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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/46788
標題: | 離散事件為基之精確型單軌物料運輸模擬系統 Discrete Event Based Monorail Material Handling Simulation System |
作者: | Zi-Yao Jian 簡子堯 |
指導教授: | 楊烽正 |
關鍵字: | 自動化物料搬運系統,模擬,晶圓製造, Automated Material Handling System,Simulation,Wafer-fab, |
出版年 : | 2011 |
學位: | 碩士 |
摘要: | 自動化搬運系統為現今晶圓加工廠中運送物料的主要方式,然而傳統模擬方式相當耗時,且無法完整模擬車輛運行細節。因此本研究提出以離散事件作為基的精確型單軌物料搬運模擬系統,同時兼顧模擬效能和精確性。系統包含常見於晶圓廠的自動化物料搬運系統的車輛和軌道,但不包含倉儲或是生產系統的機台。本論文提示使用自行設計的動作畫格來規畫車輛加速減速等狀況,藉由防撞的運算法規劃動作畫格維持車輛間有一定的車距。透過畫格規劃技術,模擬系統中的離散事件減少至「搬運需求到達」及「車輛離開軌段」兩種離散事件,使系統運行更有效率。同時系統也額外提供顯示動畫離散事件,供使用者檢視系統模擬過程,以驗證模型行為的正確性。系統以三次的貝茲曲線模擬曲線軌道來模擬軌道使軌道配置。為了模擬車輛搶奪閘道使用權的狀況,車輛運行至閘道時須以先到先行的策略依序通過閘道,以避免碰撞。在軌道上運行時,系統使用畫格規劃技術來規劃車輛在不同時點下加速減速或取卸貨的畫格,使車輛間保持一定距離避免減速不及。由於系統不模擬機台生產情形,因此使用者可以設定不同的搬運需求的產生模式,持續產生「搬運需求到達事件」模擬生產系統產生的搬運需求。研究並實作兩個測試範例,分別探討其最佳車數,並觀察其各項模擬指標隨車數變化情形。 AMHS(Automated Material Handling System) is widely used for transporting materials in fab. However, most of simulation model is not precise enough in speed and location calculation and not efficient. In this research, we proposed a discrete event based mono rail material transport simulation system for more realistic simulation in AMHS. The system includes vehicles and tracks in AMHS. However, stockers and production machines are not included. In this thesis, we use the custom motion frame to plan acceleration and deceleration for vehicles. With collision preventing algorithm, distance between vehicles are kept, and vehicle can prevent collision as a result. By using the motion frame planning technique, the discrete event is simulation system is reduced to New Delivery Request and Vehicle Exiting Track. With the reduced discrete event, the simulation system works more efficient. The animation event is also provided for animated simulation. User can verify simulation by watching process with animation. To make the track layout more realistic, 3-degree Bezier curves is used to simulate curved tracks in system .To fully simulate to collision prevention procedure, motion frame and junction are proposed. When multiple vehicle try to enter same junction, first come first served policy is used to prevent collision. Also, when multiple vehicles are moving on same track, distance should be kept to prevent collision. Since the machine and stocker is excluded in this model, New Delivery Request event is used to simulate delivery request generated by machine and stocker. Two custom track layouts are designed to find best number of vehicle. The performance index is also provided as the vehicle number changed. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/46788 |
全文授權: | 有償授權 |
顯示於系所單位: | 工業工程學研究所 |
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