.tableofcontents | 序 i 摘要 ii ABSTRACT iii CONTENTS iv LIST OF FIGURES viii LIST OF TABLES xiv Chapter 1 Introduction 1 1.1 Motivation 1 1.2 Literature Review 1 1.3 Contributions 3 1.4 Brief Introduction of the Other Sections 4 Chapter 2 Hardware Introduction 5 2.1 Piezo-actuated Stage 5 2.2 Displacement Measurement System 7 2.2.1 Overall Structure of Laser Interferometer System 7 2.2.2 Laser Path and the Operating Principle of Interferometer 9 2.3 Hardware and Software of Servo Control System 13 2.3.1 Hardware Architecture 13 2.3.2 Software-hardware integration 16 Chapter 3 System Description 18 3.1 Mechanical Structure 18 3.2 Electro-Mechanical Model of Piezo-actuated System 20 3.2.1 Piezo actuator model 20 3.2.2 Linear / Nonlinear Decouple 24 3.2.3 Dynamic Characteristic of Electromechanical System 25 3.3 Overall System 28 Chapter 4 Hysteresis Description 31 4.1 Hysteresis Model 31 4.1.1 Preisach Model Description 31 4.1.2 Polynomial Preisach Model 37 4.2 Hysteresis Consumption 39 Chapter 5 Parameter and System ID 42 5.1 Parameter ID 42 5.1.1 Estimation of the Equivalent Stiffness 42 5.1.2 Identification of the transformation ratio 44 5.2 Transfer Function ID 47 5.2.1 Setting Notification of System Identification 47 5.2.2 Identification Results Validation of Nominal System 49 5.3 Hysteresis ID 54 Chapter 6 Overall Control Structure and Outer Loop Tracking Controller 59 6.1 Overall Control Scheme 59 6.2 Outer Loop Tracking Controller 62 6.2.1 Tracking Controller 62 6.2.2 Feedback Filter 63 6.2.3 ZPTEC 64 Chapter 7 Middle Loop Voltage Feedback Control 67 Chapter 8 Inner Loop Hysteresis Compensation 72 8.1 Measurement-based Hysteresis Observer 72 8.2 Compensation Method 1- Hysteresis Shaping 77 8.2.1 Compensation structure 77 8.2.2 Stability Analysis 79 8.2.3 Performance Analysis 83 8.3 Hysteresis Compensation Method 2 - Compensation Controller 87 8.3.1 Compensation structure 88 8.3.2 Stability Analysis 89 8.3.3 Performance Analysis 90 Chapter 9 Experimental Validity 94 9.1 Without Inner Loop Compensation 94 9.1.1 Control Result: Stair Signal 97 9.1.2 Control Result: 1.2Sin(30Hz) 98 9.1.3 Control Result: 1.2Sin(60Hz) 99 9.1.4 Control Result: 1.2Sin(100Hz) 100 9.1.5 Control Result: 1.2Sin(150Hz) 101 9.1.6 Control Result: 1.2Sin(200Hz) 102 9.2 Method 1 Hysteresis Shaping 103 9.2.1 Hysteresis Shaping: Stair signal 105 9.2.2 Hysteresis Shaping: 1.2Sin(30Hz) 106 9.2.3 Hysteresis Shaping: 1.2Sin(60Hz) 107 9.2.4 Hysteresis Shaping: 1.2Sin(100Hz) 108 9.2.5 Hysteresis Shaping: 1.2Sin(150Hz) 109 9.2.6 Hysteresis Shaping: 1.2Sin(200Hz) 110 9.3 Method 2 Compensation Controller 111 9.3.1 Compensate Controller: Stair Signal 113 9.3.2 Compensate Controller: 1.2Sin(30Hz) 114 9.3.3 Compensate Controller: 1.2Sin(60Hz) 115 9.3.4 Compensate Controller: 1.2Sin(100Hz) 116 9.3.5 Compensate Controller: 1.2Sin(150Hz) 117 9.3.6 Compensate Controller: 1.2Sin(200Hz) 118 9.4 Overall Comparison 119 9.5 Comparing with the Other Paper 120 9.5.1 Comparing with Disturbance Observer Based Hysteresis Observer 120 9.5.2 Comparing with Charge Feedback Control 122 Chapter 10 Conclusions and Future Work 124 REFERENCE 126 | |
| dc.language.iso | en | |
| dc.subject | 遲滯觀察器 | zh_TW |
| dc.subject | 壓電制動器 | zh_TW |
| dc.subject | 遲滯補償 | zh_TW |
| dc.subject | 遲滯模型 | zh_TW |
| dc.subject | hysteresis observer | en |
| dc.subject | piezo-actuator | en |
| dc.subject | hysteresis compensation | en |
| dc.subject | hysteresis model | en |
| dc.title | 基於遲滯估測器與遲滯模型之混合式壓電平台遲滯補償 | zh_TW |
| dc.title | A Hybrid Hysteresis Compensation of Hysteresis Observer and Preisach Model Estimator for Pizeo-actuated Stage | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 103-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 陳永耀,王富正,連豐力,何明志 | |
| dc.subject.keyword | 壓電制動器,遲滯補償,遲滯模型,遲滯觀察器, | zh_TW |
| dc.subject.keyword | piezo-actuator,hysteresis compensation,hysteresis model,hysteresis observer, | en |
| dc.relation.page | 129 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2015-08-19 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
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