請用此 Handle URI 來引用此文件:
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/43944
完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 吳政忠(Tsung-Tsong Wu) | |
dc.contributor.author | Chao-Yi Huang | en |
dc.contributor.author | 黃兆誼 | zh_TW |
dc.date.accessioned | 2021-06-15T02:33:39Z | - |
dc.date.available | 2011-08-18 | |
dc.date.copyright | 2009-08-18 | |
dc.date.issued | 2009 | |
dc.date.submitted | 2009-08-14 | |
dc.identifier.citation | [1] K. Hashimoto, “Surface Wave Devices in Telecommunications: Modeling and Simulation” (Springer, New York, 2000)
[2] R. M. White, P. J. Wicher, S. W. Wenzel and E. D. Zellers, “Plate-mode ultrasonic oscillator sensors,” IEEE Trans. Ultrason., Ferroel., Freq. Contr. 34,162-171 (1987) [3] Y. Kim, W. D. Hunt and F. S. Hickernell, “Reflection properties of metallic gratings on ZnO films over GaAs substrates” [4] A. Hachigo, S. M. Richie, and D. C. Malocha, “Characteristics of ZnO/Diamond/Si SAW Resonators” IEEE Trans. Ultrason., Ferroel., Freq. Contr. ,199-207 (1996) [5] S. G. Joshi, B. D. Zaitsev and I. E. Kuznetsova, “Reflection of Plate Acoustic Waves Produced by a Periodic Array of Mechanical Load Strips or Grooves,” IEEE Trans. Ultrason., Ferroel., Freq. Contr. 49,1730-1734 (2002) [6] M. Sigalas and E. N. Ecconomou, “Elastic and acoustic wave band structure,” J. Sound Vib. 158, 377 (1992) [7] M. S. Kushwaha, P. Halevi, L.Dobrzynski, and B. Djafari-Rouhani, “Acoustic band structure of periodic elastic composites,” Phys.Rev. Lett. 71, 2022 (1993) [8] M. S. Kushwaha, P. Halevi, G.. Martinez, L. Dobrzynski, and B.Djafari-Rouhani, “Theory of acoustic band structure of periodic elastic composites,” Phys. Rev. B 49, 2313 (1994) [9] Zhengyou Liu, Xixiang Zhang, YiweiMao, Y. Y. Zhu, Zhiyu Yang, C.T. Chan, Ping Sheng, “Local Resonant Sonic Mateirals,” Science 289, 1734 (2000) [10] Jing Li, Zhengyou Liu,* and Chunyin Qiu, “Negative refraction imaging of acoustic waves by a two-dimensional three-component phononic crystal,” Phy. Rev. B 73, 054302 (2006) [11] Suxia Yang, J. H. Page, Zhengyou Liu, M. L.Cowan, C. T. Chan, and Ping Sheng, ”Focusing of Sound in a 3D Phononic Crystal,” Phy. Rev. Lett. 93, 024301 (2004) [12] Tsung-Tsong Wu, Wei-Shan Wang, Jia-Hong Sun, Jin-Chen Hsu and Yung-Yu Chen, “Utilization of phononic-crystal reflective gratings in a layered surface acoustic wave device,” Appl. Phys. Lett. 94, 101913 (2009) [13] E. Yablonovitch, “Inhibited spontaneous emission in solid-state physics and electronics,” Phys. Rev. Lett., 58(20), 2059-2062 (1987) [14] E. Yablonovitch and T. J. Gmitter, “Photonic band structure: The face-centered-cubic case,” Phys. Rev. Lett. 63(18), 1950-1953 (1989) [15] D. Garcia-Pablos, M. Sigalas, F. R. Montero de Espinosa, M. Torres, M. Kafesaki, and N. Garcia, “Theory and experiments on elastic band gaps,” Phys. Rev. Lett. 84, 4349 (2000) [16] Tsung-Tsong Wu, Zi-Gui Huang and S. Lin, “Surface and bulk acoustic waves in two-dimensional phononic crystal consisting of materials with general anisotropy,” Phys. Rev. B. 69, 094301 (2004) [17] Y. Tanaka and S. Tamura, “Surface acoustic waves in two-dimensional periodic elastic structures,” Phys. Rev. B. 58, 7958 (1998) [18] Jia-Hong Sun and Tsung-Tsong Wu, “Propagation of acoustic waves in phononic-crystal plates and waveguides using a finite-difference time-domain method,” Phys. Rev. B. 76, 104304 (2007) [19] Y. Tanaka, Y. Tomoyasu, and S.-I. Tamura, “Band structure of acoustic waves in phononic lattices: Two-dimensional composites with large acoustic mismatch,” Phys Rev. B 62, 7387(2000) [20] Zhengyou Liu, C. T. Chan, Ping Sheng, A. L. Goertzen, and J. H. Page, “Elastic wave scattering by periodic structures of spherical objects: Theory and experiment,” Phys. Rev. B 62, 2446 - 2457 (2000) [21] M. Kafesaki, and E. N. Economou, “Multiple-scattering theory for three-dimensional periodic acoustic composites,” Phys. Rev. B 60, 11993 - 12001 (1999) [22] A. Khelif, B. Aoubiza, S. Mohammadi, A. Adibi, and V. Laude, “Complete band gaps in two-dimensional phononic crystal slabs,” Phys. Rev. E 74, 046610 (2006) [23] J. O. Vasseur, A.-C. Hladky-Hennion, B. Djafari-Rouhani, F. Duval, B. Dubus, anennec, and P.A. Deymier, “Waveguiding in two-dimensional piezoelectric phononic crystal plates,” J. Appl. Phys. 101, 114904 (2007) [24] J. S. Jensen and O. Sigmund, proceedings of the IUTAM symposium on Asymptotics, Singularities, and Homogenisation in Problems of Mechanics. Kluwer Academic Publishers, pp. 71-81(2003). [25] T. Laurent, F. O. Bastien, J. Pommier, A. Cachard, D. Remiens and E. Cattan, “Lamb wave and plate mode in ZnO/silicon and AlN/silicon membrane Application to sensors able to operate in contact with liquid,” Sensor and Actuators A, 87,26-37, (2000) [26] J. H. Visser and A. Venema, “Silicon SAW devices and electromagnetic feedthrough”, Ultra. Symposium, 297~301, (1988) [27] J. Yamada and K. Hazama, “Relation of the Insertion Loss and the Triple Transit Echo in SAW Unidirectional Transducer”, Japanese J. of App. Phys. (22), 161-162, (1983) | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/43944 | - |
dc.description.abstract | 一般的表面波與板波的振盪器,使用壓電材料和交指叉電極(interdigital transducer)來激發彈性波,並且加上金屬柵欄(metal grating)反射器來形成一個共振腔,但金屬柵欄通常反射效果有限並且需占據相當大的面積。本文引入聲子晶體的特性來改進振盪器;在聲子晶體中,由於波傳之頻散曲線不連續,造成該不連續的頻段內聲波或彈性波無法傳遞,此現象稱為頻溝(acoustic band gap)。藉由頻溝的特性可以使用聲子晶體來設計更有效率的反射器。
本文以有限元素法(Finite Element method)來分析二維矽基聲子晶體平板之頻溝現象,並且藉由計算與模擬來探討波源與聲子晶體間距離不同所帶來的影響。並以微積電實驗來完成板波振盪器與聲子晶體結構;但由於矽基材並非壓電材料,本文以氧化鋅(ZnO)薄膜來做為壓電材料,藉由交指叉電極於氧化鋅表面以壓電效應激發板波。 由實驗的結果,針對波源與聲子晶體在不同相對距離的設計下進行量測與探討,實驗結果與計算的結果相符,驗證聲子晶體和板波振盪器在合適的設計下可以有效提升振盪的效果。 | zh_TW |
dc.description.abstract | In general, surface acoustic wave and Lamb wave resonator using piezoelectric material with IDTs to generate elastic waves. The resonant cavity is formed by adoption of metal gratings to be reflector. As usual, the efficiency of metal gratings is limited, and the grating structures occupy lots of space. In this thesis, the phononic crystal is imported to improve the resonator performance. The most characteristic of phononic crystals is the band-gap phenomenon, obstructing acoustic waves in a specific frequency range. The purpose is to design a resonator with higher resonance efficiency by phononic crystal reflective gratings.
In this study, the finite element method (FE method) is applied to predict the dispersion relation of two-dimensional air/silicon phononic crystal plate. The effect of reflective distance between wave source and phononic crystal is calculated and discussed. Moreover, air/silicon as phononic crystal plate and ZnO/Si as Lamb wave generator are fabricated. The experimental results are measured and discussed. The effect of phononic crystal gratings is verified. | en |
dc.description.provenance | Made available in DSpace on 2021-06-15T02:33:39Z (GMT). No. of bitstreams: 1 ntu-98-R96543055-1.pdf: 4683821 bytes, checksum: 951d612ef660b7fef3221d39a4e09afc (MD5) Previous issue date: 2009 | en |
dc.description.tableofcontents | 致謝 I
摘要 II Abstract III Contents IV List of Notations VI List of Figures VIII List of Tables X Chapter 1 Introduction 1 1.1 Research Motivation 1 1.2 Literature Review 2 1.3 Contents of the Chapters 4 Chapter 2 Dispersion of Lamb Waves in Two-dimensional Air/Silicon Phononic Crystal Plate 6 2.1 Theory of Wave Propagation in Phononic Crystals 6 2.2 Numerical Simulation of Band Structures 8 2.3 Design of IDTs on the ZnO/Si structure 10 Chapter 3 Delay line calculation and experimental framework 17 3.1 Delay line calculation 17 3.2 Effective Reflection and Transmission Coefficient 19 3.3 Piezoelectric excitation simulation 21 Chapter 4 Fabrications and Experimental Results 31 4.1 Fabrication of Piezoelectric film and Interdigital Transducer 31 4.1.1 Deposition of Gold and ZnO film 32 4.1.2 Fabrication of Interdigital transducer 34 4.2 Fabrication of Phononic-Crystal and Thin Plate Structure 36 4.3 Measurement of Experimental Results 38 4.3.1 Experimental set up 38 4.3.2 Time Gating Approach 39 4.3.3 Results of Phononic crystal reflective gratings 40 Chapter 5 Conclusions and Future Work 57 5.1 Conclusions 57 5.2 Future Work 58 References 59 | |
dc.language.iso | en | |
dc.title | 結合聲子晶體反射體之板波振盪器研製 | zh_TW |
dc.title | Development of Lamb Wave Rsonator with Phononic Crystal Reflective Gratings | en |
dc.type | Thesis | |
dc.date.schoolyear | 97-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 郭茂坤,吳文方,許進成 | |
dc.subject.keyword | 板波振盪器,聲子晶體平板,金屬反射極,頻溝效應, | zh_TW |
dc.subject.keyword | Lamb wave resonator,Phononic crystal plate,Ban-gap,IDT,Metal grating, | en |
dc.relation.page | 62 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2009-08-14 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 應用力學研究所 | zh_TW |
顯示於系所單位: | 應用力學研究所 |
文件中的檔案:
檔案 | 大小 | 格式 | |
---|---|---|---|
ntu-98-1.pdf 目前未授權公開取用 | 4.57 MB | Adobe PDF |
系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。