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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/48999完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 薛承輝(Chun-Hway Hsueh) | |
| dc.contributor.author | Yu-Hsuan Liang | en |
| dc.contributor.author | 梁雨萱 | zh_TW |
| dc.date.accessioned | 2021-06-15T11:13:20Z | - |
| dc.date.available | 2020-08-20 | |
| dc.date.copyright | 2020-08-20 | |
| dc.date.issued | 2020 | |
| dc.date.submitted | 2020-08-13 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/48999 | - |
| dc.description.abstract | 本實驗利用磁控濺鍍系統，透過調整 Nb 靶材上的功率，固定 CoCrFeMnNi 靶材的功率以及其他的參數，共濺鍍製備出 Nbx-CoCrFeMnNi (0 - 7.2 at.% Nb) 高熵合金薄膜，從中探討不同 Nb 的添加比例對其薄膜的機械性質與微結構所造成的影響。從 XRD 的結果顯示，在無添加 Nb 的薄膜裡為單一 FCC 結構。隨著薄膜裡 Nb 含量的增加，主峰的強度明顯變弱以及高角度的峰消失。TEM 的結果顯示，在 0.6 at.% Nb 的薄膜裡有許多的奈米雙晶生成，奈米雙晶隨著 Nb 含量的增加而減少。在 1.8 at.% Nb 的薄膜裡開始有非晶的產生。在 1.8 及 4.1 at.% Nb 的薄膜裡，可以觀察到奈米晶嵌入在非晶中。最後到 7.2 at.% Nb 的薄膜才轉為全部非晶結構。由奈米壓痕測試結果得出薄膜的硬度和彈性模數，顯示出添加Nb後，硬度從 6.5 GPa 升至 8.1 GPa ，彈性模數從182.3 GPa降至162.2 GPa。由In-situ奈米壓痕試驗機對奈米柱壓縮的測試結果得出屈服強度、極限抗壓強度隨著 Nb 含量變多而增加。屈服強度從 1.08 GPa 升至 2.70 GPa ，極限抗壓強度從 2.56 GPa 升至 5.76 GPa 。薄膜強度的提升犧牲了部分的延展性，壓縮延性從 >29.4% 降至 15.8% 。在 Nb 含量大於 1.8 at.% 的奈米柱裡，壓縮後可以觀察到剪切帶，其對應的應力-應變圖顯示鋸齒流變，對應到非晶相的產生。 | zh_TW |
| dc.description.abstract | In the present work, Nbx-CoCrFeMnNi high entropy alloy films (HEAFs, 0 to 7.2 at.% Nb) were fabricated by RF magnetron co-sputtering of CoCrFeMnNi alloy and Nb targets. The influence of Nb addition on the microstructures and mechanical properties of HEAFs were systematically investigated. For Nb-free film (0 at.% Nb), the FCC peaks were identified in the XRD pattern. The addition of Nb resulted in the broadening of diffraction peaks, the decrease of peak intensity and the vanishment of high-angle peaks. TEM images indicated that profusion of nanotwins were formed at low Nb concentrations, and a transition from a single phase FCC solid solution to an amorphous phase was observed with the increasing Nb concentration. The films were strengthened with the increase of Nb concentration. Specifically, the hardness characterized by nanoindentation increased from 6.5 to 8.1 GPa. The compressive yield strength and fracture strength measured from micropillar compression test were improved from 1.08 GPs and 2.56 GPa to 2.70 GPa and 5.76 GPa, respectively, whereas the fracture strain decreased from >29.4% (no fracture) to 15.8%. Additionally, shear banding was observed in the presence of amorphous phase. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-15T11:13:20Z (GMT). No. of bitstreams: 1 U0001-1308202002314500.pdf: 3997447 bytes, checksum: 355fca8116c23d70ad9363f5a04e3fc3 (MD5) Previous issue date: 2020 | en |
| dc.description.tableofcontents | 中文摘要 i ABSTRACT ii CONTENTS iii LIST OF FIGURES v LIST OF TABLES ix Chapter 1 Introduction 1 Chapter 2 Literature Review 4 2.1 High Entropy Alloys 4 2.1.1 Definition 5 2.1.2 Phase Formation Rules 6 2.1.3 Four Core Effects 9 2.2 High Entropy Alloy Films 15 2.2.1 Introduction of Films 15 2.2.2 Physical Vapor Deposition (PVD) 15 2.2.3 Microstructural evolution during film growth 17 2.2.4 Microstructure of High Entropy Alloy Films 19 2.2.5 Mechanical properties of High Entropy Alloy Films 22 2.2.6 Electrical properties of High Entropy Alloy Films 25 2.2.7 Effects of deposition temperature on High Entropy Alloy Films 25 2.3 Relevant Examples 28 2.3.1 CoCrFeMnNi HEAs and HEAFs 28 2.3.2 Effect of Nb addition on CoCrFeMnNi HEAs and HEAFs 30 2.3.3 Effect of Nb addition on CoCrCuFeNi HEAs and HEAFs 32 2.4 Summary 36 Chapter 3 Experimental Procedure 38 3.1 Deposition process 39 3.2 Analysis equipment 40 3.2.1 X-ray Diffraction (XRD) 40 3.2.2 Scanning Electron Microscope (SEM) 41 3.2.3 Transmission Electron Microscope (TEM) 41 3.2.4 Nanoindentation 41 3.2.5 Picoindentation 42 3.2.6 Four-point probe 42 Chapter 4 Results and Discussion 43 4.1 Microstructure 43 4.1.1 Chemical Compositions 43 4.1.2 XRD Results 44 4.1.3 Cross-section Observation 45 4.1.4 Surface Observation 47 4.1.5 TEM Observation 48 4.2 Mechanical properties 53 4.2.1 Nanoindentation 53 4.2.2 Micropillar Compression tests 56 4.3 Electrical properties 59 4.4 Effects of deposition temperature 60 Chapter 5 Conclusions 62 References 63 | |
| dc.language.iso | en | |
| dc.subject | 添加鈮 | zh_TW |
| dc.subject | 高熵合金薄膜 | zh_TW |
| dc.subject | 磁控濺鍍 | zh_TW |
| dc.subject | 機械性質 | zh_TW |
| dc.subject | 微結構 | zh_TW |
| dc.subject | High entropy alloy films | en |
| dc.subject | Nb addition | en |
| dc.subject | Microstructure | en |
| dc.subject | Mechanical properties | en |
| dc.subject | Sputtering | en |
| dc.title | 添加元素 Nb 對於 CoCrFeMnNi 高熵合金薄膜微結構及機械性質之影響 | zh_TW |
| dc.title | Effects of Nb addition on microstructures and mechanical properties of Nbx-CoCrFeMnNi high entropy alloy films | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 108-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 楊哲人(Jer-Ren Yang),李志偉(Jyh-Wei Lee) | |
| dc.subject.keyword | 高熵合金薄膜,磁控濺鍍,機械性質,微結構,添加鈮, | zh_TW |
| dc.subject.keyword | High entropy alloy films,Sputtering,Mechanical properties,Microstructure,Nb addition, | en |
| dc.relation.page | 74 | |
| dc.identifier.doi | 10.6342/NTU202003184 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2020-08-14 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 材料科學與工程學研究所 | zh_TW |
| 顯示於系所單位： | 材料科學與工程學系 | |
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