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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/40505完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 傅立成 | |
| dc.contributor.author | Wan-Lin Hu | en |
| dc.contributor.author | 胡琬琳 | zh_TW |
| dc.date.accessioned | 2021-06-14T16:49:35Z | - |
| dc.date.available | 2010-08-05 | |
| dc.date.copyright | 2008-08-05 | |
| dc.date.issued | 2008 | |
| dc.date.submitted | 2008-07-31 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/40505 | - |
| dc.description.abstract | In this thesis, we propose a fluid tapping mode atomic force microscopy (AFM) implemented by a DVD pickup head. The use of DVD pickup head replaces the quadrant photodiode and complex light path system of traditional optical-lever technique and minimizes the volume of the measuring system. In addition, a piezoelectric tube is used as a scanner which can perform three-dimensional motion. Both achievements make the AFM system more compact. Therefore, the measurement error caused by heat expansion will be reduced. Through adjusting the light path system and applying the controller, we can correctly measure the displacement of the probe in vertical direction in different condition.
In order to realize the system mentioned above, we design a Q controller to modulate the interaction force between the tip and the sample. Increasing the quality factor will overcome the problem caused by high damping ratio in the fluid which makes the probe hard to oscillate. Because of the tip-sample force reduction, the sample surface will not be hurt by the tip. Therefore, we can use the AFM to scan soft samples, and obtain more realistic topography. Traditionally, people use proportion-integration controllers to control the system. Users need to tune this kind of controller manually, and hence the quality of scan images is highly related to users' experiences. To overcome this problem, we design an adaptive sliding-mode controller to improve the scanning capability and robustness. For testing the system capability, we have conducted a series of experiments. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-14T16:49:35Z (GMT). No. of bitstreams: 1 ntu-97-R95921008-1.pdf: 5294771 bytes, checksum: beff72369b20de065304e593bad14d17 (MD5) Previous issue date: 2008 | en |
| dc.description.tableofcontents | Acknowledgements i
Chinese Abstract iii Abstract v 1 Introduction 1 1.1 Motivation and Goal . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 1.2 AFM Survey and Related Work . . . . . . . . . . . . . . . . . . . . . 4 1.3 Contributions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 1.4 Thesis Organization . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13 2 Preliminaries 15 2.1 Basic Theories of Interaction Force . . . . . . . . . . . . . . . . . . . 15 2.1.1 Van der Waals Interaction Principle . . . . . . . . . . . . . . . 16 2.1.2 Derjaguin{Muller{Toporov theory . . . . . . . . . . . . . . . . 23 2.2 Basic Principles of Piezoelectricity . . . . . . . . . . . . . . . . . . . . 24 2.2.1 Hysteresis Phenomenon . . . . . . . . . . . . . . . . . . . . . 25 2.2.2 Creep Phenomenon . . . . . . . . . . . . . . . . . . . . . . . . 27 2.2.3 Tube Scanner . . . . . . . . . . . . . . . . . . . . . . . . . . . 28 2.3 Basic Principles of CD/DVD Pickup Head . . . . . . . . . . . . . . . 31 2.3.1 Sensing Methodology . . . . . . . . . . . . . . . . . . . . . . . 33 2.3.2 Focusing and Tracking Actuators . . . . . . . . . . . . . . . . 34 2.4 Operation Principle of AFM . . . . . . . . . . . . . . . . . . . . . . . 36 2.4.1 Contact Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . 36 2.4.2 Tapping Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . 38 3 System Design 41 3.1 Hardware Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 3.2 Software Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50 4 Modeling and System Identi‾cation 53 4.1 Tip-Sample Interaction . . . . . . . . . . . . . . . . . . . . . . . . . . 53 4.2 Piezoelectric Actuator . . . . . . . . . . . . . . . . . . . . . . . . . . 62 5 Controller Design 65 5.1 Q-Controller Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67 5.2 Adaptive Sliding-Mode Controller Design . . . . . . . . . . . . . . . . 72 5.2.1 Stability Analysis . . . . . . . . . . . . . . . . . . . . . . . . . 75 5.3 Numerical Simulation . . . . . . . . . . . . . . . . . . . . . . . . . . . 79 6 Experiment 83 6.1 Hardware Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83 6.2 Experimental Result . . . . . . . . . . . . . . . . . . . . . . . . . . . 89 6.2.1 System Characteristics . . . . . . . . . . . . . . . . . . . . . . 89 6.2.2 Scanning Result of the Calibration Grating . . . . . . . . . . . 90 7 Conclusions 97 | |
| dc.language.iso | en | |
| dc.title | 以光學讀取頭系統實現之輕敲式液相原子力顯微鏡設計與控制 | zh_TW |
| dc.title | Design and Control of Tapping Mode Atomic Force Microscope in Liquid Utilizing Optical Pickup System | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 96-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 胡竹生,羅仁權,蔡坤諭,羅竹芳 | |
| dc.subject.keyword | 輕敲式原子力顯微鏡,Q控制器,適應控制器,滑動模式控制器, | zh_TW |
| dc.subject.keyword | AFM,tapping mode,Q-control,adaptive sliding-mode control, | en |
| dc.relation.page | 109 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2008-07-31 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 電機工程學研究所 | zh_TW |
| 顯示於系所單位： | 電機工程學系 | |
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