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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 吳政忠(Tsung-Tsong Wu) | |
dc.contributor.author | Chih-Wei Lan | en |
dc.contributor.author | 藍智偉 | zh_TW |
dc.date.accessioned | 2021-06-14T17:04:35Z | - |
dc.date.available | 2016-08-17 | |
dc.date.copyright | 2011-08-17 | |
dc.date.issued | 2011 | |
dc.date.submitted | 2011-08-12 | |
dc.identifier.citation | [1] M. S. Kushwaha, P. Halevi, L. Dobrzynski, and B. Djafari-Rouhani, “Acoustic band structure of Periodic elastic composites,” Phys. Rev. Lett. 71, 2022-2025, 1993.
[2] R. Sainidou, B. Djafari-Rouhani, and J. O. Vasseur, “Surface acoustic waves in finite slabs of three-dimensional phononic crystals,” Phys. Rev. B 77, 094304, 2008. [3] Y. Tanaka and S. I. Tamura, “Surface acoustic waves in two-dimensional periodic elastic structures,” Phys. Rev. B 58, 7958, 1998. [4] F. Meseguer, M. Holgado, D. Caballero, N. Benaches, J. Sánchez-Dehesa, C. López, and J. Llinares, “Rayleigh-wave attenuation by a semi-infinite two-dimensional elastic-band-gap crystal,” Phys. Rev. B 59, 12169, 1999. [5] T. T. Wu, Z. G. Huang, and S. Lin, “Surface and bulk acoustic waves in two-dimensional phononic crystal consisting of materials with general anisotropy,” Phys. Rev. B 69, 094301, 2004. [6] Z. Liu, X. Zhang, Y. Mao, Y. Y. Zhu, Z. Yang, C. T. Chan, and P. Sheng, “Locally resonant sonic materials,” Science 289, 1734-1736, 2000. [7] G. Wang, X. Wen, J. Wen, L. Shao, and Y. Liu, “Two-dimensional locally resonant phononic crystals with binary structures,” Phys. Rev. Lett.93, 154302, 2004. [8] J. C. Hsu and T. T. Wu, “Lamb waves in binary locally resonant phononic plates with two-dimensional lattices,” Appl. Phys. Lett. 90, 201904, 2007. [9] X. D. Zhang, Z. Y. Liu, “Negative refraction of acoustic waves in two-dimensional phononic crystals,” Appl. Phys. Lett. 85, 341-343, 2004. [10] S. X. Yang, J. H. Page, Z. Y. Liu, M. L. Cowan, C. T. Chan, and P. Sheng, “Focusing of sound in a 3D phononic crystal,” Phys. Rev. Lett.93, 024301, 2004. [11] K. Imamura and S. Tamura, “Negative refraction of phonons and acoustic lensing effect of a crystalline slab,” Phys. Rev. B 70, 174308, 2004. [12] L. Feng, X. P Liu, M. H Lu, Y. B Chen, Y. F Chen, Y. W Mao, J. Zi, Y. Y Zhu, S. N Zhu, and N. B Ming, “Acoustic Backward-Wave Negative Refractions in the Second Band of a Sonic Crystal,” Phys. Rev. Lett. 96, 014301, 2006. [13] M. H. Lu, C. Zhang, L. Feng, J. Zhao, Y. F. Chen, Y. W. Mao, J. Zi, Y. Y. Zhu, S. N. Zhu, and N. B. Ming, “Negative birefraction of acoustic waves in a sonic crystal,” Nature materials 6, 744-748, 2007. [14] T. Omori, Y. Tanaka, K. Hashimoto and M. Yamaguchi, “Synthesis of frequency response for wideband SAW ladder type filter,” IEEE Ultrasonics Symposium. 2574-2577, 2007. [15] V. Yantchev and I. Katardjiev, “Micromachined thin film plate acoustic resonators utilizing the lowest order symmetric Lamb wave mode,” IEEE Trans. Ultrason.Ferroelectr. Freq. Control 54, 87-95, 2007. [16] Jan H. Kuypers, Chih-Ming Lin, Gabriele Vigevani and Albert P. Pisano , “Intrinsic temperature compensation of aluminum nitride Lamb wave resonators for multiple-frequency references,” IEEE 2008. [17] C. Campbell, Surface acoustic wave devices and their signal processing applications, Academic Press, Inc., 1989. [18] K. Hashimoto, Surface acoustic wave devices in telecommunications: modeling and simulation, Springer, 2000. [19] Y. Nakagawa, S. Tanaka, and S. Kakio, “Lamb-wave-type high frequency resonator,” Jpn. J. Appl. Phys. 42, 3086-3090, 2003. [20] T. T. Wu, W. S Wang, J. H Sun, J. C Hsu, and Y. Y Chen, “Utilization of phononic-crystal reflective gratings in a layered surface acoustic wave device,” Appl. Phys. Lett. 94, 101913, 2009. [21] J. H Sun and T. T Wu, “A Lamb wave source based on the resonant cavity of phononic-crystal plates,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control 56, 121-128, 2009. [22] S. Mohammadi, A. A. Eftekhar, W. D. Hunt, and A. Adibi, “High-Q micromechanical resonators in a two-dimensional phononic crystal slab,” Appl. Phys. Lett. 94,051906, 2009. [23] C. Y. Huang, J. H. Sun, and T. T. Wu, “A two-port ZnO/silicon Lamb wave resonator using phononic crystals,” Appl. Phys. Lett. 97, 031913, 2010. [24] E. Yablonovitch, “Inhibited spontaneous emission in solid-state physics and electronics,” Phys. Rev. Lett. 58, 2059-2062, 1987. [25] E. Yablonovitch and T. J. Gmitter, “Photonic band structure: The face-centered-cubic case,” Phys. Rev. Lett. 63, 1950-1953, 1989. [26] Y. Tanaka and S. Tamura, “Surface acoustic waves in two-dimensional periodic elastic structures,” Phys. Rev. B 58, 7958-7965, 1998. [27] T. T Wu, Z. C. Hsu, and Z. G. Huang, “Band gaps and the electromechanical coupling coefficient of a surface acoustic wave in a two-dimensional piezoelectric phononic crystal,” Phys. Rev. B 71, 064303, 2005. [28] S. Benchabane, A. Khelif, J.-Y. Rauch, L. Robert, and V. Laude, “Evidence for complete surface wave band gap in a piezoelectric phononic crystal,” Phys. Rev. E 73, 065601, 2006. [29] J. H. Sun and T. T. Wu, “Propagation of surface acoustic waves through sharply bent two-dimensional phononic crystal waveguides using a finite-difference time-domain method,” Phys. Rev. B 74, 174305, 2006. [30] J. C. Hsu and T. T. Wu, “Efficient formulation for band-structure calculations of two-dimensional phononic-crystal plates,” Phys. Rev. B 74, 144303, 2006. [31] A. Khelif, B. Aoubiza, S. Mohammadi, A. Adibi, and V. Laude, ” Complete band gaps in two-dimensional phononic crystal slabs,” Phys. Rev. E 74, 046610, 2006. [32] J. H. Sun and T. T. Wu, “Propagation of acoustic waves in phononic-crystal plates and waveguides using a finite-difference time-domain method,” Phys. Rev. B 76, 104304, 2007. [33] S. Mohammadi, A. A. Eftekhar, A. Khelif, W. D. Hunt, and A. Adibi, “Evidence of large high frequency complete phononic band gaps in silicon phononic crystal plates,” Appl. Phys. Lett. 92, 221905, 2008. [34] Z. Liu, C. T. Chan, and P. Sheng, “Elastic wave scattering by periodic structures of spherical objects: Theory and experiment,” Phys. Rev. B 62, 2446-2457, 2000. [35] COMSOL Multiphysics, Structure Mechanics, Manual, Comsol, AB, Stockholm, Sweden. [36] J. S. Jensen and O. Sigmund, proceedings of the IUTAM symposium on Asymptotics, Singularities, and Homogenization in Problems of Mechanics. Kluwer Academic Publishers, 71-81, 2003. [37] R. M. White, P. J. Wicher, S. W. Wenzel, and E. T. Zellers, “Plate-mode ultrasonic oscillator sensors,” IEEE Trans. Ultrason.Ferroelectr. Freq. Control UFFC-34, 162-171, 1987. [38] T. Laurent, F. O. Bastien, J. Pommier, A. Cachard, D. Remiens, E. Cattan, “Lamb wave and plate mode in ZnO/silicon and AlN/silicon membrane application to sensors able to operate in contact with liquid,” Sensors and Actuators A 87, 26-37, 2000. [39] S. G. Joshi, B. D. Zaitsev, and I. E. Kuznetsova, “Reflection of plate acoustic waves produced by a periodic array of mechanical load strips or grooves,” IEEE Trans. Ultrason.Ferroelectr. Freq. Control 49, 1730-1734, 2002. [40] Neil W. Ashcroft, N. David Mermin, SOLID STATE PHYSICS, Thomson Learning, Inc, 1976. [41] Y. Y. Chen, “Theoretical Analysis of Electromechanical Coupling Coefficient of Lamb Waves in ZnO/Si Multilayered Piezoelectric Plates,” Japanese Journal of Applied Physics, 49, 07HD23, 2010. [42] F. Ramos-Mendieta and P. Halevi, “Electromagnetic surface modes of a dielectric superlattice: The supercell method,” J. Opt. Soc. Am. B, 14, 370-381, 1997. [43] M. M. Sigalas, “Defect states of acoustic waves in a two-dimensional lattice of solid cylinders,” J. Appl. Phys., 84, 3026-3030, 1998. [44] S. A. McAuley, H. Ashraf, L. Atabo, A. Chambers, S. Hall, J. Hopkins and G. Nicholls, “Silicon micromachining using a high-density plasma source,” J. Phys. D: Appl. Phys., 34, 2769-2774, 2001. [45] Agilent Technologies, 8712ES AND 8714ES RF network analyzers user’s guide, Agilent Technologies Inc., 2000. [46] J. H. Visser and A. Venema, “Silicon SAW devices and electromagnetic feedthrough,” Ultra. Symposium, 297~301, 1988. [47] J. Yamada and K. Hazama, “Relation of the insertion loss and the triple transit echo in SAW unidirectional transducers,” Japanese J. of App. Phys., 22, 161-162, 1983. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/40875 | - |
dc.description.abstract | 聲子晶體是由多種彈性材料周期性排列而成。而當彈性波在此結構中傳遞時,波傳模態在某些特殊頻帶會出現不連續的現象,亦即彈性波無法在該頻帶內傳遞,一般稱此現象為頻溝現象(acoustic band gap)。本研究即利用此頻溝現象,配合數值分析及微機電製程,探討以聲子晶體為反射體之共振器及濾波器行為。
本文以布拉格(Bloch)理論為基礎,使用有限元素法(finite element method, FEM)分析聲子晶體之頻散關係。此外,藉由計算延遲距離(delay distance)定義出等效反射面之位置,搭配穿射係數(transmission coefficient)計算及頻率響應(frequency response)模擬,進而最佳化雙頻共振器之共振效果。本文也同時包含階梯式濾波器(ladder type filter)之探討,藉由耦合雙頻共振器來達到濾波的效果。 在實驗方面,本研究成功研製出結合聲子晶體反射結構之雙頻共振器及濾波器,在頻率設計上,其實驗結果與數值模擬相當吻合;在包含兩相異共振腔的雙頻共振器,量測到兩相異之共振頻率,分別為158.29 MHz及164.45 MHz,驗證了共振腔長度與共振模態之頻率的關係;在階梯式濾波器方面,實驗結果亦如預期般,量測到一頻率通帶(bandpass),中心頻率為159.17 MHz,頻寬約為0.11 MHz。 | zh_TW |
dc.description.abstract | Phononic crystal (PC) is composed of different materials periodically. One of the most important phenomena of PC is the band gap. Band gap is the frequency space that elastic wave could not propagate through the structure. The resonant phenomena of dual frequency resonator and bandpass filter using PC gratings are studied by numerical simulation and fabrication in this thesis.
The dispersion relations of phononic crystals were calculated by using the finite element method (FEM). To optimize the resonance inside the cavity, the effective reflective plane, transmission coefficient and frequency response were obtained through a series of numerical simulations. Beside, the design of ladder type filter is finish from coupling two one-port resonators together. On the experimental side, both dual frequency resonator and bandpass filter were fabricated. The measured resonant frequencies are in a good agreement with the numerical predictions. In the dual frequency resonator side, two different resonant with different cavity were measured, 158.29 MHz and 164.45MHz respectively. In the ladder type filter side, a bandpass phenomenon is measured, center frequency is 159.17 MHz and bandwidth is 0.11 MHz. | en |
dc.description.provenance | Made available in DSpace on 2021-06-14T17:04:35Z (GMT). No. of bitstreams: 1 ntu-100-R98543049-1.pdf: 5168333 bytes, checksum: 2a50c24e127134888c63b7b59cac4303 (MD5) Previous issue date: 2011 | en |
dc.description.tableofcontents | 誌謝 I
摘要 II ABSTRACT III CONTENTS IV LIST OF NOTATIONS VII LIST OF FIGURES X LIST OF TABLES XVII Chapter 1 Introduction 1 1.1 Research Motivation 1 1.2 Literature Review 3 1.3 Contents of the Chapters 4 Chapter 2 Band Structure of Lamb waves in Two-dimensional Air/Silicon Phononic Crystals 6 2.1 Theory of Wave Propagation in the Phononic Crystal 6 2.2 Band Structure of a 2-D Air/Silicon Phononic Plate 10 2.3 Design of Inter-digital Transducer on ZnO Thin Film 13 Chapter 3 Design of Phononic Lamb wave Resonators 21 3.1 Calculation of Effective Reflective Plane 21 3.2 Transmission Performance of the PC Gratings 23 3.3 Resonance of Lamb Wave inside the Resonant Cavity 25 3.4 Frequency Response Simulation 28 3.5 Simulation of Band Pass Filter 30 Chapter 4 Fabrications and Experimental Results 51 4.1 Fabrication Processes 51 4.1.1 Deposition of Silicon Nitride, Gold and ZnO Film 52 4.1.2 Fabrication of Inter-digital Transducers 57 4.1.3 Fabrication of PC Gratings 59 4.1.4 Fabrication of Thin Plate Structure 60 4.2 Measurement of Experiment 63 4.2.1 Experimental Setup 63 4.2.2 Calibration for Improving Measurement Accuracy 64 4.2.3 Quality Factor 65 4.2.4 Time Gating Approach 66 4.2.5 Experimental Result and Discussion 67 Chapter 5 Conclusions and Future Work 89 5.1 Conclusions 89 5.2 Future Work 90 REFERENCES 91 | |
dc.language.iso | en | |
dc.title | 結合聲子晶體反射結構之雙頻板波共振器研製 | zh_TW |
dc.title | Fabrication of a Dual Frequency Lamb Wave Resonator
Using Phononic Gratings | en |
dc.type | Thesis | |
dc.date.schoolyear | 99-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 孫嘉宏,陳永裕,許進成 | |
dc.subject.keyword | 板波共振器,板波濾波器,聲子晶體,頻溝,有限元素法,品質係數, | zh_TW |
dc.subject.keyword | Lamb wave resonator,Lamb wave filter,Phononic crystal,Band gap,Finite element method,Q factor, | en |
dc.relation.page | 97 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2011-08-12 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 應用力學研究所 | zh_TW |
顯示於系所單位: | 應用力學研究所 |
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