不同控制器應用於主動式避振系統之強韌性

Abstract

在精密製造與工業上，振動對於生產機械及量測儀器的精度有很大的影響，尤其當科技進入了奈米時代，對於地面所傳遞的微小振動都必須列入考慮，也因此如何將振動從生產或是量測過程中消除，經常是研究人員重視的問題。常見的隔振系統均屬於被動式機構，具有高穩定性及低成本等優點，但是對於動態變化大的外界振動干擾，被動式機構的隔振效果有其限制。拜積體電路與電力電子技術的發展所賜，振動控制由以前的被動式機制轉為主動式機制，主動式的振動控制意謂利用感測器量測實體的振動量，經由回授控制器計算後，輸出指令驅動制動器產生適當推力或轉矩，幫助受控體反抗干擾或加速穩定，達到預設的控制性能。 此篇論文旨在研究模擬變動負載對於主動式避震系統的暫態性能與穩態性能的影響。在文中以雷射干涉儀做為感測器，利用音圈馬達作為致動器來設計避振系統，在系統識別方面採用HP35665A 動態訊號分析儀來建構數學模型。本研究使用滑動模式控制器(SMC)、內部模式控制器(IMP)與PID 控制器來補償干擾平台所產生的外界干擾，利用Matlab 軟體中Simulink 來模擬其結果。在文中以模擬 的方式討論變更質量對於控制性能的影響。

In the field of precision manufacture, vibration is influential in mechanical productions and instrumental measurements. Consequently, how to attenuate vibrations from the process of production and measurement is one of the main concerns of the research. Conventional vibration attenuation mechanisms are passive mechanisms, which are excellent in reducing cost and providing high stability. However, passive mechanisms are limited in reduction performances when facing rapidly-changed disturbances. Thanks to IC technology, traditional passive mechanisms transform into the active one. Active mechanisms measure plants in the first place then generate thrusts or torques in accordance with its feedback data. With those thrusts and torques, they help plants to remain stable or to reduce disturbances in order to achieve better performances. This study discusses the impacts of different loadings on transient performances as well as steady performances of active mechanisms. In our system, we apply laser interferometer as a sensor and VCM as an actuator. As to system identification, we adapt HP35665A dynamic signal analyzer as our model. We use SMC, IMP as well as PID controller to compensate outer disturbances and stimulate the possible result by using Simulink (Matlab).