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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 楊宏智 | |
dc.contributor.author | Ting-Yu Yen | en |
dc.contributor.author | 顏庭瑜 | zh_TW |
dc.date.accessioned | 2021-06-15T00:57:50Z | - |
dc.date.available | 2013-08-08 | |
dc.date.copyright | 2008-08-08 | |
dc.date.issued | 2008 | |
dc.date.submitted | 2008-08-04 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/42288 | - |
dc.description.abstract | 雷射加工隨著科技的演進已逐漸成為業界的主流加工方式之一,惟應用於微製造上,傳統奈秒級雷射(如CO2雷射、Nd:YAG雷射等)經由熱熔融、蒸發去除的過程進行加工,常見微裂縫、不規則毛邊、顯著的熱影響區之問題,且加工材料及尺寸都受限制。準分子雷射因其短波長特性而足以對部分非金屬材料作加工,但因需要製作光罩配合過程繁複,且其波長範圍恰落入許多透明材料吸收區,只能限於應用表面的加工模式。然而,飛秒(fs = 10-15 s)雷射加工因其脈衝寬度極短,瞬間功率密度可輕易達到1014 W/cm2以上,當脈衝作用在材料上時,會瞬間激發電子進而經過一連串非線性的機制使得材料被移除,因此飛秒雷射加工具有熱影響區小、毛邊少,適用於多種材料等優點,且能夠進行小於光波長尺度的精密加工,以適合光學上的應用,這是許多現有的技術難以望其項背的。
國內目前並沒有定量探討其加工精密度的研究出現。為更深入瞭解飛秒雷射加工特性,本研究利用飛秒雷射加工於常用的工程材料(SUS 304不銹鋼及PMMA)上進行多脈衝數(50~3000個)對加工精密度之影響做定量的探討,並進一步將其加工參數(脈衝個數、脈衝能量、焦點位置),與其加工後所得的微細結構之間的關係作完整的討論。本研究同時針對飛秒雷射加工原理及材料移除機制作簡要闡述,並以原理和實驗結果配合證實其加工特性與優點,期有助於各精密產業利用飛秒雷射加工技術的開發及應用。 | zh_TW |
dc.description.abstract | Laser machining has always been one of the mainstream manufacturing techniques with the advantages of noncontact process and high machining precision. By shortening the time duration, the degree of precision in laser machining could be higher than ever before. Femtosecond laser machining(fs = 10-15 s),which is getting more attention in removing materials by photolysis process, excels other techniques for its high machining precision, minimal burrs, negligible heat-affected-zone, and the feasibility for machining on any engineering materials. Femtosecond laser machining is also promising for its ability to nanomachining the size which is smaller than the light wavelength for the potential optical applications. However, femtosecond laser is still not widely adopted in industry as its system cost is high and its machining characteristics have not been fully studied.
The main theme of this thesis is to quantify machining precision of femtosecond laser machining by multi-pulse (50~3000) laser irradiation of the common industrial materials SUS 304 stainless steel and polymethylmethacrylate (PMMA). Often major focuses include a qualitative discussion of the relation between machining parameters and its microstructures. Meanwhile, a machining principle and material removing mechanism is resulted in this study, and its machining characteristics and advantages were clearly demonstrated. It is found to be useful and beneficial for the precision manufacturers as a result of development and application of femtosecond laser machining. | en |
dc.description.provenance | Made available in DSpace on 2021-06-15T00:57:50Z (GMT). No. of bitstreams: 1 ntu-97-R95522708-1.pdf: 2093228 bytes, checksum: b983df25246184dfd5f4f81f29c3c86f (MD5) Previous issue date: 2008 | en |
dc.description.tableofcontents | 誌謝 Ⅰ
中文摘要 Ⅱ 英文摘要 Ⅲ 目錄 Ⅳ 圖表目錄 Ⅵ 表目錄 Ⅷ 第一章 緒論 1 1.1 前言 1 1.2 研究動機 2 1.3 文獻整理 2 1.4 論文架構 6 第二章 飛秒雷射加工 8 2.1 飛秒雷射系統介紹 8 2.2 飛秒雷射加工原理 9 2.2.1 雷射脈衝能量吸收 9 2.2.2 瞬間吸收能量的移轉 10 2.2.3 材料移除 11 2.2.4 切削成形 12 2.3 小結 14 第三章 選擇常用工程材料之考量 15 3.1 材料考量 15 3.2 材料特性描述 16 3.2.1 加工前 16 3.2.2 加工後 16 3.3 選定材料 16 3.4 小結 17 第四章 預備實驗 18 4.1 初步光路設計 18 4.2 初步實驗材料 18 4.3 實驗設計 18 4.4 初步加工程序 19 4.5 預備實驗之結果與討論 19 4.6 小結 22 第五章 飛秒雷射加工應用之實驗 23 5.1 實驗參數規劃及設計 23 5.1.1 脈衝功率對加工結果之影響 23 5.1.2 脈衝個數對加工結果之影響 24 5.1.3 焦點位置對加工結果之影響 24 5.2 實驗機台之架設及實驗程序 24 5.2.1 加工光束之波形(Beam Profile)量測 24 5.2.2 加工機台之光路設計 25 5.2.3 實驗程序 25 5.3 實驗儀器設備介紹 26 5.3.1 原子力顯微鏡(Atomic Force Microscope,AFM) 26 5.3.2 雷射干涉儀(Laser Interferometer) 28 5.3.3 白光干涉儀(White-Light Interferometer) 28 5.3.4 掃瞄式電子顯微鏡(Scanning Electron Microscopy,SEM) 30 第六章 實驗結果及分析 32 6.1 波形量測結果與分析 32 6.1.1 光腰半徑(Beam Waist Radius)定義 32 6.1.2 量測結果 33 6.1.3 結果分析 34 6.2 加工結果與討論 39 6.2.1 定量標準 39 6.2.2 表面形貌觀察 41 6.2.3 加工精密度 51 6.3 小結 54 第七章 結論及未來展望 55 7.1 結論 55 7.2 未來展望 56 附錄:名詞解釋 57 參考文獻 58 作者簡歷 62 | |
dc.language.iso | zh-TW | |
dc.title | 飛秒雷射於工程材料精密加工之可行性研究 | zh_TW |
dc.title | Feasibility Study of Precision Machining on the Engineering Materials by Femtosecond Laser | en |
dc.type | Thesis | |
dc.date.schoolyear | 96-2 | |
dc.description.degree | 碩士 | |
dc.contributor.coadvisor | 王俊凱 | |
dc.contributor.oralexamcommittee | 郭興家,林榮慶,蔡得民 | |
dc.subject.keyword | 飛秒雷射加工,不鏽鋼,PMMA,加工精密度,多脈衝數, | zh_TW |
dc.subject.keyword | Femtosecond laser machining,stainless steel,PMMA,precision machining,multi-pulse laser irradiation, | en |
dc.relation.page | 61 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2008-08-04 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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