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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 黃榮山(Long-Sun Huang) | |
| dc.contributor.author | Hsin-Chieh Li | en |
| dc.contributor.author | 李信節 | zh_TW |
| dc.date.accessioned | 2021-06-15T07:03:04Z | - |
| dc.date.available | 2014-01-17 | |
| dc.date.copyright | 2011-01-17 | |
| dc.date.issued | 2010 | |
| dc.date.submitted | 2011-01-11 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/48580 | - |
| dc.description.abstract | 近年來隨著生物科技與微系統技術的發展，且在走向高齡化的社會趨勢下，可攜式生醫檢測晶片的市場與需求日益增大。其中生醫檢測晶片是利用微奈米機電系統技術平台，所發展出跨領域整合式系統，其特性具有微小化、可攜式、高靈敏度、少量檢體、免螢光標定及快速檢測的優點，不同於過去傳統笨重、高成本、速度緩慢的檢驗設備。
本研究以力學為出發點，應用在生物標記蛋白質上的的偵測，藉由生物分子專一性的鍵結特性，在懸臂樑表面所形成的表面應力來進行量側，使用壓阻式的微懸臂梁架構將訊號讀出與分析。除了延續本實驗室先前所發展出可在變溫環境下的量測技術外，本研究為提升壓阻式懸臂梁感測器的性能，除了在製程設計上的改良與修正，以提升感測器的靈敏度與穩定性。並將壓阻式微懸臂樑感測器推廣成微陣列形式，希望透過陣列式的微懸臂梁系統，將量測訊號進行疊加處理後，能夠有效提升量測之訊雜比，以利後續的分析與判讀。並且將其陣列化的微懸臂樑感測器，應用在後續的生物實驗量測上，透過C反應蛋白的定量實驗，可量測到1μg/ml的低濃度，驗證多重感測元件的量測系統，對於量測解析度的提升以及定量量測誤差上的縮小有顯著的貢獻。本論文成功研發出一具有高靈敏度、高解析度、高可靠度，能夠進行即時量測分析的多重感測元件壓阻式微懸臂梁生化感測系統。 | zh_TW |
| dc.description.abstract | As most countries turns into the ageing societies, biological sensing devices are increasingly needed telemedicine/telehealth. Microcantilever biosensors based on microsystem technologies offer advantages over conventional instruments on miniaturization, label-free feature, portability, real-time rapid diagnosis, and potential low cost. Meanwhile, the biosensor utilizes biomolecular specificity and recognition that can be transferred into surface stresses of nanomechanics on microcantilevers.
The piezoresistive microcantilever is chosen for signal transduction and signal analysis. The drawback of temperature-sensitive effect for microcantilever biosensors can be eliminated by the self-thermal compensation approach developed in our research group. Multiple sensing elements of microcantilever biosensors are newly developed in this study to significantly reduce the noise level and enhance signals of multiple sensing microcantilevers. The measurement of C-reactive protein has been conducted to detect a concentration level of 1μg/ml. This work shows the capability, sensitivity and manufacturing stability of results for multiple sensing microcantilever biosensors. The SEM picture has also been demonstrated to show the improved design and fabrication of multiple sensing microcantilevers. In comparison to conventionally bulky and heavy biosensing instruments, the piezoresistive multiple sensing microcantilever biosensors have great advantages of miniaturization and real-time on-site detection, and show the potential in telemedicine/telehealth. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-15T07:03:04Z (GMT). No. of bitstreams: 1 ntu-99-R97543076-1.pdf: 12946430 bytes, checksum: 779dc9732b56304b839df03525551fb2 (MD5) Previous issue date: 2010 | en |
| dc.description.tableofcontents | 致謝 I
摘要 V Abstract VI 目錄 VII 圖目錄 XI 表目錄 XX 第一章 序論 1 1.1 前言 1 1.2 研究動機及目的 2 1.3 文獻回顧 3 1.4 論文大鋼 11 第二章 生物感測器之原理與介紹 13 2.1 生物的免疫反應 13 2.1.1 抗體 14 2.1.2 抗原辨識 16 2.1.3 分子間的作用力 16 2.1.4 分子間的親和力與結合常數 18 2.2 生物感測器的原理與比較 20 2.3 微懸臂樑生物感測器 26 2.4 辨識分子層的固定化技術 30 2.5 微懸臂梁的應力變化定義 31 2.6 懸臂樑之彎曲變化機制 32 第三章 壓阻式微懸臂樑之理論分析 35 3.1 壓阻材料特性及分析 35 3.1.1 壓阻效應與壓阻因子 36 3.1.2 多晶矽的材料特性與薄膜沉積 39 3.1.3 回火與佈植濃度的影響 46 3.2 微懸臂樑的機械性質分析 51 3.2.1 彈簧常數與共振頻 52 3.2.2 微懸臂樑的應力分析 53 3.2.3 微懸臂樑的表面應力計算 58 3.3 微懸臂樑與壓阻的尺寸分析 60 3.3.1 微懸臂樑的尺寸分析 60 3.3.2 壓阻材料尺寸與位置分析 62 3.4 靈敏度與雜訊分析 65 3.4.1 靈敏度 65 3.4.2 雜訊分析 65 3.5 微懸臂樑的內應力平衡 70 3.6 微懸臂梁與壓阻材料的溫度效應 72 3.7 陣列式壓組微懸臂梁之訊號處理 73 3.7.1 惠司通電橋原理 73 3.7.2 陣列式感測器之訊號處理 76 第四章 微陣列壓阻式微懸臂樑生化感測系統的設計與製作 78 4.1 壓阻層與中性軸位置的討論 78 4.2 微陣列壓阻式微懸臂梁感測晶片的設計與製作 79 4.2.1 壓阻與微懸臂梁的幾何尺寸 79 4.2.2 微懸臂樑各層材料厚度 81 4.3 微陣列壓阻式微懸臂梁感測器之製作流程 82 4.4 微流道系統的設計與製作 89 4.4.1 微流道系統之設計 89 4.4.2 矽基材的濕蝕刻 91 4.4.3 微流道的底板製做 92 4.4.4 微流道上蓋的製做 93 4.5 微陣列壓阻式微懸臂梁感測晶片的封裝 94 4.5.1 感測器晶片的切割與清洗 94 4.5.1 感光電路板的製做與設計 95 4.5.2 微懸臂樑感測系統的封裝 96 4.6 壓阻因子量測與討論 98 4.7 製程的改善與討論 100 4.7.1 保護層的改善 100 4.7.2 微懸臂樑懸浮製程的改善 102 4.7.3 不同材料參數比較 106 4.7.4 綜合討論 108 第五章 實驗之系統架構與實驗結果討論 110 5.1 溫度效應之量測與消除 110 5.1.1 實驗系統架構與實驗方法 111 5.1.2 實驗結果與討論 113 5.2 陣列式微懸臂梁對於訊雜比的提升 115 5.2.1 實驗架構與方法 115 5.2.2 分子辨識層之量測與分析 118 5.3 陣列式微懸臂梁對於量測解析度的提升 124 5.3.1 實驗方法與步驟 124 5.3.2 C反應蛋白的濃度定量量測結果 129 第六章 結論與未來展望 136 6.1 結論 136 6.2 未來展望 138 參考文獻 140 附錄 148 | |
| dc.language.iso | zh-TW | |
| dc.subject | 生醫感測器 | zh_TW |
| dc.subject | 微陣列 | zh_TW |
| dc.subject | 壓阻 | zh_TW |
| dc.subject | 微懸臂梁 | zh_TW |
| dc.subject | 表面應力 | zh_TW |
| dc.subject | microcantilever | en |
| dc.subject | multiple sensing elements | en |
| dc.subject | biosensor | en |
| dc.subject | piezoresisitive | en |
| dc.title | 多重感測元件之高性能壓阻式微懸臂梁生化感測器
之設計、製程與特性分析 | zh_TW |
| dc.title | Design,fabrication and characterization of
high-performance piezoresistive microcantilever biosensors with multiple sensing elements | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 99-1 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 陳俊杉(Chuin-Shan Chen),趙福杉(Fu-Shan Jaw) | |
| dc.subject.keyword | 微陣列,壓阻,微懸臂梁,表面應力,生醫感測器, | zh_TW |
| dc.subject.keyword | multiple sensing elements,piezoresisitive,microcantilever,biosensor, | en |
| dc.relation.page | 151 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2011-01-12 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 應用力學研究所 | zh_TW |
| 顯示於系所單位： | 應用力學研究所 | |
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