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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/47633完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 徐振哲 | |
| dc.contributor.author | Yun Lin | en |
| dc.contributor.author | 林昀 | zh_TW |
| dc.date.accessioned | 2021-06-15T06:09:44Z | - |
| dc.date.available | 2013-08-16 | |
| dc.date.copyright | 2010-08-16 | |
| dc.date.issued | 2010 | |
| dc.date.submitted | 2010-08-13 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/47633 | - |
| dc.description.abstract | 本文為利用噴射式大氣電漿系統進行電漿輔助奈米結構製程之實驗研究。實驗使用金屬薄片作為前驅物，將前驅物置於電漿噴流區進行氧氣電漿處理，經短時間(約數十秒)即可製成具奈米結構之金屬氧化物材料。本研究使用鈮、鈦等高熔點金屬分別製成了氧化鈮奈米線結構以及氧化鈦顯微球型結構，改變電漿參數對於製程的影響上，發現改變操作電壓可以調整奈米結構成長的速率，改變氣體流量則會影響奈米結構生成與否；另外，由於奈米結構為由基材成長垂直於平面之結構，金屬原子在基材中的擴散速率對成長速率的影響，也在氧化鈮奈米線的實驗中被展示出來。氧化鈮奈米線結構在本文中有較深入的研究，如氧化鈮奈米線成長機制討論、使用APPJ電漿系統的掃描模式進行大面積製程、使用AFM以局部氧化方式嘗試定位出奈米線生長出區域以及對於氧化鈮奈米線進行了XRD、拉曼光譜、TEM等儀器分析。氧化鈦顯微球型結構則進行了關於球型結構隨著時間成長情況之研究以及使用XRD對其結晶型態進行分析等。其他低熔點金屬，如錫、鉛、鋅，由於電漿噴流溫度高於金屬熔點以及快速氧化反應所放出之高反應熱，使得基材發生熔化現象，並無觀察到奈米結構之生成。
為了瞭解電漿參數對於電漿特性之影響，使用了熱電偶以及光譜儀對於電漿氣體溫度以及電漿放射光譜進行檢測。電漿氣體溫度與操作電壓成正相關，與氣體流量成負相關，電漿放射光譜則隨著操作電壓以及氣體流量上升而增強，相關機制在文中會進行詳細敘述。另外，在電漿噴頭上配置隔絕大氣玻璃管則發現了有趣的現象，即代表O radical之特徵放射光強度顯著增強，可能的原因為玻璃管將激發態O2以及O3等反應性高產物束縛在電漿噴流區，進而發生解離反應使得O radical的濃度上升。 | zh_TW |
| dc.description.abstract | A method of synthesis of nanostructured metal oxide using an atmospheric pressure plasma jet (APPJ) was performed in this work. Solid metal foils were placed under the APPJ system as precursors. The nanostructured metal oxide was fabrication after tens of seconds of oxygen plasma treatment. Niobium oxide nanowire and titanium dioxide spheric microstructure were fabricated using this method. Parametric studies show that a high growth rate can be obtained with the synergetic effect of the high temperature and plasma reactivity. The process of fabricating niobium oxide nanowires was detailed studied. The structural analysis shows that for the case in which no nanowires is formed, the major phases are Nb6O and orthorhombic Nb2O5 phases while in the case with the presence of NWs, highly crystalline monoclinic Nb2O5 is the dominant phase. Preliminary test shows that nanowires can be fabricated using the “scanning mode” of this jet, which suggests the potential using this plasma jet to continuously fabricate nanowires in a larger area. Zinc、lead and tin were also used, but there is no nanostructure formation since the temperature of plasma jet is well above to the melting point of these metals.
The diagnostic studies of atmospheric oxygen plasma were also performed. The properties of plasma was measured using a k-type thermocouple with protective sheath and an optical emission spectroscopy. The intensity of characteristic peak of O radicals become stronger after the nozzle surrounded by a glass tube. Since high reactivity is desirable, the main factors to cause this dramatic increase were also studied in this work. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-15T06:09:44Z (GMT). No. of bitstreams: 1 ntu-99-R97524058-1.pdf: 15611513 bytes, checksum: 42bfc1f61c3c7341bb6e8e2cd23c5835 (MD5) Previous issue date: 2010 | en |
| dc.description.tableofcontents | 目錄
目錄 I 圖目錄 III 表目錄 XV 誌謝 XVII 中文摘要 XIX 英文摘要 XXI 第一章 緒論 1 1.1. 前言 1 1.1.1. 研究背景 1 1.1.2. 研究動機 2 1.2. 論文總覽 4 第二章 文獻回顧 5 2.1. 電漿輔助之奈米結構製程發展近況 5 2.2. 大氣中之非平衡電漿 16 2.2.1. 電漿粒子及其特性 16 2.2.2. 空氣電漿中之重要反應 17 2.3. 基礎電漿光譜學 30 2.3.1. 原子與分子光譜 30 2.3.2. 氧氣電漿光譜 36 2.4. 金屬鈮以及鈦之氧化研究 40 2.4.1. 金屬鈮之氧化研究 40 2.4.2. 金屬鈦之氧化研究 48 2.5. 直接熱處理奈米結構製程 55 2.5.1. 氧化鈮奈米線利用熱處理以及電漿輔助製程 55 2.5.2. 氧化鐵微結構利用熱處理以及電漿輔助製程 57 第三章 實驗設備與配置 61 3.1. 電漿特性檢測之設備與配置 61 3.2. 顯微結構製程設備與配置 70 3.3. 顯微結構檢測分析設配 72 第四章 實驗結果與討論 75 4.1. 氧氣電漿特性檢測 75 4.1.1. 電漿氣體溫度檢測 75 4.1.2. 電漿放射光譜檢測 82 4.1.3. 隔絕大氣對電漿特性之影響 86 4.2. 氧化鈮奈米線 105 4.2.1. 氧化鈮奈米線之製程研究 105 4.2.2. 氧化鈮奈米線之特性分析 116 4.2.3. 操作參數對於氧化鈮奈米線成長之影響 123 4.2.4. 以掃描模式進行大面積製程 126 4.2.5. 利用AFM進行奈米線成長定位 127 4.3. 氧化鈦微結構以及其他金屬 130 4.3.1. 氧化鈦微結構之製程研究 130 4.3.2. 氧化鈦微結構之結晶結構分析 135 4.3.3. 操作參數對微結構成長之影響 140 4.3.4. 其他金屬 144 第五章 結論 149 參考文獻 151 | |
| dc.language.iso | zh-TW | |
| dc.title | 以噴射式大氣電漿進行具奈米結構金屬氧化物之製程研究 | zh_TW |
| dc.title | Synthesis of Nanostructured Metal Oxide Using an Atmospheric Pressure Plasma Jet | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 98-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 魏大欽,陳克紹,呂宗昕 | |
| dc.subject.keyword | 大氣電漿,金屬氧化物,具奈米結構,氧氣電漿檢測, | zh_TW |
| dc.subject.keyword | atmospheric pressure plasma,Nanostructured metal oxide,oxygen plasma diagnostic, | en |
| dc.relation.page | 160 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2010-08-15 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 化學工程學研究所 | zh_TW |
| 顯示於系所單位： | 化學工程學系 | |
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