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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 沈弘俊(Horn-Jiunn Sheen) | |
dc.contributor.author | Cheng-Fu Chen | en |
dc.contributor.author | 陳建富 | zh_TW |
dc.date.accessioned | 2021-06-15T04:50:11Z | - |
dc.date.available | 2015-08-10 | |
dc.date.copyright | 2010-08-10 | |
dc.date.issued | 2010 | |
dc.date.submitted | 2010-08-02 | |
dc.identifier.citation | Accoto, D., Carrozza, M.C., and Dario, P., “Modelling of micropumps using unimorph piezoelectric actuator anhd ball valves”, Journl of Micromechanics and Microengineering, vol. 10, pp. 277-281, 2000.
Attila, G., Menake, E.P., Lajos, D., and Frank, A.G., “Magnetically controlled valve for flow manipulation in polymer microfluidic devices”, Microfluid Nanofluid, vol. 4, pp. 525-531, 2008. Böhm, S., Burger, G.J., Korthorst, M.T., and Roseboom, F., “A micromachined silicon valve driven by a miniature bi-stable electro-magnetic actuator”, Sensors and Actuators A: Physical, vol. 80, Issue 1, pp. 77-83, 2007. Deshmukh, A.A., Liepmann, D., and Pisano, A.P., “Continuous micromixer with pulsatile micropumps, In Proceedings of the 2000 Solid-State Sensor and Actuator Workshop, pp. 73-76, 2000. Goettsche, T., Kohnle, J., Willmann, M., Ernst, H., Spieth, S., Tischler, R., Messner, S., Zengerle, R., and Sandmaier, H., “Novel approaches to particle tolerant valves for use in drug delivery systems”, Sensors and Actuators A: Physical, vol. 118, Issue 1, pp. 70-77, 2005. Goll, C., Bacher, W., Büstgens, B., Maas, D., Ruprecht, R., and Schomburg, W.K., “An electrostatically actuated polymer microvalve equipped with a movable membrane electrode”, Journal of Micromechanics and Microengineering, vol. 7, No. 3, pp. 224-226, 1997. Hal, J., “Electrically-activated, normally-closed diaphragm valves”, Journal of Micromechanics and Microengineering, vol. 4, pp. 210-216, 1994. Kim, J.H., Na, K.H., Kang, C.J., Jeon, D., and Kim, Y.S., “A disposable thermopneumatic-actuated microvalve stacked with PDMS layers and ITO-coated glass ”, Microelectronic Engineering, vol. 73-74, pp. 864-869, 2004. Koch, M., Evans, A.G.R., and Brunnschweiler, A., “Characterization of micromachined cantilever valves”, Journal of Micromechanics and Microengineering, vol. 7, pp. 221-223, 1997. Lin, T.H., Stephen, P., Lu, S., and Lu, H., “A study on the performance and reliability of magnetostatic actuated RF MEMS switches”, Microelectronics Reliability, vol. 49, pp. 59–65, 2009. Papavasiliou, A.P., Liepmann, D., and Pisano, A.P., “Fabrication of a Free Floating Silicon Gate Valve”, Proceedings of the ASME International Mechanical Engineering Congress and Exposition, Nashville, pp. 435-440, 1999. Stratton, J.A., “Electromagnetic Theory”, Wiley-Interscience A John Wiley & Sons, INC., 2007. http://hyperphysics.phy-astr.gsu.edu/hbase/tables/magprop.html#c2. http://hyperphysics.phy-astr.gsu.edu/hbase/magnetic/magfield.html. http://info.ee.surrey.ac.uk/Workshop/advice/coils/mu/. http://en.wikipedia.org/wiki/Magnetizing_field. 吳劍秋,基礎電磁學,全華科技圖書股份有限公司,2002。 許家睿,新式被動閥式微幫浦之開發及其流場量測,國立台灣大學應用力學所博士論文, 2008。 葉建邦,平面被動閥式微幫浦之最佳化設計新,國立台灣大學應用力學研究所博士論文,2009。 劉政志,電磁致動式微幫浦之最佳效能分析,國立成功大學工程科學研究所碩士論文,2002。 劉奕志,高溫超導銪-釔-銅-氧化合物的磁有序及磁鬆弛探討,國立中央大學物理研究所碩士論文,2000。 | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/45972 | - |
dc.description.abstract | 近年來微流體裝置中微電磁閥門的使用,主要是利用磁性材料和外部磁鐵的相吸或相斥來擠壓薄膜,經由薄膜再擠壓腔體,故得知薄膜厚度將決定閥門開合效果。然而在高寬深比的流道中,卻無法使用薄膜變形來達到關閉效果。本論文將使用平面閥門外型設計,配合纏繞漆包線方式,使得能夠控制微流體裝置內部微電磁閥門的開和關。此外,將量測閥門所受的淨力,以充分掌握微閥門的磁滯現象和其應用。本研究中平面微電磁閥之工作原理為,利用漆包線所產生的磁場,讓鐵製的微閥門產生極性,進而因極性的相吸來推動微閥門,以完成開關的動作。根據實驗結果,線圈在0.4A時,會產生14.7Gauss的磁場即可驅動閥門。由量測磁滯曲線的結果可知,閥門在0.9A所產生的磁場下,被磁化的磁感應不超過7Gauss,且殘磁和矯頑力分別為0.4Guass和0.005A/m。而兩線圈分別通過不同向位的方波經過高速電子藕合攝影機拍攝分析後,可以得到微閥門在0.9A下的開和關動作皆可在0.005秒完成。而在背景流速15μL/hr時,閥門在線圈通過0.9A所產生的磁場下,能阻擋大部分流體且能使流體些微轉向。 | zh_TW |
dc.description.abstract | In recent years, the valves are essential component in microfluidic devices and micro-total-analysis-system. In general, the micro-solenoid valve was made of magnetic materials and the external magnets was applied to attract or repel squeeze the membrane. Based on the squeeze through the chamber, the thickness of membrane is the key factor about the moving behavior of the micro-solenoid valve. However, in the microchannel with high aspect ratio, the deformation of membrane can not be used to achieve the valve moving. The planar valve and enameled wire used to build the microfluidic devices were presented in this study. The magnetic field to drive the present planar micro-solenoid valve was generated by enameled wires. The polarity of iron microvalve can be attracted or repelled by magnetic. The currents were applied to control the opening and closing of the micro-solenoid valve. In addition, the measurements of the net force and hysteresis curves from valve motion. According to the experimental results, the magnetic induction will produce 14.7 Gauss to drive the valve with the load current of the coil is 0.4A. From the analysis results of the hysteresis curve, the magnetic induction by valve is 7.0 Gauss when the loading current is 0.9A. The residual magnetism and coercive force are 0.4 Gauss and 0.005 A/m, respectively. The moving behaviors of the microvalve were measured by the high-speed CCD. The period of opened and closed is 0.005 second when two coils are loading in different phase of 0.9A square wave. Furthermore, the present valve can obstruct most of fluid and change fluidic direction slightly with the background flow is 15μL/hr. | en |
dc.description.provenance | Made available in DSpace on 2021-06-15T04:50:11Z (GMT). No. of bitstreams: 1 ntu-99-R97543014-1.pdf: 3460881 bytes, checksum: 9fd6ded20099e3ced3906d879774ceda (MD5) Previous issue date: 2010 | en |
dc.description.tableofcontents | 致謝………………………………………………………………………I
摘要………………………………………………………………………II Abstract ……………………………………………………………III 目錄………………………………………………………………………IV 表目錄…………………………………………………………………VIII 圖目錄……………………………………………………………………IX 符號說明 XII 第一章 緒論........................................................................1 1-1前言..............................................................................1 1-2文獻回顧........................................................................2 1-2-1閥門致動的分類............................................................2 1-2-2微閥門幾何結構的選擇...................................................5 1-3研究動機........................................................................8 1-4研究目的........................................................................9 第二章 研究原理...............................................................11 2-1電流磁效應 ..................................................................11 2-1-1長直導線之電流磁效應 ................................................11 2-1-2圓形線圈之電流磁效應 ................................................12 2-1-3螺線管之電流磁效應 ...................................................12 2-2鐵製微閥門被磁化 .........................................................12 2-2-1磁性來源 ..................................................................12 2-2-2磁性的性質 ...............................................................14 2-2-2-1磁滯曲線 ...............................................................14 2-2-2-2居禮溫度(Curie temperature)....................................15 2-2-3物質的磁性 ...............................................................16 2-2-3-1順磁性(Paramagnetism) ..........................................16 2-2-3-2反磁性(Diamagnetism) .............................................16 2-2-3-3反鐵磁性(anti-ferromagnetism).................................17 2-2-3-4鐵磁性(Ferromagnetism) ..........................................17 2-2-3-5陶鐵磁性(Ferrimagnetism) .......................................18 2-3微電磁閥的作動及原理 ...................................................18 2-4製程的選擇 ..................................................................19 第三章 元件製作與實驗設備架設 ..........................................21 3-1光罩設計與製備 ............................................................21 3-2鐵製微閥門的製作 .........................................................22 3-3 基材清潔.....................................................................23 3-4矽晶圓微流道製作 .........................................................25 3-4-1光阻塗佈和軟烤 .........................................................25 3-4-2曝光 ........................................................................26 3-4-3顯影和硬烤 ...............................................................27 3-4-4微流道蝕刻製程 .........................................................27 3-5微電磁閥門的製作 .........................................................29 3-5-1設置微流道的出入水口 ................................................29 3-5-2微閥門的放置 ............................................................30 3-5-3微電磁閥的封裝 .........................................................30 3-5-4線圈的纏繞與固定 ......................................................31 3-6實驗設備與儀器架設 ......................................................32 第四章 實驗結果與討論 ...................................................34 4-1漆包線產生磁感應之量測 ................................................34 4-1-1高斯計的選用 ............................................................34 4-1-2漆包線線徑的選擇 ......................................................35 4-1-3磁感應的量測與分析 ...................................................35 4-2微閥門受力的研究 .........................................................37 4-2-1微閥門所受的淨力之研究 .............................................37 4-3微閥門磁滯曲線的研究 ...................................................40 4-4微閥門的應用測試 .........................................................41 弟五章 結論與未來展望 ...................................................43 5-1結論 ...........................................................................43 5-2未來展望 .....................................................................44 參考文獻 ........................................................................46 附表.................................................................................49 附圖 ..............................................................................50 表目錄 表2-1常見的鐵、鈷、鎳塊材的居禮溫度 .................................49 圖目錄 圖1-1 微閥門分類圖............................................................50 圖1-2 微閥門之驅動源介紹,(a)磁力式驅動,(b)電力式驅動,(c)壓電式驅動,(d)雙向式驅動,(e)熱力式驅動,(f) 記憶合金式驅動 .........................50 圖1-3 電力式驅動,(a)橫截面,(b)驅動示意圖........................51 圖1-4 壓電式驅動的橫截面和驅動示意圖.................................52 圖1-5 熱力式驅動,(a)橫截面,(b)正視圖..............................52 圖1-6 雙向式驅動,(a)橫截面,(b)驅動示意圖........................53 圖1-7 磁力式驅動,(a)正視圖,(b)開的示意圖,(c)關的示意圖.54 圖1-8 磁力式驅動,(a)結構圖,(b)驅動示意圖........................54 圖1-9 懸臂樑式導流閥門示意圖.............................................55 圖1-10 球閥的設計與其剖面示意圖 .......................................55 圖1-11 船錨型浮動式閥門 ...................................................55 圖1-12 十字型浮動式閥門 ...................................................56 圖1-13 T型閥門動件實體圖...................................................56 圖1-14 平面被動式微幫浦之作動示意圖 .................................56 圖1-15 雷射切割微閥門,(a)有毛邊,(b)無毛邊 .....................57 圖2-1 長直導線之安培右手定則.............................................57 圖2-2 圓形線圈之安培右手定則.............................................58 圖2-3 螺線管之安培右手定則................................................58 圖2-4 材料的磁疇示意圖(吳劍秋,2002).................................58 圖2-5 磁滯曲線示意圖.........................................................59 圖2-6 微電磁閥成品圖.........................................................59 圖2-7 陽極接合示意圖.........................................................59 圖3-1 曝光影響,(a)曝光不足,(b)曝光過量,(c)適量曝光 ......60 圖3-2 蝕刻特性圖, (a)濕蝕刻,(b)乾蝕刻 ...........................60 圖3-3 微流道製程示意圖,(a)清潔完成之矽晶圓,(b)將清潔完成之矽晶圓圖布光阻,(c)顯影完成之矽晶圓,(d)乾蝕刻,(e)去除殘餘光阻並清潔完成之矽晶圓........................................61 圖3-4 小型鑽床搭配鑽石磨棒................................................61 圖3-5 微閥門置入流道以及Pyrex7740玻璃組合圖 .....................62 圖3-6 完成封裝後完成圖......................................................62 圖3-7 實驗架設示意圖.........................................................63 圖3-8 磁場量測完成圖.........................................................63 圖4-1 以線徑0.08 mm的漆包線所纏繞成的線圈其磁場量測 .........64 圖4-2 線圈過載燒焦圖.........................................................64 圖4-3 以線徑0.2 mm的漆包線纏繞成的線圈的磁感應變化.......65 圖4-4 在不同電流下,微閥門所產生的磁感應變化........65 圖4-5 固定圈數和長度下,磁場大小和電流成線性......66 圖4-6 使用高速CCD分析出微閥門在不同電流所受的力量 ......66 圖4-7 微閥門的磁滯曲線.............................67 圖4-8 微閥門在0.9 A所產生的磁感應下的開關時間 .........68 圖4-9 微閥門閉合效能測試.......................68 圖4-10微閥門閉合測試,(a)以兩種染料觀察,(b)以螢光粒子觀察69 | |
dc.language.iso | zh-TW | |
dc.title | 微電磁閥門之分析與應用 | zh_TW |
dc.title | The Analysis and Application of Micro-solenoid Valve | en |
dc.type | Thesis | |
dc.date.schoolyear | 98-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 吳光鐘(Kuang-Chong Wu),張正憲(Jeng-Shian Chang) | |
dc.subject.keyword | 微電磁閥,主動式閥門,磁滯現象, | zh_TW |
dc.subject.keyword | micro-solenoid valve,active valve,hysteresis, | en |
dc.relation.page | 69 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2010-08-03 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 應用力學研究所 | zh_TW |
顯示於系所單位: | 應用力學研究所 |
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