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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 吳政忠(Tsung-Tsong Wu) | |
dc.contributor.author | Kuan-Luan Shan | en |
dc.contributor.author | 單貫綸 | zh_TW |
dc.date.accessioned | 2021-06-15T07:09:24Z | - |
dc.date.available | 2013-10-22 | |
dc.date.copyright | 2010-10-22 | |
dc.date.issued | 2010 | |
dc.date.submitted | 2010-10-21 | |
dc.identifier.citation | [1] E. Yablonovitch, “Ingibited spontaneous emission in solid-state physics and electronics,” Phys. Rev. Lett. 58, 2059-2062, (1987).
[2] E. Yablonovitch and T. J. Gmitter, “Photonic band structure: The face-centered -cubic case,” Phys. Rev. Lett. 63, 1950-1953, (1989). [3] D. Garcia-Pablos, M. Sigalas, F.-R. Montero de Espinosa, M. Torres, M. Kafesaki, and N. Garcia, ”Theory and experiments on elastic band gaps,” Phys. Rev. Lett. 84, 4349, (2000). [4] M. Kafesaki, M. M. Signalas, and N. Garcia, “Frequcncy modulation in the transmittivity of wave gurdes in elastic-wave band-gap materials,” Phys. Rev. Lett. 85, 4044, (2000). [5] J. O. Vasseur, P. A. Deymier, B. Chenni, B. Djafari-Rouhani, L. Dobrzynski, and D. Prevost, “Experimental and theoretical evidence for existence of absolute acoustic band gaps in two-dimensional solid phononic crystals,” Phys. Rev. Lett. 86, 3012, (2001). [6] T. T. Wu, Z. G. Huang, and S. Lin, “Surface and bulk acoustic waves in two -dimensional phononic crystal consisting of materials with general anisotropy,” Phys. Rev. B 69,094301 (2004). [7] Z. G. Huang, T. T. Wu, and S. Lin, “Analyses of elastic waves in Aluminum /Barium sodium niobate and Quartz/Epoxy phononic structures,” Advances in Nondestructive Evaluation, Pt 1-3 Key Engineering Materials 270-273, 1119-1126, Part 1-3 (2004). [8] T. T. Wu, and Z. G. Huang, “Level repulsions of bulk acoustic waves in composite materials,” Phys. Rev. B 70, 214304 (2004). [9] Z. G. Huang, and T. T. Wu, “Temperature effect on the bandgaps of surface and bulk acoustic waves in two-dimensional phononic crystals,” IEEE, Transactions on Ultrasonics Ferroelectrics and Frequency Control, 52 (3), 365-370 (2005). [10] T. T. Wu, Z. C. Hsu, and Z. G. Huang, “Band gaps and the electromechanical coupling coefficient of a surface acoustic wave in a two-dimensional piezoelectric phononic crystal,” Phys. Rev. B 71 (6), 064303 (2005). [11] T. T. Wu, L. C. Wu, and Z. G. Huang, “Frequency band-gap measurement of two-dimensional air/silicon phononic crystals using layered slanted finger interdigital transducers,” Journal of Applied Physics 97(9), 094916 (2005). [12] T. T. Wu, Z. G. Huang, and S.-Y. Liu, “Surface acoustic wave band gaps in micro-machined air/silicon phononic structures - theoretical calculation and experiment,” Zeitschrift Fur Kristallographie 220 (9-10), 841-847 (2005). [13] J. C. Hsu and T. T. Wu, “Bleustein-Gulyaev-Shimizu surface acoustic waves in two-dimensional piezoelectric phononic crystals,” IEEE, Transactions on Ultrasonics Ferroelectrics and Frequency Control, 53 (6), 1169-1176 (2006). [14] J. C. Hsu and T. T. Wu, “Efficient formulation for band-structure calculations of two-dimensional phononic-crystal plates,” Phys. Rev. B 74, 144303 (2006). [15] J. C. Hsu and T. T. Wu, “Lamb waves in binary locally resonant phononic plates with two-dimensional lattices” Appl. Phys. Lett. 90 (20), 201904 (2007). [16] J. H. Sun, and T. T. Wu, “The study of acoustic band gaps in 2-D air/aluminum and steel/epoxy phononic structure,” Advances in Nondestructive Evaluation, Pt 1-3 Key Engineering Materials 270-273, 1127-1134, Part 1-3 (2004). [17] J. H. Sun, and T. T. Wu, “Analyses of mode coupling in joined parallel phononic crystal waveguides,” Phys. Rev. B 71 (17), 174303 (2005). [18] P. F. Hsieh, T. T. Wu and J. H. Sun, “Three-Dimensional Phononic Band Gap Calculations Using the FDTD Method and a PC Cluster System,” IEEE, J. Ultrasonics, Ferroelectrics and Freq. Control, 53 (1), 148-158 (2006). [19] T. T. Wu, C. H. Hsu, and J. H. Sun, “Design of a highly magnified directional acoustic source based on the resonant cavity of two-dimensional phononic crystals” Appl. Phys. Lett. 89 (17), 171912 (2006). [20] J. H. Sun, and T. T. Wu, “Propagation of surface acoustic waves through sharply bent two-dimensional phononic crystal waveguides using a finite-difference time-domain method,” Phys. Rev. B 74 (17), 174305 (2006) [21] J. H. Sun, and T. T. Wu, “Propagation of acoustic waves in Phononic-crystal plates and waveguides using a finite-difference time-domain method,” Phys. Rev. B 76 (10), 104304 (2007) [22] J. H. Sun and T. T. Wu, “A Lamb source Based on the Resonant Cavity of Pononic-Crystal Plates,” IEEE, Transactions on Ultrasonics Ferroelectrics and Frequency Control, 53 (6), 121-128 (2009). [23] F. C. Hsu, T. T. Wu, J. C. Hsu, and J. H. Sun, “Directional enhanced acoustic radiation caused by a point cavity in a finite-size two-dimensional phononic cyrstal,” Appl. Phys. Lett. 93, 201904 (2008) [24] T. T. Wu, Z. G. Huang, T. C. Tsai, and T. C. Wu, “Evidence of complete band gap and resonances in a plate with periodic stubbed surface,” Appl. Phys. Lett. 93, 111902 (2008) [25] T. T. Wu, W. S. Wang, J. H. Sun, J. C. Hsu and Y. Y. Chen, “Utilization of phononic-crystal reflective gratings in a layered surface acoustic wave device,” Appl. Phys. Lett. 94, 101913 (2009) [26] C.-Y. Sun, J. C. Hsu, and T. T. Wu, “Resonant slow modes in phononic crystal plates with periodic membranes,” Appl. Phys. Lett. 97, 031912 (2010) [27] C. Y. Huang, J. H. Sun, and T. T. Wu, “A two-port ZnO/silicon Lamb wave resonator using phononic crystals,” Appl. Phys. Lett. 97, 031913 (2010) [28] B. Honein, A. M. B. Braga, P. Barbone et al., “Wave Propagation in Piezoelectric Layered Media with Some Applications,” Journal of Intelligent Material Systems and Structures 2 (4), 542 (1991) [29] Y. Y. Chen, ”Exact Analysis of Lamb Waves in Piezoelectric Membranes with Distinct Eletrode Arrangements,” Japanese Journal of Applied Physics 48,07GA06 (2009) [30] J. H. Visser and A. Venema, “Silicon SAW devices and electromagnetic feedthrough”, Ultra. Symposium, 297~301, (1988) | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/48704 | - |
dc.description.abstract | 聲子晶體是由兩種或多種彈性材料依週期性排列而成的人造材料。當聲波在聲子晶體結構中傳遞時,由於週期性結構造成其波傳頻散曲線不連續,使得聲波無法在該不連續的頻段內傳遞,一般稱為頻溝效應(acoustic band gap)。在頻溝範圍之內,若將無窮週期排列的聲子晶體移除一排或數排,形成的線缺陷可視為一個共振腔(resonant cavity)。
本文以布拉格理論(Bloch)為基礎,使用有限元素法(Finite Element Method)來分析二維矽基聲子晶體平板之頻溝現象,並使用超晶格技術(supercell technique)模擬其共振腔內之共振模態。同時配合穿射係數(transmission coefficient)之計算來驗證聲子晶體頻溝效應及缺陷共振腔內之共振模態,並針對共振腔兩側聲子晶體反射層層數對應於共振模態之間關係進行模擬及探討。 在實驗方面,本研究利用微機電製程製造出一層狀薄板量測結構。針對不同聲子晶體反射層層數之共振腔進行量測與探討,成功在約196 MHz處量測到一共振模態,其實驗結果與計算模擬結果相符。文中並進一步利用品質係數(Quality factor)分析實驗結果:當共振腔兩側之聲子晶體排數增加時,其共振腔內之共振模態的品質係數越高、能量越趨於穩定。 | zh_TW |
dc.description.abstract | In recent years, there is a great interest in the study of periodically arranged composite elastic materials called phononic crystals. The most important phenomenon of the phononic crystal is that there is no wave propagation in a specific frequency range due to the band gap effect. Accordingly, a resonant cavity can be constructed by removing one or several lines of periodic fillers from a phononic structure.
In this thesis, the Finite Element (FE) Method is adopted to predict the dispersion relation of two-dimensional air/silicon phononic crystal plates. The transmission coefficient of a resonant cavity is calculated and discussed with different layers of phononic crystals. Based on the simulated results, ZnO/Au/Si layered plates with square lattice Air/Silicon phononic crystals were fabricated by the CMOS process in order to detect and study the characteristics of the resonant mode. The experimental results show a resonant mode exists at about 196 MHz. The effect of resonant cavity with phononic crystals is in a good agreement with the numerical predictions. In addition, the results show that the Quality factor of the resonant mode can be increased up to about 1227 using six layers of the phononic crystals. | en |
dc.description.provenance | Made available in DSpace on 2021-06-15T07:09:24Z (GMT). No. of bitstreams: 1 ntu-99-R97543061-1.pdf: 3127399 bytes, checksum: 357f8b23d2dfd74227085025623ee428 (MD5) Previous issue date: 2010 | en |
dc.description.tableofcontents | 致謝 II
摘要 III Abstract IV Contents V List of Notations VII List of Figures IX List of Tables XIII Chapter 1 Introduction 1 1.1 Research Motivation 1 1.2 Literature Review 2 1.3 Contents of the Chapters 3 Chapter 2 Dispersion of Lamb Waves in a Two-dimensional Air/Silicon Phononic Crystal Plate 5 2.1 Theory of Wave Propagation in Phononic Crystals 5 2.2 Numerical Simulation of Band Structures 8 2.3 Design of IDTs on the ZnO/Si Structure 10 Chapter 3 Transmission Calculation and Experimental Framework 19 3.1 Resonant Modes in the Phononic Crystals Band-gap 19 3.2 Transmission Coefficient Calculation 22 Chapter 4 Fabrications and Experimental Results 37 4.1 Fabrication of Piezoelectric Film and Interdigital Transducer 37 4.1.1 Deposition of Silicon Nitride (Si3N4), Gold and ZnO Film 38 4.1.2 Fabrication of Interdigital Transducers 41 4.2 Fabrication of Phononic-Crystal and Thin Plate Structure 42 4.3 Measurement of Experimental Results 45 4.3.1 Experimental Set Up 46 4.3.2 Time-Gating Approach 46 4.3.3 Results of Cavity Reaonance Measurements 47 Chapter 5 Conclusions and Future Work 65 5.1 Conclusions 65 5.2 Future Work 66 References 67 | |
dc.language.iso | zh-TW | |
dc.title | 二維矽基聲子晶體平板之共振腔量測 | zh_TW |
dc.title | Measurements of Cavity Resonances in 2-D Si-Based Phononic-Crystal Plates | en |
dc.type | Thesis | |
dc.date.schoolyear | 99-1 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 馬劍清(Chien-Ching Ma),許進成(Jin-Chen Hsu),孫嘉宏(Jia-Hong Sun) | |
dc.subject.keyword | 板波,聲子晶體平板,共振腔,交指叉電極,頻溝,品質係數, | zh_TW |
dc.subject.keyword | Lamb waves,phononic crystal plate,Band gap,IDTs,resonant cavity, | en |
dc.relation.page | 70 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2010-10-21 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 應用力學研究所 | zh_TW |
顯示於系所單位: | 應用力學研究所 |
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