請用此 Handle URI 來引用此文件:
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/47045
完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 張正憲 | |
dc.contributor.author | Zhan-Yi Liao | en |
dc.contributor.author | 廖展誼 | zh_TW |
dc.date.accessioned | 2021-06-15T05:46:01Z | - |
dc.date.available | 2010-08-20 | |
dc.date.copyright | 2010-08-20 | |
dc.date.issued | 2010 | |
dc.date.submitted | 2010-08-18 | |
dc.identifier.citation | 1.S. S. Rao, Mechanical Vibration, Wesley, New York, USA, 2009.
2.W. H. Chu, 'Breathing vibrations of a partially filled cylindrical tank-linear theory,' Journal of Applied Mechanics, vol. 30, no. 4, pp. 532, 1963. 3.U. S. Lindholm, D. D. Kana, W. H. Chu, and H. N. Abramson, 'Elastic vibration characteristics of cantilever plates in water,' Journal of Ship Research, vol. 9,no. 1, pp. 11, 1965. 4.G. Muthuveerappan, N. Ganesan, and M. A. Veluswami , 'A note on vibration of a cantilever plate immersed in water,' Journal of Sound and Vibration, vol. 63, no. 3, pp. 385, 1979. 5.Y. Fu and W. G. Price, 'Interactions between a partially or totally immersed vibrating cantilever plate and the surrounding fluid,' Journal of Sound and Vibration, vol. 118, no. 3, pp. 495, 1987. 6.B. Abedian and M. Cundari, 'Resonant frequency of a polyvinylidene flouride piezoelectric bimorph: the effect of surrounding fluid,' Proc. SPIE , vol. 1916, pp. 454 , 1993 7.M. K. Kwak, 'Hydroelastic vibration of rectangular plates,' Journal of Applied Mechanics, vol. 63, pp. 110, 1996. 8.F. J. Elmer and M. Dreier, 'Eigenfrequencies of a rectangular atomic force microscope cantilever in a medium,' Journal of Applied Physics, vol. 81, pp. 7709, 1997. 9.W. E. Langlois, 'Isothermal squeeze films,' Quarterly of Applied Mathematics, vol. 20, pp. 131-150, 1961. 10.J. J. Blech, 'On Isothermal squeeze films,' Journal of Lubrication Technology, vol. 105, pp. 615-620, 1983. 11.R. B. Darling, C. Hivick, and J. Xu, 'Compact analytical modeling of squeeze film damping with arbitrary venting conditions using a Green's function approach,' Sensors and Actuators A: Physica, vol. 70, no. 1-2, pp. 32, 1998. 12.T. veijola, 'Compact models for squeezed-film dampers with inertial and rarefied gas effects,' Journal of Micromechanics and Microengineering, vol. 14, pp. 1109, 2004. 13.A. K. Pandey, and R. Pratap, 'Effect of flexural modes on squeeze film damping in MEMS cantilever resonators,' Journal of Micromechanics and Microengineering, vol. 17, pp. 2475, 2007. 14.J. W. Lee, R. Tung, A. Raman, H. Sumali, and J. P. Sullivan, 'Squeeze-film damping of flexible microcantilevers at low ambient pressures: theory and experiment,' Journal of Micromechanics and Microengineering, vol. 19, pp. 105029, 2009. 15.P. Wu, and W. A. Little, 'Mesurement of friction factors for the flow of gases in very fine channels used for microminiature Joule-Thomson refrigerators,' Cryogenics, vol. 23, no. 5, pp. 273, 1983. 16.E. B. Arkilic, and K. S. Breuer, 'Gaseous slip flow in small channels,' AIAA Shear Flow Conf . , 1993. 17.E. B. Arkilic, M. A. Schmidt, and K. S. Breuer, 'Gaseous slip flow in long microchannels,' Journal of Microelectromechanical Systems, vol. 6, no. 2, pp. 167, 1997. 18.A. K. Pandey, 'Analytical, Numerical, and Experimental Studies of Fluid Damping in MEMS Devices', a thesis submitted for degree of doctor of bhillosophn, Department of Mechanical Engineering Indian Institute of Science Bangalore, 2007. 19.L. E. Kinsler, and A. R. Frey, Fundamentals of acoustics, Wiley, New York, USA, 1962. 20.劉靜, 微米/奈米尺度熱傳學, 科學出版社, 北京, 2001. 21.G. G. Stokes, 'On the effect of the internal friction of fluids on the motion of pendulums,' Transactions of the Cambridge Philosophical Society, vol. 9, pp. 38-45, 1851. 22.L. Rosenhead, Laminar Boundary Layers: an account of the development, structure, and stability of laminar boundary layers in incompressible fluids, together with a description of the associated experimental techniques, Dover Publications, 1963. 23.J. E. Sader, 'Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope,' Journal of Applied Physics, vol. 84, pp. 64, 1997. 24.J. E Sader, J. W. M. Chon, P. Mulvaney, 'Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids,' Journal of Applied Physics, vol. 87, pp. 3978, 2000. 25.G. Binning, H. Roher, C. Gerber, and E. Weibel, 'Surface studied by scanning tunneling microscopy,' Physical Review Letters, vol. 49, pp. 57-61, 1982. 26.G. Binning, C. Quate, and C. Gerber, 'Atomic force microscope,' Physical Review Letters, vol. 56, pp. 930-933, 1986. 27.S. I. Lee, S. W. Howell, A. Raman, and R. Reifenberger, 'Nonlinear dynamics of microcantilevers in tipping mode atomic force microscopy: A comparison between theory and experiment,' Physical Review B, vol. 66, pp. 115409, 2002. 28.J. N. Israelachvili, 'Intermolecular and surface forces,' Academic Press, 1992. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/47045 | - |
dc.description.abstract | 本文探討流體環境中梁結構受到周圍牆壁影響的動態特性。首先藉由尋找Reynolds方程式與Euler梁振動方程式之間的耦合關係,推導兩種不同的分析求解方法:頻率響應法和格林函數法,以獲得系統振動行為的物理量,如共振頻率、頻率偏移和阻尼比等參數,並且交叉比對實驗數據與數值模擬來比較兩種方法的異同,發現頻率響應法對於流-固系統振動行為評估有較好的準確性。
文章中建立流-固振動系統分析流程,獲得相關物理參數:等效質量、等效勁度與等效阻尼,識別判斷系統之中各項材料性質以及牆效應對流-固耦合系統動態特性產生之影響,以便瞭解流體環境、牆效應與結構振動行為間交互作用的關係。 最後使用本文所提出的流-固系統理論,描述原子力顯微鏡在流體環境中,非接觸掃瞄模式懸壁探針的作動行為,探討懸臂探針其長度之設計規範,並且說明若式儀器使用尖端長度過短的探針量測,會受到流場行為與牆效應干擾而導致能量消散情況嚴重,造成共振頻率判斷不易,進而使得量測失真。 | zh_TW |
dc.description.abstract | This paper mainly investigates the dynamic characteristics of the beam structure located at the neighborhood of the wall inside the chamber filled with different fluids. Firstly, by establishing the relation between the Reynolds equation and Euler beam equation, it is derived for two analytic approaches: Curve fitting and Green's function method, so that specific dynamic characteristics of the entire system involving the resonant frequency, frequency shift, and damping ratio can be acquired. Compared with the differences between the two analytic methods by a cross checking of experimental data and numerical simulation, the expected vibration behavior of the entire system evaluated by Curve fitting method has the higher accuracy.
Secondly, based on calculated dynamic characteristics including the resonant frequency, frequency shift, and damping ratio, corresponding to the frequency response of single degree of freedom system, effective mass, damping and stiffness can be evaluated for the beam structure connecting with the still fluid and the chamber wall, and the coupling dynamic reaction can be comprehended by discussing these extended physical parameters. Finally, the preceding analytic procedure is used to demonstrate the limitation on a tip length of a probe of a non-contact mode atomic force microscope coupled with the fluid environment and the measured samples, and provide the suggestion of the range in the design of probe tips. | en |
dc.description.provenance | Made available in DSpace on 2021-06-15T05:46:01Z (GMT). No. of bitstreams: 1 ntu-99-R97543062-1.pdf: 2560142 bytes, checksum: 1a20d6fd0482f58b4a1c466e1bc3efb8 (MD5) Previous issue date: 2010 | en |
dc.description.tableofcontents | 摘要 i
Abstract iii 目錄 iv 圖目錄 vii 表目錄 xi 符號表 xiii 第一章 緒論 1 1-1前言 1 1-2文獻回顧 1 1-3研究動機 2 1-4論文架構 3 第二章 流體理論分析 4 2-1流體理論背景 4 2-2 Reynolds 方程式 6 2-3流體性質 8 2-3-1紐森數 9 2-3-2邊界條件與相對流率係數 11 2-3-3理想氣體行為 12 2-4線性化Reynolds方程式與水力負載 16 第三章 流-固耦合系統振動分析 18 3-1結構控制方程式 18 3-2模態分析 20 3-2-1物理模型與模態模型轉換 20 3-2-2模態形狀之求得 22 3-3頻率響應法 25 3-4格林函數法 27 3-5系統自然頻率、頻率偏移與阻尼比 34 第四章 理論驗證與比較 36 4-1單側流體環境實驗量測與數值分析、與理論解析之比較 36 4-2雙側流體環境數值分析與理論解析之比較 40 4-3雙側流體環境理論與無窮域理論比較 43 4-4頻率響應法與格林函數法之比較 51 4-5長寬比變化之比較 52 第五章 參數討論 53 5-1物理參數選擇 53 5-2流體密度 55 5-3流體黏滯係數 60 5-4固體楊氏係數 64 5-5固體密度 68 5-7環境壓力 72 5-8牆效應 76 5-8-1牆距離 76 5-8-2牆效應之流體密度 81 5-8-3牆效應之流體黏滯係數 84 5-8-4實際流體之比較 87 5-9絕熱過程與定溫過程 91 第六章 原子力顯微鏡探針於流體環境之應用 92 6-1原子力顯微鏡簡介 92 6-2原子力顯微鏡工作原理 93 6-3凡得瓦力(Van der Waals force) 96 6-4凡得瓦力邊界條件之特徵函數 99 6-5數值分析與討論 102 第七章 結論與展望 105 7-1本文主要成果 105 7-2未來展望 107 參考文獻 108 附錄 111 | |
dc.language.iso | zh-TW | |
dc.title | 微系統機械元件於流體環境中動態特性研究與原子力顯微鏡上之應用 | zh_TW |
dc.title | Theoretical Analysis on Dynamic Characteristics of Micromechanical Components in the Fluid Environment and Application of Atomic Force Microscopy | en |
dc.type | Thesis | |
dc.date.schoolyear | 98-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 吳光鐘,趙聖德 | |
dc.subject.keyword | 振動,流固耦合,微系統動態特性,原子力顯微鏡, | zh_TW |
dc.subject.keyword | vibration,atomic force microscope,fluid-structure interaction, | en |
dc.relation.page | 116 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2010-08-19 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 應用力學研究所 | zh_TW |
顯示於系所單位: | 應用力學研究所 |
文件中的檔案:
檔案 | 大小 | 格式 | |
---|---|---|---|
ntu-99-1.pdf 目前未授權公開取用 | 2.5 MB | Adobe PDF |
系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。