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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 翁宗賢 | |
| dc.contributor.author | Jun-Wei Zhuang | en |
| dc.contributor.author | 莊峻維 | zh_TW |
| dc.date.accessioned | 2021-06-15T00:57:10Z | - |
| dc.date.available | 2013-08-08 | |
| dc.date.copyright | 2008-08-08 | |
| dc.date.issued | 2008 | |
| dc.date.submitted | 2008-08-04 | |
| dc.identifier.citation | 參考文獻
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Gravesen, J. P. Krog, and C. R. Nielsen, “Fast mixing by lamination,” Micro Electromechanical System, Proc. MEMS’96, 9th IEEE Int. Workshop, pp. 441–446, 1996. [18] B. He, B. J. Burke, X. Zhang, R. Zhang, and F. E. Regnier, “A Picoliter–Volume Mixer for Microfluidic Analytical Systems,” Anal. Chem., Vol. 73, No. 9, pp. 1942–1947, 2001. [19] J. Melin, G. Giménez, N. Roxhed, W. V. D. Wijngaart, and G. Stemme, “A fast passive and planar liquid sample micromixer,” Lab on a Chip, Vol. 4, pp. 214-219, 2004. [20] R.Miyake, T.S.J. Lammerink, M. Elwenspoek, and J.H.J. Fluitman, “Micro mixer with fast diffusion,” Micro Electro Mechanical Systems, MEMS '93, Proceedings An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE., pp.248-253, 7-10 Feb 1993. [21] M. J. Ottino, The Kinematics of Mixing: Stretching, Chaos, and Transport, Cambridge University Press, 1989. [22] S. H. Wong, P. Bryant, M. Ward, and C. Wharton, “Investigation of mixing in a cross-shaped micromixer with static mixing elements for reaction kinetics studies,” Sensors and Actuators B, Vol. 95, Issues 1-3, pp. 414-424, 2003. [23] Y. Lin, G. J. Gerfen, D. L. Rousseau, and S. Yeh, “Ultrafast microfluidic mixer and freeze–quenching device,” Anal. Chem., Vol. 75, pp. 5381–5386, 2003. [24] C. C. Hong, J. W. Choi, and C. H. Ahn, “A novel in-plane microfluidic mixer with modified tesla structures,” Lab on a Chip, Vol. 4, pp. 109–113, 2004. [25] I. J. Sobey, Introduction to Interactive Boundary Layer Theory, Oxford University Press, New York, 2000. [26] R. H. Liu, M.A. Stremler, K.V. Sharp, M.G. Olsen, J.G. Santiago, R.J. Adrian, H. Aref, and D.J. Beebe, “Passive mixing in a three-dimensional serpentine microchannel,” Journal of Microelectromechanical Systems, Vol. 9, pp. 190–197, 2000. [27] T. J. Johnson, D. Ross, and L. E. Locascio, “Rapid microfluidic mixing,” Anal. Chem., Vol. 74, pp. 45–51, 2002. [28] A. D. Stroock, S. K. W. Dertinger, A. Ajdari, I. Mezic, H. A. Stone, and G. M. Whitesides, “Chaotic mixer for microchannels,” Science, Vol. 295, pp. 647–651, 2002. [29] P. Gravesen, J. Branebjerg, and O. S. Jensen, “Microfluidics-a review,” J. Micromech. Microeng., Vol. 3, pp. 168-182, 1993. [30] Y. K. Lee, P. Tabeling, C. Shih, and C.M. Ho, “Characterization of a MEMS-fabricated mixing device,” International Mechanical Engineering Congress & Exposition Orlando, Florida, pp.505-511, 2000. [31] C.K .Chung, and T.R. Shih, “A rhombic micromixer with asymmetrical flow for enhancing mixing,” J. Micromech. Microeng., Vol. 17, pp.2495-2504, 2007. [32] C. W. Wong, T. S. Zhao, Q. Ye, and J. G. Liu, “Experimental investigations of the anode flow field of a micro direct methanol fuel cell,” Journal of Power Sources, Vol. 155, pp. 291-296, 2006. [33] 吳咨亨，無閥門壓電微幫浦與微混合器之整合設計，國立台灣大學應用力學研究所碩士論文，2005。 | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/42278 | - |
| dc.description.abstract | 摘要
對於兩種或兩種以上微量流體之快速混合，在微型系統與裝置裡是一項極為重要的主題，也是影響系統功能的重要因素。 本論文提出一新型被動式微混合器之設計，先以熱流數值摹擬軟體FLUENT分析微流道內的流場狀態、混合指標及壓力係數，進而改變流道結構、尺寸及擋塊角度，比較流場特性，設計出符合低壓降、高混合效果之微混合器。 依據數值摹擬結果，本文研製平面式微混合器，以矽晶圓作為基材，利用電感耦合電漿蝕刻機(ICP)蝕刻出母模，進而以聚二甲基矽氧烷(polydimethysiloxane, PDMS)翻製出模型，最後以氧電漿接合上玻璃上蓋，完成微混合器製作。實驗量測方法則利用螢光染料及食用色素分別加入甲醇與去離子水做為工作流體，經由影像分析軟體將CCD攝影機所擷取到之混合影像灰階化，再分析比較各種流道之混合效果，目的在設計出結構簡單、低壓降、高混合效能之微混合器。其中3-U turns & 2 streamlined obstacles per turn with 5 degree rotated之設計在Re = 30時具有0.79之混合指標，與蛇型流道相同，但僅需要蛇型流道壓降值之 。因此，本文所研製的微混合器將可應用於微型化直接甲醇燃料電池(Micro Direct Methanol Fuel Cell, μDMFC)有實質幫助。 | zh_TW |
| dc.description.abstract | Abstract
It is an important topic for fast mixing two or more kinds of different μfluids in the micro systems and devices. It is also a significant factor that affected the functions of the systems. This thesis proposes a novel design of passive mixers. First, we analysis the flow fields, mixing indexes, and pressure coefficients by the commercial computational fluid dynamics software, FLUENT. In addition, we design a μmixer which meets the demands of low pressure drop, and high mixing performance by changing the μchannel structure size, and the orientation of the obstacle. According to the results of the simulations, the fabrication of the planar μmixers was based on the silicon wafer. After etching by the inductive coupling plasma etcher (ICP), we successfully fabricated our molds. Then we poured the PDMS on the molds to make our mixers and lifted the mixers from the molds. Finally, by using the oxygen plasma, we bonded the mixers with glasses to complete the chips. We use the pure methanol with fluorescent dye and D.I. water with food coloring as the working fluids. By using the charge-coupled device to capture the images, and employing the image analyzing software to quantity the concentration distribution, we can compare all the designs to find the simple structured, lowest pressure drop, and highest mixing performance mixer. Among our designs, 3-U turns & 2 streamlined obstacles per turn with 5 degree rotated design can meet the demand. At Re = 30, it has 0.79 of the mixing index, same as the serpentine design. However, it just needs three-quarter of the pressure coefficient. And we hope our design will essentially help the development of the μ-DMFC. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-15T00:57:10Z (GMT). No. of bitstreams: 1 ntu-97-R95543067-1.pdf: 4623052 bytes, checksum: 183d3b6f8f15f6c60447da9963b33208 (MD5) Previous issue date: 2008 | en |
| dc.description.tableofcontents | 目錄
摘要 I ABSTRACT II 目錄 III 表目錄 V 圖目錄 VI 符號表 XIV 第一章 緒論 1 1-1 研究動機 1 1-2 文獻回顧 3 1-2-1 主動式微混合器 3 1-2-2 被動式微混合器 4 1-3 本文內容 8 第二章 微混合器之理論、設計與數值模擬 9 2-1 統御方程式 9 2-2 模型之設計、建立 10 2-3 數值方法與模擬 12 2-4 混合指標 13 2-5 壓力係數 14 第三章 數值模擬結果與分析 16 3-1 基本假設條件、初始條件及邊界參數設定 16 3-2 網格獨立性測試 17 3-3 混合指標與壓力係數之結果分析 17 第四章 微混合器之製作與量測 22 4-1 晶片製造流程 22 4-2 晶片之製作程序 22 4-2-1 光罩之製作 23 4-2-2 晶圓之清潔 23 4-2-3 晶圓母模之製作 24 4-2-4 PDMS轉印製程 26 4-2-5 PDMS晶片接合 27 4-3 流道製作結果 28 4-4 混合指標之量測 28 第五章 結果與討論 30 第六章 結論與未來展望 32 6-1 結論 32 6-2 未來展望 32 參考文獻 33 表目錄 表1 RCA清洗流程 37 圖目錄 圖1-1 (a)~(c)壓力場擾動 (d)電場擾動 (e)介電泳擾動 (f)、(g)電動力擾動 38 圖1-2 Tsai等人[10]利用熱氣泡產生熱擾動，增加混合效果 38 圖1-3 (a)典型T字型混合器 (b)Y字型混合器 (c)平行層疊式示意圖 (d) 水力聚焦型混合器 39 圖1-4 串聯層疊式混合器之概念示意圖 39 圖1-5 Melin等人[19]利用表面張力及幾何配置所設計之混合器 39 圖1-6 Miyake等人[20]所設計之注射式混合器 40 圖1-7 Wong等人[22]在壁面上佈入阻塊以提升混合效果 40 圖1-8 Lin等人[23]在流道內佈入圓柱型阻塊以增加混合效果 41 圖1-9 Hong等人[24] 運用Coanda效應去製造流體回流以增加混合效果 41 圖1-10 Liu等人[25] 設計一以混沌對流方式增加混合的3D蛇型流道(上)，並與方波型流道(中)及長直型流道(下)比較之 42 圖1-11 Stroock等人[27] 以人字型的凹槽設計產生混沌對流效應，增加混合效果 42 圖2-1 流道混合腔體設計圖 43 圖2-2 流道尺寸、阻塊尺寸設計圖 43 圖2-3 3-U turns & 2 streamlined obstacles per turn with 5 degree rotated所切之局部網格 44 圖2-4 數值疊代求解流程圖 45 圖3-1 網格測試之混合指標對網格數關係 46 圖3-2 網格測試之壓力係數對網格數關係 46 圖3-3 網格測試之混合效率對網格數關係 47 圖3-4 Y-tpye 在Re=10時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 48 圖3-5 Y-tpye 在Re=30時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 48 圖3-6 Y-tpye 在Re=50時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 49 圖3-7 Y-tpye 在Re=70時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 49 圖3-8 Y-tpye 在Re=90時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 50 圖3-9 2-U turns & 2-streamlined obstacles per turn在Re=10時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 50 圖3-10 2-U turns & 2-streamlined obstacles per turn在Re=30時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 51 圖3-11 2-U turns & 2-streamlined obstacles per turn在Re=50時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 51 圖3-12 2-U turns & 2-streamlined obstacles per turn在Re=70時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 52 圖3-13 2-U turns & 2-streamlined obstacles per turn在Re=90時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 52 圖3-14 2-U turns & 2-streamlined obstacles per turn (open)在Re=10時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 53 圖3-15 2-U turns & 2-streamlined obstacles per turn (open)在Re=30時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 53 圖3-16 2-U turns & 2-streamlined obstacles per turn (open)在Re=50時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 54 圖3-17 2-U turns & 2-streamlined obstacles per turn (open)在Re=70時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 54 圖3-18 2-U turns & 2-streamlined obstacles per turn (open)在Re=90時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 55 圖3-19 2-U turns serpentine在Re=10時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 55 圖3-20 2-U turns serpentine在Re=30時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 56 圖3-21 2-U turns serpentine在Re=50時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 56 圖3-22 2-U turns serpentine在Re=70時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 57 圖3-23 2-U turns serpentine在Re=90時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 57 圖3-24 2-U turns & 3-streamlined obstacles per turn在Re=10時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 58 圖3-25 2-U turns & 3-streamlined obstacles per turn在Re=30時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 58 圖3-26 2-U turns & 3-streamlined obstacles per turn在Re=50時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 59 圖3-27 2-U turns & 3-streamlined obstacles per turn在Re=70時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 59 圖3-28 2-U turns & 3-streamlined obstacles per turn在Re=90時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 60 圖3-29 2-U turns & 2-streamlined obstacles per turn (5 degree rotated)在Re=10時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 60 圖3-30 2-U turns & 2-streamlined obstacles per turn (5 degree rotated)在Re=30時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 61 圖3-31 2-U turns & 2-streamlined obstacles per turn (5 degree rotated)在Re=50時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 61 圖3-32 2-U turns & 2-streamlined obstacles per turn (5 degree rotated)在Re=70時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 62 圖3-33 2-U turns & 2-streamlined obstacles per turn (5 degree rotated)在Re=90時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 62 圖3-34 2-U turns & 2-streamlined obstacles per turn (10 degree rotated)在Re=10時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 63 圖3-35 2-U turns & 2-streamlined obstacles per turn (10 degree rotated)在Re=30時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 63 圖3-36 2-U turns & 2-streamlined obstacles per turn (10 degree rotated)在Re=50時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 64 圖3-37 2-U turns & 2-streamlined obstacles per turn (10 degree rotated)在Re=70時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 64 圖3-38 2-U turns & 2-streamlined obstacles per turn (10 degree rotated)在Re=90時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 65 圖3-39 3-U turns & 2-streamlined obstacles per turn在Re=10時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 65 圖3-40 3-U turns & 2-streamlined obstacles per turn在Re=30時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 66 圖3-41 3-U turns & 2-streamlined obstacles per turn在Re=50時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 66 圖3-42 3-U turns & 2-streamlined obstacles per turn在Re=70時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 67 圖3-43 3-U turns & 2-streamlined obstacles per turn在Re=90時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 67 圖3-44 3-U turns & 2-streamlined obstacles per turn (5 degree rotated)在Re=10時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 68 圖3-45 3-U turns & 2-streamlined obstacles per turn (5 degree rotated)在Re=30時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 68 圖3-46 3-U turns & 2-streamlined obstacles per turn (5 degree rotated)在Re=50時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 69 圖3-47 3-U turns & 2-streamlined obstacles per turn (5 degree rotated)在Re=70時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 69 圖3-48 3-U turns & 2-streamlined obstacles per turn (5 degree rotated)在Re=90時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 70 圖3-49 3-U turns & 2-streamlined obstacles per turn (10 degree rotated)在Re=10時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 70 圖3-50 3-U turns & 2-streamlined obstacles per turn (10 degree rotated)在Re=30時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 71 圖3-51 3-U turns & 2-streamlined obstacles per turn (10 degree rotated)在Re=50時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 71 圖3-52 3-U turns & 2-streamlined obstacles per turn (10 degree rotated)在Re=70時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 72 圖3-53 3-U turns & 2-streamlined obstacles per turn (10 degree rotated)在Re=90時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 72 圖3-54 3-U turns serpentine在Re=10時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 73 圖3-55 3-U turns serpentine在Re=30時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 73 圖3-56 3-U turns serpentine在Re=50時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 74 圖3-57 3-U turns serpentine在Re=70時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 74 圖3-58 3-U turns serpentine在Re=90時之流道混合狀況，左圖為流道平面，右圖為混合位置截面混合濃度分佈狀況 75 圖3-59 case1各流道混合指標對雷諾數之比較圖 76 圖3-60 case1各流道壓力係數對雷諾數之比較圖 76 圖3-61 case1各流道混合效率對雷諾數之比較圖 77 圖3-62 case2各流道混合指標對雷諾數之比較圖 77 圖3-63 case2各流道壓力係數對雷諾數之比較圖 78 圖3-64 case2各流道混合效率對雷諾數之比較圖 78 圖3-65 case3各流道混合指標對雷諾數之比較圖 79 圖3-66 case3各流道壓力係數對雷諾數之比較圖 79 圖3-67 case3各流道混合指標除以壓力係數對雷諾數之比較圖 80 圖4-1 微流道製程流程圖 81 圖4-2 微混合器之光罩設計 81 圖4-3 蝕刻製程示意圖 82 圖4-4 蝕刻成功之母模 83 圖4-5 PDMS流道量測之深度 83 圖4-6 氧電漿產生器 84 圖4-7 製作完成之實驗晶片 84 圖4-8 針筒式注入泵浦 84 圖5-1 Y-type流道混合影像，左側為甲醇，右側為水 85 圖5-2 2-U turns serpentine流道混合影像，左側為甲醇，右側為水 86 圖5-3 3-U turns & 2 streamlined obstacles per turn with 5 degree rotated流道混合影像，左側為甲醇，右側為水 87 圖5-4 Y-type實驗及模擬混合指標比較圖 88 圖5-5 2-U turns serpentine實驗及模擬混合指標比較圖 88 圖5-6 3-U turns & 2 streamlined obstacles per turn with 5 degree rotated實驗及模擬混合指標比較圖 89 | |
| dc.language.iso | zh-TW | |
| dc.subject | 微流體 | zh_TW |
| dc.subject | μDMFC | zh_TW |
| dc.subject | 計算流力 | zh_TW |
| dc.subject | 微混合器 | zh_TW |
| dc.subject | CFD | en |
| dc.subject | μDMFC | en |
| dc.subject | μfluids | en |
| dc.subject | μmixer | en |
| dc.title | 新型被動式微混合器之研製 | zh_TW |
| dc.title | On the Design and Fabrication of Novel Passive Micro-mixers | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 96-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 張正憲,沈弘俊 | |
| dc.subject.keyword | 微流體,微混合器,計算流力,μDMFC, | zh_TW |
| dc.subject.keyword | μfluids,μmixer,CFD,μDMFC, | en |
| dc.relation.page | 89 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2008-08-04 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 應用力學研究所 | zh_TW |
| 顯示於系所單位： | 應用力學研究所 | |
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|---|---|---|---|
| ntu-97-1.pdf 未授權公開取用 | 4.51 MB | Adobe PDF |
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