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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 沈弘俊(Horn-Jiunn Sheen) | |
| dc.contributor.author | Chien-Pang Yeh | en |
| dc.contributor.author | 葉建邦 | zh_TW |
| dc.date.accessioned | 2021-06-15T02:49:34Z | - |
| dc.date.available | 2019-12-31 | |
| dc.date.copyright | 2009-08-18 | |
| dc.date.issued | 2009 | |
| dc.date.submitted | 2009-08-06 | |
| dc.identifier.citation | Accoto D., Carrozza M.C., and Dario P., Modelling of micropumps using
unimorph piezoelectric actuator anhd ball valves, Journl of Micromechanics and Microengineering, Vol. 10,pp. 277-281, 2000. Bistch L., Kutter J.P., Storgaard-Larsen T., and Bruus H., Alow-energy, turning microvalve with high-pressure seals: scaling of friction, Journal ofMicromechanics and Microengineering, Vol. 16, pp. 2121-2127, 2006. Brask A., Snakenborg D., Kutter J.P., and Bruus H., AC electroosmotic pump with bubble-free palladium electrodes and rectifying polymer membrane valves, Lab on a chip, Vol. 6, pp. 280-288, 2006. Deshmukh A.A., Liepmann D., Pisano A. P.,“Continuous micromixer with pulsatile micropumps, In Proceedings of the 2000 Solid-State Sensor and Actuator Workshop, Transducers Research Foundation,Cleveland OH, IEEE, pp. 73-76, 2000. Fuhr G., Schnelle T., and Wagner B., Traveling wave-driven microfabricated electrohydrodynamic pumps for liquids, Journal of Micromechanics and Microengineering, Vol. 4, pp. 217-226, 1994. Izzo I., Accoto D., Menciassi A., Schmitt L., and Dario P, Modeling and experimental validation of a piezoelectric micropump with novel no-moving-part valves, Sensors and Actuators A, Vol. 133, pp.128-140, 2007. Junwu K., Zhigang Y., Taijiang P., Guangming C., and Boda W., Design and test of a high-performance piezoelectric micropump for drug delivery, Sensors and Actuators A, Vol. 121, pp.156-161, 2005. Jang J. and Lee S.S., Theoretical and experimental study of (MHD) magnetohydrodynamic micropump, Sensors and Actuators A, Vol. 80, pp. 84-89, 2000. Joswig J., Active micromechanic valve, Journal of Micromechanics and Microengineering, Vol. 2, pp. 262-265, 1992. Koch M., Evans A.G.R., and Brunnschweiler A., Characterization of micromachined cantilever valves, Journal of Micromechanics and Microengineering, Vol. 7, pp. 221-223, 1997. Laser D.J. and Santiago J.G., A review of micropumps, Journal of Micromechanics and Microengineering, Vol. 14, pp. 35-64, 2004. Morris C.J. and Forster F.K., Optimization of a circular piezoelectric bimorph for a micropump driver, Journal of Micromechanics and Microengineering, Vol. 10, pp. 459-465, 2000. Olsson A., Stemme G., and Stemme E., A valve-less planar fluid pump with two pump chambers, Sensors and Actuators A, Vol. 46-47, pp. 549-556, 1995. Olsson A., Stemme G., and Stemme E., Diffuser-element design investigation for valve-less pumps, Sensors and Actuators A, Vol. 57, pp. 137-143, 1996. Olsson A., Stemme G., and Stemme E., Numerical and experimental studies of flat-walled diffuser elements for valve-less micropumps, Sensors and Actuators A, Vol. 84, pp. 165-175, 2000. Papavasiliou A.P., Liepmann D., and Pisano A. P., Fabrication of a Free Floating Silicon Gate Valve, Proceedings of the ASME International Mechanical Engineering Congress and Exposition, Nashville, TN, November 14-19, pp. 435-440, 1999. Sheen H.J., Hsu C.J., Wu T.H., Chang C.C., Chu H.C., Yang C.Y., and Lei U, Unsteady flow behaviors in an obstacle-type valveless micropump by micro-PIV”, Microfluidics and Nanofluidics, Vol. 4, pp. 331-342, 2008. Stemme E. and Stemme G., A valve-less diffuser/nozzle based fluid pump, Sensors and Actuators A, Vol. 39, pp. 159-167, 1993. Spencer W.J., Corbett W.T., Dominguez L.R., Shafer B.D., “An electronically controlled piezoelectric insulin pump and valves, IEEE Trans Sonics Ultrason, SU-25, pp. 153-156, 1978. Smits J. G., “Piezoelectric micropump with 3 valves working peristaltically”, Sensors Actuators A, Vol. 21, pp. 203–206, 1990. Uchida S., The pulsating viscous flow superposed on the steady laminar motion of incompressible fluid in a circular pipe, ZAMP, Vol. 7, pp. 403-422, 1956 Woias P., Micropumps – past, progress and future design, Sensors and Actuators B, Vol. 105, pp. 28-38, 2005. Yang C.Y., Tien M.W., and Lei U., The role of fluid drag on the net flow rate in a valve-less micro-pump, The 29th National Conference on Theoretical and Applied Mechanics, December 16-17, NTHU, Hsinchu, Taiwan, R.O.C. , 2005. Dimopoulos M.A., Galani E., and Matsouka C., “Waldenstrom's Macroglobulinemia” Hematology-Oncology Clinics of North America, Vol. 13, pp. 1351-1366 (1999) 周卓明，壓電力學，全華科技圖書股份有限公司，2003。 涂智凱，新式無閥門微幫浦之開發，國立台灣大學應用力學研究所碩 士論文，2005。 許家睿，新式被動閥式微幫浦之開發及其流場量測，國立台灣大學應 用力學研究所博士論文，2008。 | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/44296 | - |
| dc.description.abstract | 平面被動閥式微幫浦之制動原理為利用壓電薄膜驅動緩衝腔體後，產生之往復流場來推動閥門動件進行開關的動作。相較於無閥門微幫浦之特性，由於採用被動閥門元件，能提供良好之導流效率(71%)。
根據實驗結果，減少閥門動件質量對於降低微幫浦在幫浦模式以及補充模式間的切換時間有其f顯著效果，並能提供更有效的導流效率。採用質量為13.6μg的閥門動件之微幫浦Type1，在工作條件為30V及800 Hz下能提供266μl/min的流量，而當微幫浦採用質量減輕為10.6μg以及6.8μg之閥門動件時，微幫浦Type2及Type3之體積流率分別提升至290μl/min與360μl/min，結果顯示微幫浦的效能與閥門動件質量有關。 研究採用微粒子顯像測速儀(Micro-Particle-Image-Velocimetry)來觀測閥門動件的暫態運動以及下游閥門之導流效率。根據實驗結果，閥門動件在幫浦模式以及補充模式間的切換時間，會隨著閥門動件質量的降低而減少，因此導流效率也隨之增加。本研究開發之微幫浦可滿足微流系統的性能需求，並利於微型全分析系統(Micro-Total-Analysis-System,簡稱Micro-TAS)以及實驗室晶片(Lab on a chip)之整合與應用。 | zh_TW |
| dc.description.abstract | The novel PZT micropumps with planar passive valves were successfully developed in this study. The periodically moving planar passive valves were actuated by the oscillatory flow which is due to the oscillation of a PZT membrane. The present micropump with planar passive valves provided higher diodicity (71%) with respect to previous valveless micropumps.
From experimental results, reducing the mass of planar passive valves is useful to block the backward flow rapidly and decrease the switch time between pump mode and supply mode. In Type 1 device with planar passive valves of 13.6 μg, the optimum volume flow rate 266 μl/min was obtained at excitation voltage of 30 V and working frequency of 800 Hz. As the mass of passive valves were reduced to 10.6μg and 6.8 μg, the volume flow rates increased to 290 μl/min and 360μl/min, respectively. The results reveal that the performance of micropump was dominated by the mass of the moving parts. The transient motions of planar passive valves were observed by Micro-Particle-Image-Velocimetry (μ-PIV) and then the flow-rectified capabilities of the present device were analyzed. From the experimental results, the switching time decreased as the mass of moving part reduced, and thus the higher diodicty was obtained. This study indicates that this device fulfills the demands for microfluidic systems. Moreover, the present device can be applied to μ-TAS or lab-on-a-chip in the future. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-15T02:49:34Z (GMT). No. of bitstreams: 1 ntu-98-R96543076-1.pdf: 4010461 bytes, checksum: d93d7e1823b09818209b7121511b08cf (MD5) Previous issue date: 2009 | en |
| dc.description.tableofcontents | 致謝 i
摘要 ii Abstract iii 目錄 iv 表目錄 viii 圖目錄 ix 符號說明 xiii 第一章 緒論 1 1-1前言 1 1-2文獻回顧 2 1-2-1微幫浦的分類 2 1-2-2微閥門的設計 6 1-3研究動機 11 1-4研究目的 12 第二章 原理與設計 14 2-1被動閥式微幫浦之設計及運作原理 14 2-2動件運動理論分析 16 2-3閥門動件的改良 18 2-4驅動方式選擇 19 2-5壓電材料選擇 20 2-6製程的選擇 21 第三章 元件製作與實驗設備架設 23 3-1光罩設計與製備 23 3-2基材清潔 24 3-3矽晶圓閥門動件的製作 26 3-3-1矽晶圓黃光製程-閥門動件的厚度控制 26 3-3-2矽晶圓蝕刻製程-閥門動件的厚度控制 29 3-3-3矽晶圓黃光製程-閥門動件的成形 30 3-3-4矽晶圓蝕刻製程-閥門動件的成形 31 3-4矽晶圓微流道製作 31 3-4-1矽晶圓微流道黃光顯影製程 32 3-4-2矽晶圓微流道蝕刻製程 33 3-5被動閥式微幫浦的製作 33 3-5-1微流道出入水口設置 34 3-5-2閥門動件的放置 34 3-5-3被動閥式微幫浦的封裝 35 3-5-4壓電片的固定 36 3-6實驗設備與儀器架設 36 第四章 實驗結果與討論 38 4-1改良型被動閥式微幫浦效能量測結果 38 4-2閥門開闔速度的研究 42 4-3閥門導流率的研究 47 4-4被動閥式微幫浦的應用測試 50 第五章 結論與未來展望 51 5-1結論 51 5-2未來展望 52 參考文獻 55 附表 58 附圖 59 | |
| dc.language.iso | zh-TW | |
| dc.subject | 微粒子顯像測速儀 | zh_TW |
| dc.subject | 微幫浦 | zh_TW |
| dc.subject | 平面被動閥門 | zh_TW |
| dc.subject | 質量效應 | zh_TW |
| dc.subject | planar passive valve | en |
| dc.subject | mass effect | en |
| dc.subject | μ-PIV | en |
| dc.subject | micropump | en |
| dc.title | 平面被動閥式微幫浦之最佳化設計 | zh_TW |
| dc.title | The Optimum Design of Micropumps with Planar Passive Valves | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 97-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 吳光鐘(Kuang-Chong Wu),蔡進發(Jing-Fa Tsai),黃榮山(Long-Sun Huang) | |
| dc.subject.keyword | 微幫浦,平面被動閥門,質量效應,微粒子顯像測速儀, | zh_TW |
| dc.subject.keyword | micropump,planar passive valve,mass effect,μ-PIV, | en |
| dc.relation.page | 98 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2009-08-06 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 應用力學研究所 | zh_TW |
| 顯示於系所單位： | 應用力學研究所 | |
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