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標題: | 零阿貝誤差共平面平台之結構設計與分析 Structural Design and Analysis of an Abbé Free Coplanar stage |
作者: | Ching-Siong Lim Chan 林曾慶雄 |
指導教授: | 鍾添東 |
關鍵字: | 共平面平台,阿貝誤差,有限元素分析,空氣軸承,線性馬達, coplanar stage,Abbe error,finite element analysis,air bearing,linear motor, |
出版年 : | 2016 |
學位: | 碩士 |
摘要: | 對於半導體工業的發展,高精度定位平台越來越被重視。若使用兩個單軸平台組合成一個雙軸平台會有量測誤差,其名為阿貝誤差,產生於推動軸與測量軸之間。為了降低阿貝誤差,本研究採用共平面XY載台,由兩個單軸平台正交相疊而程。在共平面XY平台中讓X載台於Y載台之推動軸與測量軸之間的距離最小化,並使X平台與Y平台之驅動軸處於同一個Z平面。共平面XY平台由一個X方向運動載台、一個Y方向運動載台、一個花崗岩基座及一個龍門結構所組成。X運動平台與Y運動平台由空氣軸承及線形馬達所組成。共平面平台在X方向與Y方向之行程為300mm。共平面XY平台設計具有高速度、長行程距離和高精度製特徵。這個共平面之特性如速度與加速度將被計算。本研究透過有限元素分析方法來分析結構變形。其最大自重結構變形小於1.5 μm;兩個平台的最大速度可達到40m/min。 For the development of semiconductor industry, the demand for high-accuracy stage increases gradually. Two-dimensional XY stages that combined with two one-dimensional stages will have more measuring errors, called Abbé error, due to the arm between driving and measuring axes. In order to minimize these Abbé error, this research develops a coplanar XY stage that stacked up two orthogonal single axis stages. In this coplanar XY stage, the arm between driving axis and measuring axis of either x-stage or y-stage should be minimized, and both driving axes of x-stage and y-stage should be on the same z-plane. The coplanar XY stage consists of X-stage, Y-stage, granite base and gantry. X-stage and Y-stage are comprised of air bearing and linear motor. The travel range of the stage in X and Y directions are both 300 mm. The characteristic of this coplanar motion stage is designed to achieve high-speed, long travel range and high accuracy. Performances of this XY stage, such as velocity and acceleration, are estimated. The structural deformation modal characteristics of the XY stage are also analyzed through finite element analysis. The maximum self-weight deformation of the coplanar motion stage is kept to less than 1.5 μm, and the maximum speed of the both stages is more than 40 meter per minute. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/49001 |
DOI: | 10.6342/NTU201603302 |
全文授權: | 有償授權 |
顯示於系所單位: | 機械工程學系 |
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