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標題: | 以溶滲法製備氮化鋁基複合材料之探討 Preparation of AlN Composites by Infiltration |
作者: | Chun Yu Chou 周仲瑀 |
指導教授: | 段維新(Wei-Hsing Tuan) |
關鍵字: | 氮化鋁,銅,硫酸鈣,氧化/硫化,滲入製程,熱傳導, AlN,Copper,Oxidation/Sulfuration,Infiltration,Thermal conductivity, |
出版年 : | 2010 |
學位: | 碩士 |
摘要: | 本研究為探討銅滲入氮化鋁的製程及原理,在與硫酸鈣共燒的幫助之下形成有益銅及氮化鋁接合的中間相。中間相的組成由X光繞射儀(XRD)以及電子探針分析儀(EPMA)分析,並以高添加氧化釔的對照組推測在滲入時,氧化釔可能扮演的角色;量測電傳導及熱傳導性質,推測氧/硫含量對於氮化鋁及銅的影響程度。實驗結果顯示,硫酸鈣的共燒確實提供了氧/硫氣氛且進入到系統中反應成為反應相,隨著處理溫度升高,在界面分布的反應相生成長越明顯,反應相為硫化銅、氧化鋁、銅鋁化氧或銅鋁化硫等化合物及其互溶組成,越高溫則反應相傾向形成I III VI2族的銅鋁氧化物或銅鋁硫化物,且成長在氮化鋁與銅的界面,代表各含氧/硫的反應相有聚集形成中間的趨勢,此有可能利於減少熱傳導的阻礙以及氮化鋁與銅的結合。而不同的處理氣氛條件影響的是共燒硫酸鈣所產生的氣氛,在100%氮氣下所產生的硫,較95%氮氣、5%氫氣所產生之硫多,而所產生的氧則相反;對於滲入體而言,95%氮氣、5%氫氣會加劇滲入體內的氧硫離子的分布,使得其分佈均勻而得到較好的滲入程度。在熱傳導性質上面,在與理論模型比較後得知由於目前試樣相對密度無法有效提升,故得到低於於預估值,但將相對密度估算到100%時,預測值則到達理論值,代表以氧/硫的中間相接合可以有效的使氮化鋁-銅結合且不至於產生高熱阻相。 The infiltration of copper into AlN powder compact is investigated in the present study. The oxide/sulfide interphase is introduced into both AlN green body and copper matrix with the help of co-existed calcium sulphate. The interphase and inclusions are determined by using XRD technique; the composition by EPMA analysis. The possible role of yttrium in the system is evaluated by using a model system composing of 50% Y2O3 and 50% AlN. The possible interphases are Cu2S, Cu1.8S or other copper-sulfide compounds. The reaction phases, copper alumina oxide and copper alumina sulfide are also observed. By increasing the infiltration temperature, more reaction phases are formed at the interphase between AlN and copper. The gas produced by firing calcium sulfate is different in various atmospheres. More oxygen is formed by firing calcium sulfate in an atmosphere composing of 5%H2/95%N2. On the other hand, less sulfur (or sulfur dioxide) is generated by firing calcium sulfate in 5%H2/95%N2. The distribution of oxygen and sulfur is uniform as the 5%H2/95%N2 atmosphere is used. The thermal conductivity of the infiltrated specimens is lower than the theoretical predictions due to their low density. Nevertheless, the thermal conductivity values are close to the theoretical values by assuming that the specimens are fully dense. This may imply that the thermal resistance of interphases is low. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/46282 |
全文授權: | 有償授權 |
顯示於系所單位: | 材料科學與工程學系 |
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